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1. 发明申请

US20050185334A1 Method of depositing material into high aspect ratio features 有权
公开(公告)号：US20050185334A1
公开(公告)日：2005-08-25
申请号：US11108313
申请日：2005-04-18
申请人： Richard Hsiao , Quang Le , Paul Nguyen , Son Nguyen , Mustafa Pinarbasi , Patrick Webb , Howard Zolla
发明人： Richard Hsiao , Quang Le , Paul Nguyen , Son Nguyen , Mustafa Pinarbasi , Patrick Webb , Howard Zolla
IPC分类号： G11B5/17 , G11B5/31 , G11B5/39 , G11B5/147
CPC分类号： B82Y10/00 , G11B5/17 , G11B5/313 , G11B5/3163 , G11B5/3967 , Y10T29/49043 , Y10T29/49044 , Y10T29/49064 , Y10T29/49073
摘要： The present invention presents a method for fabricating coil elements for magnetic write heads. A coil pattern is formed on a substrate using photolithographic techniques. The substrate is etched using reactive ion etching, creating a coil-shaped trench in the substrate. Thin film seed layers are deposited using ion beam deposition. The substrate is electroplated with metal filling the trenches with metal. The substrate is chemical mechanical polished to remove excess metal and planarize the air bearing surface of the write head.

2. 发明授权

US07362543B2 Magnetoresistive/inductive write head assembly formed with seed layers having a uniform thickness 有权
标题翻译：由具有均匀厚度的种子层形成的磁阻/感应写头组件
公开(公告)号：US07362543B2
公开(公告)日：2008-04-22
申请号：US11108313
申请日：2005-04-18
申请人： Richard Hsiao , Quang Le , Paul P. Nguyen , Son Van Nguyen , Mustafa Pinarbasi , Patrick R. Webb , Howard G. Zolla
发明人： Richard Hsiao , Quang Le , Paul P. Nguyen , Son Van Nguyen , Mustafa Pinarbasi , Patrick R. Webb , Howard G. Zolla
IPC分类号： G11B5/17
CPC分类号： B82Y10/00 , G11B5/17 , G11B5/313 , G11B5/3163 , G11B5/3967 , Y10T29/49043 , Y10T29/49044 , Y10T29/49064 , Y10T29/49073
摘要： The present invention presents a method for fabricating coil elements for magnetic write heads. A coil pattern is formed on a substrate using photolithographic techniques. The substrate is etched using reactive ion etching, creating a coil-shaped trench in the substrate. Thin film seed layers are deposited using ion beam deposition. The substrate is electroplated with metal filling the trenches with metal. The substrate is chemical mechanical polished to remove excess metal and planarize the air bearing surface of the write head.
摘要翻译：本发明提供一种用于制造用于磁写头的线圈元件的方法。使用光刻技术在衬底上形成线圈图案。使用反应离子蚀刻蚀刻衬底，在衬底中产生线圈状沟槽。使用离子束沉积沉积薄膜种子层。用金属电镀衬底，用金属填充沟槽。基板进行化学机械抛光以去除多余的金属并平面化写入头的空气轴承表面。

3. 发明授权

US06948231B2 Method of depositing material into high aspect ratio features 失效
标题翻译：将材料沉积成高纵横比特征的方法
公开(公告)号：US06948231B2
公开(公告)日：2005-09-27
申请号：US10153333
申请日：2002-05-21
申请人： Richard Hsiao , Quang Le , Paul P. Nguyen , Son Van Nguyen , Mustafa Pinarbasi , Patrick R. Webb , Howard G. Zolla
发明人： Richard Hsiao , Quang Le , Paul P. Nguyen , Son Van Nguyen , Mustafa Pinarbasi , Patrick R. Webb , Howard G. Zolla
IPC分类号： G11B5/17 , G11B5/31 , G11B5/39 , G11B5/127 , H04R31/00
CPC分类号： B82Y10/00 , G11B5/17 , G11B5/313 , G11B5/3163 , G11B5/3967 , Y10T29/49043 , Y10T29/49044 , Y10T29/49064 , Y10T29/49073
摘要： The present invention presents a method for fabricating coil elements for magnetic write heads. A coil pattern is formed on a substrate using photolithographic techniques. The substrate is etched using reactive ion etching, creating a coil-shaped trench in the substrate. Thin film seed layers are deposited using ion beam deposition. The substrate is electroplated with metal filling the trenches with metal. The substrate is chemical mechanical polished to remove excess metal and planarize the air bearing surface of the write head.
摘要翻译：本发明提供一种用于制造用于磁写头的线圈元件的方法。使用光刻技术在衬底上形成线圈图案。使用反应离子蚀刻蚀刻衬底，在衬底中产生线圈状沟槽。使用离子束沉积沉积薄膜种子层。用金属电镀衬底，用金属填充沟槽。基板进行化学机械抛光以去除多余的金属并平面化写入头的空气轴承表面。

