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1. 发明授权

US09165734B2 Electro-mechanical actuator device and apparatus incorporating such device 有权
标题翻译：机电致动器装置和装有这种装置的装置
公开(公告)号：US09165734B2
公开(公告)日：2015-10-20
申请号：US12302220
申请日：2007-05-23
申请人： David Wood , Belen Pilar Solano Hermosilla , Mary Herbert
发明人： David Wood , Belen Pilar Solano Hermosilla , Mary Herbert
IPC分类号： H01H35/00 , H01H37/00 , H01H37/72 , H01H37/74 , F03G7/06 , H01H61/02 , H01H61/00
CPC分类号： H01H35/00 , F03G7/06 , H01H37/00 , H01H37/72 , H01H37/74 , H01H61/02 , H01H2061/008 , Y10T29/49155 , Y10T307/773 , Y10T307/786
摘要： A microgripper (2) comprises a pair of opposed actuator devices (4, 6) connected to an electronic control unit (8). Each actuator (4, 6) includes an actuator body 10 of transparent flexible epoxy based photoresist material forming a “hot” arm (12) and a “cold” arm (14) joined together at their ends, and an electrical heating element wire (18) is embedded in the “hot” arm (12). A gripper arm (32) extends from the substrate and has a gripping portion (34) such that the gripper portions of the two gripper arms (32) face each other. When electrical current is supplied to the heating element (18), electrical heating of the “hot” arm (12) occurs, as a result of which thermal expansion of the “hot” arm (12) causes its length to become greater than that of the “cold” arm (14). Because the “hot” and “cold” arms (12, 14) are joined together at their ends, the increased length of the “hot” arm (12) as a result of its thermal expansion causes the actuator bodies (10) to flex, as a result of which the gripper portions (34) of the gripper arms (32) move closer together.
摘要翻译：微型夹具（2）包括连接到电子控制单元（8）的一对相对的致动器装置（4,6）。每个致动器（4,6）包括形成透明柔性环氧基光致抗蚀剂材料的致动器本体10，其形成在其端部处接合在一起的“热”臂（12）和“冷”臂（14），以及电加热元件线 18）嵌入在“热”臂（12）中。夹持臂（32）从基板延伸并具有抓握部分（34），使得两个夹持臂（32）的夹持部分彼此面对。当向加热元件（18）提供电流时，发生“热”臂（12）的电加热，由此“热”臂（12）的热膨胀导致其长度变大的“冷”手臂（14）。由于“热”和“冷”臂（12,14）在其端部连接在一起，所以由于其热膨胀而导致的“热”臂（12）的增加的长度导致致动器主体（10）弯曲其结果是，夹持臂（32）的夹持部分（34）更靠近在一起。

2. 发明申请

US20110012705A1 MEMS ACTUATORS WITH STRESS RELEASING DESIGN 有权
标题翻译：具有应力释放设计的MEMS执行器
公开(公告)号：US20110012705A1
公开(公告)日：2011-01-20
申请号：US12839708
申请日：2010-07-20
申请人： Stéphane Ménard , Nicolas Gonon
发明人： Stéphane Ménard , Nicolas Gonon
IPC分类号： H01H37/46 , H01H37/04
CPC分类号： H01H61/04 , F03G7/06 , H01H2001/0078 , H01H2061/006 , H01H2061/008
摘要： The micro-electromechanical (MEMS) actuator comprises a hot arm member and a cold arm member. The cold arm member comprises at least two longitudinally spaced-apart flexors. The actuators may also be constructed with at least one among the hot arm member and the cold arm member comprising at least one spring section. The stress in this improved MEMS actuator is more uniformly distributed, thereby reducing the mechanical creep and improving its reliability as well as its operation life.
摘要翻译：微机电（MEMS）致动器包括热臂构件和冷臂构件。冷臂构件包括至少两个纵向间隔开的屈曲部。致动器还可以构造为包括至少一个弹簧部分的热臂部件和冷臂部件中的至少一个。这种改进的MEMS致动器中的应力更均匀分布，从而减少机械蠕变，提高其可靠性及其使用寿命。

