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1. 发明申请

US20130205454A1 SCANNING PROBE MICROSCOPE 有权
标题翻译：扫描探针显微镜
公开(公告)号：US20130205454A1
公开(公告)日：2013-08-08
申请号：US13726764
申请日：2012-12-26
申请人： Shuichi BABA , Masahiro WATANABE , Toshihiko NAKATA , Yukio KEMBO , Toru KURENUMA , Takafumi MORIMOTO , Manabu EDAMURA , Satoshi SEKINO
发明人： Shuichi BABA , Masahiro WATANABE , Toshihiko NAKATA , Yukio KEMBO , Toru KURENUMA , Takafumi MORIMOTO , Manabu EDAMURA , Satoshi SEKINO
IPC分类号： G01Q10/00
CPC分类号： G01Q10/00 , B82Y35/00 , G01Q60/28 , G01Q60/34
摘要： In the case of measuring a pattern having a steep side wall, a probe adheres to the side wall by the van der Waals forces acting between the probe and the side wall when approaching the pattern side wall, and an error occurs in a measured profile of the side wall portion. When a pattern having a groove width almost equal to a probe diameter is measured, the probe adheres to both side walls, the probe cannot reach the groove bottom, and the groove depth cannot be measured. When the probe adheres to a pattern side wall in measurements of a microscopic high-aspect ratio pattern using an elongated probe, the probe is caused to reach the side wall bottom by detecting the adhesion of the probe to the pattern side wall, and temporarily increasing a contact force between the probe and the sample. Also, by obtaining the data of the amount of torsion of a cantilever with the shape data of the pattern, a profile error of the side wall portion by the adhesion is corrected by the obtained data of the amount of torsion.
摘要翻译：在测量具有陡峭侧壁的图案的情况下，当接近图案侧壁时，探针通过作用在探针和侧壁之间的范德华力附着在侧壁上，并且在测量的轮廓中发生错误侧壁部分。当测量具有几乎等于探针直径的槽宽度的图案时，探针粘附到两个侧壁，探针不能到达凹槽底部，并且不能测量凹槽深度。当使用细长的探针测量微观高纵横比图案时探头粘附到图案侧壁上时，通过检测探针与图案侧壁的粘附力使探针到达侧壁底部，并暂时增加探针和样品之间的接触力。此外，通过利用图案的形状数据获得悬臂的扭转量的数据，通过获得的扭转量的数据来校正侧壁部分的粘附的轮廓误差。

2. 发明申请

US20080257024A1 SCANNING PROBE MICROSCOPE 有权
标题翻译：扫描探针显微镜
公开(公告)号：US20080257024A1
公开(公告)日：2008-10-23
申请号：US12099176
申请日：2008-04-08
申请人： Masahiro WATANABE , Shuichi Baba , Toshihiko Nakata
发明人： Masahiro WATANABE , Shuichi Baba , Toshihiko Nakata
IPC分类号： G01B5/28
CPC分类号： G01Q70/04 , G01Q10/06
摘要： The invention provides a scanning probe microscope capable of performing highly accurate three-dimensional profile measurement in a state in which no sliding of the probe or deformation of the sample substantially occurs. The present invention realizes a highly accurate three-dimensional profile measurement using a scanning probe microscope, in which the method performs measurement to obtain an accurate three-dimensional profile without causing damage to the sample by having the probe contact the sample at the measurement point and then move to a next measurement point, wherein the probe is pulled up and retracted temporarily and then moved to the next measurement point where it is approximated to the sample again, the method comprises analyzing the signals of the contact force sensor so as to obtain the height of the probe at the time when the probe contacts the sample with zero contact force, so as to substantially eliminate errors caused by sliding of the probe and deformation of the sample caused by minute contact force.
摘要翻译：本发明提供一种扫描探针显微镜，其能够在不发生探针滑动或样品变形的状态下进行高精度的三维轮廓测量。本发明使用扫描探针显微镜实现高精度的三维轮廓测量，其中该方法进行测量以获得准确的三维轮廓，而不会通过使探针在测量点处接触样品而使样品受损，并且然后移动到下一个测量点，其中探针被暂时拉起和缩回，然后移动到下一个测量点，在该测量点近似于样品，该方法包括分析接触力传感器的信号，以获得当探针以零接触力与样品接触时，探针的高度，从而基本上消除了探针的滑动和由微小的接触力导致的样品变形所引起的误差。

