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    • 5. 发明授权
    • Vacuum-coated compound body and process for its production
    • 真空镀膜复合体及其生产工艺
    • US5693417A
    • 1997-12-02
    • US445523
    • 1995-05-22
    • Klaus GoedickeGunter HotzschFred FietzkeOlaf ZywitzkiSiegfried SchillerJonathan ReschkeWolfgang Hempel
    • Klaus GoedickeGunter HotzschFred FietzkeOlaf ZywitzkiSiegfried SchillerJonathan ReschkeWolfgang Hempel
    • C23C14/00C23C14/08C23C8/00
    • C23C14/081C23C14/0036Y10T428/24975Y10T428/265
    • Vacuum coated compound body and a process for its production. Such compound bodies, when coated in a known manner, have a carrier of a metal or of an alloy, a layer that is thermally, mechanically and chemically unstable, with their surface showing cracks and being partially porous. These shortcomings are overcome via an improved eco-friendly vacuum deposition process wherein at least one layer of a material having an outer layer is of Al.sub.2 O.sub.3, is applied to the metal or alloy carrier at a maximum of 700.degree. C., with this layer being completely crystalline and comprised of an .alpha.Al.sub.2 O.sub.3 phase and possibly of a .gamma.Al.sub.2 O.sub.3 phase with a (440) texture, having a compressive stress of at least 1 Gpa and a hardness of at least 20 Gpa, with the Al.sub.2 O.sub.3 layer being deposited via reactive magnetron sputtering, wherein the magnetrons are pulse powered, the pulse frequency lies between 20 and 100 Khz, and the deposition rate is at least 1 nm/s, with the compound bodies being utilized for cutting treatments, particularly as drills, milling cutters, reamers, broaches or saw blades.
    • 真空涂层复合体及其生产工艺。 当以已知的方式涂覆时,这种复合体具有金属或合金的载体,即热,机械和化学不稳定的层,其表面显示出裂纹并且是部分多孔的。 通过改进的环保真空沉积工艺克服了这些缺点,其中至少一层具有外层的材料为Al 2 O 3,最多在700℃下施加到金属或合金载体上,该层为 完全结晶并且由αAl 2 O 3相和可能具有(440)织构的γAl 2 O 3相组成,具有至少1Gpa的压缩应力和至少20Gpa的硬度,其中Al 2 O 3层通过反应磁控管沉积 溅射,其中磁控管是脉冲供电的,脉冲频率在20和100KHz之间,并且沉积速率为至少1nm / s,复合体用于切割处理,特别是作为钻头,铣刀,铰刀, 拉刀或锯片。