3. 发明授权

US07733200B2 MEMS actuator 有权
标题翻译： MEMS致动器
公开(公告)号：US07733200B2
公开(公告)日：2010-06-08
申请号：US11904949
申请日：2007-09-29
申请人： Vladimir Anatolyevich Aksyuk , Flavio Pardo , Maria Elina Simon
发明人： Vladimir Anatolyevich Aksyuk , Flavio Pardo , Maria Elina Simon
IPC分类号： H01H51/22
CPC分类号： H01H1/0036 , B81B3/0024 , B81B2201/031 , H01H2001/0078 , H01H2061/006 , H01H2061/008
摘要： Apparatus including substrate, pusher assembly, and flexor assembly adjacent to pusher assembly. Pusher assembly includes hot and cold pusher arms. First ends of hot and cold pusher arms are anchored over substrate. Second ends of hot and cold pusher arms are coupled together and suspended for lateral displacement over substrate. Flexor assembly includes flexor arm, and conductor having actuator contact. First end of flexor arm is anchored over substrate. Pusher assembly is configured for causing lateral displacement of second end of flexor arm and of actuator contact over the substrate. Method includes providing apparatus and causing pusher assembly to laterally displace second end of flexor arm and actuator contact over substrate.
摘要翻译：包括靠近推进器组件的基底，推动器组件和屈肌组件的装置。推动器组件包括冷热推杆。冷热推杆的第一端锚固在基板上。冷热推杆的第二端连接在一起并悬挂在基板上横向移位。弯曲组件包括屈肌臂和具有致动器接触的导体。屈肌臂的第一端锚固在基底上。推动器组件被构造成使得屈肌臂的第二端和致动器接触的横向位移在基底上。方法包括提供装置并使得推动器组件横向移动屈肌臂的第二端和致动器接触在基底上。

4. 发明申请

US20100020843A1 Thermal Bend Actuator Material Selection 失效
标题翻译：热弯曲致动器材料选择
公开(公告)号：US20100020843A1
公开(公告)日：2010-01-28
申请号：US12572080
申请日：2009-10-01
申请人： Gregory John McAvoy , Kia Silverbrook
发明人： Gregory John McAvoy , Kia Silverbrook
IPC分类号： G01N25/00
CPC分类号： B81C99/006 , B41J2/14427 , B81B3/0024 , B81B3/0035 , B81B2201/038 , F03G7/06 , F05C2203/0813 , F05C2203/083 , F05C2251/04 , F05C2251/044 , F05C2251/046 , H01H1/0036 , H01H2061/006 , H01H2061/008
摘要： A thermoelastic device comprising an expansive element is disclosed. The expansive element is formed from a material, which is preselected on the basis that it has one or more of the following properties: a resistivity between 0.1 μΩm and 10.0 μΩm; chemically inert in air; chemically inert in the chosen ink; and depositable by CVD, sputtering or other thin film deposition technique.
摘要翻译：公开了一种包括膨胀元件的热弹性装置。膨胀元件由材料形成，该材料基于其具有一个或多个以下性质来预先选择：电阻率在0.1Mmegam和10.0μmOgamam之间; 在空气中化学惰性; 在所选择的油墨中化学惰性; 并通过CVD，溅射或其它薄膜沉积技术沉积。