4. 发明申请

US20050068696A1 Apparatus having improved hard bias properties of layers in a magnetoresistive sensor 失效
标题翻译：具有改进的磁阻传感器中的层的硬偏置特性的装置
公开(公告)号：US20050068696A1
公开(公告)日：2005-03-31
申请号：US10674831
申请日：2003-09-30
申请人： Phong Chau , James Freitag , Mustafa Pinarbasi , Hua Zeng , Howard Zolla
发明人： Phong Chau , James Freitag , Mustafa Pinarbasi , Hua Zeng , Howard Zolla
IPC分类号： G11B5/127 , G11B5/33 , G11B5/39
CPC分类号： G11B5/3932
摘要： An apparatus having improved hard bias properties of layers of a magnetoresistance sensor is disclosed. Properties of the hard bias layer are improved using a seedlayer structure that includes at least a layer of silicon and a layer comprising chromium or chromium molybdenum. Further, benefits are achieved when the seedlayer structure includes a layer of tantalum.
摘要翻译：公开了一种具有改进的磁阻传感器层的硬偏置特性的装置。使用包括至少一层硅层和包含铬或铬钼的层的种子层结构来改善硬偏置层的性质。此外，当种子层结构包括一层钽时，实现了益处。

5. 发明申请

US20120234314A1 ROLL-TO-ROLL REACTOR FOR PROCESSING FLEXIBLE CONTINUOUS WORKPIECE 审中-公开
标题翻译：用于加工柔性连续工件的辊对辊反应器
公开(公告)号：US20120234314A1
公开(公告)日：2012-09-20
申请号：US13100201
申请日：2011-05-03
申请人： Howard Zolla , Jorge Vasquez , James Freitag , Mustafa Pinarbasi , Robert J. Bailey
发明人： Howard Zolla , Jorge Vasquez , James Freitag , Mustafa Pinarbasi , Robert J. Bailey
IPC分类号： F24C3/00
CPC分类号： H01L31/0322 , H01L31/0749 , H01L31/206 , Y02E10/541 , Y02P70/521
摘要： The present invention provides a reactor for preparing thin films of compound semiconductors for photovoltaic devices. The reactor includes a chamber that has a bottom surface that, in some locations, has protrusions that contact the bottom surface of the substrate having the compound semiconductor to provide uniform heating and cooling of the substrate. Interior walls of the chamber can also be lined with high thermal conductivity portions and low thermal conductivity portions interposed between high thermal conductivity portions.
摘要翻译：本发明提供一种用于制备用于光伏器件的化合物半导体的薄膜的反应器。反应器包括具有底表面的室，其在一些位置具有与具有化合物半导体的衬底的底表面接触的突起，以提供衬底的均匀加热和冷却。腔室的内壁还可以衬有高导热部分和介于高导热部分之间的低导热部分。

