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1. 发明授权

US5399232A Microfabricated cantilever stylus with integrated pyramidal tip 失效
标题翻译：具有集成金字塔尖端的微型悬臂式触控笔
公开(公告)号：US5399232A
公开(公告)日：1995-03-21
申请号：US179756
申请日：1994-01-07
申请人： Thomas R. Albrecht , Shinya Akamine , Thomas E. Carver , Mark J. Zdeblick
发明人： Thomas R. Albrecht , Shinya Akamine , Thomas E. Carver , Mark J. Zdeblick
IPC分类号： B81C1/00 , G01Q70/10 , G01Q70/14 , G01Q70/16 , H01L21/306 , H01L21/603
CPC分类号： G01Q60/38 , B82Y35/00 , G01Q70/10 , G01Q70/14 , G01Q70/16
摘要： A dielectric cantilever arm stylus with an integrally formed pyramidal tip is provided. The tip is molded in a pyramidal pit etched in a later-removed (100) silicon substrate. An integrally-formed cantilever arm is also formed as the tip is being formed. Various thin film materials form the cantilever arm and the tip. In one embodiment of the invention, the dielectric is silicon nitride. The cantilever arm is anodically bonded to a glass block.
摘要翻译：提供具有整体形成的金字塔形尖端的介电悬臂臂触针。尖端被模制在蚀刻在稍后去除的（100）硅衬底中的金字塔形坑中。当尖端正在形成时，也形成一体形成的悬臂。各种薄膜材料形成悬臂和尖端。在本发明的一个实施例中，电介质是氮化硅。悬臂被阳极结合到玻璃块上。

2. 发明授权

US5221415A Method of forming microfabricated cantilever stylus with integrated pyramidal tip 失效
标题翻译：形成集成金字塔尖端的微型悬臂式触控笔的方法
公开(公告)号：US5221415A
公开(公告)日：1993-06-22
申请号：US618054
申请日：1990-11-26
申请人： Thomas R. Albrecht , Shinya Akamine , Thomas E. Carver , Mark J. Zdeblick
发明人： Thomas R. Albrecht , Shinya Akamine , Thomas E. Carver , Mark J. Zdeblick
IPC分类号： B81C1/00 , G01Q70/10 , G01Q70/14 , G01Q70/16 , H01L21/306
CPC分类号： G01Q60/38 , B82Y35/00 , G01Q70/10 , G01Q70/14 , G01Q70/16
摘要： A dielectric cantilever arm stylus with an integrally formed pyramidal tip is provided. The tip is molded in a pyramidal pit etched in a later-removed (100) silicon substrate. An integrally-formed cantilever arm is also formed as the tip is being formed. Various thin film materials form the cantilever arm and the tip. In one embodiment of the invention, the dielectric is silicon nitride. The cantilever arm is anodically bonded to a glass block.
摘要翻译：提供具有整体形成的金字塔形末端的介电悬臂臂触针。尖端被模制在蚀刻在稍后去除的（100）硅衬底中的金字塔形坑中。当尖端正在形成时，也形成一体形成的悬臂。各种薄膜材料形成悬臂和尖端。在本发明的一个实施例中，电介质是氮化硅。悬臂被阳极结合到玻璃块上。

3. 发明授权

US4943719A Microminiature cantilever stylus 失效
标题翻译：微型悬臂式触笔
公开(公告)号：US4943719A
公开(公告)日：1990-07-24
申请号：US297770
申请日：1989-01-17
申请人： Shinya Akamine , Thomas R. Albrecht , Thomas E. Carver
发明人： Shinya Akamine , Thomas R. Albrecht , Thomas E. Carver
IPC分类号： C03C15/00 , G01B5/28 , G01B21/30 , G01C7/00 , G01Q60/38 , G01Q70/10 , G01Q70/16 , H01J37/26 , H01L21/306
CPC分类号： G01Q60/38 , B82Y35/00 , Y10S977/878 , Y10S977/879
摘要： Integral sharp tips on thin film cantilevers are produced by forming a rectangular silicon post on a (100) silicon wafer. Etching the top of the post leaves sharp silicon tips at the corners of what remains of the silicon post. A silicon dioxide cantilever with an integral tip is thermally grown over the silicon wafer and the sharp silicon tips.
摘要翻译：通过在（100）硅晶片上形成矩形硅柱来产生薄膜悬臂上的整体尖锐尖端。蚀刻顶部的顶部在硅柱的剩余部分的角落留下尖锐的硅尖端。具有整体尖端的二氧化硅悬臂在硅晶片和尖锐的硅尖端上热生长。