5. 发明申请

US20090212658A1 MICRO--ELECTROMECHANICAL ACTUATOR WITH SPACER SEPARATED LAYERS 审中-公开
标题翻译：微型机电执行器与间隔分层
公开(公告)号：US20090212658A1
公开(公告)日：2009-08-27
申请号：US12435359
申请日：2009-05-04
申请人： Gregory John McAvoy , Kia Silverbrook
发明人： Gregory John McAvoy , Kia Silverbrook
IPC分类号： H02N10/00
CPC分类号： B81C99/006 , B41J2/14427 , B81B3/0024 , B81B3/0035 , B81B2201/038 , F03G7/06 , F05C2203/0813 , F05C2203/083 , F05C2251/04 , F05C2251/044 , F05C2251/046 , H01H1/0036 , H01H2061/006 , H01H2061/008
摘要： A micro-electromechanical actuator comprising a pair of elongate layers of identical material heated by an electrical current; a pair of spacers separating the elongate layers at two opposite ends, the spacers fast with the layers; and an air gap provided between the pair of elongate layers. Each spacer is composed of a thermally non-conductive material.
摘要翻译：包括由电流加热的相同材料的一对细长层的微机电致动器; 一对间隔件，其在两个相对端分隔细长层，隔离物与层紧贴; 以及设置在所述一对细长层之间的气隙。每个间隔物由热不导电材料组成。

6. 发明申请

US20090181488A1 MEMS thermal actuator and method of manufacture 失效
公开(公告)号：US20090181488A1
公开(公告)日：2009-07-16
申请号：US12382142
申请日：2009-03-10
申请人： Gregory A. Carlson , John S. Foster , Christopher S. Gudeman , Paul J. Rubel
发明人： Gregory A. Carlson , John S. Foster , Christopher S. Gudeman , Paul J. Rubel
IPC分类号： H01L21/306
CPC分类号： H01H1/0036 , H01H61/04 , H01H2001/0047 , H01H2001/0078 , H01H2061/006 , H01H2061/008
摘要： A separated MEMS thermal actuator is disclosed which is largely insensitive to creep in the cantilevered beams of the thermal actuator. In the separated MEMS thermal actuator, a inlaid cantilevered drive beam formed in the same plane, but separated from a passive beam by a small gap. Because the inlaid cantilevered drive beam and the passive beam are not directly coupled, any changes in the quiescent position of the inlaid cantilevered drive beam may not be transmitted to the passive beam, if the magnitude of the changes are less than the size of the gap.

7. 发明申请

US20090033454A1 MEMS actuators with even stress distribution 审中-公开
标题翻译：具有均匀应力分布的MEMS致动器
公开(公告)号：US20090033454A1
公开(公告)日：2009-02-05
申请号：US11882457
申请日：2007-08-01
申请人： Stephane Menard , Nicolas Gonon , Jean-Francois Saheb
发明人： Stephane Menard , Nicolas Gonon , Jean-Francois Saheb
IPC分类号： H01H37/00
CPC分类号： B81B3/0072 , B81B2201/014 , B81B2203/051 , H01H2061/008
摘要： The micro-electromechanical (MEMS) switch comprises a first double-sided cantilever MEMS actuator attached to a substrate and movable in two opposite directions, and a second cantilever MEMS actuator attached to the substrate. In use, the first MEMS actuator is moved in either directions to distribute the stress more uniformly, thereby reducing the mechanical creep and improving its reliability as well as its operation life.
摘要翻译：微机电（MEMS）开关包括附接到基板并可在两个相反方向上移动的第一双边悬臂MEMS致动器和附接到基板的第二悬臂MEMS致动器。在使用中，第一MEMS致动器在任一方向上移动以更均匀地分布应力，从而减少机械蠕变并提高其可靠性以及其使用寿命。

8. 发明申请

US20060214761A1 Micro-electromechanical actuator 失效
公开(公告)号：US20060214761A1
公开(公告)日：2006-09-28
申请号：US11442180
申请日：2006-05-30
申请人： Gregory McAvoy , Kia Silverbrook
发明人： Gregory McAvoy , Kia Silverbrook
IPC分类号： H01H37/52 , H01H37/46
CPC分类号： B81C99/006 , B41J2/14427 , B81B3/0024 , B81B3/0035 , B81B2201/038 , F03G7/06 , F05C2203/0813 , F05C2203/083 , F05C2251/04 , F05C2251/044 , F05C2251/046 , H01H1/0036 , H01H2061/006 , H01H2061/008
摘要： A micro-electromechanical actuator includes a pair of elongate layers capable of being heated with an electrical current to thermally expand and to perform work. A pair of spacers separates the elongate layers from each other. The spacers are arranged at respective opposite ends of the elongate layers and are fast with the layers so that the actuator is deflected when one of the layers is heated.

