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1. 发明授权

US06962007B1 Method and device for drying substrate 失效
标题翻译：干燥基材的方法和装置
公开(公告)号：US06962007B1
公开(公告)日：2005-11-08
申请号：US09889484
申请日：1999-08-10
申请人： Norio Maeda , Koji Sumi , Hiroshi Aihara , Masao Oono , Naoaki Izu Tani
发明人： Norio Maeda , Koji Sumi , Hiroshi Aihara , Masao Oono , Naoaki Izu Tani
IPC分类号： H01L21/304 , B05B7/04 , B08B3/04 , H01L21/00 , F26B17/00
CPC分类号： H01L21/67051 , H01L21/67028 , H01L21/67034
摘要： A device for drying substrates which stores a plurality of substrate (1) and which comprises a processing container (3) to which cleaning fluid (2) after cleaning the substrates (1) is drained and an injection nozzle (5) for injecting drying fluid located at the terminating part of a feed pipe (4) through which liquid drying fluid is supplied, whereby an exhaust equipment is eliminated or simplified, and the drying fluid is fed smoothly.
摘要翻译：一种用于干燥存储多个基板（1）的基板的装置，其特征在于，包括：清洗基板（1）后的清洗液（2）的清洗液（2）的处理容器（3），以及喷射干燥流体位于进料管（4）的终端部分，通过该进料管供应液体干燥流体，从而消除或简化排气设备，并且干燥流体被顺利进给。

2. 发明授权

US07377053B1 Method and device for drying substrate 失效
标题翻译：干燥基材的方法和装置
公开(公告)号：US07377053B1
公开(公告)日：2008-05-27
申请号：US09936618
申请日：2000-01-17
申请人： Norio Maeda , Koji Sumi , Hiroshi Aihara , Masao Oono , Takao Matsumoto , Naoaki Izutani
发明人： Norio Maeda , Koji Sumi , Hiroshi Aihara , Masao Oono , Takao Matsumoto , Naoaki Izutani
IPC分类号： F26B21/00 , F26B21/06 , F26B21/12 , B08B3/02 , B08B3/04 , B08B5/00
CPC分类号： H01L21/67028 , Y10S134/902
摘要： A device for drying substrate comprising a processing vessel housing a specified number of substrates such as semiconductor wafers installed erectedly in parallel to one another, a first substrate supporting member supporting substrates within the processing vessel, the processing fluid supplying section supplying to the processing vessel, the processing fluid for performing processing such as cleaning processing on the substrates, a processing fluid exhausting section exhausting processing fluid from the processing vessel, and a drying fluid supplying section supplying, to the processing vessel, the liquid drops of drying fluid for performing drying processing on the substrates.
摘要翻译：一种用于干燥基板的装置，包括：容纳指定数量的基板的处理容器，所述处理容器彼此平行地安装的半导体晶片，第一基板支撑构件，其支撑处理容器内的基板，供给处理容器的处理流体供应部，用于对基板进行清洗处理的处理流体，来自处理容器的排出处理流体的处理流体排出部分和向处理容器提供用于进行干燥处理的干燥流体液滴的干燥流体供应部分在基板上。

3. 发明授权

US08459767B2 Liquid ejecting head, liquid ejecting apparatus, and actuator 有权
标题翻译：液体喷头，液体喷射装置和致动器
公开(公告)号：US08459767B2
公开(公告)日：2013-06-11
申请号：US12757519
申请日：2010-04-09
申请人： Koji Sumi
发明人： Koji Sumi
IPC分类号： B41J29/38
CPC分类号： B41J2/04581 , B41J2/0459 , B41J2/14233 , H01L41/0973
摘要： A liquid ejecting head includes a flow path forming substrate in which pressure generation chambers are formed. The pressure generation chambers communicate with nozzles that eject liquid droplets. Piezoelectric elements are positioned on the flow path forming substrate to generate pressure changes in the pressure generation chambers. Each piezoelectric element includes a piezoelectric body layer, a first electrode on one side of the piezoelectric body layer, and a second electrode on the opposite side of the piezoelectric body layer. The piezoelectric element is driven in a condition that the relationship between minimum voltage Vmin, and maximum voltage Vmax, which are applied to the piezoelectric element, and peak voltage Vo satisfies the expression, Vmin
摘要翻译：液体喷射头包括形成有压力产生室的流路形成基板。压力产生室与喷射液滴的喷嘴连通。压电元件位于流路形成基板上，以产生压力产生室中的压力变化。每个压电元件包括压电体层，压电体层一侧的第一电极和与压电体层相对的第二电极。压电元件在施加到压电元件的最小电压Vmin和最大电压Vmax之间的关系以及峰值电压Vo满足Vmin

