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1. 发明申请

US20030029566A1 Remote exposure of workpieces using a plasma 有权
标题翻译：使用等离子体远程暴露工件
公开(公告)号：US20030029566A1
公开(公告)日：2003-02-13
申请号：US10156394
申请日：2002-05-28
申请人： The University of Tennessee Research Corporation
发明人： J. Reece Roth
IPC分类号： H05H001/24 , B05D005/12 , C23F001/00 , H01L021/306 , C23C016/00
CPC分类号： H01J37/32357 , A61L2/14 , B29C59/14 , C23C16/452 , H01J37/32366 , H01J2237/336 , H05H1/46 , H05H2001/466 , H05H2240/10 , H05H2240/20 , H05H2245/123 , H05H2277/14
摘要： An OAUGD plasma is generated using, for example, paraelectric or peristaltic electrohydrodynamic (EHD) techniques, in the plasma generator of a remote-exposure reactor, wherein one or more active species, especially oxidizing species in the plasma are convected away from the plasma-generation region and directed towards a workpiece that is located outside of the plasma-generation region (e.g., within an optional remote-exposure chamber configured to the plasma generator). In this way, the workpiece can be subjected to the one or more active species without directly being subjected to either the plasma or to the electric fields used to generate the plasma. The plasma generator may have a set of flat panels arranged within an air baffle to convect the active species in a serpentine manner through the plasma generator. The remote-exposure reactor can also be configured as a portable backpack unit with tubing that is used to direct the active species onto the workpiece, rather than placing the workpiece within a remote-exposure chamber of the reactor.
摘要翻译：在远程暴露反应器的等离子体发生器中使用例如顺电或蠕动电动力学（EHD）技术产生OAUGD等离子体，其中一个或多个活性物质，特别是等离子体中的氧化物质与等离子体 - 并且指向位于等离子体产生区域外部的工件（例如，在配置到等离子体发生器的可选的远程曝光室内）。以这种方式，工件可以经受一种或多种活性物质而不直接经受等离子体或用于产生等离子体的电场。等离子体发生器可以具有布置在空气挡板内的一组平板，以通过等离子体发生器以蛇形方式对流活性物质。远程曝光反应器也可以配置为具有用于将活性物质引导到工件上的管道的便携式背包单元，而不是将工件放置在反应器的远程暴露室内。

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