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    • 2. 发明授权
    • Electroless metal adhesion to organic dielectric material with phase
separated morphology
    • 无机金属与相分离形态的有机介电材料粘合
    • US5310580A
    • 1994-05-10
    • US874665
    • 1992-04-27
    • Eugene J. O'SullivanTerrence R. O'TooleJudith M. RoldanLubomyr T. RomankiwCarlos J. SambucettiRavi Saraf
    • Eugene J. O'SullivanTerrence R. O'TooleJudith M. RoldanLubomyr T. RomankiwCarlos J. SambucettiRavi Saraf
    • B05D1/34C23C18/20H05K3/18H05K3/38B05D2/06
    • H05K3/387B05D1/34C23C18/20C23C18/2033C23C18/208C23C18/24C23C18/30H05K2201/0154H05K2201/0212H05K2203/0759H05K2203/0773H05K2203/0793H05K3/181H05K3/381
    • Improved adhesion of electroless metal deposited on an organic dielectric layer with phase separated morphology is accomplished by the spontaneous formation of a morphologically and topographically rough surface. In one embodiment a ternary solution of a polar solvent and two polymer precursors of the same polymer which are separable in two phases of different order are cast in film on a substrate and heated to form two phases of different order to spontaneously produce a rough surface. Upon exposure to an alkaline solution, one phase is etched at a faster rate than the other. Seeding and electroless deposition of a metal on the rough surface results in improved adhesion of the metal to the dielectric layer. In a second embodiment a quaternary solution of a polar solvent, a seeding agent, two polymer precursors of the same polymer which are separable in two phases of different order are cast in a thin film on a substrate and heated to form three phases. Upon curing the precursors there is surface roughening as a result of phase separation. Upon exposure to alkaline solution there is etching of one of the polymer phases at a faster rate and simultaneous opening of the seeding colloid. The rough surface is overcoated with a photoresist, exposed and developed. Subsequent electroless metal deposition results in improved metal to dielectric layer adhesion. The method is applicable to selective deposition of electroless copper onto a polyimide layer.
    • 沉积在具有相分离形态的有机电介质层上的化学金属的改善的粘附通过自发形成形态和形貌上粗糙的表面来实现。 在一个实施方案中,可以将不同顺序的两相分离的相同聚合物的极性溶剂和两种聚合物前体的三元溶液在基材上成膜并加热形成不同阶数的两相以自发产生粗糙表面。 在暴露于碱性溶液时,以比另一相更快的速率蚀刻一相。 在粗糙表面上的金属的接种和无电沉积导致金属对电介质层的附着力提高。 在第二个实施方案中,将极性溶剂,接种剂,可以在两相中分离的相同聚合物的两种聚合物前体的四元溶液浇铸在基材上的薄膜中,并加热形成三相。 固化前体由于相分离而导致表面粗糙化。 暴露在碱性溶液中时,以更快的速率蚀刻聚合物相之一并同时打开接种胶体。 粗糙表面用光致抗蚀剂涂覆,曝光和显影。 随后的无电金属沉积导致金属与电介质层粘附性的改善。 该方法适用于将化学镀铜选择性沉积到聚酰亚胺层上。
    • 5. 发明授权
    • Micro goniometer for scanning microscopy
    • 用于扫描显微镜的微测角仪
    • US6100523A
    • 2000-08-08
    • US960692
    • 1997-10-29
    • Arunava GuptaRavi Saraf
    • Arunava GuptaRavi Saraf
    • G01B7/30G01Q10/00G01Q20/04G01Q60/38G01Q80/00G01Q90/00G11B5/00G11B9/00G01N13/12
    • G01Q70/06B82Y35/00G01B7/30G01Q20/04B82Y10/00G11B2005/0002G11B9/14G11B9/1409G11B9/1418Y10S977/852Y10S977/872
    • A goniometer for performing scanning probe microscopy on a substrate surface is disclosed. The goniometer has a cantilever, having a cantilevered end and a supported end and a tip disposed at the cantilevered end of the cantilever. The goniometer also has a block disposed at the supported end of the cantilever. The block has at least one pair of piezoelectric layers, a pair of electrodes disposed about each individual piezoelectric layer such that varying a potential difference applied between the individual electrodes of a pair of electrodes causes the corresponding piezoelectric layer to deform, and a first insulating material disposed between the individual electrodes for insulating the individual electrodes from each other. The individual piezoelectric layers are deformed at different rates resulting in a deformity of the block and tilting of the cantilever and tip connected therewith. Also disclosed are methods of using the goniometer of the present invention to measure the interactive forces between two molecular structures using a scanning probe microscope equipped with a goniometer of the present invention.
    • 公开了一种用于在衬底表面上执行扫描探针显微镜的测角器。 测角器具有悬臂,具有悬臂端和支撑端,以及设置在悬臂悬臂端的尖端。 测角器还具有设置在悬臂的支撑端处的块。 该块具有至少一对压电层,围绕每个单独的压电层设置的一对电极,使得改变施加在一对电极的各个电极之间的电势差导致相应的压电层变形,并且第一绝缘材料 设置在各个电极之间,用于使各个电极彼此绝缘。 单个压电层以不同的速率变形,导致块的变形和与其连接的悬臂和尖端的倾斜。 还公开了使用本发明的测角器的方法,使用配备有本发明的测角器的扫描探针显微镜来测量两个分子结构之间的相互作用力。
    • 10. 发明授权
    • Micro goniometer for scanning probe microscopy
    • 用于扫描探针显微镜的微测角仪
    • US06552339B1
    • 2003-04-22
    • US09572209
    • 2000-05-17
    • Arunava GuptaRavi Saraf
    • Arunava GuptaRavi Saraf
    • G01N2300
    • G01Q70/06G01B7/30G01Q20/04G11B9/14G11B9/1409G11B9/1418G11B2005/0002Y10S977/852Y10S977/872
    • A goniometer for performing scanning probe microscopy on a substrate surface is disclosed. The goniometer has a cantilever, having a cantilevered end and a supported end and a tip disposed at the cantilevered end of the cantilever. The goniometer also has a block disposed at the supported end of the cantilever. The block has at least one pair of piezoelectric layers, a pair of electrodes disposed about each individual piezoelectric layer such that varying a potential difference applied between the individual electrodes of a pair of electrodes causes the corresponding piezoelectric layer to deform, and a first insulating material disposed between the individual electrodes for insulating the individual electrodes from each other. The individual piezoelectric layers are deformed at different rates resulting in a deformity of the block and tilting of the cantilever and tip connected therewith. Also disclosed are methods of using the goniometer of the present invention to measure the interactive forces between two molecular structures using a scanning probe microscope equipped with a goniometer of the present invention.
    • 公开了一种用于在衬底表面上执行扫描探针显微镜的测角器。 测角器具有悬臂,具有悬臂端和支撑端,以及设置在悬臂悬臂端的尖端。 测角器还具有设置在悬臂的支撑端处的块。 该块具有至少一对压电层,围绕每个单独的压电层设置的一对电极,使得改变施加在一对电极的各个电极之间的电势差导致相应的压电层变形,并且第一绝缘材料 设置在各个电极之间,用于使各个电极彼此绝缘。 单个压电层以不同的速率变形,导致块的变形和与其连接的悬臂和尖端的倾斜。 还公开了使用本发明的测角器的方法,使用配备有本发明的测角器的扫描探针显微镜来测量两个分子结构之间的相互作用力。