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    • 2. 发明授权
    • MEMS micro-relay with coupled electrostatic and electromagnetic actuation
    • 具有耦合静电和电磁致动的MEMS微型继电器
    • US06635837B2
    • 2003-10-21
    • US09843532
    • 2001-04-26
    • Arunkumar SubramanianSusan BromleyBradley J. NelsonKarl Vollmers
    • Arunkumar SubramanianSusan BromleyBradley J. NelsonKarl Vollmers
    • B81B700
    • H01H50/005H01H53/06H01H2001/0063H01H2001/0084
    • A microelectromechanical relay and a method of fabricating the same that combines electrostatic actuation with electromagnetic actuation. The relay has very low contact resistance when the relay is in its ON state and enhanced contact-to-contact isolation when the relay is in its OFF state. The relay includes a substrate having a trench formed therein, a first pair of contacts located in the trench and an actuator for controllably establishing electrical contact between the first pair of contacts. The actuator includes spaced apart supports on the substrate and a movable beam extending between the supports. A contact cross bar is located on the movable beam facing the first pair of contacts. A first electrode is located on the movable beam and a second electrode is located on the substrate. Electromagnetic force is used to deflect the movable beam towards the substrate and then electrostatic force is used to bring the contact cross bar in physical contact with the first pair of contacts.
    • 一种微机电继电器及其制造方法,其结合静电致动与电磁致动。 当继电器处于其接通状态时,继电器具有非常低的接触电阻,并且当继电器处于其断开状态时,继电器具有增强的接触 - 接触隔离。 继电器包括其中形成有沟槽的衬底,位于沟槽中的第一对触点和用于可控地建立第一对触点之间的电接触的致动器。 致动器包括在基板上的间隔开的支撑件和在支撑件之间延伸的可移动梁。 接触横杆位于面对第一对触点的可动梁上。 第一电极位于可移动光束上,第二电极位于基板上。 使用电磁力将可移动光束偏转到基板,然后使用静电力使接触横杆与第一对触点物理接触。
    • 6. 发明申请
    • WIRELESS RESONANT MAGNETIC ACUTATION FOR UNTETHERED MICROROBOTS
    • 无线通信微波无线共振磁共振
    • US20100264776A1
    • 2010-10-21
    • US12667162
    • 2008-06-30
    • Karl VollmersDominic FrutigerBradley KratochvilBradley Nelson
    • Karl VollmersDominic FrutigerBradley KratochvilBradley Nelson
    • H02N11/00
    • H02K33/00H02K99/00H02K2201/18
    • The invention concerns a novel magnetic actuator mechanism suitable for use on untethered microrobots. It relies on the interaction of magnetic bodies in an external magnetic field. By an oscillating field, the bodies are driven to oscillatory motion, and the energy stored in the oscillation is harnessed. The untethered wireless microactuator according to the invention comprises a mechanical system with at least two magnetic bodies resiliently connected to one another, wherein the mechanical system is capable of being oscillated, in particular driven to resonance, by an oscillating external magnetic field. The actuation system according to the invention comprises such a microrobot as well as a magnetic field generator with adjustable field direction and oscillation frequency. The actuation method comprises exciting two or more magnetic bodies with an oscillating magnetic field such that they perform mechanical oscillations, and harnessing this energy for propulsion of the device or to fulfill other tasks.
    • 本发明涉及一种新颖的磁致动器机构,适用于无阻尼微型机器人。 它依赖于磁体在外部磁场中的相互作用。 通过振荡场,机体被驱动到振荡运动,并且利用存储在振荡中的能量。 根据本发明的无捆绑式无线微型致动器包括具有彼此弹性连接的至少两个磁体的机械系统,其中机械系统能够通过振荡的外部磁场而被振荡,特别是被驱动以进行谐振。 根据本发明的致动系统包括这种微型机器人以及具有可调的场方向和振荡频率的磁场发生器。 致动方法包括激励具有振荡磁场的两个或更多个磁体,使得它们执行机械振荡,并利用该能量来推动装置或完成其它任务。