6. 发明申请

US20100226629A1 ROLL-TO-ROLL PROCESSING AND TOOLS FOR THIN FILM SOLAR CELL MANUFACTURING 审中-公开
标题翻译：薄膜太阳能电池制造的滚动到滚动加工和工具
公开(公告)号：US20100226629A1
公开(公告)日：2010-09-09
申请号：US12721446
申请日：2010-03-10
申请人： Bulent M. Basol , Howard Zolla , Mustafa Pinarbasi , Gregory Norsworthy
发明人： Bulent M. Basol , Howard Zolla , Mustafa Pinarbasi , Gregory Norsworthy
IPC分类号： F26B3/28 , F24F7/00 , F26B3/34
CPC分类号： F27B9/045 , C23C14/5866 , F27B9/063 , F27B9/20 , F27B9/28 , F27B9/36 , H01L21/67109 , H01L21/67126 , H01L21/6776 , H01L31/0322 , Y02E10/541
摘要： Described are roll-to-roll or reel-to-reel thermal or rapid thermal processing tools (reactors) are used to react a precursor layer on a continuous flexible workpiece. Variants of the reactors are described, including a reactor having multiple exhaust outlets connected to a process gap of the reactor between an entrance opening and an exit opening of the process gap; a reactor including multiple gas inlets and exhaust outlets connected to a process gap of the reactor between an entrance opening and an exit opening of the process gap; a reactor including multiple gas inlets and exhaust outlets connected to a process gap of the reactor between an entrance opening and an exit opening of the process gap; and a reactor including multiple gas inlets and exhaust outlets connected to a process gap of the reactor between an entrance opening and an exit opening of the process gap. Also described is an exhaust system that separates the Group VIA material vapors from other gaseous species for re-cycling or easy disposal and techniques and apparatus for efficient removal of moisture from the workpiece before processing precursor layer in the RTP tool.
摘要翻译：描述了卷对卷或卷对卷热或快速热处理工具（反应器）用于使连续柔性工件上的前体层反应。描述了反应器的变型，包括具有多个排气出口的反应器，该排气出口连接到处理间隙的入口和出口之间的反应器的工艺间隙; 包括多个气体入口和排气出口的反应器，所述多个气体入口和排气出口连接到所述反应器的过程间隙，位于所述工艺间隙的入口和出口之间; 包括多个气体入口和排气出口的反应器，所述多个气体入口和排气出口连接到所述反应器的过程间隙，位于所述工艺间隙的入口和出口之间; 以及包括多个气体入口和排气出口的反应器，所述多个气体入口和排气出口连接到处理间隙的入口和出口之间的反应器的工艺间隙。还描述了一种排气系统，其将VIA族VIA气体物质与其他气态物质分离以进行重新循环或易于处置，以及在RTP工具中处理前体层之前有效去除工件的水分的技术和设备。

7. 发明申请

US20130096710A1 TRACKING SYSTEM AND METHOD FOR SOLAR CELL MANUFACTURING 审中-公开
标题翻译：太阳能电池制造的跟踪系统和方法
公开(公告)号：US20130096710A1
公开(公告)日：2013-04-18
申请号：US13275243
申请日：2011-10-17
申请人： Mustafa Pinarbasi , Howard Zolla , Serkan Erdemli
发明人： Mustafa Pinarbasi , Howard Zolla , Serkan Erdemli
IPC分类号： G06F19/00
CPC分类号： H01L31/02 , H01L31/0322 , H01L31/206 , Y02E10/541 , Y02P70/521
摘要： A system and method of manufacturing solar panels whereby parameters about how each cell, each array and each panel are recorded in a database or electronic memory. The cells, arrays and panels are also provided an identification, such as a bar code, to allow for subsequent retrieval of the parameters. The electronic memory is arranged so that different cells, arrays and panels that share the same parameters can be identified.
摘要翻译：一种制造太阳能电池板的系统和方法，其中关于每个电池，每个阵列和每个面板如何记录在数据库或电子存储器中的参数。单元格，阵列和面板还提供了诸如条形码的标识，以允许随后检索参数。电子存储器被布置成可以识别共享相同参数的不同的单元，阵列和面板。

