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1. 发明授权

US08003161B2 Method of manufacturing dielectric layer and method of manufacturing liquid jet head 有权
标题翻译：制造介质层的方法和制造液体喷头的方法
公开(公告)号：US08003161B2
公开(公告)日：2011-08-23
申请号：US12101057
申请日：2008-04-10
申请人： Akira Kuriki , Hironobu Kazama , Toshinao Shinbo , Koji Sumi
发明人： Akira Kuriki , Hironobu Kazama , Toshinao Shinbo , Koji Sumi
IPC分类号： B05D5/12
CPC分类号： B41J2/161 , B41J2/1628 , B41J2/164 , C23C18/1216 , C23C18/1225 , C23C18/1245 , C23C18/1254 , C23C18/1283 , H01L41/1876 , H01L41/318 , Y10T29/42
摘要： A method of manufacturing a dielectric film includes a coating step of coating sol made of an organic metal compound and forming a dielectric precursor film, a drying step of drying the dielectric precursor film, a degreasing step of degreasing the dielectric precursor film, and a baking step of baking the dielectric precursor film to form a dielectric film. The drying step includes a first drying step of drying the dielectric precursor film by heating the dielectric precursor film to a temperature lower than a boiling point of a solvent which is a main solvent of the sol and then holding the dielectric precursor film at the temperature for a predetermined period of time, and a second drying step of drying the dielectric precursor film further by reheating the dielectric precursor film and then holding the dielectric precursor film at the temperature for a predetermined period of time.
摘要翻译：制造电介质膜的方法包括：涂覆由有机金属化合物制成的溶胶并形成电介质前体膜的涂覆步骤，干燥电介质前体膜的干燥步骤，使电介质前体膜脱脂的脱脂步骤和烘烤烘烤电介质前体膜以形成电介质膜的步骤。干燥步骤包括：第一干燥步骤，通过将电介质前体膜加热到低于作为溶胶的主要溶剂的溶剂的沸点的温度，然后将电介质前体膜保持在温度为以及第二干燥步骤，通过再次加热电介质前体膜，然后将电介质前体膜保持在该温度下进一步干燥电介质前体膜一段预定时间。

2. 发明申请

US20050208208A1 Method of manufacturing dielectric layer and method of manufacturing liquid jet head 有权
标题翻译：制造介质层的方法和制造液体喷头的方法
公开(公告)号：US20050208208A1
公开(公告)日：2005-09-22
申请号：US10998195
申请日：2004-11-29
申请人： Akira Kuriki , Hironobu Kazama , Toshinao Shinbo , Koji Sumi
发明人： Akira Kuriki , Hironobu Kazama , Toshinao Shinbo , Koji Sumi
IPC分类号： H01L21/316 , B05D5/12 , B41J2/14 , B41J2/16 , C23C18/12 , H01L41/09 , H01L41/18 , H01L41/187 , H01L41/22 , H01L41/318 , H01L41/39 , H01L41/43
CPC分类号： B41J2/161 , B41J2/1628 , B41J2/164 , C23C18/1216 , C23C18/1225 , C23C18/1245 , C23C18/1254 , C23C18/1283 , H01L41/1876 , H01L41/318 , Y10T29/42
摘要： A method of manufacturing a dielectric film includes a coating step of coating sol made of an organic metal compound and forming a dielectric precursor film, a drying step of drying the dielectric precursor film, a degreasing step of degreasing the dielectric precursor film, and a baking step of baking the dielectric precursor film to form a dielectric film. The drying step includes a first drying step of drying the dielectric precursor film by heating the dielectric precursor film to a temperature lower than a boiling point of a solvent which is a main solvent of the sol and then holding the dielectric precursor film at the temperature for a predetermined period of time, and a second drying step of drying the dielectric precursor film further by reheating the dielectric precursor film and then holding the dielectric precursor film at the temperature for a predetermined period of time.
摘要翻译：制造电介质膜的方法包括：涂覆由有机金属化合物制成的溶胶并形成电介质前体膜的涂覆步骤，干燥电介质前体膜的干燥步骤，使电介质前体膜脱脂的脱脂步骤和烘烤烘烤电介质前体膜以形成电介质膜的步骤。干燥步骤包括：第一干燥步骤，通过将电介质前体膜加热到低于作为溶胶的主要溶剂的溶剂的沸点的温度，然后将电介质前体膜保持在温度为以及第二干燥步骤，通过再次加热电介质前体膜，然后将电介质前体膜保持在该温度下进一步干燥电介质前体膜一段预定时间。