4. 发明授权

US4968585A Microfabricated cantilever stylus with integrated conical tip 失效
标题翻译：具有集成锥形尖端的微型悬臂式触控笔
公开(公告)号：US4968585A
公开(公告)日：1990-11-06
申请号：US368580
申请日：1989-06-20
申请人： Thomas R. Albrecht , Shinya Akamine , Mark J. Zdeblick
发明人： Thomas R. Albrecht , Shinya Akamine , Mark J. Zdeblick
IPC分类号： G01B7/34 , C23F4/00 , G01B21/30 , G01N37/00 , G01Q60/38 , G03F7/00 , G03F7/40 , H01J37/28
CPC分类号： G01Q60/38 , B82Y35/00 , G03F7/00
摘要： A cantilever stylus with an integrally formed conical tip is provided for atomic force microscopy AFM. The method for forming a stylus includes forming a circular masking pattern on the surface of a silicon substrate and anisotropically etching the silicon to form a post under the masking pattern. The post is then isotropically etched to produce a conical silicon tip mold. In one embodiment of the invention the silicon substrate and the conical silicon tip mold are thermally oxidized to form a cantilever stylus having including a cantilever arm with a conical tip fixed to its free end. In another embodiment of the invention the silicon substrate and the conical silicon tip mold are coated with a thin film of a dielectric material to form a cantilever stylus with a conical tip. In this embodiment the backside of the stylus is coated with a conductive material and a strong electric field is applied to the tip to cause electromigration of the conductive material to the point of the tip.
摘要翻译：提供具有整体形成的锥形尖端的悬臂式触针用于原子力显微镜AFM。用于形成触针的方法包括在硅衬底的表面上形成圆形掩模图案，并各向异性地蚀刻硅以在掩模图案下形成柱。然后将该柱进行各向同性蚀刻以产生锥形硅尖端模具。在本发明的一个实施例中，硅衬底和圆锥形硅尖端模具被热氧化以形成悬臂式触针，其包括具有固定到其自由端的锥形尖端的悬臂。在本发明的另一个实施例中，硅衬底和圆锥形硅尖端模具用电介质材料的薄膜涂覆以形成具有锥形尖端的悬臂式触笔。在该实施例中，触针的背面涂覆有导电材料，并且将强电场施加到尖端，以使导电材料的电迁移到尖端的点。

5. 发明授权

US08786969B2 Shingled recording systems using multiple pass write, single pass read architecture 有权
标题翻译：嵌入式录音系统采用多通写，单通读结构
公开(公告)号：US08786969B2
公开(公告)日：2014-07-22
申请号：US13251031
申请日：2011-09-30
申请人： Prakash Kasiraj , Thomas R. Albrecht
发明人： Prakash Kasiraj , Thomas R. Albrecht
IPC分类号： G11B20/10
CPC分类号： G11B5/012 , G11B5/746
摘要： In one embodiment, a magnetic data storage system includes a bit patterned magnetic medium, wherein centers of bits in adjacent data tracks do not lie on a common line in a cross-track direction, a magnetic head having a writer element having a width greater than a width of a data track in a track width direction adapted for writing data successively to at least two adjacent data tracks of the magnetic medium, and a reader element having a width larger than the width of a data track in the track width direction adapted for reading data concurrently from the at least two adjacent data tracks of the magnetic medium in a single pass, a drive mechanism for passing the magnetic medium over the magnetic head, and a controller electrically coupled to the magnetic head for controlling operation of the magnetic head.
摘要翻译：在一个实施例中，磁数据存储系统包括位图形磁介质，其中相邻数据磁道中的位中心不位于交叉磁道方向上的公共线上，磁头具有写入器元件，宽度大于适于将数据连续地写入磁介质的至少两个相邻数据轨道的轨道宽度方向上的数据轨道的宽度，以及宽度大于轨道宽度方向上的数据轨道的宽度的读取器元件，在单次通过中从磁介质的至少两个相邻数据轨道同时读取数据，用于使磁介质通过磁头的驱动机构，以及电耦合到磁头的控制器，用于控制磁头的操作。

