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    • 1. 发明授权
    • Thermal flow meter
    • 热流量计
    • US09188470B2
    • 2015-11-17
    • US13813094
    • 2011-07-28
    • Hiroshi NakanoMasahiro MatsumotoSatoshi AsanoKeiji Hanzawa
    • Hiroshi NakanoMasahiro MatsumotoSatoshi AsanoKeiji Hanzawa
    • G01F1/68G01F1/692G01F1/684G01F1/699
    • G01F1/692G01F1/6842G01F1/699
    • An object of the present invention is to provide a thermal type flow rate sensor that offers high sensitivity and improved reliability. A sensor element according to the present invention includes a semiconductor substrate, a cavity portion formed on the semiconductor substrate, a heating resistor formed on the cavity portion via an electrically insulating film, a heating temperature sensor for detecting heating temperature of the heating resistor, and a driving circuit for controlling the heating temperature of the heating resistor using the temperature detected by the heating temperature sensor. The heating temperature sensor comprises temperature-sensitive resistors having resistance values varying according to temperature and disposed upstream and downstream of a direction of flow of a fluid to be measured relative to the heating resistor and on upper and lower sides in a direction perpendicular to the direction of flow of the fluid to be measured relative to the heating resistor.
    • 本发明的目的是提供一种提供高灵敏度和改善的可靠性的热式流量传感器。 根据本发明的传感器元件包括半导体衬底,形成在半导体衬底上的空腔部分,通过电绝缘膜形成在空腔部分上的发热电阻器,用于检测加热电阻器的加热温度的加热温度传感器,以及 使用由加热温度传感器检测到的温度来控制加热电阻器的加热温度的驱动电路。 加热温度传感器包括具有根据温度变化的电阻值的温度敏感电阻器,并且设置在相对于加热电阻器的被测量流体的流动方向的上游和下游以及垂直于该方向的方向上下侧 要测量的流体相对于加热电阻器的流动。
    • 4. 发明申请
    • SENSOR DEVICE
    • 传感器设备
    • US20140167781A1
    • 2014-06-19
    • US14235933
    • 2011-08-03
    • Satoshi AsanoMasahiro MatsumotoHIroshi NakanoKeiji Hanzawa
    • Satoshi AsanoMasahiro MatsumotoHIroshi NakanoKeiji Hanzawa
    • G01R1/18G01D7/00
    • G01R1/18B81B3/0086G01D7/00
    • An objective of the present invention is to provide a sensor device with an increased accuracy. In order to achieve the objective, provided is a sensor device includes: an external terminal 2 to which an external device is connected; a ground terminal 3 connected to the ground; an internal circuit 4 that generates a sensor output signal; and a protection circuit 5 having a resistive element 6 and a capacitative element 7 between the external terminal and the internal circuit, in which the capacitative element is formed of a pair of electrodes having different conductivities from each other and a lower-conductive electrode 7a of the electrodes which has a smaller conductivity is connected to the external terminal and the internal circuit.
    • 本发明的目的是提供一种具有更高精度的传感器装置。 为了实现该目的,提供了一种传感器装置,包括:连接有外部装置的外部端子2; 连接到地面的接地端子3; 产生传感器输出信号的内部电路4; 以及保护电路5,其在外部端子和内部电路之间具有电阻元件6和电容元件7,其中电容元件由彼此具有不同电导率的一对电极形成,并且电容元件7的下导电电极7a 具有较小导电性的电极连接到外部端子和内部电路。
    • 5. 发明申请
    • Thermal Flow Meter
    • 热流量计
    • US20130199280A1
    • 2013-08-08
    • US13813094
    • 2011-07-28
    • Hiroshi NakanoMasahiro MatsumotoSatoshi AsanoKeiji Hanzawa
    • Hiroshi NakanoMasahiro MatsumotoSatoshi AsanoKeiji Hanzawa
    • G01F1/692
    • G01F1/692G01F1/6842G01F1/699
    • An object of the present invention is to provide a thermal type flow rate sensor that offers high sensitivity and improved reliability. A sensor element according to the present invention includes a semiconductor substrate, a cavity portion formed on the semiconductor substrate, a heating resistor formed on the cavity portion via an electrically insulating film, a heating temperature sensor for detecting heating temperature of the heating resistor, and a driving circuit for controlling the heating temperature of the heating resistor using the temperature detected by the heating temperature sensor. The heating temperature sensor comprises temperature-sensitive resistors having resistance values varying according to temperature and disposed upstream and downstream of a direction of flow of a fluid to be measured relative to the heating resistor and on upper and lower sides in a direction perpendicular to the direction of flow of the fluid to be measured relative to the heating resistor.
