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1. 发明申请

US20060215313A1 Method for using CVD process to encapsulate coil in a magnetic write head 失效
标题翻译：使用CVD工艺将线圈封装在磁写头中的方法
公开(公告)号：US20060215313A1
公开(公告)日：2006-09-28
申请号：US11090457
申请日：2005-03-25
申请人： Richard Hsiao , Wipul Jayasekara , Howard Zolla
发明人： Richard Hsiao , Wipul Jayasekara , Howard Zolla
IPC分类号： G11B5/127
CPC分类号： G11B5/3133 , G11B5/17 , G11B5/3136 , G11B5/3163 , Y10T29/49041 , Y10T29/4906 , Y10T29/49064
摘要： Applicant discloses a method for fabricating a magnetic write head with a coil with a high aspect ratio using a Chemical Vapor Deposition process such as Atomic Layer Deposition (ALD), High Speed ALD, Plasma Enhanced ALD (PEALD), Plasma Enhanced Chemical Vapor Deposition (PECVD) or Low Pressure Chemical Vapor Deposition (LPCVD) to form encapsulating films over the coils without voids. Materials which can be used for encapsulation include Al2O3, SiO2, AlN, Ta2O5, HfO2, ZrO2, and YtO3. The use of an ultra-conformal deposition process allows the pitch of the coils to be smaller than it is possible in the prior art. The method according to the invention also allows materials with a smaller coefficient of thermal expansion than hardbake photoresist to be used with resulting improvements in thermal protrusion characteristics.
摘要翻译：申请人公开了使用诸如原子层沉积（ALD），高速ALD，等离子体增强型ALD（PEALD），等离子体增强化学气相沉积（Plasma Enhanced Chemical Vapor Deposition，等离子体增强化学气相沉积法）等化学气相沉积工艺制造具有高纵横比的线圈的磁写头的方法 PECVD）或低压化学气相沉积（LPCVD），在无空隙的线圈上形成封装膜。可用于封装的材料包括Al 2 O 3，SiO 2，AlN，Ta 2 O， 5，HfO 2，ZrO 2和YtO 3。使用超适形沉积工艺允许线圈的间距小于现有技术中可能的间距。根据本发明的方法还允许使用具有比硬质光刻胶更小的热膨胀系数的材料，从而提高热突起特性。

2. 发明申请

US20060207966A1 Method to improve ability to perform CMP-assisted liftoff for trackwidth definition 失效
标题翻译：提高执行CMP辅助提升能力的方法，用于跟踪宽度定义
公开(公告)号：US20060207966A1
公开(公告)日：2006-09-21
申请号：US11081222
申请日：2005-03-15
申请人： Shawn Hernandez , Wipul Jayasekara , Timothy Minvielle , Benjamin Wang , Howard Zolla
发明人： Shawn Hernandez , Wipul Jayasekara , Timothy Minvielle , Benjamin Wang , Howard Zolla
IPC分类号： B44C1/22
CPC分类号： G11B5/3932 , B82Y10/00 , B82Y25/00 , G11B5/3163 , G11B2005/3996 , Y10T29/26 , Y10T29/49028 , Y10T29/49044 , Y10T29/49052
摘要： A method is presented for fabricating a read head having a read head sensor and a hard bias/lead layer which includes depositing a strip of sensor material in a sensor material region, and depositing strips of fast-milling dielectric material in first and second fast-milling dielectric material regions adjacent to the sensor material region. A protective layer and a layer of masking material is deposited on the strip of sensor material and the strips of fast-milling dielectric material to provide masked areas and exposed areas. A shaping source, such as an ion milling source, is provided which shapes the exposed areas. Hard bias/lead material is then deposited on the regions of sensor material and fast-milling dielectric material to form first and second leads and a cap on each of these regions. The cap of hard bias/lead material and the masking material is then removed from each of these regions.
摘要翻译：提出了一种用于制造具有读取头传感器和硬偏压/引线层的读取头的方法，该读取头传感器和硬偏置/引线层包括在传感器材料区域中沉积传感器材料条，以及在第一和第二快速接头中沉积快速铣削介电材料的条带，研磨与传感器材料区域相邻的介电材料区域。保护层和掩蔽材料层沉积在传感器材料条和快速铣削电介质材料条上，以提供掩蔽区域和暴露区域。提供成形源，例如离子铣削源，其形成暴露的区域。然后将硬偏置/引线材料沉积在传感器材料和快速研磨电介质材料的区域上，以在这些区域中的每一个上形成第一和第二引线和盖。然后从这些区域中的每一个去除硬偏压/铅材料的盖和掩模材料。