6. 发明授权

US08501022B2 Method using block copolymers for making a master disk with radial nondata marks for nanoimprinting patterned magnetic recording disks 失效
标题翻译：使用嵌段共聚物制造具有用于纳米压印图案化磁记录盘的径向非标记标记的母盘的方法
公开(公告)号：US08501022B2
公开(公告)日：2013-08-06
申请号：US13287761
申请日：2011-11-02
申请人： Thomas R. Albrecht , Elizabeth Ann Dobisz , Guoliang Liu , Ricardo Ruiz , Gabriel Zeltzer
发明人： Thomas R. Albrecht , Elizabeth Ann Dobisz , Guoliang Liu , Ricardo Ruiz , Gabriel Zeltzer
IPC分类号： B44C1/22
CPC分类号： B82Y10/00 , G11B5/746 , G11B5/855 , G11B5/865
摘要： A method for making a master disk for nanoimprinting patterned-media magnetic recording disks has patterns for both the data islands and the nondata regions. The method uses guided self-assembly of a block copolymer (BCP) to form patterns of generally radial lines and/or generally concentric rings as well as patterns of gap regions of one of the BCP components. The pattern of lines and/or rings have the BCP components aligned as lamellae perpendicular to the substrate, while the pattern of gap regions has the BCP components aligned as lamellae parallel to the substrate. One of the BCP components is removed, leaving the other BCP component as an etch mask to fabricate either the final master disk or two separate molds that are then used to fabricate the master disk.
摘要翻译：用于制造用于纳米压印图案化介质磁记录盘的母盘的方法具有用于数据岛和非数据区的图案。该方法使用嵌段共聚物（BCP）的引导自组装形成大体上径向线和/或大致同心环的图案以及一种BCP组分的间隙区域的图案。线和/或环的图案具有垂直于衬底的薄片对准的BCP组分，而间隙区域的图案将BCP组分排列成平行于衬底的薄片。 BCP组件中的一个被去除，另一个BCP组件作为蚀刻掩模来制造最终的主磁盘或两个单独的模具，然后用于制造主磁盘。

7. 发明申请

US20130084468A1 FABRICATION OF BIT PATTERNED MEDIA USING MICROCONTACT PRINTING 审中-公开
标题翻译：使用微孔印刷制作印刷图案的介质
公开(公告)号：US20130084468A1
公开(公告)日：2013-04-04
申请号：US13251125
申请日：2011-09-30
申请人： Thomas R. Albrecht , Xing-Cai Guo
发明人： Thomas R. Albrecht , Xing-Cai Guo
IPC分类号： G11B5/65 , B05D5/12
CPC分类号： G11B5/851 , C23C14/024 , C23C14/08 , C23C14/10 , C23C14/12 , C23C14/14 , C23C14/34 , G11B5/65 , G11B5/855
摘要： A method for manufacturing a bit patterned magnetic media for magnetic data recording. The method includes selectively depositing a self assembled monolayer over a seed layer and then oxidizing the deposited self assembled monolayer. The self-assembled monolayer can be deposited by use of a stamp to form a pattern covering areas where a non-magnetic segregant (such as an oxide) is to be formed and openings where a magnetic material is to be formed. A magnetic alloy and a segregant (such as an oxide) are then co-sputtered. The magnetic alloy grows only or selectively over the seed layer, whereas the segregant grows only or selectively over the oxidized self-assembled monolayer.
摘要翻译：一种用于制造用于磁数据记录的位图形磁介质的方法。该方法包括在种子层上选择性地沉积自组装单层，然后氧化沉积的自组装单层。可以通过使用印模来沉积自组装单层以形成覆盖要形成非磁性分离器（例如氧化物）的区域的图案，并且形成磁性材料的开口。然后将磁性合金和分离剂（例如氧化物）共溅射。磁性合金仅在种子层上生长或选择性地生长，而分离器在氧化的自组装单层上仅生长或选择性生长。

8. 发明申请

US20130081937A1 BIT PATTERNED MAGNETIC MEDIA FABRICATED BY TEMPLATED GROWTH FROM A PRINTED TOPOGRAPHIC PATTERN 审中-公开
标题翻译：由打印的地形图形模拟生长形成的位图形磁化介质
公开(公告)号：US20130081937A1
公开(公告)日：2013-04-04
申请号：US13370131
申请日：2012-02-09
申请人： Thomas R. Albrecht
发明人： Thomas R. Albrecht
IPC分类号： C23C14/34 , C01B13/14 , B01J19/12
CPC分类号： H01F41/34 , B82Y40/00 , C01B13/14 , C23C14/0036 , C23C14/024 , C23C14/028 , C23C14/08 , C23C14/14 , G11B5/65 , G11B5/746 , G11B5/855 , H01F1/009 , H01F10/123
摘要： A method for manufacturing a bit patterned magnetic media for magnetic data recording. The method includes patterning a topography that includes an array of raised regions separated by a recessed portion. The array can be patterned by micro-printing using a stamp that has raised islands. The raised regions can have a height of 1 to 5 nm as measured from the recessed region. A magnetic alloy and a non-magnetic segregant are then co-sputtered. The magnetic alloy preferentially grows over the raised portions and the non-magnetic segregant grow preferentially over the recessed region between the raised portions.
摘要翻译：一种用于制造用于磁数据记录的位图形磁介质的方法。该方法包括图案化，其包括由凹部分开的凸起区域的阵列。该阵列可以通过使用凸起凸起的印模进行微印而进行图案化。凸起区域可以具有从凹陷区域测量的1至5nm的高度。然后将磁性合金和非磁性分离器共溅射。磁性合金优先生长在凸起部分之上，非磁性分离器优先在凸起部分之间的凹陷区域上生长。

