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1. 发明申请

US20120198943A1 Sensor Structure 审中-公开
标题翻译：传感器结构
公开(公告)号：US20120198943A1
公开(公告)日：2012-08-09
申请号：US13368746
申请日：2012-02-08
申请人： Takayuki SAITO , Keiji Hanzawa , Takayuki Yogo
发明人： Takayuki SAITO , Keiji Hanzawa , Takayuki Yogo
IPC分类号： G01F1/34
CPC分类号： G01L19/0007 , G01F1/684 , G01L23/24
摘要： A sensor structure is provided so that a dynamic pressure effect caused by airflow is avoided as much as possible even when a mass airflow measurement device is integrated with a pressure measurement device, thereby preventing contaminated substances, water droplets, or the like from arriving at a pressure measurement part. In the sensor structure, the mass airflow measurement device is inserted into a sensor insertion port provided in an intake air tube component including an intake air tube and is fixed to the intake air tube, and a pressure measurement device is mounted in a housing structural component of the mass airflow measurement device for measuring the pressure. The pressure measurement device and the inside of the intake air tube are connected by a pressure intake port provided in the housing structural component.
摘要翻译：提供了一种传感器结构，即使当质量气流测量装置与压力测量装置集成在一起时也尽可能地避免由气流引起的动态压力效应，从而防止污染物质，水滴等到达压力测量部件。在传感器结构中，将质量气流测量装置插入设置在包括进气管的进气管部件中的传感器插入口中，并固定在进气管上，并且将压力测量装置安装在壳体结构部件用于测量压力的质量气流测量装置。压力测量装置和进气管的内部通过设置在壳体结构部件中的压力吸入口连接。

2. 外观设计

USD674303S1 Physical amount sensor for air 有权
公开(公告)号：USD674303S1
公开(公告)日：2013-01-15
申请号：US29411773
申请日：2012-01-26
申请人： Takayuki Saito , Keiji Hanzawa , Takayuki Yogo
设计人： Takayuki Saito , Keiji Hanzawa , Takayuki Yogo

3. 发明申请

US20140216146A1 AIR PHYSICAL QUANTITY SENSING DEVICE 审中-公开
标题翻译：空气物理量传感装置
公开(公告)号：US20140216146A1
公开(公告)日：2014-08-07
申请号：US14240946
申请日：2012-07-31
申请人： Takayuki Yogo , Takayuki Saito , Keiji Hanzawa
发明人： Takayuki Yogo , Takayuki Saito , Keiji Hanzawa
IPC分类号： F02M35/10
CPC分类号： F02M35/10373 , F02D41/187 , F02M35/10393 , G01F1/684 , G01F15/14
摘要： To prevent dew condensation on a sensor element, an air physical quantity sensing device which has a housing structural component integrally provided with a connector and a connector terminal member that perform input and output with the outside, an electronic circuit board mounted on the housing structural component, and an air physical quantity sensing element provided on the electronic circuit board and capable of detecting physical quantity of air. The housing structural component formed with a communication hole which allows the inside and outside of the main air flow passage to communicate with each other. The electronic circuit board has the communication hole separated into two and the surface on the side where the air physical quantity sensing element is provided faces the main air flow passage side.
摘要翻译：为了防止传感器元件上的结露，具有一体地设置有连接器的壳体结构部件和与外部进行输入和输出的连接器端子部件的空气物理量检测装置，安装在壳体结构部件上的电子电路板以及设置在电子电路板上并且能够检测空气的物理量的空气物理量感测元件。壳体结构部件形成有连通孔，其允许主空气流动通道的内部和外部彼此连通。电子电路板具有分离为两个的连通孔，并且设置有空气物理感测元件的一侧的表面面向主空气流动通道侧。

4. 发明授权

US08549901B2 Sensor structure 有权
标题翻译：传感器结构
公开(公告)号：US08549901B2
公开(公告)日：2013-10-08
申请号：US13367939
申请日：2012-02-07
申请人： Takayuki Saito , Keiji Hanzawa , Takayuki Yogo
发明人： Takayuki Saito , Keiji Hanzawa , Takayuki Yogo
IPC分类号： G01M15/04
CPC分类号： G01F1/6842 , F02D41/187 , G01F5/00
摘要： In relation to a humidity sensor sensitive to water and contamination, a sensor implementation structure that achieves both protection performance against water and contaminants and measurement performance such as humidity responsiveness is provided. A sensor structure has a mass airflow measurement element that measures a mass airflow flowing in an intake pipe, a humidity sensing element that senses humidity of air flowing in the intake pipe, a housing structural component having a connector that carries out input/output to/from outside and a terminal component of the connector, and a bypass passage that is composed by using part of the housing structural component and takes in part of the air that flows in the intake pipe, the mass airflow measurement element being mounted in the bypass passage; wherein space is provided in the housing structural component in the vicinity of the bypass passage, the humidity sensing element is mounted in the space.
摘要翻译：关于对水和污染物敏感的湿度传感器，提供了实现对水和污染物的保护性能以及诸如湿度响应性的测量性能的传感器实施结构。传感器结构具有测量进气管中流动的质量气流的质量气流测量元件，感测进气管中流动的空气湿度的湿度感测元件，具有连接器的壳体结构部件，该连接器将输入/ 从连接器的外部和端子部件和旁通通路构成，所述旁通通路由使用所述壳体结构部件的一部分而占据所述进气管中流动的一部分空气，所述质量空气流量测量元件安装在所述旁路通路 ; 其中在所述外壳结构部件中在所述旁通通路附近设置空间，所述湿度感测元件安装在所述空间中。

