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1. 发明授权

US5221415A Method of forming microfabricated cantilever stylus with integrated pyramidal tip 失效
标题翻译：形成集成金字塔尖端的微型悬臂式触控笔的方法
公开(公告)号：US5221415A
公开(公告)日：1993-06-22
申请号：US618054
申请日：1990-11-26
申请人： Thomas R. Albrecht , Shinya Akamine , Thomas E. Carver , Mark J. Zdeblick
发明人： Thomas R. Albrecht , Shinya Akamine , Thomas E. Carver , Mark J. Zdeblick
IPC分类号： B81C1/00 , G01Q70/10 , G01Q70/14 , G01Q70/16 , H01L21/306
CPC分类号： G01Q60/38 , B82Y35/00 , G01Q70/10 , G01Q70/14 , G01Q70/16
摘要： A dielectric cantilever arm stylus with an integrally formed pyramidal tip is provided. The tip is molded in a pyramidal pit etched in a later-removed (100) silicon substrate. An integrally-formed cantilever arm is also formed as the tip is being formed. Various thin film materials form the cantilever arm and the tip. In one embodiment of the invention, the dielectric is silicon nitride. The cantilever arm is anodically bonded to a glass block.
摘要翻译：提供具有整体形成的金字塔形末端的介电悬臂臂触针。尖端被模制在蚀刻在稍后去除的（100）硅衬底中的金字塔形坑中。当尖端正在形成时，也形成一体形成的悬臂。各种薄膜材料形成悬臂和尖端。在本发明的一个实施例中，电介质是氮化硅。悬臂被阳极结合到玻璃块上。

2. 发明授权

US5399232A Microfabricated cantilever stylus with integrated pyramidal tip 失效
标题翻译：具有集成金字塔尖端的微型悬臂式触控笔
公开(公告)号：US5399232A
公开(公告)日：1995-03-21
申请号：US179756
申请日：1994-01-07
申请人： Thomas R. Albrecht , Shinya Akamine , Thomas E. Carver , Mark J. Zdeblick
发明人： Thomas R. Albrecht , Shinya Akamine , Thomas E. Carver , Mark J. Zdeblick
IPC分类号： B81C1/00 , G01Q70/10 , G01Q70/14 , G01Q70/16 , H01L21/306 , H01L21/603
CPC分类号： G01Q60/38 , B82Y35/00 , G01Q70/10 , G01Q70/14 , G01Q70/16
摘要： A dielectric cantilever arm stylus with an integrally formed pyramidal tip is provided. The tip is molded in a pyramidal pit etched in a later-removed (100) silicon substrate. An integrally-formed cantilever arm is also formed as the tip is being formed. Various thin film materials form the cantilever arm and the tip. In one embodiment of the invention, the dielectric is silicon nitride. The cantilever arm is anodically bonded to a glass block.
摘要翻译：提供具有整体形成的金字塔形尖端的介电悬臂臂触针。尖端被模制在蚀刻在稍后去除的（100）硅衬底中的金字塔形坑中。当尖端正在形成时，也形成一体形成的悬臂。各种薄膜材料形成悬臂和尖端。在本发明的一个实施例中，电介质是氮化硅。悬臂被阳极结合到玻璃块上。