    • 本发明的目的是提供一种提供高灵敏度和改善的可靠性的热式流量传感器。 根据本发明的传感器元件包括半导体衬底,形成在半导体衬底上的空腔部分,通过电绝缘膜形成在空腔部分上的发热电阻器,用于检测加热电阻器的加热温度的加热温度传感器,以及 使用由加热温度传感器检测到的温度来控制加热电阻器的加热温度的驱动电路。 加热温度传感器包括具有根据温度变化的电阻值的温度敏感电阻器,并且设置在相对于加热电阻器的被测量流体的流动方向的上游和下游以及垂直于该方向的方向上下侧 要测量的流体相对于加热电阻器的流动。
    • 6. 发明授权
    • Intake temperature sensor
    • 进气温度传感器
    • US08813556B2
    • 2014-08-26
    • US13337398
    • 2011-12-27
    • Masahiro MatsumotoHiroshi NakanoKeiji HanzawaSatoshi Asano
    • Masahiro MatsumotoHiroshi NakanoKeiji HanzawaSatoshi Asano
    • G01F1/68
    • G01K13/02G01F1/6842G01F5/00G01F15/185G01K1/16G01K2205/02
    • An intake temperature sensor capable of precisely detecting the temperature of intake at high speed even in a low air mass flow zone is provided. In an intake temperature sensor having a temperature detecting element 6 inserted in an opening provided in an intake pipe 3 to be disposed in the intake pipe, a temperature detecting element is mechanically joined with a heat sink 4 directly exposed to the flow of the intake flowing in the intake pipe, and the temperature of the intake is output based on an output obtained from the temperature detecting element. Thus, the thermal resistance of the temperature detecting element with respect to the intake flow can be reduced; therefore, the intake temperature sensor capable of precisely detecting the temperature of the intake at high speed even in the low air mass flow zone can be provided.
    • 提供了即使在低空气质量流量区域也能够高精度地检测进气温度的进气温度传感器。 在具有插入到设置在进气管3内的进气管3中的开口中的温度检测元件6的进气温度传感器中,温度检测元件与直接暴露于进气流动的散热器4机械接合 在进气管中,并且基于从温度检测元件获得的输出来输出进气温度。 因此,可以降低温度检测元件相对于进气流的热阻; 因此,即使在低空气质量流量区域中也能够高精度地检测进气温度的进气温度传感器。
    • 8. 发明申请
    • INTAKE TEMPERATURE SENSOR
    • 摄入温度传感器
    • US20120160024A1
    • 2012-06-28
    • US13337398
    • 2011-12-27
    • Masahiro MATSUMOTOHiroshi NakanoKeiji HanzawaSatoshi Asano
    • Masahiro MATSUMOTOHiroshi NakanoKeiji HanzawaSatoshi Asano
    • G01F1/684G01K13/02
    • G01K13/02G01F1/6842G01F5/00G01F15/185G01K1/16G01K2205/02
    • An intake temperature sensor capable of precisely detecting the temperature of intake at high speed even in a low air mass flow zone is provided. In an intake temperature sensor having a temperature detecting element 6 inserted in an opening provided in an intake pipe 3 to be disposed in the intake pipe, a temperature detecting element is mechanically joined with a heat sink 4 directly exposed to the flow of the intake flowing in the intake pipe, and the temperature of the intake is output based on an output obtained from the temperature detecting element. Thus, the thermal resistance of the temperature detecting element with respect to the intake flow can be reduced; therefore, the intake temperature sensor capable of precisely detecting the temperature of the intake at high speed even in the low air mass flow zone can be provided.
    • 提供了即使在低空气质量流量区域也能够高精度地检测进气温度的进气温度传感器。 在具有插入到设置在进气管3内的进气管3中的开口中的温度检测元件6的进气温度传感器中,温度检测元件与直接暴露于进气流动的散热器4机械接合 在进气管中,并且基于从温度检测元件获得的输出来输出进气温度。 因此,可以降低温度检测元件相对于进气流的热阻; 因此,即使在低空气质量流量区域中也能够高精度地检测进气温度的进气温度传感器。
    • 10. 发明申请
    • Thermal Type Flowmeter
    • 热式流量计
    • US20140326064A1
    • 2014-11-06
    • US14359161
    • 2012-01-18
    • Hiroshi NakanoMasahiro MatsumotoSatoshi AsanoKeiji Hanzawa
    • Hiroshi NakanoMasahiro MatsumotoSatoshi AsanoKeiji Hanzawa
    • G01F1/692
    • G01F1/692G01F1/6842G01F1/696G01F5/00G01F15/00
    • Provided is a thermal type flowmeter in which contamination of a sensor element is reduced. The flowmeter includes a sensor element including a heating resistor formed in a thin film part, the thin film part being provided on a diaphragm formed on a substrate; a support member to locate the sensor element thereon; a secondary channel that includes part of the support member and takes in part of intake air flowing through an air intake pipeline; and a guide member provided on the support member or the sensor element that lies on a line L that extends along an air flow in the secondary channel and passing over the thin film part, the guide member allowing fine particles to be guided in a direction away from the line L, the fine particles coming together with an air flow along the surface of the support member or the sensor element.
    • 提供了一种传感器元件的污染减少的热式流量计。 流量计包括:传感器元件,包括形成在薄膜部分中的加热电阻器,薄膜部分设置在形成在基板上的隔膜上; 支撑构件,用于将传感器元件定位在其上; 第二通道,其包括支撑构件的一部分并且部分地吸入通过进气管道的进气; 以及引导构件,其设置在所述支撑构件或所述传感器元件上,所述引导构件位于沿着所述次级通道中的空气流延伸并且越过所述薄膜部分的线L上,所述引导构件允许微粒沿着远离的方向被引导 来自线L的细颗粒与沿着支撑构件或传感器元件的表面的空气流一起。