3. 发明申请

US20110055982A1 A SCANNING PROBE MICROSCOPE AND A MEASURING METHOD USING THE SAME 有权
标题翻译：扫描探针显微镜和使用其的测量方法
公开(公告)号：US20110055982A1
公开(公告)日：2011-03-03
申请号：US12828590
申请日：2010-07-01
申请人： Masahiro WATANABE , Shuichi Baba , Toshihiko Nakata
发明人： Masahiro WATANABE , Shuichi Baba , Toshihiko Nakata
IPC分类号： G01Q10/02 , G01Q10/00 , G01Q10/04
CPC分类号： G01Q10/02 , G01Q10/04
摘要： It is difficult for a scanning probe microscope according to the conventional technology to operate a probe for scanning and positioning in a wide range and for high-precision scanning in a narrow range. A scanning probe microscope according to the invention uses probe driving actuators for coarse adjustment and fine adjustment. For scanning and positioning in a wide range, the coarse adjustment actuator is switched to fast responsiveness. For scanning in a narrow range, the coarse adjustment actuator is switched to slow responsiveness. Instead, positional noise is reduced and the fine adjustment actuator is mainly used for scanning in a narrow range. The probe is capable of not only scanning and positioning in a wide range but also high-precision scanning in a narrow range.
摘要翻译：根据传统技术的扫描探针显微镜难以在宽范围内操作用于扫描和定位的探针并且在窄范围内进行高精度扫描。根据本发明的扫描探针显微镜使用探头驱动致动器进行粗调和微调。对于广泛的扫描和定位，粗调执行器切换到快速响应。为了在窄范围内进行扫描，粗调调节执行器被切换为响应速度慢。相反，位置噪声减小，微调致动器主要用于窄范围的扫描。该探头不仅可以在很宽的范围内进行扫描和定位，还可以在窄范围内进行高精度扫描。

4. 发明申请

US20100259751A1 DEFECTS INSPECTING APPARATUS AND DEFECTS INSPECTING METHOD 有权
标题翻译：缺陷检查装置和缺陷检查方法
公开(公告)号：US20100259751A1
公开(公告)日：2010-10-14
申请号：US12823510
申请日：2010-06-25
申请人： Sachio UTO , Minori NOGUCHI , Hidetoshi NISHIYAMA , Yoshimasa OHSHIMA , Akira HAMAMATSU , Takahiro JINGU , Toshihiko NAKATA , Masahiro WATANABE
发明人： Sachio UTO , Minori NOGUCHI , Hidetoshi NISHIYAMA , Yoshimasa OHSHIMA , Akira HAMAMATSU , Takahiro JINGU , Toshihiko NAKATA , Masahiro WATANABE
IPC分类号： G01N21/00
CPC分类号： G01N21/00 , G01N21/9501 , G06T7/0004 , G06T2207/30148
摘要： An inspecting apparatus and method including first and second illuminating units for illuminating a surface of a specimen to be inspected with different incident angles and first and second detecting optical units arranged at different elevation angle directions to the surface of the specimen for detecting images of the specimen illuminated by the first and second illuminating units.
摘要翻译：一种检查装置和方法，包括：第一和第二照明单元，用于以不同的入射角照射待检查样本的表面;以及第一和第二检测光学单元，其以不同的仰角方向布置在样本的表面上，用于检测样本的图像由第一和第二照明单元照亮。