4. 发明授权

US08097048B2 Polyphenylene sulfide member and method for producing the same 有权
标题翻译：聚苯硫醚构件及其制造方法
公开(公告)号：US08097048B2
公开(公告)日：2012-01-17
申请号：US10468255
申请日：2002-02-21
申请人： Kenzo Kubo , Makoto Nakahara , Taizo Horiike , Hideyuki Yamamoto , Ryutaro Ito , Koji Sumi
发明人： Kenzo Kubo , Makoto Nakahara , Taizo Horiike , Hideyuki Yamamoto , Ryutaro Ito , Koji Sumi
IPC分类号： C09B67/00
CPC分类号： C08K5/07 , C08K5/0008 , C08K5/3475 , C08L81/02 , D01F6/76 , Y10T428/2933 , Y10T428/2967
摘要： Disclosed is a PPS member having an excellent fastness to lights such as ultraviolet light, and of which color does not change even when the member is used outdoors, while retaining the characteristics of PPS. The polyphenylene sulfide member according to the present invention is characterized by having a light-fastness rating of Class 1 or higher, against light from an ultraviolet carbon arc lamp, which rating is measured in accordance with JIS L-0842.
摘要翻译：公开了一种具有优异的耐紫外光等耐光性的PPS构件，即使在室外使用时，颜色也不变化，同时保持PPS的特性。根据本发明的聚苯硫醚构件的特征在于耐紫外线弧光灯的耐光性等级为1级以上，该等级根据JIS L-0842测量。

5. 发明授权

US08003161B2 Method of manufacturing dielectric layer and method of manufacturing liquid jet head 有权
标题翻译：制造介质层的方法和制造液体喷头的方法
公开(公告)号：US08003161B2
公开(公告)日：2011-08-23
申请号：US12101057
申请日：2008-04-10
申请人： Akira Kuriki , Hironobu Kazama , Toshinao Shinbo , Koji Sumi
发明人： Akira Kuriki , Hironobu Kazama , Toshinao Shinbo , Koji Sumi
IPC分类号： B05D5/12
CPC分类号： B41J2/161 , B41J2/1628 , B41J2/164 , C23C18/1216 , C23C18/1225 , C23C18/1245 , C23C18/1254 , C23C18/1283 , H01L41/1876 , H01L41/318 , Y10T29/42
摘要： A method of manufacturing a dielectric film includes a coating step of coating sol made of an organic metal compound and forming a dielectric precursor film, a drying step of drying the dielectric precursor film, a degreasing step of degreasing the dielectric precursor film, and a baking step of baking the dielectric precursor film to form a dielectric film. The drying step includes a first drying step of drying the dielectric precursor film by heating the dielectric precursor film to a temperature lower than a boiling point of a solvent which is a main solvent of the sol and then holding the dielectric precursor film at the temperature for a predetermined period of time, and a second drying step of drying the dielectric precursor film further by reheating the dielectric precursor film and then holding the dielectric precursor film at the temperature for a predetermined period of time.
摘要翻译：制造电介质膜的方法包括：涂覆由有机金属化合物制成的溶胶并形成电介质前体膜的涂覆步骤，干燥电介质前体膜的干燥步骤，使电介质前体膜脱脂的脱脂步骤和烘烤烘烤电介质前体膜以形成电介质膜的步骤。干燥步骤包括：第一干燥步骤，通过将电介质前体膜加热到低于作为溶胶的主要溶剂的溶剂的沸点的温度，然后将电介质前体膜保持在温度为以及第二干燥步骤，通过再次加热电介质前体膜，然后将电介质前体膜保持在该温度下进一步干燥电介质前体膜一段预定时间。