3. 发明申请

US20060256482A1 Method to fabricate side shields for a magnetic sensor 失效
公开(公告)号：US20060256482A1
公开(公告)日：2006-11-16
申请号：US11126508
申请日：2005-05-10
申请人： Satoru Araki , Robert Beach , Marie-Claire Cyrille , Wipul Jayasekara , Quang Le , Jui-Lung Li , David Seagle , Howard Zolla
发明人： Satoru Araki , Robert Beach , Marie-Claire Cyrille , Wipul Jayasekara , Quang Le , Jui-Lung Li , David Seagle , Howard Zolla
IPC分类号： G11B5/33
CPC分类号： G11B5/3909 , B82Y10/00 , G11B5/112 , G11B5/3169 , G11B5/3906 , Y10T29/49041 , Y10T29/49044 , Y10T29/49046
摘要： A method for fabricating magnetic side shields for an MR sensor of a magnetic head. Following the deposition of MR sensor layers, a first DLC layer is deposited. Milling mask layers are then deposited, and outer portions of the milling mask layers are removed such that a remaining central portion of the milling mask layers is formed having straight sidewalls and no undercuts. Outer portions of the sensor layers are then removed such that a relatively thick remaining central portion of the milling mask resides above the remaining sensor layers. A thin electrical insulation layer is deposited, followed by the deposition of magnetic side shields. A second DLC layer is deposited and the remaining mask layers are then removed utilizing a chemical mechanical polishing (CMP) liftoff step. Thereafter, the first DLC layer and the second DLC layer are removed and a second magnetic shield layer is then fabricated thereabove.

4. 发明申请

US20050063101A1 Ion bombardment of electrical lapping guides to decrease noise during lapping process 失效
标题翻译：离子轰击电气研磨导轨，以减少研磨过程中的噪音
公开(公告)号：US20050063101A1
公开(公告)日：2005-03-24
申请号：US10964123
申请日：2004-10-12
申请人： Mark Church , Wipul Jayasekara , Howard Zolla
发明人： Mark Church , Wipul Jayasekara , Howard Zolla
IPC分类号： G11B5/39 , B24B37/04 , G11B5/33 , G11B5/127
CPC分类号： B24B37/042 , Y10T29/49034 , Y10T29/49046 , Y10T29/49048
摘要： A method for reducing noise in a lapping guide. Selected portions of a Giant magnetoresistive device wafer are masked, thereby defining masked and unmasked regions of the wafer in which the unmasked regions include lapping guides. The wafer is bombarded with ions such that a Giant magnetoresistive effect of the unmasked regions is reduced. The GMR device is lapped, using the lapping guides to measure an extent of the lapping
摘要翻译：一种降低研磨导轨中噪音的方法。掩蔽了巨型磁阻器件晶片的选定部分，由此限定晶片的掩蔽和未掩模区域，其中未掩蔽区域包括研磨引导件。用离子轰击晶片，使得未掩蔽区域的巨磁阻效应降低。研磨GMR装置，使用研磨导轨测量研磨的程度

5. 发明申请

US20070076328A1 Magnetic recording head with ESD shunt trace 失效
标题翻译：具有ESD分路迹线的磁记录头
公开(公告)号：US20070076328A1
公开(公告)日：2007-04-05
申请号：US11240542
申请日：2005-09-30
申请人： Wipul Jayasekara , Howard Zolla
发明人： Wipul Jayasekara , Howard Zolla
IPC分类号： G11B5/127 , G11B5/33
CPC分类号： G11B5/40 , G11B5/11 , G11B5/3133
摘要： Recording heads having an ESD shunt trace and methods of fabricating the same are disclosed. A recording head of the invention includes a first shield, a second shield, an MR read element between the first shield and the second shield, and an ESD shunt trace. The ESD shunt trace is formed from MR layers and is connected to the MR read element and one or both of the first shield and the second shield. One or more of the MR layers forming the ESD shunt trace are processed to reduce the MR properties of the ESD shunt trace. Examples of processing the ESD shunt trace are ion milling, ion implantation, oxidizing, reactive ion etching, sputter etching, wet chemical etching, etc.
摘要翻译：公开了具有ESD分流迹线的记录头及其制造方法。本发明的记录头包括第一屏蔽，第二屏蔽，第一屏蔽和第二屏蔽之间的MR读取元件以及ESD分流迹线。 ESD分路迹线由MR层形成，并连接到MR读取元件以及第一屏蔽和第二屏蔽中的一个或两个。处理形成ESD分流迹线的一个或多个MR层以降低ESD分流迹线的MR特性。处理ESD分流迹线的示例是离子铣削，离子注入，氧化，反应离子蚀刻，溅射蚀刻，湿化学蚀刻等。