5. 发明申请

US20130145507A1 SCANNING PROBE MICROSCOPE AND SAMPLE OBSERVING METHOD USING THE SAME 有权
标题翻译：扫描探针显微镜和使用其的样品观察方法
公开(公告)号：US20130145507A1
公开(公告)日：2013-06-06
申请号：US13586754
申请日：2012-08-15
申请人： Toshihiko NAKATA , Masahiro WATANABE , Takashi INOUE , Kishio HIDAKA , Motoyuki HIROOKA
发明人： Toshihiko NAKATA , Masahiro WATANABE , Takashi INOUE , Kishio HIDAKA , Motoyuki HIROOKA
IPC分类号： G01Q60/18
CPC分类号： G01Q60/18 , G01Q60/22
摘要： In a near-field scanning microscope using an aperture probe, the upper limit of the aperture formation is at most several ten nm in practice. In a near-field scanning microscope using a scatter probe, the resolution ability is limited to at most several ten nm because of the external illuminating light serving as background noise. Moreover, measurement reproducibility is seriously lowered by a damage or abrasion of a probe. Optical data and unevenness data of the surface of a sample can be measured at a nm-order resolution ability and a high reproducibility while damaging neither the probe nor the sample by fabricating a plasmon-enhanced near-field probe having a nm-order optical resolution ability by combining a nm-order cylindrical structure with nm-order microparticles and repeatedly moving the probe toward the sample and away therefrom at a low contact force at individual measurement points on the sample.
摘要翻译：在使用孔径探针的近场扫描显微镜中，实际上孔径形成的上限为至多几十nm。在使用散射探针的近场扫描显微镜中，由于外部照明光作为背景噪声，分辨能力被限制在至多几十nm。此外，通过探针的损伤或磨损，测量再现性被严重降低。可以以nm级分辨能力和高再现性测量样品表面的光学数据和不均匀性数据，同时通过制造具有nm级光学分辨率的等离子体增强近场探针而不损害探针和样品通过将nm级圆柱形结构与nm级微粒组合，并在样品上的各个测量点处以低接触力将探针重复地移动到样品并从中离开它们的能力。

6. 发明申请

US20130048978A1 SEMICONDUCTOR DEVICE AND METHOD FOR MANUFACTURING THE SAME 有权
标题翻译：半导体器件及其制造方法
公开(公告)号：US20130048978A1
公开(公告)日：2013-02-28
申请号：US13592942
申请日：2012-08-23
申请人： Masahiro WATANABE , Mitsuo MASHIYAMA , Takuya HANDA , Kenichi OKAZAKI , Shunpei YAMAZAKI
发明人： Masahiro WATANABE , Mitsuo MASHIYAMA , Takuya HANDA , Kenichi OKAZAKI , Shunpei YAMAZAKI
IPC分类号： H01L29/22
CPC分类号： H01L29/7869 , H01L29/4908 , H01L29/66742 , H01L29/78696
摘要： Provided is a semiconductor device including an oxide semiconductor and having stable electrical characteristics. Specifically, a semiconductor device including an oxide semiconductor and including a gate insulating film with favorable characteristics is provided. Further, a method for manufacturing the semiconductor device is provided. The semiconductor device includes a gate electrode, a gate insulating film over the gate electrode, an oxide semiconductor film over the gate insulating film, and a source electrode and a drain electrode in contact with the oxide semiconductor film. The gate insulating film includes at least a silicon oxynitride film and an oxygen release type oxide film which is formed over the silicon oxynitride film. The oxide semiconductor film is formed on and in contact with the oxygen release type oxide film.
摘要翻译：提供了包括氧化物半导体并且具有稳定的电特性的半导体器件。具体地，提供了包括氧化物半导体并且包括具有有利特性的栅极绝缘膜的半导体器件。此外，提供了一种用于制造半导体器件的方法。半导体器件包括栅电极，栅电极上的栅极绝缘膜，栅极绝缘膜上的氧化物半导体膜，以及与氧化物半导体膜接触的源电极和漏电极。栅极绝缘膜至少包括形成在氧氮化硅膜上的氮氧化硅膜和氧释放型氧化物膜。氧化物半导体膜与氧释放型氧化物膜形成并接触。

