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    • 3. 发明授权
    • Vertical-cavity surface-emitting laser generating light with a defined
direction of polarization
    • 垂直腔表面发射激光产生具有确定的极化方向的光
    • US5727014A
    • 1998-03-10
    • US551302
    • 1995-10-31
    • Shih-Yuan WangMichael R. T. TanWilliam D. HollandJohn P. ErtelScott W. Corzine
    • Shih-Yuan WangMichael R. T. TanWilliam D. HollandJohn P. ErtelScott W. Corzine
    • H01S5/00H01S5/183H01S5/30H01S5/42H01S3/19
    • H01S5/18355H01S5/18308H01S5/18338H01S5/18394H01S5/3054H01S5/3095H01S5/423
    • A vertical-cavity surface-emitting laser that generates light having a fixed direction of polarization. The laser has a plane light-generating region sandwiched between a first conductive mirror region and a second conductive mirror region. The first conductive mirror region has an opposite conductivity mode from the second conductive mirror region. The first conductive mirror region has a remote surface substantially parallel to the light-generating region and an electrode formed on the remote surface. The electrode bounds a light emission port from which the light is emitted in a direction defining an axis. A reduced-conductivity region is formed in the first conductive mirror region surrounding the axis and extending from the remote surface towards the light-emitting region to define a core region in the first conductive mirror region. The light emission port and/or the core region has first and second dimensions in orthogonal directions in a plane parallel to the light-generating region. The first dimension is greater than the second dimension to set the direction of polarization of the light to the direction of the first dimension.
    • 产生具有固定的偏振方向的光的垂直腔表面发射激光器。 激光器具有夹在第一导电镜区域和第二导电镜面区域之间的平面发光区域。 第一导电镜区域具有与第二导电镜区域相反的导电模式。 第一导电镜区域具有基本上平行于发光区域的远程表面和形成在远程表面上的电极。 电极在限定轴线的方向上限定发光的发光口。 导电区域形成在围绕轴线的第一导电反射镜区域中,并从远程表面朝向发光区域延伸以在第一导电反射镜区域中限定芯区域。 发光端口和/或芯区域在与发光区域平行的平面中具有正交方向上的第一和第二尺寸。 第一尺寸大于第二尺寸以将光的偏振方向设置为第一尺寸的方向。
    • 5. 发明授权
    • Polarization-controlled VCSELs using externally applied uniaxial stress
    • 使用外部施加的单轴应力的极化控制VCSEL
    • US06188711B1
    • 2001-02-13
    • US08993006
    • 1997-12-18
    • Scott W. CorzineMichael R. T. TanAlbert T. YuenDubravko I. Babic
    • Scott W. CorzineMichael R. T. TanAlbert T. YuenDubravko I. Babic
    • H01S512
    • H01S5/18355H01S5/0607
    • A Vertical Cavity Surface-Emitting Laser (VCSEL) assembly in which the polarization is locked to a specified direction that is the same for all VCSELs. A VCSEL according to the present invention includes a VCSEL having a top mirror region, a bottom mirror region, a light generation region between the top and bottom mirror regions, a conducting substrate and a bottom electrode. The bottom mirror region is sandwiched between the conducting substrate and the light generation region, and the conducting substrate is sandwiched between the bottom electrode and the bottom mirror region. The assembly also includes a mounting substrate having top and bottom surfaces, the VCSEL being mechanically coupled to the mounting substrate. The mounting substrate includes a means for defining a first axis. The assembly includes a means for causing the mounting substrate to flex about the first axis thereby inducing a strain in the light generation region which locks the polarization into a mode determined by the first axis. In one embodiment of the present invention, the first axis is defined by a channel in the mounting substrate. The mounting substrate is caused to flex by the application of an adhesive layer applied between the mounting substrate and a mounting surface. The adhesive layer has a thermal coefficient of expansion different from the mounting substrate. In another embodiment, trenches whose direction defines the first axis are located in the top mirror region of the VCSEL.
    • 垂直腔表面发射激光(VCSEL)组件,其中偏振被锁定到对于所有VCSEL相同的指定方向。 根据本发明的VCSEL包括VCSEL,其具有顶部反射镜区域,底部反射镜区域,顶部和底部反射镜区域之间的发光区域,导电基底和底部电极。 底部反射镜区域夹在导电衬底和光产生区域之间,并且导电衬底夹在底部电极和底部镜像区域之间。 组件还包括具有顶表面和底表面的安装衬底,VCSEL机械地联接到安装衬底。 安装基板包括用于限定第一轴线的装置。 该组件包括用于使安装基板围绕第一轴弯曲的装置,从而在将偏振锁定为由第一轴确定的模式的光产生区域中引起应变。 在本发明的一个实施例中,第一轴由安装基板中的通道限定。 通过施加施加在安装基板和安装表面之间的粘合剂层,使安装基板挠曲。 粘合剂层具有与安装基板不同的热膨胀系数。 在另一个实施例中,其方向限定第一轴的沟槽位于VCSEL的顶部反射镜区域中。
    • 6. 发明授权
    • Long-Wavelength VCSEL using buried bragg reflectors
    • 长波长VCSEL使用埋地布拉格反射器
    • US06252896B1
    • 2001-06-26
    • US09263696
    • 1999-03-05
    • Michael R. T. TanDubravko I. BabicScott W. CorzineTirmula R. RanganathShih-Yuan WangWayne Bi
    • Michael R. T. TanDubravko I. BabicScott W. CorzineTirmula R. RanganathShih-Yuan WangWayne Bi
    • H01S500
    • H01S5/426H01S5/0215H01S5/0216H01S5/041H01S5/18311H01S5/18369
    • An optically pumped vertical-cavity surface-emitting laser (VCSEL) device and a method of fabricating the device utilize two separate substrates that perform a filtering operation to selectively transmit only light having a long peak wavelength that is generated by the device. The optically pumped VCSEL device is a self-pumped device that can generate the pump light to drive the device to emit output laser light having a long peak wavelength. The optically pumped VCSEL device includes a short-wavelength VCSEL formed on one of the two substrates and a long-wavelength VCSEL formed on the other substrate. The short-wavelength VCSEL is a current-driven VCSEL that generates short-wavelength light to drive (i.e., optically pump) the long-wavelength VCSEL. The short-wavelength VCSEL and the long-wavelength VCSEL are bonded together such that the two substrates are separated by the two VCSELs. A transparent optical adhesive material or a metallic bonding material may be utilized to bond the short-wavelength VCSEL onto the long-wavelength VCSEL. The substrates are wavelength-selective with respect to propagating light, so that short-wavelength light generated by the short-wavelength VCSEL and not absorbed by the long-wavelength VCSEL is mostly absorbed by the two separate substrates. However, the long-wavelength light generated by the long-wavelength VCSEL is allowed to be transmitted through the substrates as output laser light.
