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1. 发明授权

US07362543B2 Magnetoresistive/inductive write head assembly formed with seed layers having a uniform thickness 有权
标题翻译：由具有均匀厚度的种子层形成的磁阻/感应写头组件
公开(公告)号：US07362543B2
公开(公告)日：2008-04-22
申请号：US11108313
申请日：2005-04-18
申请人： Richard Hsiao , Quang Le , Paul P. Nguyen , Son Van Nguyen , Mustafa Pinarbasi , Patrick R. Webb , Howard G. Zolla
发明人： Richard Hsiao , Quang Le , Paul P. Nguyen , Son Van Nguyen , Mustafa Pinarbasi , Patrick R. Webb , Howard G. Zolla
IPC分类号： G11B5/17
CPC分类号： B82Y10/00 , G11B5/17 , G11B5/313 , G11B5/3163 , G11B5/3967 , Y10T29/49043 , Y10T29/49044 , Y10T29/49064 , Y10T29/49073
摘要： The present invention presents a method for fabricating coil elements for magnetic write heads. A coil pattern is formed on a substrate using photolithographic techniques. The substrate is etched using reactive ion etching, creating a coil-shaped trench in the substrate. Thin film seed layers are deposited using ion beam deposition. The substrate is electroplated with metal filling the trenches with metal. The substrate is chemical mechanical polished to remove excess metal and planarize the air bearing surface of the write head.
摘要翻译：本发明提供一种用于制造用于磁写头的线圈元件的方法。使用光刻技术在衬底上形成线圈图案。使用反应离子蚀刻蚀刻衬底，在衬底中产生线圈状沟槽。使用离子束沉积沉积薄膜种子层。用金属电镀衬底，用金属填充沟槽。基板进行化学机械抛光以去除多余的金属并平面化写入头的空气轴承表面。

2. 发明授权

US06948231B2 Method of depositing material into high aspect ratio features 失效
标题翻译：将材料沉积成高纵横比特征的方法
公开(公告)号：US06948231B2
公开(公告)日：2005-09-27
申请号：US10153333
申请日：2002-05-21
申请人： Richard Hsiao , Quang Le , Paul P. Nguyen , Son Van Nguyen , Mustafa Pinarbasi , Patrick R. Webb , Howard G. Zolla
发明人： Richard Hsiao , Quang Le , Paul P. Nguyen , Son Van Nguyen , Mustafa Pinarbasi , Patrick R. Webb , Howard G. Zolla
IPC分类号： G11B5/17 , G11B5/31 , G11B5/39 , G11B5/127 , H04R31/00
CPC分类号： B82Y10/00 , G11B5/17 , G11B5/313 , G11B5/3163 , G11B5/3967 , Y10T29/49043 , Y10T29/49044 , Y10T29/49064 , Y10T29/49073
摘要： The present invention presents a method for fabricating coil elements for magnetic write heads. A coil pattern is formed on a substrate using photolithographic techniques. The substrate is etched using reactive ion etching, creating a coil-shaped trench in the substrate. Thin film seed layers are deposited using ion beam deposition. The substrate is electroplated with metal filling the trenches with metal. The substrate is chemical mechanical polished to remove excess metal and planarize the air bearing surface of the write head.
摘要翻译：本发明提供一种用于制造用于磁写头的线圈元件的方法。使用光刻技术在衬底上形成线圈图案。使用反应离子蚀刻蚀刻衬底，在衬底中产生线圈状沟槽。使用离子束沉积沉积薄膜种子层。用金属电镀衬底，用金属填充沟槽。基板进行化学机械抛光以去除多余的金属并平面化写入头的空气轴承表面。

3. 发明申请

US20050185334A1 Method of depositing material into high aspect ratio features 有权
公开(公告)号：US20050185334A1
公开(公告)日：2005-08-25
申请号：US11108313
申请日：2005-04-18
申请人： Richard Hsiao , Quang Le , Paul Nguyen , Son Nguyen , Mustafa Pinarbasi , Patrick Webb , Howard Zolla
发明人： Richard Hsiao , Quang Le , Paul Nguyen , Son Nguyen , Mustafa Pinarbasi , Patrick Webb , Howard Zolla
IPC分类号： G11B5/17 , G11B5/31 , G11B5/39 , G11B5/147
CPC分类号： B82Y10/00 , G11B5/17 , G11B5/313 , G11B5/3163 , G11B5/3967 , Y10T29/49043 , Y10T29/49044 , Y10T29/49064 , Y10T29/49073
摘要： The present invention presents a method for fabricating coil elements for magnetic write heads. A coil pattern is formed on a substrate using photolithographic techniques. The substrate is etched using reactive ion etching, creating a coil-shaped trench in the substrate. Thin film seed layers are deposited using ion beam deposition. The substrate is electroplated with metal filling the trenches with metal. The substrate is chemical mechanical polished to remove excess metal and planarize the air bearing surface of the write head.

