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    • 9. 发明授权
    • Method of assembling micro-actuator
    • 组合微致动器的方法
    • US06467141B2
    • 2002-10-22
    • US09820553
    • 2001-03-29
    • Toru OkadaKenji IketakiHidehiko KobayashiYutaka NodaMasayuki KitajimaSeiichi ShimouraMasakazu TakesueKeiichi YamamotoHisao TanakaMasanao Fujii
    • Toru OkadaKenji IketakiHidehiko KobayashiYutaka NodaMasayuki KitajimaSeiichi ShimouraMasakazu TakesueKeiichi YamamotoHisao TanakaMasanao Fujii
    • H04R1710
    • G11B5/5552H01L41/313Y10T29/42Y10T29/49025Y10T29/49055
    • A method of assembling a micro-actuator is provided in which a base frame having a plurality of actuator bases is placed on a stage, a first adhesive is applied to each of the actuator bases, and a base electrode frame having a plurality of base electrodes is placed on the first adhesive. The first adhesive is semi-cured by heating and pressing. A second adhesive is applied to each of the base electrodes, and a plurality of piezoelectric elements are placed on the second adhesive. The second adhesive is semi-cured by heating and pressing. A third adhesive is,applied to the piezoelectric elements, and a movable electrode frame having a plurality of movable electrodes is placed on the third adhesive. The third adhesive is semi-cured by heating and pressing. Next, a fourth adhesive is applied to each of the movable electrodes, and a hinge plate frame having a plurality of hinge plates is placed on the fourth adhesive. The fourth adhesive is semi-cured by heating and pressing. Finally, the adhered laminate thus obtained is placed in a heating furnace, and is heated at a predetermined temperature for a predetermined period of time, whereby each of the adhesives is fully cured.
    • 提供了一种组装微致动器的方法,其中具有多个致动器基座的基架被放置在台架上,第一粘合剂被施加到每个致动器基座,以及具有多个基极的基极框架 被放置在第一粘合剂上。 第一粘合剂通过加热和压制半固化。 将第二粘合剂施加到每个基底电极上,并且将多个压电元件放置在第二粘合剂上。 第二粘合剂通过加热和压制半固化。 将第三粘合剂施加到压电元件,并且具有多个可移动电极的可动电极框架放置在第三粘合剂上。 第三粘合剂通过加热和压制半固化。 接下来,将第四粘合剂施加到每个可移动电极,并且具有多个铰链板的铰链板框架放置在第四粘合剂上。 第四粘合剂通过加热和加压半固化。 最后,将如此获得的粘合层压材料放置在加热炉中,并在预定温度下加热预定的时间,从而使各种粘合剂完全固化。