6. 发明申请

US20100110148A1 PIEZOELECTRIC ELEMENT AND METHOD FOR MANUFACTURING THE SAME, LIQUID-EJECTING HEAD AND METHOD FOR MANUFACTURING THE SAME, AND LIQUID-EJECTING APPARATUS 有权
标题翻译：压电元件及其制造方法，液体喷射头及其制造方法和液体喷射装置
公开(公告)号：US20100110148A1
公开(公告)日：2010-05-06
申请号：US12611823
申请日：2009-11-03
申请人： Akira Kuriki , Koji Sumi , Tatsuo Sawasaki , Tatsuro Torimoto , Motoki Takabe
发明人： Akira Kuriki , Koji Sumi , Tatsuo Sawasaki , Tatsuro Torimoto , Motoki Takabe
IPC分类号： B41J2/045 , H01L41/16 , H04R17/00
CPC分类号： B41J2/161 , B41J2/1646 , B41J2002/14241 , B41J2002/14419 , B41J2202/03 , H01L41/0973 , H01L41/1876 , H01L41/318 , Y10T29/42
摘要： A piezoelectric element includes a piezoelectric film containing lead (Pb), zirconium (Zr), and titanium (Ti). The piezoelectric film has a composition satisfying the relationship of Zr/(Ti+Zr)>Ti/(Ti+Zr) and has a polarization-electric field hysteresis loop having a Pm/2Pr of 1.95 or more and a Vc(−) of −1.75 V or more, wherein Pm denotes saturation polarization, Pr denotes remanent polarization, and Vc(−) denotes a negative coercive electric field intensity.
摘要翻译：压电元件包括含铅（Pb），锆（Zr）和钛（Ti）的压电膜。该压电膜具有满足Zr /（Ti + Zr）> Ti /（Ti + Zr）的关系的组成，并且具有Pm / 2Pr为1.95以上的极化电场磁滞回线，Vc（ - -1.75V以上，其中Pm表示饱和极化，Pr表示剩余极化，Vc（ - ）表示负矫顽电场强度。

7. 发明授权

US07589450B2 Actuator device, liquid-jet head and liquid-jet apparatus 失效
标题翻译：执行器装置，喷液头和液体喷射装置
公开(公告)号：US07589450B2
公开(公告)日：2009-09-15
申请号：US11482689
申请日：2006-07-10
申请人： Motoki Takabe , Koji Sumi , Naoto Yokoyama
发明人： Motoki Takabe , Koji Sumi , Naoto Yokoyama
IPC分类号： H01L41/00 , H02N2/00
CPC分类号： B41J2/14233 , B41J2002/14241 , B41J2002/14419 , B41J2202/03 , B41J2202/20 , H01L41/0973 , H01L41/1876 , H01L41/318 , H01L41/319
摘要： An actuator device includes: a layer provided on a single crystal silicon (Si) substrate, and made of silicon dioxide (SiO2); at least one buffer layer provided on the layer made of silicon dioxide (SiO2); a base layer provided on the buffer layer, and made of lanthanum nickel oxide (LNO) having the (100m) plane orientation; and a piezoelectric element. The piezoelectric element includes: a lower electrode provided on the base layer, and made of platinum (Pt) having the (100) plane orientation; a piezoelectric layer made of a ferroelectric layer whose plane orientation is the (100) orientation, the piezoelectric layer formed on the lower electrode by epitaxial growth where a crystal system of at least one kind selected from a group consisting of a tetragonal system, a monoclinic system and a rhombohedral system dominates the other crystal systems; and an upper electrode provided on the piezoelectric layer.
摘要翻译：致动器装置包括：设置在单晶硅（Si）衬底上的由二氧化硅（SiO 2）制成的层; 提供在由二氧化硅（SiO 2）制成的层上的至少一个缓冲层; 设置在缓冲层上的由具有（100μm）面取向的氧化镧（LNO）构成的基层; 和压电元件。压电元件包括：设置在基底层上并由具有（100）面取向的铂（Pt）制成的下电极; 由平面取向为（100）取向的铁电体层构成的压电层，通过外延生长在下部电极上形成的压电体，其中选自四方晶系，单斜晶系系统和菱方系统主导其他晶体系统; 以及设置在压电层上的上电极。

8. 发明授权

US07568792B2 Piezoelectric element, actuator device, liquid-jet head and liquid-jet apparatus 有权
标题翻译：压电元件，致动器装置，喷液头和液体喷射装置
公开(公告)号：US07568792B2
公开(公告)日：2009-08-04
申请号：US11389218
申请日：2006-03-27
申请人： Motoki Takabe , Koji Sumi
发明人： Motoki Takabe , Koji Sumi
IPC分类号： B41J2/045 , H01L41/00
CPC分类号： B41J2/1629 , B41J2/14233 , B41J2/161 , B41J2/1632 , B41J2002/14241 , B41J2002/14419 , B41J2202/03 , B41J2202/11 , H01L41/0973 , H01L41/1876 , H01L41/318 , H01L41/319
摘要： Provided are an a piezoelectric element, an actuator device, a liquid-jet head and a liquid-jet apparatus which exhibit excellent displacement characteristics; the piezoelectric element is configured of a lower electrode, a piezoelectric layer and an upper electrode; and the half-value width of the (100) planes is not larger than 0.2 degrees, and the half-value width of the (200) planes is not smaller than 0.25 degrees, when the face surface of the piezoelectric layer is measured by means of the wide-angle X-ray diffraction method.
摘要翻译：提供具有优异的位移特性的压电元件，致动器装置，液体喷射头和液体喷射装置; 压电元件由下电极，压电层和上电极构成; 并且（100）面的半值宽度不大于0.2度，并且当通过装置测量压电层的表面时，（200）面的半值宽度不小于0.25度的广角X射线衍射法。