4. 发明申请

US20090183675A1 REACTOR TO FORM SOLAR CELL ABSORBERS 审中-公开
标题翻译：形成太阳能电池吸收器的反应器
公开(公告)号：US20090183675A1
公开(公告)日：2009-07-23
申请号：US12334420
申请日：2008-12-12
申请人： Mustafa Pinarbasi , Howard G. Zolla , Ying Yu , Gregory Norsworthy , Jalal Ashjaee , Bulent M. Basol
发明人： Mustafa Pinarbasi , Howard G. Zolla , Ying Yu , Gregory Norsworthy , Jalal Ashjaee , Bulent M. Basol
IPC分类号： B05C13/00
CPC分类号： F27B9/045 , F27B9/063 , F27B9/20 , F27B9/28 , F27B9/36 , H01L21/67109 , H01L21/67126 , H01L21/67706 , H01L21/67721 , H01L21/6776 , H01L31/0322 , Y02E10/541 , Y02P70/521
摘要： A roll-to-roll or reel-to-reel RTP tool including a reactor having a continuous insert placed in a primary gap of the reactor is provided. The primary gap of the reactor is defined by peripheral reactor walls including a top reactor wall, a bottom reactor wall and side reactor walls. The continuous insert includes a continuous process gap through which a continuous workpiece travels between an entry opening and an exit opening of the insert. An inner space exists between at least one of the insert walls and at least a portion of the peripheral reactor walls that make up the primary gap. At least one gas inlet is connected to the inner space, and at least one exhaust opening connects the process gap as well as the inner space to outside the reactor and carries any gaseous products to outside the process gap and the primary gap of the reactor. Sealable doors or web valves seal the entrance and the exit of the process gap when needed before or after the process, especially when the continuous workpiece stops moving.
摘要翻译：提供卷对卷或卷到卷RTP工具，其包括具有放置在反应器的初级间隙中的连续插入物的反应器。反应器的主要间隙由外围反应器壁限定，包括顶部反应器壁，底部反应器壁和侧壁反应器壁。连续的插入件包括连续的工件间隙，连续的工件在插入件的进入开口和出口之间行进。内部空间存在于至少一个插入壁和构成主间隙的外围反应器壁的至少一部分之间。至少一个气体入口连接到内部空间，并且至少一个排气口将过程间隙以及内部空间连接到反应器外部，并将任何气体产物运送到过程间隙和反应器的初级间隙之外。密封的门或腹板阀门在工艺之前或之后需要密封过程间隙的入口和出口，特别是当连续工件停止移动时。

5. 发明授权

US06785101B2 Overlaid lead giant magnetoresistive head with side reading reduction 失效
标题翻译：覆盖铅巨磁阻头，侧读数减少
公开(公告)号：US06785101B2
公开(公告)日：2004-08-31
申请号：US09905522
申请日：2001-07-12
申请人： Patrick Rush Webb , Mustafa Pinarbasi , Richard Hsiao , Hardayal Singh Gill
发明人： Patrick Rush Webb , Mustafa Pinarbasi , Richard Hsiao , Hardayal Singh Gill
IPC分类号： G11B533
CPC分类号： B82Y10/00 , G11B5/3903 , G11B5/398
摘要： The first and second side surfaces of either a bottom spin valve sensor or a top spin valve sensor are notched so as to enable a reduction in the magnetoresistive coefficient of side portions of the sensor beyond the track width region thereby minimizing side reading by the sensor. The first and second notches of the spin valve sensor are then filled with layers in various embodiments of the invention to complete the spin valve sensor.
摘要翻译：底部自旋阀传感器或顶部自旋阀传感器的第一和第二侧表面被切口，以便能够将传感器的侧部的磁阻系数降低到轨道宽度区域之外，从而最小化传感器的侧面读数。然后，在本发明的各种实施例中，自旋阀传感器的第一和第二缺口填充层以完成自旋阀传感器。

