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    • 2. 发明授权
    • Sensor having tin oxide thin film for detecting methane gas and propane
gas, and process for manufacturing thereof
    • 具有用于检测甲烷气体和丙烷气体的氧化锡薄膜的传感器及其制造方法
    • US6059937A
    • 2000-05-09
    • US654055
    • 1996-05-28
    • Seok Keun KohHyung Jin JungSeok Kyun SongWon Kook ChoiDongsoo ChoiJin Seok Jeon
    • Seok Keun KohHyung Jin JungSeok Kyun SongWon Kook ChoiDongsoo ChoiJin Seok Jeon
    • G01N27/12C23C14/34C23C14/08
    • G01N27/12
    • The present invention relates to a sensor for detecting hydrocarbon type gas such as methane gas and propane gas, and process for manufacturing thereof. SiO.sub.2 was deposited in 1 .mu.m by ion beam sputtering with a mixed gas (3:2) of argon and oxygen on a silicon wafer in the process. In case of a propane sensor, platinum electrode is deposited in 600 .ANG. by ion beam sputtering on a tin oxide thin film synthesized by ionized beam of which the oxygen ion energy is 0 to 500 eV by using poly alumina. In case of a methane sensor, heat treatment at 500.degree. C. was performed for 1 hour in the air in order for the thin film to be stable at high operation temperature, while heat treatment was not performed in case of propane sensor. The sensor was manufactured by adding platinum or palladium thereto by argon ion beam sputtering. The thin film type tin oxide sensor according to the present invention exhibited an excellent selectivity of 47.4% even at low temperature of 150.degree. C. at a gas concentration of 3,000 ppm in case of the methane sensor, while a sensor having high electric sensitivity and selectivity as 93.4% was obtained in case of the propane sensor.
    • 本发明涉及用于检测甲烷气和丙烷气等烃类气体的传感器及其制造方法。 在此过程中,通过离子束溅射,在硅晶片上用氩和氧气的混合气体(3:2)将SiO 2沉积在1μm。 在丙烷传感器的情况下,铂电极通过离子束溅射在通过使用聚氧化铝的氧离子能为0至500eV的电离束合成的氧化锡薄膜上沉积在600范围内。 在甲烷传感器的情况下,在空气中在500℃下进行热处理1小时,以使薄膜在高操作温度下稳定,而在丙烷传感器的情况下不进行热处理。 通过氩离子束溅射将铂或钯加入其中来制造传感器。 根据本发明的薄膜型氧化锡传感器,即使在甲烷传感器的情况下,即使在低温度为150℃,在3,000ppm的气体浓度下也显示出47.4%的优异选择性,而具有高电敏感性的传感器和 在丙烷传感器的情况下获得93.4%的选择性。
    • 6. 发明授权
    • Thin film deposition apparatus
    • 薄膜沉积装置
    • US5855683A
    • 1999-01-05
    • US797255
    • 1997-02-07
    • Seok Keun KohHong Kyu JangHyung Jin JungWon Kook Choi
    • Seok Keun KohHong Kyu JangHyung Jin JungWon Kook Choi
    • C23C16/54C23C14/32H01J37/32C23C16/00
    • H01J37/32422C23C14/32
    • An improved thin film deposition apparatus which is capable of easily increasing the temperature of a crucible using low electric power, for thus reducing the maintenance cost of the system, and fabricating a thin film having a constant characteristic by using a lower current density variation based on a distance, for thus increasing the reliability of a thin film device, whereby it is possible to fabricate a more compact product and to more easily maintain the system, which includes a heat shielding cylindrical chamber, a cylindrical chamber located within the heat shielding cylindrical chamber, a crucible section including a crucible and a heat filament arranged at an inner and lower portion of the cylindrical chamber, an ionization section having an anode and an ionization filament arranged in an upper portion inside the cylindrical chamber, and a magnet for enhancing an ionization efficiency, an upper and lower filament support for supporting the heater filament and the ionization filament, an upper and lower flange, to which the upper and lower filaments are fixed, arranged in the cylindrical chamber in order for the upper and lower filaments to be detachable, and a grounding plate extended from the heat shielding plate and the electromagnetic field blocking cylindrical chamber located at the upper direction of the crucible section and forming of an acceleration electrode system together with the upper flange.
    • 一种改进的薄膜沉积装置,其能够使用低功率容易地增加坩埚的温度,从而降低系统的维护成本,并且通过使用基于以下的电流密度变化来制造具有恒定特性的薄膜 距离,从而提高薄膜器件的可靠性,由此可以制造更紧凑的产品并且更容易地保持包括隔热圆柱形室的系统,位于隔热圆柱形室内的圆柱形室 包括坩埚和布置在圆筒形室的内部和下部的热丝的坩埚部分,具有设置在圆筒形室内部上部的阳极和电离丝的离子化部分和用于增强电离的磁体 效率,用于支撑加热丝和电离的上,下丝支撑 灯丝,上,下灯丝固定在其上的上下法兰,布置在圆筒形室中,以便上下灯丝可拆卸,并且从隔热板延伸的接地板和电磁场阻塞 圆柱形室位于坩埚部分的上方,并与上凸缘一起形成加速电极系统。