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    • 4. 发明申请
    • SEMICONDUCTOR DEVICE AND FABRICATION METHOD
    • 半导体器件和制造方法
    • US20130075785A1
    • 2013-03-28
    • US13544023
    • 2012-07-09
    • Tetsuro IshiguroAtsushi Yamada
    • Tetsuro IshiguroAtsushi Yamada
    • H01L29/778H01L21/335
    • H01L29/7787H01L29/1029H01L29/2003H01L29/66462
    • A semiconductor device includes a first semiconductor layer formed on a substrate, the first semiconductor containing an impurity element; a second semiconductor layer formed on the first semiconductor layer; a third semiconductor layer formed on the second semiconductor layer; and a gate electrode, a source electrode and a drain electrode that are formed on the third semiconductor layer. In the semiconductor device, the second semiconductor layer includes an impurity diffusion region in which an impurity element contained in the first semiconductor layer is diffused, the impurity diffusion region being located directly beneath the gate electrode and being in contact with the first semiconductor layer, and the impurity element causes the impurity diffusion region to be a p-type impurity diffusion region.
    • 半导体器件包括形成在衬底上的第一半导体层,第一半导体含有杂质元素; 形成在所述第一半导体层上的第二半导体层; 形成在所述第二半导体层上的第三半导体层; 以及形成在第三半导体层上的栅电极,源电极和漏电极。 在半导体器件中,第二半导体层包括杂质扩散区,其中包含在第一半导体层中的杂质元素扩散,杂质扩散区位于栅电极正下方并与第一半导体层接触, 杂质元素使杂质扩散区域成为p型杂质扩散区域。