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    • 10. 发明申请
    • AIRFLOW MEASURING APPARATUS
    • 气流测量装置
    • US20140352424A1
    • 2014-12-04
    • US14363235
    • 2011-12-07
    • Takeshi MorinoShinobu TashiroNoboru TokuyasuRyosuke DoiKeiji Hanzawa
    • Takeshi MorinoShinobu TashiroNoboru TokuyasuRyosuke DoiKeiji Hanzawa
    • G01F1/684H01L35/34G01F1/692
    • G01F1/6842F02D41/187G01F1/6845G01F1/692G01F5/00H01L35/34
    • Airflow measuring apparatus compring: sub-passage that takes in part of flow of fluid flowing through an intake pipe; sensor element that is disposed in the sub-passage to measure the flow of fluid; a circuit part that converts the flow of fluid detected by the sensor element into an electric signal; connector part connected to the circuit part to output a signal externally; and casing that supports the sensor element and the circuit part, the sensor element being disposed in the intake pipe. The sensor element includes a cavity disposed at a semiconductor substrate, a diaphragm including a thin film part that covers the cavity. The sensor element on a lead frame have surfaces that are mold-packaged with resin so that a diaphragm of the sensor element and part of the lead frame are exposed. One hole is disposed at the lead frame for communication between the cavity and exterior.
    • 气流测量装置包括:部分流过进气管的流体流动的副通道; 传感器元件,设置在子通道中以测量流体的流动; 电路部,其将由所述传感器元件检测出的流体流转换为电信号; 连接器部分连接到电路部分以从外部输出信号; 以及支撑传感器元件和电路部分的壳体,传感器元件设置在进气管中。 传感器元件包括设置在半导体衬底处的腔体,隔膜包括覆盖空腔的薄膜部分。 引线框架上的传感器元件具有用树脂模制包装的表面,使得传感器元件的膜片和引线框架的一部分被暴露。 一个孔设置在引线框架处,用于在空腔和外部之间连通。