9. 发明申请

US20050146404A1 Microengineered self-releasing switch 审中-公开
标题翻译：微型自动释放开关
公开(公告)号：US20050146404A1
公开(公告)日：2005-07-07
申请号：US10510511
申请日：2003-04-04
申请人： Eric Yeatman
发明人： Eric Yeatman
IPC分类号： H01H1/00 , H01H61/02 , H01H71/14 , H01H51/22
CPC分类号： H01H71/14 , H01H1/0036 , H01H61/02 , H01H2001/0047 , H01H2061/006 , H01H2061/008
摘要： A MEMS (microelectromechanical system) electrical switch device is provided for circuit protection applications. The device includes a mechanical latching mechanism by which the switch is held in the closed position, and a mechanism by which this latch is released when the load current passing through the device reaches or exceeds some desired magnitude. In addition, a mechanism is provided by which the switch may be reset to its closed position by applying an electrical control voltage to certain terminals of the device. A number of these devices, or arrays of these devices, can be fabricated by parallel processes on a single substrate, and photolithography can be employed to define the mechanical structures described above. Other embodiments include additional electrical isolation of the resetting mechanism, enhancement of the separation distance of the contact points of the switch in the open position, and prevention of arcing at the latch mechanism. A method of fabricating the device is provided. A method of using the aforementioned device is also provided.
摘要翻译：提供了用于电路保护应用的MEMS（微机电系统）电开关装置。该装置包括机械闭锁机构，开关保持在关闭位置，并且当通过该装置的负载电流达到或超过某一所需大小时，该闩锁被释放的机构。此外，提供了一种机构，通过该机构，可以通过向设备的某些端子施加电气控制电压来将开关复位到其关闭位置。这些器件的这些器件或这些器件的阵列可以通过在单个衬底上的并行工艺制造，并且可以使用光刻来定义上述机械结构。其他实施例包括复位机构的附加电隔离，增强开关在接通位置的接触点的间隔距离，以及防止闩锁机构处的电弧。提供了一种制造该器件的方法。还提供了使用上述装置的方法。

10. 发明申请

US20040261412A1 Thermal actuator 有权
标题翻译：热致动器
公开(公告)号：US20040261412A1
公开(公告)日：2004-12-30
申请号：US10819457
申请日：2004-04-07
申请人： Bookham Technology PLC
发明人： Ryan Murray Hickey
IPC分类号： G11B005/56 , G11B021/24
CPC分类号： B81B3/004 , B81B3/0024 , B81B2201/047 , B81B2203/0118 , B81B2203/033 , B81B2203/058 , G02B26/0866 , H01H2061/008
摘要： An asymmetric MEMS thermal actuator device includes a base portion, typically a pair of bond pads, and an actuator element connected to the base portion by a flexure portion. The actuator element has a first arm and a second arm alongside the first arm and spaced from the first arm. The second arm is wider than the first arm so that the actuator element deflects about the flexure element due to differential heating in the first and second arms when an electrical current is passed therethrough. A cut-out portion is provided in the second arm adjacent the first arm so as to increase the spacing therefrom over at least a portion of the second arm. Preferably, a heat sink is also provided laterally adjacent the second arm.
摘要翻译：非对称MEMS热致动器装置包括基部，通常为一对接合焊盘，以及通过挠曲部分连接到基部的致动器元件。致动器元件具有与第一臂并排并与第一臂间隔开的第一臂和第二臂。第二臂比第一臂宽，使得当电流通过其中时，由于第一和第二臂中的差加热，致动器元件围绕挠曲元件偏转。切割部分设置在邻近第一臂的第二臂中，以便在第二臂的至少一部分上增加其间隔。优选地，散热器还横向设置在第二臂的附近。

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