6. 发明申请

US20080020240A1 Method to reduce corner shunting during fabrication of CPP read heads 有权
标题翻译：在CPP读取头制造过程中减少拐角分流的方法
公开(公告)号：US20080020240A1
公开(公告)日：2008-01-24
申请号：US11890868
申请日：2007-08-07
申请人： Robert Fontana , Ying Hong , Wipul Jayasekara , Howard Zolla
发明人： Robert Fontana , Ying Hong , Wipul Jayasekara , Howard Zolla
IPC分类号： G11B5/33 , B05D5/12 , C23F1/04
CPC分类号： B82Y10/00 , B82Y25/00 , G11B5/3163 , G11B5/3932 , G11B2005/3996 , Y10T428/1171
摘要： A method is presented for fabricating a CPP read head having a CPP read head sensor and a hard bias layer which includes forming a strip of sensor material in a sensor material region, and depositing strips of fast-milling dielectric material in first and second fast-milling dielectric material regions adjacent to the sensor material region. A protective layer and a layer of masking material are deposited on the strip of sensor material and the strips of fast-milling dielectric material to provide masked areas and exposed areas. A shaping source, such as an ion milling source, is provided which shapes the exposed areas. Hard bias material is then deposited on the regions of sensor material and fast-milling dielectric material to form caps on each of these regions. The caps of hard bias material and the masking material are then removed from each of these regions.
摘要翻译：提出了一种用于制造具有CPP读取头传感器和硬偏置层的CPP读取头的方法，该CPP读取头包括在传感器材料区域中形成传感器材料条，以及将快速研磨电介质材料的条带放置在第一和第二快速接头中，研磨与传感器材料区域相邻的介电材料区域。保护层和掩蔽材料层沉积在传感器材料条和快速研磨电介质材料条上，以提供掩蔽区域和暴露区域。提供成形源，例如离子铣削源，其形成暴露的区域。然后将硬偏置材料沉积在传感器材料和快速研磨电介质材料的区域上，以在这些区域中的每一个上形成盖。然后从这些区域中的每一个去除硬偏置材料的盖子和掩模材料。

7. 发明申请

US20060027528A1 Ion bombardment of electrical lapping guides to decrease noise during lapping process 失效
标题翻译：离子轰击电气研磨导轨，以减少研磨过程中的噪音
公开(公告)号：US20060027528A1
公开(公告)日：2006-02-09
申请号：US11246727
申请日：2005-10-06
申请人： Mark Church , Wipul Jayasekara , Howard Zolla
发明人： Mark Church , Wipul Jayasekara , Howard Zolla
IPC分类号： B44C1/22 , C23F1/00
CPC分类号： B24B37/042 , Y10T29/49034 , Y10T29/49046 , Y10T29/49048
摘要： A method for reducing noise in a lapping guide. Selected portions of a magnetoresistive device wafer are bombarded with ions such that a magnetoresistive effect of lapping guides is reduced. The device is lapped, using the lapping guides to measure an extent of the lapping
摘要翻译：一种降低研磨导轨中噪音的方法。用离子轰击磁阻器件晶片的选定部分，使得研磨导轨的磁阻效应降低。研磨装置，使用研磨导轨测量研磨的程度

8. 发明申请

US20050185334A1 Method of depositing material into high aspect ratio features 有权
公开(公告)号：US20050185334A1
公开(公告)日：2005-08-25
申请号：US11108313
申请日：2005-04-18
申请人： Richard Hsiao , Quang Le , Paul Nguyen , Son Nguyen , Mustafa Pinarbasi , Patrick Webb , Howard Zolla
发明人： Richard Hsiao , Quang Le , Paul Nguyen , Son Nguyen , Mustafa Pinarbasi , Patrick Webb , Howard Zolla
IPC分类号： G11B5/17 , G11B5/31 , G11B5/39 , G11B5/147
CPC分类号： B82Y10/00 , G11B5/17 , G11B5/313 , G11B5/3163 , G11B5/3967 , Y10T29/49043 , Y10T29/49044 , Y10T29/49064 , Y10T29/49073
摘要： The present invention presents a method for fabricating coil elements for magnetic write heads. A coil pattern is formed on a substrate using photolithographic techniques. The substrate is etched using reactive ion etching, creating a coil-shaped trench in the substrate. Thin film seed layers are deposited using ion beam deposition. The substrate is electroplated with metal filling the trenches with metal. The substrate is chemical mechanical polished to remove excess metal and planarize the air bearing surface of the write head.