6. 发明授权

US06996894B2 Methods of making magnetic heads with improved contiguous junctions 失效
标题翻译：制造具有改进的连续结的磁头的方法
公开(公告)号：US06996894B2
公开(公告)日：2006-02-14
申请号：US10109110
申请日：2002-03-28
申请人： Richard Hsiao , Wipul Pemsiri Jayasekara , Mustafa Pinarbasi , Patrick Rush Webb
发明人： Richard Hsiao , Wipul Pemsiri Jayasekara , Mustafa Pinarbasi , Patrick Rush Webb
IPC分类号： G11B5/127 , B44C1/22
CPC分类号： B82Y10/00 , G11B5/3116 , G11B5/313 , G11B5/3163 , G11B5/3903 , Y10T29/49041 , Y10T29/49043 , Y10T29/49046 , Y10T29/49048 , Y10T29/49052
摘要： Methods of making a read head with improved contiguous junctions are described. After sensor layer materials are deposited over a substrate, a lift-off mask is formed over the sensor layer materials in a central region which is surrounded by end regions. Ion milling is performed with use of the lift-off mask such that the sensor layer materials in the end regions are removed and those in the central region remain to form a read sensor. A high-angle ion mill (e.g. between 45–80 degrees) is then performed to remove redeposited material from side walls of the lift-off mask. Next, a reactive ion etch (RIE) is used to reduce the thickness and the width of the lift-off mask and to remove capping layer materials from the top edges of the read sensor. With the reduced-size lift-off mask in place, hard bias and lead layers are deposited adjacent the read sensor as well as over the mask. The reduced-size lift-off mask allows the amount of hard bias to be increased in the contiguous junction region, and the edges of the leads to be deposited more closely over the top edges of the read sensor. Advantageously, the stability of the sensor is enhanced and the transfer curve is improved using a method which can be controlled independently from the initial mask structure and ion milling process. No critical alignments or multiple photoresist processes are necessary.
摘要翻译：描述了制造具有改进的连续结的读取头的方法。在传感器层材料沉积在衬底上之后，在由端部区域包围的中心区域中的传感器层材料上形成剥离掩模。使用剥离掩模进行离子铣削，使得端部区域中的传感器层材料被去除，并且在中心区域中的传感器层材料保持形成读取传感器。然后执行高角度离子磨（例如在45-80度之间）以从剥离掩模的侧壁去除再沉积的材料。接下来，使用反应离子蚀刻（RIE）来减小剥离掩模的厚度和宽度，并从读取传感器的顶部边缘去除封盖层材料。随着尺寸减小的剥离掩模就位，硬读取传感器以及掩模附近沉积了硬偏置和引线层。缩小尺寸的剥离掩模允许在连续接合区域中增加硬偏置的量，并且引线的边缘更紧密地沉积在读取传感器的顶部边缘上。有利地，增强了传感器的稳定性，并且使用可以独立于初始掩模结构和离子铣削过程进行控制的方法来提高传递曲线。不需要临界对准或多个光刻胶工艺。

7. 发明申请

US20120318319A1 METHODS OF INTERCONNECTING THIN FILM SOLAR CELLS 审中-公开
标题翻译：互膜薄膜太阳能电池的方法
公开(公告)号：US20120318319A1
公开(公告)日：2012-12-20
申请号：US13253921
申请日：2011-10-05
申请人： Mustafa Pinarbasi , Burak Metin
发明人： Mustafa Pinarbasi , Burak Metin
IPC分类号： H01L31/05 , H01L31/18
CPC分类号： H01L31/0201 , H01L31/0504 , Y02E10/50
摘要： A photovoltaic module comprises a first group of solar cells; a second group of solar cells; a first interconnection member extending across a first surface of the first group of solar cells and across a first surface of the second group of solar cells to connect the first and second groups of solar cells in parallel; and a second interconnection member extending across a second surface of the first group of solar cells and across a second surface of the second group of solar cells.
摘要翻译：光伏模块包括第一组太阳能电池; 第二组太阳能电池; 第一互连构件，其横跨第一组太阳能电池的第一表面延伸并穿过第二组太阳能电池的第一表面，以平行地连接第一和第二组太阳能电池; 以及横跨第一组太阳能电池的第二表面并跨越第二组太阳能电池的第二表面延伸的第二互连部件。