8. 发明申请

US20060114607A1 Electrical connection structure for magnetic heads and method of making the same 失效
标题翻译：磁头的电气连接结构及其制造方法
公开(公告)号：US20060114607A1
公开(公告)日：2006-06-01
申请号：US10999265
申请日：2004-11-30
申请人： Mustafa Pinarbasi , Howard Zolla
发明人： Mustafa Pinarbasi , Howard Zolla
IPC分类号： G11B5/147
CPC分类号： G11B5/3116 , G11B5/3163
摘要： An electrical connection structure suitable for use in a magnetic head and disk drive, as well as a method of making the same, are disclosed. An electrically conductive etch stop layer is formed over a first electrically conductive layer. An electrically conductive diffusion barrier layer is then formed over the electrically conductive etch stop layer, followed by the formation of an insulator layer over the electrically conductive diffusion barrier layer. Next, a patterned photoresist is formed over left and right regions of the insulator layer so as to expose a central region of the insulator layer. Utilizing an etching process with the patterned photoresist in place, insulator materials of the insulator layer in the central region are removed to form a via which exposes electrically conductive materials in the central region. Finally, a second electrically conductive layer is formed within the via over the electrically conductive materials in the central region. Advantageously, the electrically conductive diffusion barrier layer reduces or eliminates oxidation of a top surface of the electrically conducting etch stop layer during the formation of the electrical connection.
摘要翻译：公开了适用于磁头和磁盘驱动器的电连接结构及其制造方法。在第一导电层上形成导电蚀刻停止层。然后在导电蚀刻停止层上形成导电扩散阻挡层，随后在导电扩散阻挡层上形成绝缘体层。接下来，在绝缘体层的左右区域上形成图案化的光致抗蚀剂，以暴露绝缘体层的中心区域。利用图案化的光致抗蚀剂的蚀刻工艺，去除中心区域中的绝缘体层的绝缘体材料以形成在中心区域中暴露导电材料的通孔。最后，在中心区域中的导电材料上的通孔内形成第二导电层。有利地，导电扩散阻挡层在形成电连接期间降低或消除导电蚀刻停止层的顶表面的氧化。

9. 发明申请

US20050066514A1 Method for improving hard bias properties of layers in a magnetoresistive sensor 有权
标题翻译：改善磁阻传感器层的硬偏置特性的方法
公开(公告)号：US20050066514A1
公开(公告)日：2005-03-31
申请号：US10675126
申请日：2003-09-30
申请人： Phong Chau , James Freitag , Mustafa Pinarbasi , Hua Zeng , Howard Zolla
发明人： Phong Chau , James Freitag , Mustafa Pinarbasi , Hua Zeng , Howard Zolla
IPC分类号： G11B5/127 , G11B5/39
CPC分类号： B82Y25/00 , B82Y10/00 , G11B5/3932 , G11B2005/3996 , Y10T29/49004 , Y10T29/49007 , Y10T29/49021 , Y10T29/49043 , Y10T29/49044 , Y10T29/49046 , Y10T29/49052
摘要： A method for improving hard bias properties of layers of a magnetoresistance sensor is disclosed. Properties of the hard bias layer are improved using a seedlayer structure that includes at least a first layer of silicon and a second layer comprising chromium or chromium molybdenum. Further, benefits are achieved when the seedlayer structure includes a layer of tantalum.
摘要翻译：公开了一种用于改善磁阻传感器的层的硬偏置特性的方法。使用包含至少第一层硅的种子层结构和包含铬或铬钼的第二层来改善硬偏置层的性质。此外，当种子层结构包括一层钽时，实现了益处。

10. 发明申请

US20050007705A1 Thermally stable oxidized bias layer structure for magnetoresistive magnetic head for a hard disk drive 失效
标题翻译：用于硬盘驱动器的磁阻磁头的热稳定氧化偏压层结构
公开(公告)号：US20050007705A1
公开(公告)日：2005-01-13
申请号：US10615554
申请日：2003-07-07
申请人： Elizabeth Dobisz , James Freitag , Mustafa Pinarbasi , Patrick Webb
发明人： Elizabeth Dobisz , James Freitag , Mustafa Pinarbasi , Patrick Webb
IPC分类号： G11B5/39
CPC分类号： G11B5/3906 , Y10T29/49032
摘要： The magnetic head of the present invention includes a magnetoresistive read head element in which a magnetic bias layer is deposited across the surface of the wafer above the free magnetic layer. Central portions of the biasing layer that correspond to the read head track width are oxidized to essentially remove the magnetic moment of the bias layer material in those central locations. An oxygen diffusion barrier layer is then deposited upon the oxidized central portions of the biasing layer to prevent diffusion or migration of oxygen from the oxidized central regions of the biasing layer. An insulation layer, a second magnetic shield layer and further structures of the magnetic head are subsequently fabricated.
摘要翻译：本发明的磁头包括磁阻读头元件，其中磁偏置层跨过自由磁层上的晶片表面。对应于读头磁道宽度的偏置层的中心部分被氧化以基本上去除那些中心位置处的偏置层材料的磁矩。然后将氧扩散阻挡层沉积在偏置层的氧化中心部分上，以防止氧从偏置层的氧化中心区域扩散或迁移。随后制造绝缘层，第二磁屏蔽层和磁头的其它结构。

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