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1. 发明申请

US20050185334A1 Method of depositing material into high aspect ratio features 有权
公开(公告)号：US20050185334A1
公开(公告)日：2005-08-25
申请号：US11108313
申请日：2005-04-18
申请人： Richard Hsiao , Quang Le , Paul Nguyen , Son Nguyen , Mustafa Pinarbasi , Patrick Webb , Howard Zolla
发明人： Richard Hsiao , Quang Le , Paul Nguyen , Son Nguyen , Mustafa Pinarbasi , Patrick Webb , Howard Zolla
IPC分类号： G11B5/17 , G11B5/31 , G11B5/39 , G11B5/147
CPC分类号： B82Y10/00 , G11B5/17 , G11B5/313 , G11B5/3163 , G11B5/3967 , Y10T29/49043 , Y10T29/49044 , Y10T29/49064 , Y10T29/49073
摘要： The present invention presents a method for fabricating coil elements for magnetic write heads. A coil pattern is formed on a substrate using photolithographic techniques. The substrate is etched using reactive ion etching, creating a coil-shaped trench in the substrate. Thin film seed layers are deposited using ion beam deposition. The substrate is electroplated with metal filling the trenches with metal. The substrate is chemical mechanical polished to remove excess metal and planarize the air bearing surface of the write head.

2. 发明授权

US07362543B2 Magnetoresistive/inductive write head assembly formed with seed layers having a uniform thickness 有权
标题翻译：由具有均匀厚度的种子层形成的磁阻/感应写头组件
公开(公告)号：US07362543B2
公开(公告)日：2008-04-22
申请号：US11108313
申请日：2005-04-18
申请人： Richard Hsiao , Quang Le , Paul P. Nguyen , Son Van Nguyen , Mustafa Pinarbasi , Patrick R. Webb , Howard G. Zolla
发明人： Richard Hsiao , Quang Le , Paul P. Nguyen , Son Van Nguyen , Mustafa Pinarbasi , Patrick R. Webb , Howard G. Zolla
IPC分类号： G11B5/17
CPC分类号： B82Y10/00 , G11B5/17 , G11B5/313 , G11B5/3163 , G11B5/3967 , Y10T29/49043 , Y10T29/49044 , Y10T29/49064 , Y10T29/49073
摘要： The present invention presents a method for fabricating coil elements for magnetic write heads. A coil pattern is formed on a substrate using photolithographic techniques. The substrate is etched using reactive ion etching, creating a coil-shaped trench in the substrate. Thin film seed layers are deposited using ion beam deposition. The substrate is electroplated with metal filling the trenches with metal. The substrate is chemical mechanical polished to remove excess metal and planarize the air bearing surface of the write head.
摘要翻译：本发明提供一种用于制造用于磁写头的线圈元件的方法。使用光刻技术在衬底上形成线圈图案。使用反应离子蚀刻蚀刻衬底，在衬底中产生线圈状沟槽。使用离子束沉积沉积薄膜种子层。用金属电镀衬底，用金属填充沟槽。基板进行化学机械抛光以去除多余的金属并平面化写入头的空气轴承表面。

3. 发明授权

US06948231B2 Method of depositing material into high aspect ratio features 失效
标题翻译：将材料沉积成高纵横比特征的方法
公开(公告)号：US06948231B2
公开(公告)日：2005-09-27
申请号：US10153333
申请日：2002-05-21
申请人： Richard Hsiao , Quang Le , Paul P. Nguyen , Son Van Nguyen , Mustafa Pinarbasi , Patrick R. Webb , Howard G. Zolla
发明人： Richard Hsiao , Quang Le , Paul P. Nguyen , Son Van Nguyen , Mustafa Pinarbasi , Patrick R. Webb , Howard G. Zolla
IPC分类号： G11B5/17 , G11B5/31 , G11B5/39 , G11B5/127 , H04R31/00
CPC分类号： B82Y10/00 , G11B5/17 , G11B5/313 , G11B5/3163 , G11B5/3967 , Y10T29/49043 , Y10T29/49044 , Y10T29/49064 , Y10T29/49073
摘要： The present invention presents a method for fabricating coil elements for magnetic write heads. A coil pattern is formed on a substrate using photolithographic techniques. The substrate is etched using reactive ion etching, creating a coil-shaped trench in the substrate. Thin film seed layers are deposited using ion beam deposition. The substrate is electroplated with metal filling the trenches with metal. The substrate is chemical mechanical polished to remove excess metal and planarize the air bearing surface of the write head.
摘要翻译：本发明提供一种用于制造用于磁写头的线圈元件的方法。使用光刻技术在衬底上形成线圈图案。使用反应离子蚀刻蚀刻衬底，在衬底中产生线圈状沟槽。使用离子束沉积沉积薄膜种子层。用金属电镀衬底，用金属填充沟槽。基板进行化学机械抛光以去除多余的金属并平面化写入头的空气轴承表面。

