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    • 9. 发明授权
    • Microcircuit die-sawing protector
    • 微电路模切保护器
    • US06563204B1
    • 2003-05-13
    • US09615670
    • 2000-07-14
    • Thomas P. Glenn
    • Thomas P. Glenn
    • H01L2302
    • H01L21/67132H01L21/67092H01L21/6836H01L21/78H01L2221/68327H01L2224/32225Y10S438/928
    • A method and apparatus for protecting hypersensitive microcircuits on the face of a semiconductor wafer from contamination and mechanical damage during die sawing and subsequent die handling operations include the provision of a plastic sheet having an array of protective domes formed into it, the array corresponding to the array of microcircuits on the wafer, and the temporary adhesion of the sheet to the face of the wafer such that each die in the wafer is covered by a respective one of the domes, with an associated one of the microcircuits protectively sealed therein. Die sawing is performed with the component side of the wafer facing up, the cut passing between the domes and through the thicknesses of both the domed sheet and the wafer such that each die is separated from the wafer, with a corresponding one of the domes still attached to it. The domes may be removed later when the dies are located in a more benign environment by simply peeling them off the die. The invention enables the use of conventional die-handling equipment and results in improved device yield.
    • 用于保护半导体晶片的表面上的超敏感微电路的方法和装置不受模具切割期间的污染和机械损伤以及随后的模具处理操作,包括提供一种具有形成在其中的保护圆顶阵列的塑料片,该阵列对应于 晶片上的微电路阵列,以及薄片临时粘附到晶片的表面,使得晶片中的每个晶片被相应的一个圆顶覆盖,其中一个微型电路被保护地密封在其中。 在晶片的部件侧面朝上,切割通过圆顶和圆顶片和晶片的厚度之间进行切割,使得每个管芯与晶片分离,相应的一个圆顶仍然 附于它 当模具位于较温和的环境中时,可以通过简单地将它们从模具上剥离而将后盖移除。 本发明能够使用常规的模具处理设备并导致提高的装置产量。