3. 发明授权

US4968585A Microfabricated cantilever stylus with integrated conical tip 失效
标题翻译：具有集成锥形尖端的微型悬臂式触控笔
公开(公告)号：US4968585A
公开(公告)日：1990-11-06
申请号：US368580
申请日：1989-06-20
申请人： Thomas R. Albrecht , Shinya Akamine , Mark J. Zdeblick
发明人： Thomas R. Albrecht , Shinya Akamine , Mark J. Zdeblick
IPC分类号： G01B7/34 , C23F4/00 , G01B21/30 , G01N37/00 , G01Q60/38 , G03F7/00 , G03F7/40 , H01J37/28
CPC分类号： G01Q60/38 , B82Y35/00 , G03F7/00
摘要： A cantilever stylus with an integrally formed conical tip is provided for atomic force microscopy AFM. The method for forming a stylus includes forming a circular masking pattern on the surface of a silicon substrate and anisotropically etching the silicon to form a post under the masking pattern. The post is then isotropically etched to produce a conical silicon tip mold. In one embodiment of the invention the silicon substrate and the conical silicon tip mold are thermally oxidized to form a cantilever stylus having including a cantilever arm with a conical tip fixed to its free end. In another embodiment of the invention the silicon substrate and the conical silicon tip mold are coated with a thin film of a dielectric material to form a cantilever stylus with a conical tip. In this embodiment the backside of the stylus is coated with a conductive material and a strong electric field is applied to the tip to cause electromigration of the conductive material to the point of the tip.
摘要翻译：提供具有整体形成的锥形尖端的悬臂式触针用于原子力显微镜AFM。用于形成触针的方法包括在硅衬底的表面上形成圆形掩模图案，并各向异性地蚀刻硅以在掩模图案下形成柱。然后将该柱进行各向同性蚀刻以产生锥形硅尖端模具。在本发明的一个实施例中，硅衬底和圆锥形硅尖端模具被热氧化以形成悬臂式触针，其包括具有固定到其自由端的锥形尖端的悬臂。在本发明的另一个实施例中，硅衬底和圆锥形硅尖端模具用电介质材料的薄膜涂覆以形成具有锥形尖端的悬臂式触笔。在该实施例中，触针的背面涂覆有导电材料，并且将强电场施加到尖端，以使导电材料的电迁移到尖端的点。

4. 发明授权

US4943719A Microminiature cantilever stylus 失效
标题翻译：微型悬臂式触笔
公开(公告)号：US4943719A
公开(公告)日：1990-07-24
申请号：US297770
申请日：1989-01-17
申请人： Shinya Akamine , Thomas R. Albrecht , Thomas E. Carver
发明人： Shinya Akamine , Thomas R. Albrecht , Thomas E. Carver
IPC分类号： C03C15/00 , G01B5/28 , G01B21/30 , G01C7/00 , G01Q60/38 , G01Q70/10 , G01Q70/16 , H01J37/26 , H01L21/306
CPC分类号： G01Q60/38 , B82Y35/00 , Y10S977/878 , Y10S977/879
摘要： Integral sharp tips on thin film cantilevers are produced by forming a rectangular silicon post on a (100) silicon wafer. Etching the top of the post leaves sharp silicon tips at the corners of what remains of the silicon post. A silicon dioxide cantilever with an integral tip is thermally grown over the silicon wafer and the sharp silicon tips.
摘要翻译：通过在（100）硅晶片上形成矩形硅柱来产生薄膜悬臂上的整体尖锐尖端。蚀刻顶部的顶部在硅柱的剩余部分的角落留下尖锐的硅尖端。具有整体尖端的二氧化硅悬臂在硅晶片和尖锐的硅尖端上热生长。

