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1. 发明申请

US20170102249A1 MODULES, SYSTEMS, AND METHODS FOR MONITORING ENVIRONMENTAL CONDITIONS 审中-公开
公开(公告)号：US20170102249A1
公开(公告)日：2017-04-13
申请号：US15281230
申请日：2016-09-30
申请人： Navid Yazdi
发明人： Navid Yazdi
IPC分类号： G01D5/12 , H01H1/00 , H01H35/00
CPC分类号： G01D5/12 , G01D5/251 , H01H1/0036 , H01H35/00 , H01H35/42 , H01H2037/008 , H01H2300/032 , Y02B90/224 , Y04S20/14
摘要： Modules, systems, and methods for monitoring environmental conditions, such as physical, electromagnetic, thermal, and/or chemical parameters within an environment, over extended periods of time with the use of one or more electromechanical sensing devices that include a sensing device and electronic circuitry for processing an output of the sensing device and generating a output of the module. The sensing device includes a microstructure, for example, a cantilevered beam, and at least one set of contacts configured for contact-mode operation with the microstructure in response to the microstructure deflecting toward or away from the contacts when exposed to the parameter of interest. The microstructure has a stack of layers of dissimilar materials, at least one of which has at least one property that changes as a result of curing of or absorption by the first material when exposed to the parameter.

2. 发明授权

US07973637B2 MEMS device with bi-directional element 有权
标题翻译：具有双向元件的MEMS器件
公开(公告)号：US07973637B2
公开(公告)日：2011-07-05
申请号：US12732752
申请日：2010-03-26
申请人： Arman Gasparyan , John VanAtta Gates, II , Maria Elina Simon
发明人： Arman Gasparyan , John VanAtta Gates, II , Maria Elina Simon
IPC分类号： H01H61/01
CPC分类号： H01H1/0036 , B81B3/0024 , B81B2201/014 , B81B2201/031 , H01H37/00 , H01H2001/0047 , H01H2037/008 , H01H2061/006 , H01H2061/008
摘要： The present invention provides a bi-directional microelectromechanical element, a microelectromechanical switch including the bi-directional element, and a method to reduce mechanical creep in the bi-directional element. In one embodiment, the bi-directional microelectromechanical element includes a cold beam having a free end and a first end connected to a cold beam anchor. The cold beam anchor is attached to a substrate. A first beam pair is coupled to the cold beam by a free end tether and is configured to elongate when heated thereby to a greater temperature than a temperature of the cold beam. A second beam pair is located on an opposing side of the cold beam from the first beam pair and is coupled to the first beam pair and the cold beam by the free end tether. The second beam pair is configured to elongate when heated thereby to the greater temperature.
摘要翻译：本发明提供一种双向微电子机械元件，包括双向元件的微机电开关，以及减少双向元件中机械蠕变的方法。在一个实施例中，双向微机电元件包括具有自由端的冷梁和连接到冷束锚的第一端。冷梁锚附接到基板。第一束对通过自由端系绳连接到冷束，并且被构造成在被加热时延伸到比冷束的温度更大的温度。第二光束对位于与第一光束对的冷光束的相对侧上，并且通过自由端系绳耦合到第一光束对和冷光束。第二束对被配置成在被加热时延长到更高的温度。

