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    • 5. 发明申请
    • ACOUSTIC WAVE DEVICE AND METHOD OF MANUFACTURING THE SAME
    • 声波装置及其制造方法
    • US20090175470A1
    • 2009-07-09
    • US12349265
    • 2009-01-06
    • Shunichi AikawaMasayuki KitajimaKeiji Tsuda
    • Shunichi AikawaMasayuki KitajimaKeiji Tsuda
    • H04R25/00H04R31/00
    • H04R31/00H01L2224/11H04R17/00H04R2499/11Y10T29/49005
    • An acoustic wave device includes a substrate; an acoustic wave element provided on the substrate; a terminal that is provided on the substrate and is electrically coupled to the acoustic wave element; a first insulating layer that is provided on the substrate and has a first opening at a region thereof overlapped with at least a part of the terminal; a second insulating layer that has an second opening at a region thereof overlapped with at least a part of the first opening and is provided on the first insulating layer and the acoustic wave element so that a cavity is formed above the acoustic wave element; a third insulating layer that has a third opening including the region where the first opening and the second opening are overlapped with each other, and is provided on the second insulating layer; a metal post that is electrically coupled to the terminal and is provided in the first opening, the second opening and the third opening; and a solder ball provided on the metal post.
    • 声波装置包括:基板; 设置在基板上的声波元件; 设置在所述基板上并且电耦合到所述声波元件的端子; 第一绝缘层,其设置在所述基板上,并且在其与所述端子的至少一部分重叠的区域具有第一开口; 第二绝缘层,其在与第一开口的至少一部分重叠的区域处具有第二开口,并且设置在第一绝缘层和声波元件上,使得在声波元件上形成空腔; 第三绝缘层,其具有包括第一开口和第二开口彼此重叠的区域的第三开口,并且设置在第二绝缘层上; 电连接到端子并设置在第一开口,第二开口和第三开口中的金属柱; 以及设置在金属柱上的焊球。