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    • 7. 发明申请
    • Method of forming ultra thin chips of power devices
    • 形成功率器件超薄芯片的方法
    • US20080242052A1
    • 2008-10-02
    • US11694888
    • 2007-03-30
    • Tao FengFrancois HebertMing SunYueh-Se Ho
    • Tao FengFrancois HebertMing SunYueh-Se Ho
    • H01L21/30
    • H01L21/3043H01L21/78
    • A method for making thin semiconductor devices is disclosed. Starting from wafer with pre-fabricated front-side devices, the method includes: Thinning wafer central portion from its back-side to produce a thin region while preserving original wafer thickness in the wafer periphery for structural strength. Forming ohmic contact at wafer back-side. Separating and collecting pre-fabricated devices. This further includes: Releasably bonding wafer back-side onto single-sided dicing tape, in turn supported by a dicing frame. Providing a backing plate to match the thinned out wafer central portion. Sandwiching the dicing tape between wafer and backing plate then pressing the dicing tape to bond with the wafer. With a step-profiled chuck to support wafer back-side, the pre-fabricated devices are separated from each other and from the wafer periphery in one dicing operation with dicing depth slightly thicker than the wafer central portion. The separated thin semiconductor devices are then picked up and collected.
    • 公开了制造薄半导体器件的方法。 从具有预制的前端器件的晶片开始,该方法包括:从其背面将晶片中心部分变薄以产生薄区域,同时在晶片周边保留原始晶片厚度以获得结构强度。 在晶圆背面形成欧姆接触。 分离和收集预制设备。 这还包括:将晶片背面可释放地粘合到单面切割胶带上,然后由切割架支撑。 提供背板以匹配变薄的晶片中心部分。 将切割胶带夹在晶片和背板之间,然后按压切割胶带与晶片结合。 利用阶梯型卡盘来支撑晶片背面,在一个切割操作中,预制的装置彼此分离并且与晶片周边分离,切割深度比晶片中心部分稍厚。 然后拾取并收集分离的薄半导体器件。
    • 10. 发明申请
    • PLANAR GROOVED POWER INDUCTOR STRUCTURE AND METHOD
    • 平面电力电力电感器结构与方法
    • US20110107589A1
    • 2011-05-12
    • US13007551
    • 2011-01-14
    • Francois HebertTao FengJun Lu
    • Francois HebertTao FengJun Lu
    • H01F7/06
    • H01F17/0033H01F1/344H01F41/046H01F2017/002Y10T29/4902
    • An inductor may include a planar ferrite core. A first group of one or more grooves is formed in a first side of the ferrite core. A second group of two or more grooves is formed in a second side of the ferrite core. The grooves in the first and second groups are oriented such that each groove in the first group overlaps with two corresponding grooves in the second group. A first plurality of vias communicates through the ferrite core between the first and second sides of the ferrite core. Each via is located where a groove in the first group overlaps with a groove in the second group. A conductive material is disposed in the first and second groups of grooves and in the vias to form an inductor coil.
    • 电感器可以包括平面铁氧体磁芯。 第一组一个或多个凹槽形成在铁氧体磁芯的第一侧。 在铁氧体磁芯的第二侧形成有第二组两个或多个凹槽。 第一组和第二组中的凹槽被定向成使得第一组中的每个凹槽与第二组中的两个相应的凹槽重叠。 第一多个通孔在铁氧体磁芯的第一和第二侧之间通过铁氧体磁芯连通。 每个通孔位于第一组中的凹槽与第二组中的凹槽重叠的位置。 导电材料设置在第一和第二组沟槽和通孔中以形成电感线圈。