4. 发明申请

US20070139816A1 Magnetic transducer with milling mask 失效
标题翻译：具有铣削面罩的磁性换能器
公开(公告)号：US20070139816A1
公开(公告)日：2007-06-21
申请号：US11707524
申请日：2007-02-12
申请人： Tsung Chen , David Druist , Quang Le , Kim Lee , Chun-Ming Wang , Howard Zolla
发明人： Tsung Chen , David Druist , Quang Le , Kim Lee , Chun-Ming Wang , Howard Zolla
IPC分类号： B44C1/22 , G11B5/127
CPC分类号： G11B5/3163 , G11B5/1278 , G11B5/3116 , Y10T29/49032
摘要： A method for fabricating a magnetic head with a trapezoidal shaped pole piece tip is described. The body of the main pole piece is deposited; then one or more layers for the pole piece tip are deposited. A bed material is deposited over the pole piece tip material. A void is formed in the bed material over the area for the pole piece tip. The void is filled with an ion-milling resistant material such as alumina preferably using atomic layer deposition or atomic layer chemical vapor deposition. The excess ion-milling resistant material and the bed material are removed. The result is an ion-milling mask formed over the area for the pole piece tip. Ion milling is then used to remove the unmasked material in the pole piece tip layer and to form a beveled pole piece tip and preferably a beveled face on the main pole piece.
摘要翻译：描述了制造具有梯形极片尖端的磁头的方法。主极片的主体被沉积; 然后沉积用于极片尖端的一个或多个层。床材料沉积在极片末端材料上。在用于极片尖端的区域上的床材料中形成空隙。空隙填充有耐离子碾磨材料，例如氧化铝，优选使用原子层沉积或原子层化学气相沉积。除去过量的抗离子碾磨材料和床料。结果是在极片尖端的区域上形成离子铣削掩模。然后使用离子铣削去除极片末端层中的未掩模材料，并且在主极片上形成斜面极片末端，并且优选地形成斜面。

5. 发明申请

US20060044682A1 Self aligned wrap around shield for perpendicular magnetic recording 有权
标题翻译：围绕屏蔽的自对准涡卷用于垂直磁记录
公开(公告)号：US20060044682A1
公开(公告)日：2006-03-02
申请号：US11116753
申请日：2005-04-27
申请人： Quang Le , Nian-Xiang Sun , Howard Zolla
发明人： Quang Le , Nian-Xiang Sun , Howard Zolla
IPC分类号： G11B5/147
CPC分类号： G11B5/1278 , G11B5/1475 , G11B5/23 , G11B5/3116 , G11B5/315 , G11B5/3163
摘要： A write element for use in perpendicular magnetic recording. The write element including a write pole and a self aligned wrap around shield that can have a trailing shield gap thickness that is different from its side shield gap thickness. The materials making up the trailing shield gap and the side shield gaps can be different materials or can be the same material deposited in two different steps. The side or wrap around portions of the trailing shield can extend down to the level of the leading edge of the write pole or can terminate at some point between the levels of the leading and trailing edge to form a partial wrap around trailing shield.
摘要翻译：在垂直磁记录中使用的写元件。包括写磁极和围绕屏蔽一个自对准包裹，可以有一个尾屏蔽间隙的厚度是从其侧面屏蔽间隙的厚度不同的写元件。的材料构成的尾屏蔽件间隙和侧屏蔽间隙可以是不同的材料，或者可以是沉积于两个不同的步骤相同的材料。侧或缠绕在尾屏蔽件的部分可以向下延伸到写入极的前缘的水平或可以在前缘和后缘的电平之间的一些点终止以形成围绕尾屏蔽件的部分包裹。

