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    • 1. 发明申请
    • Thermal Air Flow Sensor
    • 热空气流量传感器
    • US20140284753A1
    • 2014-09-25
    • US14355104
    • 2011-11-28
    • Norio IshitsukaKeiji HanzawaYasuo OnoseNoriyuki Sakuma
    • Norio IshitsukaKeiji HanzawaYasuo OnoseNoriyuki Sakuma
    • G01F1/69
    • G01F1/69G01F1/692
    • A thermal air flow sensor that produces less measurement error is provided. The thermal air flow sensor includes: a semiconductor substrate; a heating resistor, resistance temperature detectors, and an electrical insulator that includes a silicon oxide film, wherein the heating resistor, the resistance temperature detectors, and the electrical insulator are formed on the semiconductor substrate; and a diaphragm portion formed by removing a portion of the semiconductor substrate. The heating resistor and the resistance temperature detectors are formed on the diaphragm portion. The thermal air flow sensor further includes a silicon nitride film formed as the electrical insulator above the heating resistor and the resistance temperature detectors. The silicon nitride film has steps conforming to the patterns of the heating resistor and the resistance temperature detectors. The silicon nitride film has a multilayer structure.
    • 提供了产生较少测量误差的热空气流量传感器。 热空气流量传感器包括:半导体衬底; 加热电阻器,电阻温度检测器和包括氧化硅膜的电绝缘体,其中在半导体衬底上形成有加热电阻器,电阻温度检测器和电绝缘体; 以及通过去除半导体衬底的一部分而形成的膜片部分。 加热电阻器和电阻温度检测器形成在隔膜部分上。 热空气流量传感器还包括形成为加热电阻器上方的电绝缘体的电阻温度检测器的氮化硅膜。 氮化硅膜具有符合加热电阻器和电阻温度检测器的图案的步骤。 氮化硅膜具有多层结构。
    • 6. 发明授权
    • Capacitance-type pressure sensor
    • 电容式压力传感器
    • US06640642B1
    • 2003-11-04
    • US09653808
    • 2000-09-01
    • Yasuo OnoseAtsuo WatanabeSeiji KuryuShinya SatouJunichi HorieSatoshi Shimada
    • Yasuo OnoseAtsuo WatanabeSeiji KuryuShinya SatouJunichi HorieSatoshi Shimada
    • G01L912
    • G01L9/0042G01L1/146G01L9/0073
    • A pressure sensor of electric capacitance type which includes a plurality of pressure sensor units connected in parallel with one another and each formed on a substrate by an electrode, a cavity region and a diaphragm having an electrically conductive film which is disposed in opposition to the electrode with the cavity region intervening between the electrode and the diaphragm, wherein diaphragm fixing portions are disposed internally of the cavity region so that a single sheet of the diaphragm is partitionarily and regionally allotted to regions of the plural pressure sensor units, respectively. With this structure of the capacitance-type pressure sensor, ineffective region for capacitance detection is minimized and hence the parasitic capacitance can be reduced with the detection accuracy of the sensor being improved.
    • 一种电容式压力传感器,其包括彼此并联连接的多个压力传感器单元,每个压力传感器单元通过电极形成在基板上,空腔区域和具有导电膜的隔膜,所述导电膜设置成与电极相对设置 其中腔区插入在电极和隔膜之间,其中隔膜固定部分设置在空腔区域的内部,使得隔膜的单片分别地分区地分配到多个压力传感器单元的区域。 利用电容型压力传感器的这种结构,电容检测的无效区域被最小化,因此可以随着传感器的检测精度提高而降低寄生电容。