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    • 1. 发明授权
    • Wafer edge scrubber and method
    • 晶圆边洗涤器和方法
    • US06299698B1
    • 2001-10-09
    • US09113447
    • 1998-07-10
    • Ramin EmamiBrian J. Brown
    • Ramin EmamiBrian J. Brown
    • B08B104
    • H01L21/67028B08B1/04G11B23/505
    • An inventive brush and scrubbing device is provided for simultaneously scrubbing both planar and profiled (e.g., edge) surfaces of a thin disk such as a semiconductor wafer. The inventive brush has a contact surface having two portions, a planar portion for contacting a planar surface of a wafer, and a profiled portion for contacting an edge surface of a wafer. The profile of the profiled portion preferably follows the edge profile of a wafer to be cleaned by the brush. The profiled portion may have a higher modulus of elasticity than does the planar portion. Preferably the brushes are roller type PVA brushes having a plurality of nodules formed thereon.
    • 提供了一种创新的刷子和擦洗装置,用于同时擦洗诸如半导体晶片的薄盘的平面和成型(例如,边缘)表面。 本发明的刷具有具有两个部分的接触表面,用于接触晶片的平面的平面部分和用于接触晶片的边缘表​​面的成型部分。 成形部分的轮廓优选地遵循待刷清洁的晶片的边缘轮廓。 成型部分可以具有比平坦部分更高的弹性模量。 优选地,刷子是在其上形成有多个结节的辊式PVA刷。
    • 3. 发明申请
    • Multilayer Sheet Stent
    • 多层片材支架
    • US20080071346A1
    • 2008-03-20
    • US11768304
    • 2007-06-26
    • Brian J. Brown
    • Brian J. Brown
    • A61F2/06
    • A61F2/92A61F2/852A61F2/88A61F2/91A61F2/915A61F2002/91525A61F2002/91541A61F2002/9155A61F2002/91575A61F2210/0076A61F2230/0054
    • A rolled sheet multilayer stent having an unrolled state, an outer surface layer, and an inner surface layer and comprising a first sheet and a second sheet. The first and second sheets each have a first edge and at least one cell design comprising a plurality of struts which form a plurality of cells. When the rolled sheet multilayer stent is in an unrolled state, the first and second sheets lay on top of one another so that the first edge of the first sheet and the first edge of the second sheet form a first edge of the rolled sheet multilayer stent. When the rolled sheet multilayer stent is in a rolled state, the first edge of the first sheet is opposite from the second edge of the first sheet and the first edge of the second sheet is opposite from the second edge of the second sheet. The first sheet has a first circumferential length and the second sheet has a second circumferential length where the first circumferential length is greater than the second circumferential length.
    • 一种具有展开状态的卷材多层支架,外表面层和内表面层,并且包括第一片和第二片。 第一和第二片各自具有第一边缘和包括形成多个单元的多个支柱的至少一个单元设计。 当轧制板多层支架处于展开状态时,第一和第二板相互叠置,使得第一板的第一边缘和第二板的第一边缘形成轧制板多层支架的第一边缘 。 当轧制板多层支架处于轧制状态时,第一板的第一边缘与第一板的第二边缘相反,并且第二板的第一边缘与第二板的第二边缘相反。 第一片具有第一圆周长度,第二片具有第二圆周长度,其中第一圆周长度大于第二圆周长度。
    • 5. 发明授权
    • Spin-rinse-dryer
    • 旋转干燥机
    • US07226514B2
    • 2007-06-05
    • US10309832
    • 2002-12-04
    • Anwar HusainBrian J. BrownDavid G. AndeenSvetlana ShermanJohn M. WhiteMichael SugarmanMakoto InagawaManoocher Birang
    • Anwar HusainBrian J. BrownDavid G. AndeenSvetlana ShermanJohn M. WhiteMichael SugarmanMakoto InagawaManoocher Birang
    • B08B3/02
    • H01L21/67028Y10S134/902
    • An inventive vertical spin-dryer is provided. The inventive spin-dryer may have a shield system positioned to receive fluid displaced from a substrate vertically positioned within the spin-dryer. The shield system may have one or more shields positioned to at least partially reflect fluid therefrom as the fluid impacts the shield. The one or more shields are angled to encourage the flow of fluid therealong, and are preferably hydrophilic to prevent droplets from forming. Preferably the shield system has three shields positioned in a horizontally and vertically staggered manner so that fluid is transferred from a substrate facing surface of a first shield to the top or non-substrate-facing surface of an adjacent shield, etc. A pressure gradient may be applied across the interior of the spin-dryer to create an air flow which encourages fluid to travel along the shield system in a desired direction. A sensor adapted to facilitate desired flywheel position, an openable gripper having a remote actuator, a radiused gripper and a source of inert drying gas are also provided in individual embodiments.
    • 提供了一种创造性的垂直旋转干燥器。 本发明的旋转干燥器可以具有屏蔽系统,其被定位成接收从垂直定位在旋转干燥器内的衬底移位的流体。 屏蔽系统可以具有一个或多个屏蔽件,其定位成当流体冲击屏蔽时至少部分地反射流体。 一个或多个屏蔽件成角度以促使其流体流动,并且优选是亲水的以防止液滴形成。 优选地,屏蔽系统具有以水平和垂直交错方式定位的三个屏蔽件,使得流体从第一屏蔽件的面向基板的表面转移到相邻屏蔽件的顶部或非基板面向表面等。压力梯度可以 施加在旋转干燥器的内部以产生鼓风流体沿着屏蔽系统沿所需方向行进的空气流。 在各个实施例中还提供了适于促进期望的飞轮位置的传感器,具有远程致动器的可打开夹具,圆角夹持器和惰性干燥气体源。
    • 7. 发明授权
    • System and method for personalizing an electrical device
    • 电气设备个性化的系统和方法
    • US06912126B2
    • 2005-06-28
    • US10649059
    • 2003-08-27
    • Michael L RuddJerlyn R CulpMichelle R. LehmeierBrian J. BrownJames C Albritton-McDonald
    • Michael L RuddJerlyn R CulpMichelle R. LehmeierBrian J. BrownJames C Albritton-McDonald
    • G06F3/02G06F3/023H01H3/12G06F1/16
    • G06F3/0202G06F3/0238
    • The present disclosure relates to a system and method for personalizing an electrical device. In one arrangement, the system comprises an electrical device having a plurality of button openings that are adapted to receive buttons that control operation of the electrical device, and a plurality of removable buttons that can be interchangeably disposed within the button openings of the electrical device, the buttons being provided with a variety of discrete features so as to be selectable by a user for provision on the electrical device in an arrangement chosen by the user to personalize the device as desired by the user. In one arrangement, the method comprises the steps of receiving selection of a particular device functionality to be associated with a particular encoded button, and assigning the selected device functionality to the encoded button such that when the encoded button is disposed within a button opening of the electrical device and depressed, the selected functionality will be performed by the electrical device.
    • 本公开涉及一种用于个性化电气设备的系统和方法。 在一种布置中,该系统包括具有适于接收控制电气设备的操作的按钮的多个按钮开口的电气设备,以及可互换地设置在电气设备的按钮开口内的多个可拆卸按钮, 按钮被提供有各种离散的特征,以便用户可以选择以在用户根据使用者的需要个性化设备所选择的布置在电气设备上。 在一种布置中,该方法包括以下步骤:接收与特定编码按钮相关联的特定设备功能的选择,以及将所选择的设备功能分配给编码按钮,使得当编码按钮被布置在 电气设备和按下,所选择的功能将由电气设备执行。