    • 光泵浦垂直腔表面发射激光器(VCSEL)器件和制造该器件的方法利用执行滤波操作的两个分离的衬底,以仅选择性地仅透射由器件产生的具有长峰值波长的光。 光泵浦VCSEL器件是自泵浦器件,其可以产生泵浦光以驱动器件发射具有长峰值波长的输出激光。 光泵浦VCSEL器件包括形成在两个衬底中的一个上的短波长VCSEL和在另一衬底上形成的长波长VCSEL。 短波长VCSEL是产生短波长光以驱动(即光泵浦)长波长VCSEL的电流驱动VCSEL。 短波长VCSEL和长波长VCSEL被结合在一起,使得两个基板被两个VCSEL隔开。 可以使用透明光学粘合剂材料或金属粘合材料将短波长VCSEL粘合到长波长VCSEL上。 衬底相对于传播光是波长选择性的,使得由短波长VCSEL产生并且不被长波长VCSEL吸收的短波长光主要被两个分离的衬底吸收。 然而,由长波长VCSEL产生的长波长光被允许通过基板作为输出激光传输。
    • 7. 发明授权
    • N-drive, p-common light-emitting devices fabricated on an n-type
substrate and method of making same
    • 在n型衬底上制造的N驱动p普通发光器件及其制造方法
    • US5892787A
    • 1999-04-06
    • US635838
    • 1996-04-22
    • Michael R. T. TanAlbert T. YuenShih-Yuan WangGhulam HasnainYu-Min Houng
    • Michael R. T. TanAlbert T. YuenShih-Yuan WangGhulam HasnainYu-Min Houng
    • H01S5/00H01L33/00H01L33/30H01S5/042H01S5/183H01S5/30H01S5/42H01S3/19
    • H01L33/30H01L33/0016H01L33/0062H01S5/18308H01S5/0207H01S5/0421H01S5/18305H01S5/2059H01S5/2063H01S5/3054H01S5/3095H01S5/423
    • A substantially n-type substrate structure having a p-type surface for use in semiconductor devices as a substitute for a p-type semiconductor substrate. The substrate structure comprises a substrate region and a buffer region. The substrate region is a region of n-type compound semiconductor, and includes a degeneratively n-doped portion adjacent its first surface. The buffer region is a region of compound semiconductor doped with a p-type dopant. The buffer region is located on the first surface of the substrate region and includes a surface remote from the substrate region that provides the p-type surface of the substrate structure. The buffer region also includes a degeneratively p-doped portion adjacent the degeneratively n-doped portion of the substrate region. The substrate structure includes a tunnel junction between the degeneratively n-doped portion of the substrate region and the degeneratively p-doped portion of the buffer region. The substrate structure is made by degeneratively doping a substrate region of n-type compound semiconductor material adjacent its first surface with an n-type impurity, and depositing a layer of compound semiconductor material doped with a p-type impurity on the first surface of the substrate region to form a buffer region that includes a surface remote from the substrate region. In the course of depositing the compound semiconductor material to form the buffer region, the compound semiconductor material is degeneratively doped with the p-type impurity at least in a portion adjacent the substrate region to form a tunnel junction between the substrate region and the buffer region.
    • 具有用于半导体器件的p型表面作为p型半导体衬底的替代物的基本为n型衬底结构。 衬底结构包括衬底区域和缓冲区域。 衬底区域是n型化合物半导体的区域,并且包括与其第一表面相邻的退化的n-掺杂部分。 缓冲区是掺杂有p型掺杂剂的化合物半导体的区域。 缓冲区域位于衬底区域的第一表面上并且包括远离衬底区域的表面,该表面提供衬底结构的p型表面。 缓冲区还包括与衬底区域的退化的n掺杂部分相邻的退化的p掺杂部分。 衬底结构包括在衬底区域的退化的n掺杂部分和缓冲区域的退化的p掺杂部分之间的隧道结。 衬底结构是通过用n型杂质将邻近其第一表面的n型化合物半导体材料的衬底区域简单地掺杂制成的,并且在第一表面上沉积掺杂有p型杂质的化合物半导体材料层 衬底区域以形成包括远离衬底区域的表面的缓冲区域。 在沉积化合物半导体材料以形成缓冲区的过程中,化合物半导体材料至少在与衬底区域相邻的部分中被p型杂质退变掺杂以在衬底区域和缓冲区域之间形成隧道结 。