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    • 4. 发明授权
    • Control device, control method and control program
    • 控制装置,控制方法和控制程序
    • US09457467B2
    • 2016-10-04
    • US14628860
    • 2015-02-23
    • Hiroshi FujimotoKenji InukaiTaro Takahashi
    • Hiroshi FujimotoKenji InukaiTaro Takahashi
    • B25J9/16G05B13/02G05B11/36
    • B25J9/163G05B11/36G05B13/02G05B2219/41144
    • A control device includes a main actuator configured to drive a plant through a torque transfer device disposed on a driving side, a load side sub-actuator configured to drive the plant that is disposed on a plant side, and a processor configured to: generate a torque reference input value driving the main actuator and the load side sub-actuator, and cancel out resonance by multiplying the generated torque reference input value by: a first gain including an inertia coefficient, a viscosity coefficient, and a reduction ratio of the torque transfer device on the driving side and on the plant side, and a second gain including: the inertia coefficient, the viscosity coefficient, and the reduction ratio of the torque transfer device on the driving side and on the plant side, and thereby adjusting a ratio of the torque reference input value of the main actuator and the load side sub-actuator.
    • 一种控制装置,其特征在于,包括:主驱动器,被配置为通过设置在驱动侧的扭矩传递装置来驱动工厂;负载侧副致动器,被配置为驱动设置在工厂侧的工厂;以及处理器,其被配置为: 驱动主致动器和负载侧副致动器的转矩基准输入值,并且通过将产生的转矩基准输入值乘以:包括惯性系数,粘度系数和转矩传递的减速比的第一增益来抵消共振 驱动侧和工厂侧的装置,以及第二增益,包括:转矩传递装置在驱动侧和工厂侧的惯性系数,粘度系数和减速比,由此调节 主执行器和负载侧副执行器的转矩参考输入值。
    • 10. 发明申请
    • Polishing monitoring method, polishing apparatus and monitoring apparatus
    • 抛光监测方法,抛光装置和监测装置
    • US20090096446A1
    • 2009-04-16
    • US12285674
    • 2008-10-10
    • Taro TakahashiYoichi KobayashiShinrou OhtaAkihiko Ogawa
    • Taro TakahashiYoichi KobayashiShinrou OhtaAkihiko Ogawa
    • G01B7/06
    • G01B7/105
    • The present invention provides a method for monitoring a change in thickness of a conductive film brought into sliding contact with a polishing surface of a polishing pad using an eddy current sensor. The output signal of the eddy current sensor comprises two signals corresponding to a resistance component and an inductive reactance component of an impedance of an electric circuit including a coil of the eddy current sensor. The method includes acquiring the output signal of the eddy current sensor when the eddy current sensor is facing the conductive film, defining the two signals as coordinates on a coordinate system, repeating the acquiring of the output signal and the defining of the coordinates, determining a center of curvature of an arc specified by at least three sets of coordinates on the coordinate system, determining an angle of inclination of a line connecting the center of curvature and a latest one of the at least three sets of coordinates, and monitoring a change in thickness of the conductive film by monitoring a change in the angle of inclination.
    • 本发明提供一种用于使用涡流传感器监测与抛光垫的抛光表面滑动接触的导电膜的厚度变化的方法。 涡电流传感器的输出信号包括对应于包括涡流传感器的线圈的电路的阻抗的电阻分量和电抗分量的两个信号。 该方法包括当涡流传感器面向导电膜时获取涡流传感器的输出信号,将两个信号定义为坐标系上的坐标,重复获取输出信号和定义坐标,确定 由坐标系上的至少三组坐标指定的圆弧的曲率中心,确定连接曲率中心的直线和最小三个坐标系中的最近一个的线的倾斜角度, 通过监测倾斜角度的变化来确定导电膜的厚度。