5. 发明授权

US5317533A Integrated mass storage device 失效
标题翻译：集成大容量存储设备
公开(公告)号：US5317533A
公开(公告)日：1994-05-31
申请号：US566335
申请日：1990-08-17
申请人： Calvin F. Quate , Mark J. Zdeblick , Thomas R. Albrecht
发明人： Calvin F. Quate , Mark J. Zdeblick , Thomas R. Albrecht
IPC分类号： G01B7/34 , B44C1/22 , G01N23/00 , G01N23/225 , G01N27/00 , G01N37/00 , G01Q10/06 , G01Q20/04 , G01Q30/04 , G01Q60/10 , G01Q60/16 , G01Q70/16 , G01Q80/00 , G11B9/00 , G11B9/04 , G11B9/14 , G11C13/00 , G11C13/04 , H01J37/20 , H01J37/28 , H01L41/09 , H01L41/22 , H02N2/00 , G11C11/00 , G21K7/00
CPC分类号： H01L41/0966 , B82Y35/00 , G01Q10/045 , G01Q60/16 , G11B9/14 , G11B9/1418 , G11B9/1436 , G11B9/1472 , H01J37/20 , H01L41/316 , B82Y10/00 , G01Q80/00 , Y10S977/837 , Y10S977/861 , Y10S977/872 , Y10S977/873 , Y10S977/943 , Y10S977/947 , Y10T29/42
摘要： A integrated mass memory device is formed by combining a piezoelectric bimorph cantilever (214) with a recording surface (212) having a number of storage locations to and from which digital information is transferred using a scanning tunneling microscope or an atomic force microscope mode of operation. Controls circuits (240) are provided for controlling the scanning of the recording surface (212) and for writing and reading information into and from the recording surface. An image storage system stores images captured from an optical sensor using piezoelectric bimorph cantilevers for reading and writing digital information on recording surfaces.
摘要翻译： PCT No.PCT / US89 / 00277 Sec。 371日期1990年8月17日第 102（e）日期1990年8月17日PCT 1989年1月27日提交PCT。通过将压电双晶片悬臂（214）与具有多个存储位置的记录表面（212）组合而形成集成的大容量存储器件使用扫描隧道显微镜或原子力显微镜操作模式传送数字信息。控制电路（240）被设置用于控制记录表面（212）的扫描并且用于将信息写入记录表面和从记录表面读取信息。图像存储系统存储使用压电双压电晶片悬臂的从光学传感器捕获的图像，用于在记录表面上读写数字信息。

6. 发明授权

US5015850A Microfabricated microscope assembly 失效
标题翻译：微型显微镜组件
公开(公告)号：US5015850A
公开(公告)日：1991-05-14
申请号：US368664
申请日：1989-06-20
申请人： Mark J. Zdeblick , Thomas R. Albrecht
发明人： Mark J. Zdeblick , Thomas R. Albrecht
IPC分类号： G01B7/34 , B81B3/00 , G01B7/00 , G01B21/30 , G01N23/00 , G01N37/00 , G01Q10/00 , G01Q60/38 , G11B5/00 , G11B9/00 , G11B9/14
CPC分类号： G01Q70/06 , B82Y35/00 , G01Q60/38 , G11B5/00 , G11B9/14 , G11B9/1418 , B82Y10/00 , Y10S977/872
摘要： A microfabricated microscope assembly including a piezoelectric bimorph cantilever arm mounted at one end to a first substrate. The free end of the canitlever arm has a tip mounted thereto for scanning a scanned surface mounted on a second substrate. The cantilever arm and the substrate are configured to carry out a predetermined write or read mode of operation, such as scanning tunneling microscopy or atomic force microscopy. The two substrates are spaced apart a fixed distance by spacer feet which project from one of the substrates and which have their ends fixed to ther surface of the other substrate by eutectic, aniodic, or adhesive bonding. An array of microfabricated microscope assemblies is formed using a plurality of individual assemblies. A number of different write/read modes of operation are accommodated, such as charge storage, molecular attachment, or magnetic domains. An array of piezoelectric cantilever arms having tips fixed to the free ends thereof and mounted to a substrate form are used to scan a scanned surface. The array is moved laterally with respect to the scanned surface using mechanical actuators as micropositioners for coarse positioning and using the piezoelectric cantilever arms for fine positioning.
摘要翻译：一种微加工显微镜组件，其包括一端安装在第一基板上的压电双压电晶片悬臂。角色手臂的自由端具有安装在其上的尖端，用于扫描安装在第二基底上的扫描表面。悬臂和衬底被配置为执行预定的写入或读取操作模式，例如扫描隧道显微镜或原子力显微镜。两个基板通过间隔脚间隔一定距离，该间隔脚从一个基底突出，并且其端部通过共晶，非碘化或粘合粘合固定在另一个基底的其它表面上。使用多个单独的组件形成微阵列显微镜组件阵列。容纳许多不同的写入/读取操作模式，例如电荷存储，分子附着或磁畴。使用具有固定到其自由端并安装到基板形式的顶端的压电悬臂的阵列来扫描扫描的表面。使用机械致动器作为用于粗定位的微定位器并使用压电悬臂来进行精细定位，阵列相对于扫描表面横向移动。