3. 发明申请

US20110063068A1 THERMALLY ACTUATED RF MICROELECTROMECHANICAL SYSTEMS SWITCH 审中-公开
标题翻译：热电激光微电子系统开关
公开(公告)号：US20110063068A1
公开(公告)日：2011-03-17
申请号：US12828268
申请日：2010-06-30
申请人： Shumin Zhang , Mona Zaghloul , Wansheng Su , Anis Nurashikin Nordin
发明人： Shumin Zhang , Mona Zaghloul , Wansheng Su , Anis Nurashikin Nordin
IPC分类号： H01H37/02
CPC分类号： B81B3/0024 , B81B2201/014 , B81B2201/031 , H01H1/0036 , H01H2001/0084 , H01H2037/008
摘要： A radio frequency (RF) micro electromechanical system (MEMS) switch formed on a substrate (e.g., a CMOS substrate). The RF MEMS switch includes a micromechanical member including a flexible switch membrane configured to move between an on state and an off state of the RF MEMS switch. The flexible switch membrane includes a first set of fingers on a sidewall thereof to be vertically coupled with a second set of fingers formed at an output of the RF MEMS switch on the substrate, and an actuation member in operable communication with the micromechanical member and configured to thermally actuate the micromechanical member such that the first set of fingers electrically couple with the second set of fingers upon thermal actuation of the micromechanical member to enable transmission of an RF signal.
摘要翻译：形成在基板（例如CMOS基板）上的射频（RF）微机电系统（MEMS）开关。 RF MEMS开关包括微机械构件，其包括被配置为在RF MEMS开关的导通状态和断开状态之间移动的柔性开关膜。柔性开关膜包括在其侧壁上的第一组指状物，以与形成在基板上的RF MEMS开关的输出端处的第二组指状件垂直耦合，以及与微机械构件可操作地连通的致动构件，以热致动所述微机械构件，使得所述第一组指状件在所述微机械构件的热致动时与所述第二组指状物电耦合以使得能够传输RF信号。

4. 发明授权

US07907037B2 Micro-electro-mechanical module 有权
标题翻译：微机电模块
公开(公告)号：US07907037B2
公开(公告)日：2011-03-15
申请号：US11671130
申请日：2007-02-05
申请人： Navid Yazdi
发明人： Navid Yazdi
IPC分类号： H01H51/22
CPC分类号： H01H35/14 , G01D21/00 , G01K5/62 , G01P15/0888 , G01P15/135 , G01P15/18 , H01H1/0036 , H01H35/24 , H01H35/42 , H01H69/01 , H01H2001/0063 , H01H2037/008 , H01H2300/032 , Y02B90/224 , Y04S20/14
摘要： A MEMS module that contains at least one integrated energy storage device whose discharge is minimized and controlled, so that power is available for system operation over longer periods of time. The MEMS module includes a device electrically coupled to the energy storage device for controlling charge transfers from the energy storage device while preventing charge leakage from the energy storage device. The controlling device includes a plurality of integrated MEMS switches that define open electrical paths that prevent charge leakage from the energy storage device through the MEMS switches, and are then operable to define closed electrical paths to allow charge transfers from the energy storage device, and preferably also allow charge transfers to the energy storage device, through the MEMS switches. The charge transfer can be utilized to power electronic circuits or store data in non-volatile digital memory.
摘要翻译： MEMS模块包含至少一个集成的能量存储装置，其放电被最小化和控制，使得电力可用于较长时间的系统操作。 MEMS模块包括电耦合到能量存储装置的装置，用于控制来自能量存储装置的电荷转移，同时防止来自能量存储装置的电荷泄漏。控制装置包括多个集成的MEMS开关，其限定开放的电路径，防止电能从能量存储装置通过MEMS开关泄漏，然后可操作地定义闭合的电路径以允许从能量存储装置的电荷转移还允许通过MEMS开关向储能装置进行电荷转移。电荷转移可用于为电子电路供电或将数据存储在非易失性数字存储器中。

