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    • 2. 发明授权
    • Estimation of sidewall skew angles of a structure
    • 一种结构侧壁倾斜角的估计
    • US09316665B2
    • 2016-04-19
    • US13867720
    • 2013-04-22
    • FREESCALE SEMICONDUCTOR, INC.
    • Aaron A. GeisbergerKemiao Jia
    • G01N3/20G01P15/08G01C19/5656G01C19/5663G01C25/00G01B5/24B81C99/00
    • G01P15/0888B81C99/004B81C2201/0132G01B5/24G01C19/5656G01C19/5663G01C25/005
    • An apparatus (36) includes a motion amplification structure (52), an actuator (54), and a sense electrode (50) in proximity to the structure (52). The actuator (54) induces an axial force (88) upon the structure (52), which causes a relatively large amount of in-plane motion (108) in one or more beams (58, 60) of the structure (52). When sidewalls (98) of the beams (58, 60) exhibit a skew angle (28), the in-plane motion (108) of the beams (58, 60) produces out-of-plane motion (110) of a paddle element (62) connected to the end of the beams (58, 60). The skew angle (28), which results from an etch process, defines a degree to which the sidewalls (98) of beams (58, 60) are offset or tilted from their design orientation. The out-of-plane motion (110) of element (62) is sensed at the electrode (50), and is utilized to determine an estimated skew angle (126).
    • 装置(36)包括靠近结构(52)的运动放大结构(52),致动器(54)和感测电极(50)。 致动器(54)在结构(52)上引起轴向力(88),其在结构(52)的一个或多个梁(58,60)中引起相对大量的平面内运动(108)。 当梁(58,60)的侧壁(98)呈现偏斜角(28)时,梁(58,60)的平面内运动(108)产生桨叶的平面外运动(110) 元件(62)连接到梁(58,60)的端部。 由蚀刻工艺产生的偏斜角(28)限定了梁(58,60)的侧壁(98)从其设计取向偏移或倾斜的程度。 在电极(50)处感测元件(62)的平面外运动(110),并用于确定估计的倾斜角(126)。
    • 3. 发明申请
    • SUBSTRATE, ELECTRONIC DEVICE, AND ELECTRONIC APPARATUS
    • 基板,电子设备和电子设备
    • US20130033838A1
    • 2013-02-07
    • US13560039
    • 2012-07-27
    • Kenji SATO
    • Kenji SATO
    • H05K7/02H05K1/11
    • G01C19/5663H01L23/49838H01L2224/48091H01L2224/73265H01L2924/00014
    • A substrate includes: a base; and a plurality of bonding terminals arranged on at least one surface of the base, wherein the plurality of bonding terminals include a first bonding terminal and a second bonding terminal, the first bonding terminal and the second bonding terminal include, in plan view of the base, a circle contacting portion extending along the circumference of a circle tangent to the first bonding terminal and the second bonding terminal, all of the plurality of bonding terminals are arranged so as not to protrude from an area including the circle and the inside thereof, and the circle contacting portion includes at least a first circle contacting portion disposed in the first bonding terminal and a second circle contacting portion disposed in the second bonding terminal.
    • 基材包括:碱; 以及配置在所述基座的至少一个表面上的多个接合端子,其中所述多个接合端子包括第一接合端子和第二接合端子,所述第一接合端子和所述第二接合端子包括在所述基座的平面图中 ,沿着与第一接合端子和第二接合端子相切的圆的圆周延伸的圆形接触部分,所有多个接合端子被布置成不从包括圆圈及其内部的区域突出,并且 圆形接触部分至少包括设置在第一接合端子中的第一圆形接触部分和设置在第二接合端子中的第二圆形接触部分。
    • 6. 发明授权
    • Angular velocity sensor
    • 角速度传感器
    • US07296467B2
    • 2007-11-20
    • US10957129
    • 2004-10-01
    • Toshiyuki KawamuraYoshinori SatohToru MatsunagaTakeshi MaedaNaoya SasakiKazuhiro Chiba
    • Toshiyuki KawamuraYoshinori SatohToru MatsunagaTakeshi MaedaNaoya SasakiKazuhiro Chiba
    • G01C19/00G01P15/08
    • G01C19/5663
    • An angular velocity sensor 1 includes support members 10A1, 10A2, 10B1 and 10B2, bonded to two nodal points of a pillar-shaped oscillator, generated on oscillations of the oscillator, in a manner of sandwiching the nodal points from upper and lower sides of the oscillator. The support members simultaneously serve for mechanically supporting and providing for electrical connection of the oscillator. Upper support members 10A1, 10A2 and lower support members 10B1 and 10B2 for the nodal points include bent parts, the bent parts being bent in the same direction with respect to the longitudinal direction of the oscillator. The upper support members and lower support members also include arms 11 extending at right angles to the up-and-down direction and to the longitudinal direction of the oscillator and connecting portion 13 for the arms and the oscillator.
    • 角速度传感器1包括支撑构件10A 1,10 A 2,10 B 1和10 B 2 ,以从振荡器的上侧和下侧夹住节点的方式结合到在振荡器的振荡上产生的柱状振荡器的两个节点。 支撑构件同时用于机械地支撑并提供振荡器的电连接。 上支撑构件10 A 1,10 A 2和下支撑构件10 B 1和10 B 2,用于 节点包括弯曲部分,弯曲部分相对于振荡器的纵向方向在相同的方向上弯曲。 上支撑构件和下支撑构件还包括臂11,它们与上下方向成直角地延伸,并且还包括用于臂和振荡器的振荡器和连接部分13的纵向。
    • 7. 发明授权
    • Composite sensor for detecting angular velocity and acceleration
    • 用于检测角速度和加速度的复合传感器
    • US07155975B2
    • 2007-01-02
    • US10481436
    • 2002-06-24
    • Tomohiro MitaniShoichi TakenoKatsuhiko Omoto
    • Tomohiro MitaniShoichi TakenoKatsuhiko Omoto
    • G01P1/02G01P9/04
    • G01C19/5663G01P1/023Y10T29/49007
    • A high-reliability complex sensor is protected against vibration and electromagnetic wave noise from outside. A shield case is provided with a power conjunction terminal, GND conjunction terminal, angular velocity conjunction terminal, X axis acceleration conjunction terminal and Y axis acceleration conjunction terminal. Both a power supply terminal of an angular velocity detection device and a power supply terminal of an acceleration detection device are electrically connected with a power connector terminal of a protection case, via the power conjunction terminal of the shield case. Both a GND terminal of the angular velocity detection device and a GND terminal of the acceleration detection device are electrically connected with a GND connector terminal of the protection case, via the GND conjunction terminal of the shield case. A circuit board is contained completely within the shield case.
    • 高可靠性的复杂传感器可以防止外部的振动和电磁波噪声。 屏蔽盒配有电源连接端子,GND连接端子,角速度连接端子,X轴加速连接端子和Y轴加速连接端子。 角速度检测装置的电源端子和加速度检测装置的电源端子都经由屏蔽壳体的电力连接端子与保护壳体的电源连接器端子电连接。 角速度检测装置的GND端子和加速度检测装置的GND端子经由屏蔽壳体的GND连接端子与保护壳体的GND连接器端子电连接。 电路板完全包含在屏蔽盒内。