7. 发明授权

US08786969B2 Shingled recording systems using multiple pass write, single pass read architecture 有权
标题翻译：嵌入式录音系统采用多通写，单通读结构
公开(公告)号：US08786969B2
公开(公告)日：2014-07-22
申请号：US13251031
申请日：2011-09-30
申请人： Prakash Kasiraj , Thomas R. Albrecht
发明人： Prakash Kasiraj , Thomas R. Albrecht
IPC分类号： G11B20/10
CPC分类号： G11B5/012 , G11B5/746
摘要： In one embodiment, a magnetic data storage system includes a bit patterned magnetic medium, wherein centers of bits in adjacent data tracks do not lie on a common line in a cross-track direction, a magnetic head having a writer element having a width greater than a width of a data track in a track width direction adapted for writing data successively to at least two adjacent data tracks of the magnetic medium, and a reader element having a width larger than the width of a data track in the track width direction adapted for reading data concurrently from the at least two adjacent data tracks of the magnetic medium in a single pass, a drive mechanism for passing the magnetic medium over the magnetic head, and a controller electrically coupled to the magnetic head for controlling operation of the magnetic head.
摘要翻译：在一个实施例中，磁数据存储系统包括位图形磁介质，其中相邻数据磁道中的位中心不位于交叉磁道方向上的公共线上，磁头具有写入器元件，宽度大于适于将数据连续地写入磁介质的至少两个相邻数据轨道的轨道宽度方向上的数据轨道的宽度，以及宽度大于轨道宽度方向上的数据轨道的宽度的读取器元件，在单次通过中从磁介质的至少两个相邻数据轨道同时读取数据，用于使磁介质通过磁头的驱动机构，以及电耦合到磁头的控制器，用于控制磁头的操作。

8. 发明授权

US08501022B2 Method using block copolymers for making a master disk with radial nondata marks for nanoimprinting patterned magnetic recording disks 失效
标题翻译：使用嵌段共聚物制造具有用于纳米压印图案化磁记录盘的径向非标记标记的母盘的方法
公开(公告)号：US08501022B2
公开(公告)日：2013-08-06
申请号：US13287761
申请日：2011-11-02
申请人： Thomas R. Albrecht , Elizabeth Ann Dobisz , Guoliang Liu , Ricardo Ruiz , Gabriel Zeltzer
发明人： Thomas R. Albrecht , Elizabeth Ann Dobisz , Guoliang Liu , Ricardo Ruiz , Gabriel Zeltzer
IPC分类号： B44C1/22
CPC分类号： B82Y10/00 , G11B5/746 , G11B5/855 , G11B5/865
摘要： A method for making a master disk for nanoimprinting patterned-media magnetic recording disks has patterns for both the data islands and the nondata regions. The method uses guided self-assembly of a block copolymer (BCP) to form patterns of generally radial lines and/or generally concentric rings as well as patterns of gap regions of one of the BCP components. The pattern of lines and/or rings have the BCP components aligned as lamellae perpendicular to the substrate, while the pattern of gap regions has the BCP components aligned as lamellae parallel to the substrate. One of the BCP components is removed, leaving the other BCP component as an etch mask to fabricate either the final master disk or two separate molds that are then used to fabricate the master disk.
摘要翻译：用于制造用于纳米压印图案化介质磁记录盘的母盘的方法具有用于数据岛和非数据区的图案。该方法使用嵌段共聚物（BCP）的引导自组装形成大体上径向线和/或大致同心环的图案以及一种BCP组分的间隙区域的图案。线和/或环的图案具有垂直于衬底的薄片对准的BCP组分，而间隙区域的图案将BCP组分排列成平行于衬底的薄片。 BCP组件中的一个被去除，另一个BCP组件作为蚀刻掩模来制造最终的主磁盘或两个单独的模具，然后用于制造主磁盘。