6. 发明申请

US20060000795A1 Method for fabricating a pole tip in a magnetic transducer 有权
标题翻译：用于在磁换能器中制造极尖的方法
公开(公告)号：US20060000795A1
公开(公告)日：2006-01-05
申请号：US10882883
申请日：2004-06-30
申请人： Tsung Chen , David Druist , Quang Le , Kim Lee , Chun-Ming Wang , Howard Zolla
发明人： Tsung Chen , David Druist , Quang Le , Kim Lee , Chun-Ming Wang , Howard Zolla
IPC分类号： B44C1/22
CPC分类号： G11B5/3163 , G11B5/1278 , G11B5/3116 , Y10T29/49032
摘要： A method for fabricating a magnetic head with a trapezoidal shaped pole piece tip is described. The body of the main pole piece is deposited, then one or more layers for the pole piece tip are deposited. A bed material is deposited over the pole piece tip material. A void is formed in the bed material over the area for the pole piece tip. The void is filled with an ion-milling resistant material such as alumina preferably using atomic layer deposition or atomic layer chemical vapor deposition. The excess ion-milling resistant material and the bed material are removed. The result is an ion-milling mask formed over the area for the pole piece tip. Ion milling is then used to remove the unmasked material in the pole piece tip layer and to form a beveled pole piece tip and preferably a beveled face on the main pole piece.
摘要翻译：描述了制造具有梯形极片尖端的磁头的方法。沉积主极片的主体，然后沉积用于极片尖端的一个或多个层。床材料沉积在极片末端材料上。在用于极片尖端的区域上的床材料中形成空隙。空隙填充有耐离子碾磨材料，例如氧化铝，优选使用原子层沉积或原子层化学气相沉积。除去过量的抗离子碾磨材料和床料。结果是在极片尖端的区域上形成离子铣削掩模。然后使用离子铣削去除极片末端层中的未掩模材料，并且在主极片上形成斜面极片末端，并且优选地形成斜面。

7. 发明授权

US07565732B2 Method of manufacturing a write pole 失效
标题翻译：制造磁极的方法
公开(公告)号：US07565732B2
公开(公告)日：2009-07-28
申请号：US10931649
申请日：2004-08-31
申请人： Quang Le , Howard Zolla , Nian-Xiang Sun
发明人： Quang Le , Howard Zolla , Nian-Xiang Sun
IPC分类号： G11B5/187 , G11B5/23
CPC分类号： G11B5/1475 , G11B5/1278 , G11B5/315 , G11B5/3163 , Y10T29/49041 , Y10T29/49043 , Y10T29/49046
摘要： A method of fabricating a magnetic write head, in accordance with one embodiment, includes forming a beveled write pole. A conformal spacer may be formed upon a portion of a flare length proximate a tip of the write pole. A shield layer may also be formed upon the conformal spacer adjacent the flare length proximate the tip of the write pole.
摘要翻译：根据一个实施例的制造磁性写入头的方法包括形成斜面的写入极。可以在靠近写入极的尖端的喇叭长度的一部分上形成共形间隔物。屏蔽层也可以形成在邻近写极的尖端的火炬长度附近的保形间隔物上。

8. 发明申请

US20060256482A1 Method to fabricate side shields for a magnetic sensor 失效
公开(公告)号：US20060256482A1
公开(公告)日：2006-11-16
申请号：US11126508
申请日：2005-05-10
申请人： Satoru Araki , Robert Beach , Marie-Claire Cyrille , Wipul Jayasekara , Quang Le , Jui-Lung Li , David Seagle , Howard Zolla
发明人： Satoru Araki , Robert Beach , Marie-Claire Cyrille , Wipul Jayasekara , Quang Le , Jui-Lung Li , David Seagle , Howard Zolla
IPC分类号： G11B5/33
CPC分类号： G11B5/3909 , B82Y10/00 , G11B5/112 , G11B5/3169 , G11B5/3906 , Y10T29/49041 , Y10T29/49044 , Y10T29/49046
摘要： A method for fabricating magnetic side shields for an MR sensor of a magnetic head. Following the deposition of MR sensor layers, a first DLC layer is deposited. Milling mask layers are then deposited, and outer portions of the milling mask layers are removed such that a remaining central portion of the milling mask layers is formed having straight sidewalls and no undercuts. Outer portions of the sensor layers are then removed such that a relatively thick remaining central portion of the milling mask resides above the remaining sensor layers. A thin electrical insulation layer is deposited, followed by the deposition of magnetic side shields. A second DLC layer is deposited and the remaining mask layers are then removed utilizing a chemical mechanical polishing (CMP) liftoff step. Thereafter, the first DLC layer and the second DLC layer are removed and a second magnetic shield layer is then fabricated thereabove.