5. 发明授权

US07906887B2 Microsystem and method for positioning a second element with respect to a first element in a microsystem 有权
标题翻译：用于相对于微系统中的第一元件定位第二元件的微系统和方法
公开(公告)号：US07906887B2
公开(公告)日：2011-03-15
申请号：US11577331
申请日：2005-09-29
申请人： Bernd Gotsmann , Michel Despont , Urs T. Duerig
发明人： Bernd Gotsmann , Michel Despont , Urs T. Duerig
IPC分类号： H02N10/00
CPC分类号： B81B3/0018 , F03G7/06 , F03G7/065 , H01H2037/008
摘要： A microsystem, comprising a first static element (1), a second, movable and unattached element (2), an actuator (3) for effecting a force between the first and the second element (1, 2), which actuator (3) is designed for controlling a temperature (T1, T2) of one of the first element (1) and the second element (2). A corresponding method for positioning a second element (2) with respect to a first element (1) in a microsystem is introduced.
摘要翻译：一种微系统，包括第一静态元件（1），第二可移动和未附接元件（2），用于在第一和第二元件（1,2）之间产生力的致动器（3），该致动器（3）被设计用于控制第一元件（1）和第二元件（2）之一的温度（T1，T2）。引入了相对于在微系统中相对于第一元件（1）定位第二元件（2）的方法。

6. 发明授权

US07749793B2 Method for fabricating lateral-moving micromachined thermal bimorph 有权
标题翻译：制造横向移动微机械加热双压电晶片的方法
公开(公告)号：US07749793B2
公开(公告)日：2010-07-06
申请号：US12357826
申请日：2009-01-22
申请人： Robert Faye Elliott , Philip John Reiner
发明人： Robert Faye Elliott , Philip John Reiner
IPC分类号： H01L21/302
CPC分类号： H01H37/52 , B81B3/0078 , B81B2201/032 , B81B2203/056 , H01H2001/0047 , H01H2037/008 , H01H2300/032
摘要： A method of making a Lateral-Moving Micromachined Thermal Bimorph which provides the capability of achieving in-plane thermally-induced motion on a microchip, as opposed to the much more common out-of-plane, or vertical, motion seen in many devices. The present invention employs a novel fabrication process to allow the fabrication of a lateral bimorph in a fundamentally planar set of processes. In addition, the invention incorporates special design features that allow the bimorph to maintain material interfaces.
摘要翻译：一种制造横向移动微机械加热双压电晶片的方法，其提供了在微芯片上实现面内热感应运动的能力，而不是在许多器件中看到的更常见的平面外或垂直运动。本发明采用新颖的制造工艺，以允许在基本平面的工艺集合中制造横向双压电晶片。此外，本发明还包含允许双压电晶体保持材料界面的特殊设计特征。

7. 发明申请

US20070215448A1 MEMS thermal device with slideably engaged tether and method of manufacture 有权
标题翻译：具有可滑动接合系绳的MEMS热敏装置及其制造方法
公开(公告)号：US20070215448A1
公开(公告)日：2007-09-20
申请号：US11378340
申请日：2006-03-20
申请人： Alok Paranjpye , Jeffery Summers
发明人： Alok Paranjpye , Jeffery Summers
IPC分类号： H01H1/00 , H01H11/00
CPC分类号： B81B3/0024 , B81B2201/018 , B81B2201/0278 , H01H2037/008 , H01H2061/008 , Y10T29/49105 , Y10T29/49147 , Y10T29/49204 , Y10T29/53248
摘要： A MEMS thermal switch is disclosed which couples a hot, expanding beam to a cool flexor beam using a slideably engaged tether, and bends the cool, flexor beam by the expansion of the hot beam. A rigidly engaged tether ties the distal ends of the hot, expanding beam and the cool, flexor beam together, whereas the slideably engaged tether allows the hot, expanding beam to elongate with respect to the cool, flexor beam, without loading the slideably engaged tether with a large shear force. As a result, the material of the tether can be made stiffer, and therefore transmit the bending force of the hot, expanding beam more efficiently to the cool, flexor beam.
摘要翻译：公开了一种MEMS热开关，其使用可滑动接合的系绳将热膨胀梁耦合到冷弯头梁，并且通过热梁的膨胀来弯曲冷弯曲梁。刚性接合的系绳将热的，扩张的梁和冷的弯曲梁的远端连接在一起，而可滑动地接合的系绳允许热的，膨胀的梁相对于冷的屈肌梁而伸长，而不加载可滑动地接合的系绳具有很大的剪切力。结果，系链的材料可以变得更硬，并且因此将热膨胀梁的弯曲力更有效地传递到凉爽的弯曲梁。