9. 发明申请

US20130084468A1 FABRICATION OF BIT PATTERNED MEDIA USING MICROCONTACT PRINTING 审中-公开
标题翻译：使用微孔印刷制作印刷图案的介质
公开(公告)号：US20130084468A1
公开(公告)日：2013-04-04
申请号：US13251125
申请日：2011-09-30
申请人： Thomas R. Albrecht , Xing-Cai Guo
发明人： Thomas R. Albrecht , Xing-Cai Guo
IPC分类号： G11B5/65 , B05D5/12
CPC分类号： G11B5/851 , C23C14/024 , C23C14/08 , C23C14/10 , C23C14/12 , C23C14/14 , C23C14/34 , G11B5/65 , G11B5/855
摘要： A method for manufacturing a bit patterned magnetic media for magnetic data recording. The method includes selectively depositing a self assembled monolayer over a seed layer and then oxidizing the deposited self assembled monolayer. The self-assembled monolayer can be deposited by use of a stamp to form a pattern covering areas where a non-magnetic segregant (such as an oxide) is to be formed and openings where a magnetic material is to be formed. A magnetic alloy and a segregant (such as an oxide) are then co-sputtered. The magnetic alloy grows only or selectively over the seed layer, whereas the segregant grows only or selectively over the oxidized self-assembled monolayer.
摘要翻译：一种用于制造用于磁数据记录的位图形磁介质的方法。该方法包括在种子层上选择性地沉积自组装单层，然后氧化沉积的自组装单层。可以通过使用印模来沉积自组装单层以形成覆盖要形成非磁性分离器（例如氧化物）的区域的图案，并且形成磁性材料的开口。然后将磁性合金和分离剂（例如氧化物）共溅射。磁性合金仅在种子层上生长或选择性地生长，而分离器在氧化的自组装单层上仅生长或选择性生长。

10. 发明申请

US20130081937A1 BIT PATTERNED MAGNETIC MEDIA FABRICATED BY TEMPLATED GROWTH FROM A PRINTED TOPOGRAPHIC PATTERN 审中-公开
标题翻译：由打印的地形图形模拟生长形成的位图形磁化介质
公开(公告)号：US20130081937A1
公开(公告)日：2013-04-04
申请号：US13370131
申请日：2012-02-09
申请人： Thomas R. Albrecht
发明人： Thomas R. Albrecht
IPC分类号： C23C14/34 , C01B13/14 , B01J19/12
CPC分类号： H01F41/34 , B82Y40/00 , C01B13/14 , C23C14/0036 , C23C14/024 , C23C14/028 , C23C14/08 , C23C14/14 , G11B5/65 , G11B5/746 , G11B5/855 , H01F1/009 , H01F10/123
摘要： A method for manufacturing a bit patterned magnetic media for magnetic data recording. The method includes patterning a topography that includes an array of raised regions separated by a recessed portion. The array can be patterned by micro-printing using a stamp that has raised islands. The raised regions can have a height of 1 to 5 nm as measured from the recessed region. A magnetic alloy and a non-magnetic segregant are then co-sputtered. The magnetic alloy preferentially grows over the raised portions and the non-magnetic segregant grow preferentially over the recessed region between the raised portions.
摘要翻译：一种用于制造用于磁数据记录的位图形磁介质的方法。该方法包括图案化，其包括由凹部分开的凸起区域的阵列。该阵列可以通过使用凸起凸起的印模进行微印而进行图案化。凸起区域可以具有从凹陷区域测量的1至5nm的高度。然后将磁性合金和非磁性分离器共溅射。磁性合金优先生长在凸起部分之上，非磁性分离器优先在凸起部分之间的凹陷区域上生长。

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