9. 发明申请

US20060044681A1 Write pole and method of manufacturing the same 失效
标题翻译：写极和制造方法相同
公开(公告)号：US20060044681A1
公开(公告)日：2006-03-02
申请号：US10931649
申请日：2004-08-31
申请人： Quang Le , Howard Zolla , Nian-Xiang Sun
发明人： Quang Le , Howard Zolla , Nian-Xiang Sun
IPC分类号： G11B5/127 , G11B5/23
CPC分类号： G11B5/1475 , G11B5/1278 , G11B5/315 , G11B5/3163 , Y10T29/49041 , Y10T29/49043 , Y10T29/49046
摘要： A magnetic write head and method of fabrication, in accordance with one embodiment of the present invention, includes depositing a first hard mask layer on a layer of magnetic material, depositing a second hard mask layer on the first hard mask layer, depositing a third hard mask layer on the second hard mask layer and forming a soft mask upon the third hard mask layer defining a write pole. The third hard mask layer exposed by the soft mask is etched utilizing a first chemistry, wherein the pattern of the write pole is transferred from the soft mask to the third hard mask. The second and first hard mask layers exposed by the patterned third hard mask are etched utilizing a second chemistry thereby forming a first and second hard mask. The selectivity of the second chemistry favors the first and second hard mask layers over the third hard mask. The layer of magnetic material exposed by the first hard mask is milled such that a beveled write pole is formed. The selectivity of the milling favors the magnetic material over the first hard mask
摘要翻译：根据本发明的一个实施例的磁写头和制造方法包括在第一硬掩模层上沉积第一硬掩模层，在第一硬掩模层上沉积第二硬掩模层，掩模层，并且在限定写入极的第三硬掩模层上形成软掩模。利用第一化学蚀刻由软掩模曝光的第三硬掩模层，其中写极的图案从软掩模转移到第三硬掩模。通过图案化的第三硬掩模暴露的第二和第一硬掩模层利用第二化学物质进行蚀刻，从而形成第一和第二硬掩模。第二化学品的选择性有利于第三硬掩模上的第一和第二硬掩模层。由第一硬掩模曝光的磁性材料层被研磨成形成斜面的写入极。铣削的选择性有利于磁性材料超过第一个硬掩模

10. 发明申请

US20050047014A1 Apparatus for patterning a self-aligned coil using a damascene process 有权
标题翻译：用于使用镶嵌工艺图案化自对准线圈的装置
公开(公告)号：US20050047014A1
公开(公告)日：2005-03-03
申请号：US10652877
申请日：2003-08-29
申请人： Daniel Bedell , Quang Le , Edward Lee , Son Nguyen , Vladimir Nikitin , Murali Ramasubramanian
发明人： Daniel Bedell , Quang Le , Edward Lee , Son Nguyen , Vladimir Nikitin , Murali Ramasubramanian
IPC分类号： G11B5/127 , G11B5/147
CPC分类号： G11B5/127
摘要： An apparatus for patterning a self-aligned coil using a damascene process is disclosed. Coil pockets are formed in a first insulation layer disposed over a first pole layer. A barrier/seed layer is deposited along walls of the coil pockets in the insulation layer. Copper is formed in the coil pockets and over the insulation layer. The copper is planarized down to the insulation layer. The self-aligned coil process packs more copper into the same coil pocket and relaxes the coil alignment tolerance. Protrusions are prevented because of the more efficient and uniform spacing of the coil to reduce heat buildup in the head during a write.
摘要翻译：公开了一种使用镶嵌工艺图案化自对准线圈的装置。在设置在第一极层上的第一绝缘层中形成线圈腔。隔离层/籽晶层沿绝缘层中的线圈袋的壁被沉积。在线圈袋中形成铜，并在绝缘层上形成铜。铜平坦化到绝缘层。自对准线圈工艺将更多的铜包装到相同的线圈袋中，并松弛线圈对准公差。由于在写入期间线圈的间隔更加有效和均匀以减少头部的积聚，所以防止了突起。

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