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    • 7. 发明申请
    • Vibration type gyrosensor device
    • 振动式陀螺仪器
    • US20050241395A1
    • 2005-11-03
    • US11088480
    • 2005-03-24
    • Kazuo TakahashiTakashi TamuraJunichi HondaTeruo Inaguma
    • Kazuo TakahashiTakashi TamuraJunichi HondaTeruo Inaguma
    • G01C19/56G01C19/5656G01C19/5663H01L41/08H01L41/18H01L41/22H01L41/29H01L41/311
    • G01C19/5642
    • Disclosed is a small-sized vibration type gyrosensor device of high sensitivity provided with a cantilevered oscillator. A cantilevered oscillator 11, provided with a lower electrode, a piezoelectric film and an upper electrode, formed on a single-crystal silicon substrate by a thin film forming process, includes, as an upper electrode, a driving electrode 6a, formed along the length of the oscillator 11 for applying the voltage for causing oscillations of the oscillator 11, and first and second detection electrodes 6b, 6c, formed on both sides of the driving electrode 6a parallel to the longitudinal direction of the oscillator, without contacting with the driving electrode 6a. With a width W0 of the driving electrode 6a, a width W1 of the first detection electrode 6b, a width W2 of the second detection electrode 6c and with W=W0+W1+W2, the condition of 0.5
    • 公开了一种具有悬臂振荡器的高灵敏度的小型振动式陀螺仪。 通过薄膜形成工艺在单晶硅衬底上形成的具有下电极,压电膜和上电极的悬臂振荡器11包括沿着上电极形成的驱动电极6a, 用于施加用于引起振荡器11的振荡的电压的振荡器11的长度以及形成在驱动电极6的平行于振荡器的纵向的两侧上的第一和第二检测电极6b,6c,而不接触 与驱动电极6a连接。 驱动电极6a的宽度W 0,第一检测电极6b的宽度W 1,第二检测电极6c的宽度W 2,W = W 0 + W 1 + W 2,条件 为0.5 <(W 0 / W)<1。
    • 9. 发明授权
    • Method of manufacturing a magnetic head
    • 制造磁头的方法
    • US07428776B2
    • 2008-09-30
    • US10737566
    • 2003-12-16
    • Teruo Inaguma
    • Teruo Inaguma
    • G11B5/17H05K3/06
    • H01F5/003G11B5/127G11B5/17G11B5/3103G11B5/313H01F17/0006H01F41/042Y10T29/49041Y10T29/4906Y10T29/49062Y10T29/49073Y10T29/49155Y10T29/49156
    • A method of manufacturing a thin-film coil in which a first coil and a second coil each having a desired number of winding are electrically connected in series and the second coil is formed between winding portions of the first coil on substantially the same plane, comprising: forming the first coil having a predetermined number of windings via a first insulating film; forming a second insulating film on a surface of the first coil and between the winding portions of the first coil; forming an underlying conductive film on the second insulating film, and treating the underlying conductive film so as to leave only the bottom portions of the underlying conducting film between the winding portions of the first coil; and growing deposition originating from a remaing portion of the underlying conductive film on the bottom portions of the underlying conducting film between the winding portions of the first coil so as to form the second coil.
    • 一种制造薄膜线圈的方法,其中具有期望数量的绕组的第一线圈和第二线圈串联地电连接,并且第二线圈形成在基本上在同一平面上的第一线圈的绕组部分之间,包括 :经由第一绝缘膜形成具有预定数量的绕组的第一线圈; 在所述第一线圈的表面和所述第一线圈的绕组部之间形成第二绝缘膜; 在第二绝缘膜上形成下面的导电膜,并处理下面的导电膜,以便仅使底层导电膜的底部部分在第一线圈的绕组部分之间; 以及源自在第一线圈的绕组部分之间的下面的导电膜的底部上的下面的导电膜的再一部分的沉积,以形成第二线圈。
    • 10. 发明申请
    • PIEZOELECTRIC DEVICE, OSCILLATION TYPE GYRO SENSOR, ELECTRONIC DEVICE, AND METHOD OF MANUFACTURING PIEZOELECTRIC DEVICE
    • 压电元件,振荡型陀螺传感器,电子设备及制造压电元件的方法
    • US20080196498A1
    • 2008-08-21
    • US11960041
    • 2007-12-19
    • Koji SuzukiTeruo InagumaKazuo Takahashi
    • Koji SuzukiTeruo InagumaKazuo Takahashi
    • G01C19/56H01L41/22
    • G01C19/5642Y10T29/42
    • A piezoelectric device is disclosed. A substrate has an arm portion. A piezoelectric member is disposed on the substrate. A drive electrode oscillates the arm portion by a piezoelectric operation of the piezoelectric member. First and second detection electrodes detect a Coriolis force from the oscillating arm portion. A first lead electrode having a first area is disposed on the substrate and connected to the first detection electrode and connects the first detection electrode to the outside. A second lead electrode has a second area substantially the same as the first area. The second lead electrode is disposed on the substrate asymmetrical to the first lead electrode with respect to an axis in a longitudinal direction of the arm portion and connected to the second detection electrode. The second lead electrode connects the second detection electrode to the outside. A third lead electrode connects the drive electrode to the outside.
    • 公开了一种压电装置。 基板具有臂部。 压电构件设置在基板上。 驱动电极通过压电元件的压电操作来振荡臂部。 第一和第二检测电极从摆动臂部分检测科里奥利力。 具有第一区域的第一引线电极设置在基板上并连接到第一检测电极,并将第一检测电极连接到外部。 第二引线电极具有与第一区域基本相同的第二区域。 第二引线电极相对于臂部的长度方向的轴线配置在与第一引线电极不对称的基板上,并与第二检测电极连接。 第二引线电极将第二检测电极连接到外部。 第三引线电极将驱动电极连接到外部。