9. 发明申请

US20120234314A1 ROLL-TO-ROLL REACTOR FOR PROCESSING FLEXIBLE CONTINUOUS WORKPIECE 审中-公开
标题翻译：用于加工柔性连续工件的辊对辊反应器
公开(公告)号：US20120234314A1
公开(公告)日：2012-09-20
申请号：US13100201
申请日：2011-05-03
申请人： Howard Zolla , Jorge Vasquez , James Freitag , Mustafa Pinarbasi , Robert J. Bailey
发明人： Howard Zolla , Jorge Vasquez , James Freitag , Mustafa Pinarbasi , Robert J. Bailey
IPC分类号： F24C3/00
CPC分类号： H01L31/0322 , H01L31/0749 , H01L31/206 , Y02E10/541 , Y02P70/521
摘要： The present invention provides a reactor for preparing thin films of compound semiconductors for photovoltaic devices. The reactor includes a chamber that has a bottom surface that, in some locations, has protrusions that contact the bottom surface of the substrate having the compound semiconductor to provide uniform heating and cooling of the substrate. Interior walls of the chamber can also be lined with high thermal conductivity portions and low thermal conductivity portions interposed between high thermal conductivity portions.
摘要翻译：本发明提供一种用于制备用于光伏器件的化合物半导体的薄膜的反应器。反应器包括具有底表面的室，其在一些位置具有与具有化合物半导体的衬底的底表面接触的突起，以提供衬底的均匀加热和冷却。腔室的内壁还可以衬有高导热部分和介于高导热部分之间的低导热部分。

10. 发明申请

US20100226629A1 ROLL-TO-ROLL PROCESSING AND TOOLS FOR THIN FILM SOLAR CELL MANUFACTURING 审中-公开
标题翻译：薄膜太阳能电池制造的滚动到滚动加工和工具
公开(公告)号：US20100226629A1
公开(公告)日：2010-09-09
申请号：US12721446
申请日：2010-03-10
申请人： Bulent M. Basol , Howard Zolla , Mustafa Pinarbasi , Gregory Norsworthy
发明人： Bulent M. Basol , Howard Zolla , Mustafa Pinarbasi , Gregory Norsworthy
IPC分类号： F26B3/28 , F24F7/00 , F26B3/34
CPC分类号： F27B9/045 , C23C14/5866 , F27B9/063 , F27B9/20 , F27B9/28 , F27B9/36 , H01L21/67109 , H01L21/67126 , H01L21/6776 , H01L31/0322 , Y02E10/541
摘要： Described are roll-to-roll or reel-to-reel thermal or rapid thermal processing tools (reactors) are used to react a precursor layer on a continuous flexible workpiece. Variants of the reactors are described, including a reactor having multiple exhaust outlets connected to a process gap of the reactor between an entrance opening and an exit opening of the process gap; a reactor including multiple gas inlets and exhaust outlets connected to a process gap of the reactor between an entrance opening and an exit opening of the process gap; a reactor including multiple gas inlets and exhaust outlets connected to a process gap of the reactor between an entrance opening and an exit opening of the process gap; and a reactor including multiple gas inlets and exhaust outlets connected to a process gap of the reactor between an entrance opening and an exit opening of the process gap. Also described is an exhaust system that separates the Group VIA material vapors from other gaseous species for re-cycling or easy disposal and techniques and apparatus for efficient removal of moisture from the workpiece before processing precursor layer in the RTP tool.
摘要翻译：描述了卷对卷或卷对卷热或快速热处理工具（反应器）用于使连续柔性工件上的前体层反应。描述了反应器的变型，包括具有多个排气出口的反应器，该排气出口连接到处理间隙的入口和出口之间的反应器的工艺间隙; 包括多个气体入口和排气出口的反应器，所述多个气体入口和排气出口连接到所述反应器的过程间隙，位于所述工艺间隙的入口和出口之间; 包括多个气体入口和排气出口的反应器，所述多个气体入口和排气出口连接到所述反应器的过程间隙，位于所述工艺间隙的入口和出口之间; 以及包括多个气体入口和排气出口的反应器，所述多个气体入口和排气出口连接到处理间隙的入口和出口之间的反应器的工艺间隙。还描述了一种排气系统，其将VIA族VIA气体物质与其他气态物质分离以进行重新循环或易于处置，以及在RTP工具中处理前体层之前有效去除工件的水分的技术和设备。

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