3. 发明授权

US07579041B2 Method of manufacturing dielectric layer and method of manufacturing liquid jet head 有权
标题翻译：制造介质层的方法和制造液体喷头的方法
公开(公告)号：US07579041B2
公开(公告)日：2009-08-25
申请号：US10998195
申请日：2004-11-29
申请人： Akira Kuriki , Hironobu Kazama , Toshinao Shinbo , Koji Sumi
发明人： Akira Kuriki , Hironobu Kazama , Toshinao Shinbo , Koji Sumi
IPC分类号： B05D5/12 , H01L41/22
CPC分类号： B41J2/161 , B41J2/1628 , B41J2/164 , C23C18/1216 , C23C18/1225 , C23C18/1245 , C23C18/1254 , C23C18/1283 , H01L41/1876 , H01L41/318 , Y10T29/42
摘要： A method of manufacturing a dielectric film includes a coating step of coating sol made of an organic metal compound and forming a dielectric precursor film, a drying step of drying the dielectric precursor film, a degreasing step of degreasing the dielectric precursor film, and a baking step of baking the dielectric precursor film to form a dielectric film. The drying step includes a first drying step of drying the dielectric precursor film by heating the dielectric precursor film to a temperature lower than a boiling point of a solvent which is a main solvent of the sol and then holding the dielectric precursor film at the temperature for a predetermined period of time, and a second drying step of drying the dielectric precursor film further by reheating the dielectric precursor film and then holding the dielectric precursor film at the temperature for a predetermined period of time.
摘要翻译：制造电介质膜的方法包括：涂覆由有机金属化合物制成的溶胶并形成电介质前体膜的涂覆步骤，干燥电介质前体膜的干燥步骤，使电介质前体膜脱脂的脱脂步骤和烘烤烘烤电介质前体膜以形成电介质膜的步骤。干燥步骤包括：第一干燥步骤，通过将电介质前体膜加热到低于作为溶胶的主要溶剂的溶剂的沸点的温度，然后将电介质前体膜保持在温度为以及第二干燥步骤，通过再次加热电介质前体膜，然后将电介质前体膜保持在该温度下进一步干燥电介质前体膜一段预定时间。

4. 发明申请

US20080199599A1 METHOD OF MANUFACTURING DIELECTRIC LAYER AND METHOD OF MANUFACTURING LIQUID JET HEAD 有权
标题翻译：制造介质层的方法及制造液体喷射头的方法
公开(公告)号：US20080199599A1
公开(公告)日：2008-08-21
申请号：US12101057
申请日：2008-04-10
申请人： Akira Kuriki , Hironobu Kazama , Toshinao Shinbo , Koji Sumi
发明人： Akira Kuriki , Hironobu Kazama , Toshinao Shinbo , Koji Sumi
IPC分类号： B05D5/12
CPC分类号： B41J2/161 , B41J2/1628 , B41J2/164 , C23C18/1216 , C23C18/1225 , C23C18/1245 , C23C18/1254 , C23C18/1283 , H01L41/1876 , H01L41/318 , Y10T29/42
摘要： A method of manufacturing a dielectric film includes a coating step of coating sol made of an organic metal compound and forming a dielectric precursor film, a drying step of drying the dielectric precursor film, a degreasing step of degreasing the dielectric precursor film, and a baking step of baking the dielectric precursor film to form a dielectric film. The drying step includes a first drying step of drying the dielectric precursor film by heating the dielectric precursor film to a temperature lower than a boiling point of a solvent which is a main solvent of the sol and then holding the dielectric precursor film at the temperature for a predetermined period of time, and a second drying step of drying the dielectric precursor film further by reheating the dielectric precursor film and then holding the dielectric precursor film at the temperature for a predetermined period of time.
摘要翻译：制造电介质膜的方法包括：涂覆由有机金属化合物制成的溶胶并形成电介质前体膜的涂覆步骤，干燥电介质前体膜的干燥步骤，使电介质前体膜脱脂的脱脂步骤和烘烤烘烤电介质前体膜以形成电介质膜的步骤。干燥步骤包括：第一干燥步骤，通过将电介质前体膜加热到低于作为溶胶的主要溶剂的溶剂的沸点的温度，然后将电介质前体膜保持在温度为以及第二干燥步骤，通过再次加热电介质前体膜，然后将电介质前体膜保持在该温度下进一步干燥电介质前体膜一段预定时间。