7. 发明申请

US20070269101A1 PATTERN INSPECTION METHOD AND APPARATUS 有权
标题翻译：模式检验方法和装置
公开(公告)号：US20070269101A1
公开(公告)日：2007-11-22
申请号：US11782274
申请日：2007-07-24
申请人： Takashi HIROI , Masahiro WATANABE , Chie SHISHIDO , Aritoshi SUGIMOTO , Maki TANAKA , Hiroshi MIYAI , Asahiro KUNI , Yasuhiko NARA
发明人： Takashi HIROI , Masahiro WATANABE , Chie SHISHIDO , Aritoshi SUGIMOTO , Maki TANAKA , Hiroshi MIYAI , Asahiro KUNI , Yasuhiko NARA
IPC分类号： G06K9/00
CPC分类号： G01N21/9501 , G01N21/956 , G01N2021/8854 , G01N2021/8861 , G01N2021/8864 , G01R31/311 , G03F1/86 , G06T1/0007 , G06T7/0002 , G06T7/001 , G06T2200/24 , G06T2207/10061 , G06T2207/30148 , H01J37/222 , H01J37/265 , H01J37/28 , H01J2237/221 , H01J2237/24592 , H01J2237/28
摘要： A pattern inspection apparatus including: an image detecting part for detecting a digital image of an object substrate; a display having a screen on which the digital image of the object substrate and/or a distribution of defect candidates in a map form are displayable; an input device for inputting information of a non-inspection region to be masked on the object substrate by defining a region on the screen on which said distribution of defect candidates is displayed in a map form; a memory part for storing coordinate data, pattern data or feature quantity data of the non-inspection region to be masked on the object substrate inputted on the screen by the input device; and a defect judging part in which the digital image detected by the image detecting part is examined in a state that a region matching with a condition stored in the memory part is masked and a defect is detected in a region other than said masked region.
摘要翻译：一种图案检查装置，包括：图像检测部，用于检测对象基板的数字图像; 具有可以显示对象基板的数字图像的屏幕和/或以地图形式的缺陷候选的分布的显示器; 输入装置，用于通过在屏幕上定义要以掩模形式显示所述缺陷候选的分布的区域来输入要被掩蔽在对象基板上的不检查区域的信息; 用于存储由输入装置输入到屏幕上的待掩蔽的待检查区域的坐标数据，图案数据或特征量数据的存储部分; 以及缺陷判断部分，其中在与存储在存储器部分中的条件匹配的区域被屏蔽并且在除了所述屏蔽区域之外的区域中检测到缺陷的状态下，检查由图像检测部分检测到的数字图像。

8. 发明申请

US20120063963A1 SELECTIVE CO METHANATION CATALYST, METHOD OF PRODUCING THE SAME, AND APPARATUS USING THE SAME 有权
标题翻译：选择性CO甲烷催化剂，其制备方法和使用它们的装置
公开(公告)号：US20120063963A1
公开(公告)日：2012-03-15
申请号：US13278990
申请日：2011-10-21
申请人： Masahiro WATANABE , Hisao YAMASHITA , Kazutoshi HIGASHIYAMA , Toshihiro MIYAO , Aihua CHEN
发明人： Masahiro WATANABE , Hisao YAMASHITA , Kazutoshi HIGASHIYAMA , Toshihiro MIYAO , Aihua CHEN
IPC分类号： B01J23/755 , B01J23/89 , B01J7/00
CPC分类号： H01M8/0668 , B01J23/40 , B01J23/755 , B01J35/006 , B01J35/04 , B01J35/08 , B01J35/1019 , B01J35/1061 , B01J37/036 , B01J37/349 , C01B3/38 , C01B3/48 , C01B3/586 , C01B2203/0233 , C01B2203/0238 , C01B2203/0244 , C01B2203/025 , C01B2203/0283 , C01B2203/0445 , C01B2203/047 , C01B2203/066 , C01B2203/1241 , C01B2203/1258 , Y02E60/50 , Y02P20/52 , Y02P70/56
摘要： Provided is a new catalyst capable of removing carbon monoxide economically without adding particular reaction gas externally. Also provided are a process for producing and an apparatus using such a catalyst. Impregnation of a Ni—Al composite oxide precursor of a nonstoichiometric composition prepared by the solution-spray plasma technique with a ruthenium salt to be supported and performing reduction treatment allows CO methanation reaction to selectively proceed even in the high-temperature range in which CO2 methanation reaction and reverse water-gas-shift reaction proceed preferentially with conventional catalysts. Selective CO methanation reaction occurs reproducibly with another Ni—Al composite oxide precursor or an additive metallic species. Also, the low-temperature activity of CO methanation reaction can be improved through steps different from conventional catalyst production processes in producing such a catalyst material, whereby the temperature window the resulting catalyst material has can be utilized most effectively.
摘要翻译：提供了能够经济地除去一氧化碳而不在外部添加特定反应气体的新型催化剂。还提供了一种生产方法和使用这种催化剂的装置。通过溶液喷射等离子体技术制备的非化学计量组合物的Ni-Al复合氧化物前体用待负载的钌盐进行还原处理，即使在CO 2甲烷化的高温范围内也可以选择性地进行CO甲烷化反应反应和反向水煤气变换反应优先用常规催化剂进行。选择性CO甲烷化反应与另一种Ni-Al复合氧化物前体或添加金属物质可再现发生。此外，通过与生产这种催化剂材料的常规催化剂制备方法不同的步骤，可以提高CO甲烷化反应的低温活性，由此可以最有效地利用所得催化剂材料具有的温度窗口。