9. 发明授权

US07268472B2 Piezoelectric device, liquid jetting head, ferroelectric device, electronic device and methods for manufacturing these devices 失效
标题翻译：压电元件，液体喷射头，铁电元件，电子器件及其制造方法
公开(公告)号：US07268472B2
公开(公告)日：2007-09-11
申请号：US10705251
申请日：2003-11-12
申请人： Takamitsu Higuchi , Setsuya Iwashita , Hiromu Miyazawa , Koji Sumi , Masami Murai , Maki Ito , Li Xin-Shan
发明人： Takamitsu Higuchi , Setsuya Iwashita , Hiromu Miyazawa , Koji Sumi , Masami Murai , Maki Ito , Li Xin-Shan
IPC分类号： H01L41/047 , H01L41/22
CPC分类号： H01L41/04 , B41J2/161 , B41J2/1623 , B41J2/1628 , B41J2/1629 , B41J2/1634 , B41J2/1642 , B41J2/1643 , B41J2/1645 , B41J2/1646 , H01L21/31691 , H01L41/0973 , H01L41/316
摘要： An intermediate film (15, 12, 53) is formed on a substrate (11, 52), a bottom electrode (13, 542) is formed on top of this intermediate film, a ferroelectric film (24) or piezoelectric film (543) is formed on top of this bottom electrode by an ion beam assist method, and a top electrode (25, 541) is formed on top of this ferroelectric film or piezoelectric film. The ferroelectric film or piezoelectric film is formed by PZT, BST or a relaxer material. As a result of the use of an ion beam assist method in the formation of any one of the intermediate film, bottom electrode, ferroelectric film or piezoelectric film, a piezoelectric device or ferroelectric device which has a piezoelectric film or ferroelectric film with an in-plane orientation can be manufactured with good efficiency.
摘要翻译：在基板（11,52）上形成中间膜（15,12,53），在该中间膜的顶部，铁电体膜（24）或压电膜（543）上形成有底部电极（13,542）通过离子束辅助法形成在该底部电极的顶部上，并且在该铁电体膜或压电膜的顶部上形成顶部电极（25,541）。铁电体膜或压电膜由PZT，BST或松弛材料形成。通过使用离子束辅助方法来形成中间膜，底部电极，铁电体膜或压电膜中的任一个的结果，具有压电膜或铁电体膜的压电器件或铁电体器件，可以以高效率制造平面取向。

10. 发明申请

US20070035590A1 Actuator device, liquid-jet head liquid-jet apparatus 有权
标题翻译：致动器装置，喷液头喷液装置
公开(公告)号：US20070035590A1
公开(公告)日：2007-02-15
申请号：US11501040
申请日：2006-08-09
申请人： Koji Sumi
发明人： Koji Sumi
IPC分类号： B41J2/045
CPC分类号： B41J2/14233 , B41J2002/14241 , B41J2202/11
摘要： An actuator device including vibration plates formed on one side of a substrate; and piezoelectric elements mounted through the vibration plates and each including a lower electrode, a piezoelectric layer, and an upper electrode, wherein a ratio d31/S11E of a piezoelectric constant d31 of the piezoelectric layer to an elastic compliance S11E of the piezoelectric layer is greater than 5 C/m2, and the elastic compliance S11E of each vibration plate is greater than 2×10−8 m2/N.
摘要翻译：一种致动器装置，包括形成在基板的一侧上的振动板; 以及压电元件，其通过振动板安装并且各自包括下电极，压电层和上电极，其中比率d 31 压电层的压电常数d 31> 30 与压电层的弹性柔量相差大于5 C / m 2，并且每个振动板的弹性柔顺度S 11大于2×10 -8。 m 2 / N。

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