9. 发明申请

US20110215070A1 SELF-ASSEMBLY STRUCTURES USED FOR FABRICATING PATTERNED MAGNETIC MEDIA 有权
标题翻译：用于制作图形磁介质的自组装结构
公开(公告)号：US20110215070A1
公开(公告)日：2011-09-08
申请号：US13108515
申请日：2011-05-16
申请人： Thomas R. Albrecht , Xiao Z. Wu , Henry Hung Yang
发明人： Thomas R. Albrecht , Xiao Z. Wu , Henry Hung Yang
IPC分类号： B29C33/42 , B05D5/12
CPC分类号： G11B5/855 , B82Y10/00 , G11B5/743 , G11B5/82 , G11B5/865
摘要： Methods of defining servo patterns and data patterns for forming patterned magnetic media are described. For one method, a lithographic process is performed to define a servo pattern in servo regions on a substrate. The lithographic process also defines a first data pattern in data regions of the substrate. The first data pattern is then transferred to (i.e., etched into) the data regions. Self-assembly structures are then formed on the data pattern in the data regions to define a second data pattern. The servo pattern is then transferred to the servo regions and the second data pattern is transferred to the data regions. Thus, the servo pattern is defined through lithographic processes while the data pattern is defined by a combination of lithographic processes and self-assembly.
摘要翻译：描述了定义用于形成图案化磁性介质的伺服图案和数据图案的方法。对于一种方法，执行光刻处理以在衬底上的伺服区域中定义伺服图案。光刻工艺还定义了衬底的数据区域中的第一数据模式。然后将第一数据模式转移到（即蚀刻）数据区。然后在数据区域中的数据模式上形成自组装结构以定义第二数据模式。然后将伺服模式传送到伺服区域，并将第二数据模式传送到数据区域。因此，通过光刻工艺定义伺服图案，同时通过光刻工艺和自组装的组合来定义数据图案。

10. 发明申请

US20110212347A1 PATTERNED-MEDIA PERPENDICULAR MAGNETIC RECORDING DISK WITH SERVO REGIONS HAVING MAGNETIZED SERVO PILLARS AND OPPOSITELY-MAGNETIZED SERVO TRENCHES 有权
标题翻译：带有伺服区域的磁性记录磁盘记录磁盘，具有磁化的伺服柱和相对磁化的伺服轨道
公开(公告)号：US20110212347A1
公开(公告)日：2011-09-01
申请号：US13103143
申请日：2011-05-09
申请人： Thomas R. Albrecht , Zvonimir Z. Bandic , Olav Hellwig , Gabriel Zeltzer
发明人： Thomas R. Albrecht , Zvonimir Z. Bandic , Olav Hellwig , Gabriel Zeltzer
IPC分类号： G11B5/65 , C23C14/34
CPC分类号： G11B5/82 , B82Y10/00 , C23C14/04 , C23C14/16 , G11B5/59688 , G11B5/743 , G11B5/746 , G11B5/855
摘要： A patterned perpendicular magnetic recording disk has a pre-patterned disk substrate with pillars and trenches arranged in data regions and servo regions. In the data regions, the height of the data pillars is equal to or greater than the spacing between the data pillars, while in the servo regions the height of the servo pillars is less than the spacing between the servo pillars. A magnetic recording material with perpendicular magnetic anisotropy is deposited over the entire disk substrate, which results in magnetic material on the tops of the data pillars and servo pillars and in the servo trenches. The material in the data trenches is either nonmagnetic or discontinuous. After the application of a high DC magnetic field in one perpendicular direction and a low DC magnetic field in the opposite direction, the resulting disk has patterned servo sectors with servo pillars all magnetized in the same perpendicular direction and servo trenches magnetized in the opposite perpendicular direction.
摘要翻译：图案化的垂直磁记录盘具有预先图案化的盘基片，其具有布置在数据区域和伺服区域中的柱状物和沟槽。在数据区域中，数据柱的高度等于或大于数据柱之间的间距，而在伺服区域中，伺服柱的高度小于伺服柱之间的间距。具有垂直磁各向异性的磁记录材料沉积在整个盘基底上，这导致数据柱和伺服柱顶部以及伺服槽中的磁性材料。数据沟槽中的材料是非磁性的或不连续的。在相反方向上在一个垂直方向和低DC磁场上施加高DC磁场之后，所得到的盘具有带有伺服柱的图案化伺服扇区，其中所有伺服柱都在相同的垂直方向上被磁化，并且伺服沟槽在相反的垂直方向上被磁化。

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