5. 发明授权

US07757362B2 Method for producing dielectric film, method for producing piezoelectric element, method for producing liquid-jet head, dielectric film, piezoelectric element, and liquid-jet apparatus 有权
标题翻译：电介质膜的制造方法，压电元件的制造方法，液体喷射头的制造方法，电介质膜，压电元件，液体喷射装置
公开(公告)号：US07757362B2
公开(公告)日：2010-07-20
申请号：US12167930
申请日：2008-07-03
申请人： Akira Kuriki , Koji Sumi , Hironobu Kazama , Motoki Takabe , Motohisa Noguchi
发明人： Akira Kuriki , Koji Sumi , Hironobu Kazama , Motoki Takabe , Motohisa Noguchi
IPC分类号： H01L41/22 , H04R17/00
CPC分类号： H01L41/318 , B41J2/14233 , B41J2/161 , B41J2/1623 , B41J2/1629 , B41J2/1632 , B41J2/1646 , B41J2002/14241 , B41J2002/14419 , C23C18/1216 , C23C18/1283 , H01L41/0973 , H01L41/1876 , Y10T29/42 , Y10T29/435 , Y10T29/49155
摘要： A method for producing a dielectric film, comprising: a coating step of coating a colloidal solution containing an organometallic compound containing a metal constituting a dielectric film containing at least a lead component to form a dielectric precursor film; a drying step of drying the dielectric precursor film; a degreasing step of degreasing the dielectric precursor film; and a firing step of firing the dielectric precursor film to form a dielectric film, and wherein the drying step includes a first drying step of heating the dielectric precursor film to a temperature lower than the boiling point of a solvent, which is a main solvent of the material, and holding the dielectric precursor film at the temperature for a certain period of time to dry the dielectric precursor film, and a second drying step of drying the dielectric precursor film at a temperature in the range of 140° C., to 170° C., the degreasing step is performed at a degreasing temperature of 350° C. to 450° C. and at a heating-up rate of 15 [° C./sec] or higher, and the firing step is performed at a heating-up rate of 100 [° C./sec] to 150 [° C./sec].
摘要翻译：一种电介质膜的制造方法，其特征在于，包括：涂布包含含有构成含有至少含有铅成分的电介质膜的金属的有机金属化合物的胶体溶液以形成电介质前体膜的涂布步骤; 干燥所述电介质前体膜的干燥步骤; 脱脂步骤，使所述电介质前体膜脱脂; 以及烧制电介质前体膜以形成电介质膜的烧制步骤，其中干燥步骤包括将电介质前体膜加热至低于作为主要溶剂的溶剂的沸点的温度的第一干燥步骤并且将介电前体膜在该温度下保持一定时间以干燥电介质前体膜;以及第二干燥步骤，在140℃的温度下将电介质前体膜干燥至170℃ ℃，脱脂步骤在350℃至450℃的脱脂温度和15℃/秒以上的加热速率下进行，并且烧成步骤在升温速度为100 [℃/秒]至150℃/秒。

6. 发明申请

US20060230590A1 Method for producing dielectric film, method for producing piezoelectric element, method for producing liquid-jet head, dielectric film, piezoelectric element, and liquid-jet apparatus 有权
标题翻译：电介质膜的制造方法，压电元件的制造方法，液体喷射头的制造方法，电介质膜，压电元件，液体喷射装置
公开(公告)号：US20060230590A1
公开(公告)日：2006-10-19
申请号：US11392757
申请日：2006-03-30
申请人： Akira Kuriki , Koji Sumi , Hironobu Kazama , Motoki Takabe , Motohisa Noguchi
发明人： Akira Kuriki , Koji Sumi , Hironobu Kazama , Motoki Takabe , Motohisa Noguchi
IPC分类号： H04R17/00
CPC分类号： H01L41/318 , B41J2/14233 , B41J2/161 , B41J2/1623 , B41J2/1629 , B41J2/1632 , B41J2/1646 , B41J2002/14241 , B41J2002/14419 , C23C18/1216 , C23C18/1283 , H01L41/0973 , H01L41/1876 , Y10T29/42 , Y10T29/435 , Y10T29/49155
摘要： A method for producing a dielectric film, comprising: a coating step of coating a colloidal solution containing an organometallic compound containing a metal constituting a dielectric film containing at least a lead component to form a dielectric precursor film; a drying step of drying the dielectric precursor film; a degreasing step of degreasing the dielectric precursor film; and a sintering step of sintering the dielectric precursor film to form a dielectric film, and wherein the drying step includes a first drying step of heating the dielectric precursor film to a temperature lower than the boiling point of a solvent, which is a main solvent of the material, and holding the dielectric precursor film at the temperature for a certain period of time to dry the dielectric precursor film, and a second drying step of drying the dielectric precursor film at a temperature in the range of 140° C. to 170° C., the degreasing step is performed at a degreasing temperature of 350° C. to 450° C. and at a heating-up rate of 15 [° C./sec] or higher, and the sintering step is performed at a heating-up rate of 100 [° C/sec] to 150 [° C./sec].
摘要翻译：一种电介质膜的制造方法，其特征在于，包括：涂布包含含有构成含有至少含有铅成分的电介质膜的金属的有机金属化合物的胶体溶液以形成电介质前体膜的涂布步骤; 干燥所述电介质前体膜的干燥步骤; 脱脂步骤，使所述电介质前体膜脱脂; 以及烧结所述电介质前体膜以形成电介质膜的烧结步骤，其中所述干燥步骤包括将所述电介质前体膜加热到低于作为主要溶剂的溶剂的沸点的温度的第一干燥步骤并将电介质前体膜在该温度下保持一定时间以干燥电介质前体膜;以及第二干燥步骤，在140℃至170℃的温度下干燥该电介质前体膜在脱脂温度为350℃〜450℃，升温速度为15℃/秒以上的条件下进行脱脂工序，烧结工序在加热升速率为100 [℃/秒]至150℃/秒。