8. 发明授权

US08318530B2 Solar cell buffer layer having varying composition 失效
标题翻译：具有不同组成的太阳能电池缓冲层
公开(公告)号：US08318530B2
公开(公告)日：2012-11-27
申请号：US12843778
申请日：2010-07-26
申请人： Bulent M. Basol , Mustafa Pinarbasi , James Freitag
发明人： Bulent M. Basol , Mustafa Pinarbasi , James Freitag
IPC分类号： H01L21/00
CPC分类号： H01L31/206 , C23C18/12 , C23C18/1204 , C23C18/125 , H01L31/022475 , H01L31/022483 , H01L31/0322 , H01L31/0749 , H01L31/1884 , Y02E10/541 , Y02P70/521
摘要： Described is a continuous electroless deposition method and a system to form a solar cell buffer layer with a varying composition through its thickness are provided. The composition of the buffer layer is varied by varying the composition of a chemical bath deposition solution applied onto an absorber surface on which the buffer layer with varying composition is formed. In one example, the buffer layer with varying composition includes a first section containing CdS, a second section containing CdZnS formed on top of the already deposited CdS, and a third section containing ZnS is formed on the second section All the process steps are applied in a roll-to-roll fashion. In another example, a transparent conductive layer including a first transparent conductive film such as aluminum doped zinc oxide and a second transparent conductive film such as indium tin oxide is deposited over the buffer layer with the varying composition.
摘要翻译：描述了一种连续的无电沉积方法，并且提供了通过其厚度形成具有不同组成的太阳能电池缓冲层的系统。通过改变施加到其上形成有不同组成的缓冲层的吸收体表面上的化学浴沉积溶液的组成来改变缓冲层的组成。在一个实例中，具有不同成分的缓冲层包括含有CdS的第一部分，在已经沉积的CdS的顶部上形成的包含CdZnS的第二部分，在第二部分上形成包含ZnS的第三部分。所有的工艺步骤都应用于一对一的滚动时尚。在另一个实例中，包括第一透明导电膜如铝掺杂氧化锌和第二透明导电膜如氧化铟锡的透明导电层沉积在具有不同组成的缓冲层上。

9. 发明申请

US20120266958A1 METHODS OF FORMING RUTHENIUM-GROUP IIIA ALLOYS 审中-公开
标题翻译：形成钌IIIA族合金的方法
公开(公告)号：US20120266958A1
公开(公告)日：2012-10-25
申请号：US13457224
申请日：2012-04-26
申请人： Serdar Aksu , Sarah Lastella , Alan Kleiman-Shwarsctein , Shirish Pethe , Mustafa Pinarbasi
发明人： Serdar Aksu , Sarah Lastella , Alan Kleiman-Shwarsctein , Shirish Pethe , Mustafa Pinarbasi
IPC分类号： H01L31/18 , C22C5/04 , C22C30/00 , H01L31/0216
CPC分类号： C25D5/50 , C23C14/165 , C23C14/5806 , C23C14/5893 , C23C30/00 , C25D3/56 , C25D5/10 , C25D7/126 , H01L51/426 , H01L51/441 , Y02E10/549 , Y02P70/521
摘要： Described are embodiments including an apparatus that provides a thin film solar cell base structure for a photovoltaic device, a method of manufacturing a photovoltaic device, a roll to roll method of manufacturing a thin film solar cell base structure, and a ruthenium alloy sheet material.
摘要翻译：描述了包括提供用于光伏器件的薄膜太阳能电池基底结构的装置，光伏器件的制造方法，制造薄膜太阳能电池基底结构的卷对卷方法以及钌合金片材的实施例。

10. 发明申请

US20110108099A1 METHOD OF FORMING TRANSPARENT ZINC OXIDE LAYERS FOR HIGH EFFICIENCY PHOTOVOLTAIC CELLS 审中-公开
标题翻译：形成用于高效光伏电池的透明氧化锌层的方法
公开(公告)号：US20110108099A1
公开(公告)日：2011-05-12
申请号：US12616578
申请日：2009-11-11
申请人： Mustafa Pinarbasi , James Freitag
发明人： Mustafa Pinarbasi , James Freitag
IPC分类号： H01L31/00 , H01L21/283
CPC分类号： H01L31/022466 , H01L31/022483 , H01L31/0749 , H01L31/1884 , Y02E10/541 , Y02P70/521
摘要： A solar cell including a high electrical resistivity transparent layer formed on a CdS buffer layer is provided. The high electrical resistivity transparent layer includes an intrinsic oxide film formed on the buffer layer and an intermediate oxide film formed on the intrinsic oxide film. The intrinsic oxide film includes undoped zinc oxide and has a thickness range of 10 to 40 nm. The intermediate oxide film includes semi-intrinsic zinc oxide doped with aluminum and has a thickness range of 50-150 nm. The intermediate oxide film has an aluminum concentration of less than 1000 ppm.
摘要翻译：提供了包括形成在CdS缓冲层上的高电阻率透明层的太阳能电池。高电阻率透明层包括形成在缓冲层上的本征氧化膜和形成在本征氧化膜上的中间氧化膜。本发明的氧化物膜包括未掺杂的氧化锌，其厚度范围为10〜40nm。中间氧化膜包括掺杂有铝的半固有氧化锌，其厚度范围为50-150nm。中间氧化膜的铝浓度小于1000ppm。

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