8. 发明申请

US20060021864A1 Miniaturised relay and corresponding uses thereof 失效
标题翻译：小型继电器及其相应应用
公开(公告)号：US20060021864A1
公开(公告)日：2006-02-02
申请号：US10534736
申请日：2003-11-18
申请人： Josep Montanya Silvestre
发明人： Josep Montanya Silvestre
IPC分类号： H01H57/00
CPC分类号： G01C19/5755 , G01C19/5726 , G01P15/093 , G01P15/131 , H01H35/02 , H01H35/14 , H01H35/24 , H01H36/00 , H01H59/0009 , H01H2036/0093 , H01H2037/008
摘要： A miniaturized relay having a first zone facing a second zone, a first condenser plate, a second condenser plate arranged in the second zone, and smaller than or equal to the first plate, an intermediate space between both zones, a conductive element arranged in the intermediate space and which is mechanically independent from the adjacent walls and can move freely across the intermediate space depending on voltages present between both plates, contact points of an electric circuit, in which the conductive element closes the electric circuit by making contact with the contact points. Such relays can be used, for example, as: accelerometers, accelerometers in airbags, tiltmeters, Coriolis force detectors, microphones, in acoustic applications, pressure sensors, flow sensors, temperature sensors, gas sensors and magnetic field sensors.
摘要翻译：一种小型化继电器，具有面向第二区域的第一区域，第一电容器板，布置在第二区域中的第二电容器板，小于或等于第一板，两个区域之间的中间空间，布置在第二区域中的导电元件中间空间，其机械地独立于相邻的壁并且可以根据存在于两个板之间的电压自由移动，电路的接触点，其中导电元件通过与接触点接触而闭合电路。这种继电器可用于例如：加速度计，安全气囊中的加速度计，倾斜仪，科里奥利力检测器，麦克风，声学应用，压力传感器，流量传感器，温度传感器，气体传感器和磁场传感器。

9. 发明申请

US20030034870A1 Snap action thermal switch 有权
标题翻译：快动开关
公开(公告)号：US20030034870A1
公开(公告)日：2003-02-20
申请号：US10223943
申请日：2002-08-20
申请人： Honeywell International, Inc.
发明人： Stephen F. Becka , George D. Davis
IPC分类号： H01H071/16
CPC分类号： H01H1/0036 , H01H1/20 , H01H37/46 , H01H2001/0084 , H01H2037/008
摘要： A simplified snap-action micromachined thermal switch having a bimodal thermal actuator fabricated from non-ductile materials such as silicon, glass, silicon oxide, tungsten, and other suitable materials using MEMS techniques.
摘要翻译：具有由非延性材料如硅，玻璃，氧化硅，钨以及使用MEMS技术的其它合适材料制成的双峰型热致动器的简化的快动式微加工热开关。

10. 发明授权

US06396382B1 Thermally actuated control device 失效
标题翻译：热控制装置
公开(公告)号：US06396382B1
公开(公告)日：2002-05-28
申请号：US09393145
申请日：1999-09-10
申请人： Steven J. Ross
发明人： Steven J. Ross
IPC分类号： H01H3748
CPC分类号： H01H1/0036 , H01H37/48 , H01H2037/008
摘要： A micro miniature solid state mechanical switch device operated by thermal energy for the control of thermal and electrical energy is shown. A gap in an energy path is bridged by an energy conductor that is mechanically moved into and out of operative position with the gap in the energy path.
摘要翻译：显示了用于控制热能和电能的由热能操作的微型微型固态机械开关装置。能量路径中的间隙由能量导体桥接，能量导体机械地移动到能量路径中与间隙的操作位置和离开操作位置。

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