5. 外观设计

USD674300S1 Portion of physical amount sensor for air 有权
标题翻译：物理量传感器部分用于空气
公开(公告)号：USD674300S1
公开(公告)日：2013-01-15
申请号：US29397275
申请日：2011-07-14
申请人： Takayuki Saito , Hiromu Kikawa , Keiji Hanzawa
设计人： Takayuki Saito , Hiromu Kikawa , Keiji Hanzawa

6. 外观设计

USD674301S1 Physical amount sensor for air 有权
标题翻译：物理量传感器用于空气
公开(公告)号：USD674301S1
公开(公告)日：2013-01-15
申请号：US29397276
申请日：2011-07-14
申请人： Takayuki Saito , Hiromu Kikawa , Keiji Hanzawa
设计人： Takayuki Saito , Hiromu Kikawa , Keiji Hanzawa

7. 发明授权

US09766106B2 Thermal air flow sensor 有权
公开(公告)号：US09766106B2
公开(公告)日：2017-09-19
申请号：US14355104
申请日：2011-11-28
申请人： Norio Ishitsuka , Keiji Hanzawa , Yasuo Onose , Noriyuki Sakuma
发明人： Norio Ishitsuka , Keiji Hanzawa , Yasuo Onose , Noriyuki Sakuma
IPC分类号： G01F1/692 , G01F1/69
CPC分类号： G01F1/69 , G01F1/692
摘要： A thermal air flow sensor that produces less measurement error is provided. The thermal air flow sensor includes: a semiconductor substrate; a heating resistor, resistance temperature detectors, and an electrical insulator that includes a silicon oxide film, wherein the heating resistor, the resistance temperature detectors, and the electrical insulator are formed on the semiconductor substrate; and a diaphragm portion formed by removing a portion of the semiconductor substrate. The heating resistor and the resistance temperature detectors are formed on the diaphragm portion. The thermal air flow sensor further includes a silicon nitride film formed as the electrical insulator above the heating resistor and the resistance temperature detectors. The silicon nitride film has steps conforming to the patterns of the heating resistor and the resistance temperature detectors. The silicon nitride film has a multilayer structure.

8. 发明授权

US09188470B2 Thermal flow meter 有权
标题翻译：热流量计
公开(公告)号：US09188470B2
公开(公告)日：2015-11-17
申请号：US13813094
申请日：2011-07-28
申请人： Hiroshi Nakano , Masahiro Matsumoto , Satoshi Asano , Keiji Hanzawa
发明人： Hiroshi Nakano , Masahiro Matsumoto , Satoshi Asano , Keiji Hanzawa
IPC分类号： G01F1/68 , G01F1/692 , G01F1/684 , G01F1/699
CPC分类号： G01F1/692 , G01F1/6842 , G01F1/699
摘要： An object of the present invention is to provide a thermal type flow rate sensor that offers high sensitivity and improved reliability. A sensor element according to the present invention includes a semiconductor substrate, a cavity portion formed on the semiconductor substrate, a heating resistor formed on the cavity portion via an electrically insulating film, a heating temperature sensor for detecting heating temperature of the heating resistor, and a driving circuit for controlling the heating temperature of the heating resistor using the temperature detected by the heating temperature sensor. The heating temperature sensor comprises temperature-sensitive resistors having resistance values varying according to temperature and disposed upstream and downstream of a direction of flow of a fluid to be measured relative to the heating resistor and on upper and lower sides in a direction perpendicular to the direction of flow of the fluid to be measured relative to the heating resistor.
摘要翻译：本发明的目的是提供一种提供高灵敏度和改善的可靠性的热式流量传感器。根据本发明的传感器元件包括半导体衬底，形成在半导体衬底上的空腔部分，通过电绝缘膜形成在空腔部分上的发热电阻器，用于检测加热电阻器的加热温度的加热温度传感器，以及使用由加热温度传感器检测到的温度来控制加热电阻器的加热温度的驱动电路。加热温度传感器包括具有根据温度变化的电阻值的温度敏感电阻器，并且设置在相对于加热电阻器的被测量流体的流动方向的上游和下游以及垂直于该方向的方向上下侧要测量的流体相对于加热电阻器的流动。