9. 发明申请

US20110114347A1 HAND-HELD TOOL 有权
标题翻译：手持工具
公开(公告)号：US20110114347A1
公开(公告)日：2011-05-19
申请号：US12945190
申请日：2010-11-12
申请人： Yoshihiro KASUYA , Masanori FURUSAWA , Hajime TAKEUCHI , Masahiro WATANABE
发明人： Yoshihiro KASUYA , Masanori FURUSAWA , Hajime TAKEUCHI , Masahiro WATANABE
IPC分类号： B25D17/00 , B23Q15/00 , B23Q5/027
CPC分类号： B25D17/043 , B25D11/005 , B25D2211/068 , B25D2250/101 , B25D2250/201 , B25D2250/205 , B25D2250/221 , B25F5/00
摘要： An effective technique for detecting several load conditions different in presence or absence and magnitude of load applied to a tool bit is provided in a hand-held tool. A hand-held tool 101 performs a predetermined operation while pressing a tool bit 119 mounted in a front end region of a tool body 103 against a workpiece. A plurality of detecting sensors 161 of different kinds detect several load conditions different in presence or absence and magnitude of load applied to the tool bit 119. The hand-held tool 101 includes at least one of an indicating device 171 which indicates the load conditions based on a result detected by the detecting sensors 161, and a driving control device 135 which controls driving of the tool bit 119 based on the detected result.
摘要翻译：一种用于检测在施加到工具位上的负载存在或不存在和大小不同的多个负载条件的有效技术在手持工具中提供。手持工具101在将安装在工具主体103的前端区域中的工具头119压靠在工件上的同时进行预定的操作。多种不同种类的检测传感器161检测在施加到工具刀119的负载的存在或不存在和大小上不同的多个负载条件。手持工具101包括指示装置171中的至少一个，其指示基于负载条件根据检测传感器161检测到的结果，以及基于检测结果控制工具位119的驱动的驱动控制装置135。

10. 发明申请

US20090104911A1 COMMUNICATION CONTROL APPRATUS AND METHOD 有权
标题翻译：通信控制设备和方法
公开(公告)号：US20090104911A1
公开(公告)日：2009-04-23
申请号：US12253279
申请日：2008-10-17
申请人： Masahiro WATANABE , Makoto Yoshida
发明人： Masahiro WATANABE , Makoto Yoshida
IPC分类号： H04W36/00
CPC分类号： H04W36/30 , H04B7/15507 , H04W84/005 , H04W88/08
摘要： A communication control apparatus that is applied to a wireless communication system in which a mobile terminal can be connected to a fixed base station through a wireless connection to a relay station that is mounted on a moving body, wherein the communication control apparatus includes a detecting unit that detects a change, associated with movement of the moving body on which the relay station is mounted, of a communication environment between the mobile terminal and the relay station, a control unit that controls a handover of the mobile terminal according to the change, detected by the detecting unit, of communication environment between the mobile terminal and the relay station.
摘要翻译：一种应用于无线通信系统的通信控制装置，其中移动终端可以通过无线连接与固定基站连接到安装在移动体上的中继站，其中通信控制装置包括检测单元检测与所述移动终端与所述中继站之间的通信环境相关联的与所述中继站所在的移动体的移动相关联的变化，控制单元，其根据所述变化来控制所述移动终端的切换; 由检测单元检测移动终端与中继站之间的通信环境。

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