9. 发明授权

US08969977B2 Flow sensor, method for manufacturing flow sensor and flow sensor module 有权
标题翻译：流量传感器，流量传感器和流量传感器模块的制造方法
公开(公告)号：US08969977B2
公开(公告)日：2015-03-03
申请号：US12964935
申请日：2010-12-10
申请人： Tsutomu Kono , Yuuki Okamoto , Takeshi Morino , Keiji Hanzawa
发明人： Tsutomu Kono , Yuuki Okamoto , Takeshi Morino , Keiji Hanzawa
IPC分类号： H01L29/84 , G01F1/684 , G01F1/692
CPC分类号： G01F15/16 , G01F1/684 , G01F1/6842 , G01F1/692 , H01L23/495 , H01L29/84 , H01L2224/45144 , H01L2224/48091 , H01L2224/48227 , H01L2224/49171 , H01L2224/73265 , H01L2924/00014 , H01L2924/00
摘要： The invention provides a flow sensor structure for sealing the surface of an electric control circuit and a part of a semiconductor device via a manufacturing method capable of preventing occurrence of flash or chip crack when clamping the semiconductor device via a mold. The invention provides a flow sensor structure comprising a semiconductor device having an air flow sensing unit and a diaphragm formed thereto, and a board or a lead frame having an electric control circuit for controlling the semiconductor device disposed thereto, wherein a surface of the electric control circuit and a part of a surface of the semiconductor device is covered with resin while having the air flow sensing unit portion exposed. The invention further provides flow sensor structure in which surfaces of a resin mold, a board or a pre-mold component surrounding the semiconductor device are continuously not in contact with three walls of the semiconductor device orthogonal to a side on which the air flow sensing unit portion is disposed, or a manufacturing method for absorbing the dimensional variation of the semiconductor device by the deformation of springs or deformation of an elastic film in the thickness direction.
摘要翻译：本发明提供了一种流量传感器结构，用于经由模具夹紧半导体器件时能够防止发生闪光或芯片裂纹的制造方法来密封电气控制电路和半导体器件的一部分的表面。本发明提供了一种流量传感器结构，其包括具有气流检测单元和形成于其上的隔膜的半导体器件，以及具有用于控制设置在其上的半导体器件的电气控制电路的电路板或引线框架，其中，电路和半导体器件的表面的一部分被树脂覆盖，同时使空气流感测单元部分暴露。本发明还提供了一种流量传感器结构，其中围绕半导体器件的树脂模具，板或预模具部件的表面不连续地与半导体器件的三个壁接触，该壁与空气流量检测单元或者通过弹簧的变形或弹性膜在厚度方向的变形来吸收半导体器件的尺寸变化的制造方法。

10. 发明授权

US08596113B2 Intake air temperature sensor and thermal airflow meter including the same 有权
标题翻译：进气温度传感器和热风量计包括相同
公开(公告)号：US08596113B2
公开(公告)日：2013-12-03
申请号：US13360923
申请日：2012-01-30
申请人： Masahiro Matsumoto , Hiroshi Nakano , Keiji Hanzawa , Satoshi Asano
发明人： Masahiro Matsumoto , Hiroshi Nakano , Keiji Hanzawa , Satoshi Asano
IPC分类号： G01M15/04
CPC分类号： G01K13/02 , G01F1/00 , G01F1/68 , G01F1/6888 , G01F5/00 , G01F15/185 , G01K1/20 , G01K7/42 , G01K2013/024 , G01K2205/02
摘要： An intake air temperature sensor capable of detecting an intake air temperature highly accurately and at high speed. The intake air temperature sensor of the present invention includes: a secondary passage 7 taking in an intake airflow; a flow rate detecting element 13 disposed in the secondary passage 7; an intake air temperature detecting element 4 provided outside the secondary passage; a temperature sensor 9 detecting a temperature of a fitting section of the intake air temperature detecting element 4; a circuit board 11 disposed in a casing; and an integrated circuit 10 applying a correction process to an output of the intake air temperature detecting element 4 on the basis of signals output from the temperature sensor 9 and a flow rate detecting element 13.
摘要翻译：能够高精度地且高速地检测进气温度的进气温度传感器。本发明的进气温度传感器包括：进入气流的二次通路7; 设置在次通道7中的流量检测元件13; 设置在次级通道外侧的进气温度检测元件4; 检测进气温度检测元件4的嵌合部的温度的温度传感器9; 布置在壳体中的电路板11; 以及基于从温度传感器9和流量检测元件13输出的信号将校正处理应用于进气温度检测元件4的输出的集成电路10。

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