7. 发明授权

US07819508B2 Dielectric film and piezoelectric element 有权
标题翻译：电介质膜和压电元件
公开(公告)号：US07819508B2
公开(公告)日：2010-10-26
申请号：US11392757
申请日：2006-03-30
申请人： Akira Kuriki , Koji Sumi , Hironobu Kazama , Motoki Takabe , Motohisa Noguchi
发明人： Akira Kuriki , Koji Sumi , Hironobu Kazama , Motoki Takabe , Motohisa Noguchi
IPC分类号： B41J2/45 , H01L41/08 , C04B35/00
CPC分类号： H01L41/318 , B41J2/14233 , B41J2/161 , B41J2/1623 , B41J2/1629 , B41J2/1632 , B41J2/1646 , B41J2002/14241 , B41J2002/14419 , C23C18/1216 , C23C18/1283 , H01L41/0973 , H01L41/1876 , Y10T29/42 , Y10T29/435 , Y10T29/49155
摘要： A method for producing a dielectric film, comprising: a coating step of coating a colloidal solution containing an organometallic compound containing a metal constituting a dielectric film containing at least a lead component to form a dielectric precursor film; a drying step of drying the dielectric precursor film; a degreasing step of degreasing the dielectric precursor film; and a sintering step of sintering the dielectric precursor film to form a dielectric film, and wherein the drying step includes a first drying step of heating the dielectric precursor film to a temperature lower than the boiling point of a solvent, which is a main solvent of the material, and holding the dielectric precursor film at the temperature for a certain period of time to dry the dielectric precursor film, and a second drying step of drying the dielectric precursor film at a temperature in the range of 140° C. to 170° C., the degreasing step is performed at a degreasing temperature of 350° C. to 450° C. and at a heating-up rate of 15 [° C./sec] or higher, and the sintering step is performed at a heating-up rate of 100 [° C./sec] to 150 [° C./sec].
摘要翻译：一种电介质膜的制造方法，其特征在于，包括：涂布包含含有构成含有至少含有铅成分的电介质膜的金属的有机金属化合物的胶体溶液以形成电介质前体膜的涂布步骤; 干燥所述电介质前体膜的干燥步骤; 脱脂步骤，使所述电介质前体膜脱脂; 以及烧结所述电介质前体膜以形成电介质膜的烧结步骤，其中所述干燥步骤包括将所述电介质前体膜加热到低于作为主要溶剂的溶剂的沸点的温度的第一干燥步骤并将电介质前体膜在该温度下保持一定时间以干燥电介质前体膜;以及第二干燥步骤，在140℃至170℃的温度下干燥该电介质前体膜在脱脂温度为350℃〜450℃，升温速度为15℃/秒以上的条件下进行脱脂工序，烧结工序在加热升速率为100 [℃/秒]至150℃/秒。

8. 发明授权

US07896480B2 Liquid jet head and a piezoelectric element 有权
标题翻译：液体喷头和压电元件
公开(公告)号：US07896480B2
公开(公告)日：2011-03-01
申请号：US12433204
申请日：2009-04-30
申请人： Hironobu Kazama , Yuka Yonekura , Koji Sumi
发明人： Hironobu Kazama , Yuka Yonekura , Koji Sumi
IPC分类号： B41J2/045
CPC分类号： B41J2/14233 , B41J2002/14241 , B41J2002/14419 , B41J2002/14491 , B41J2202/03 , H01L41/0973
摘要： A liquid jet head includes a passage-forming substrate composed of a crystal substrate provided with pressure-generating chambers communicating with nozzle orifices and piezoelectric elements disposed on the passage-forming substrate and each composed of a lower electrode, a piezoelectric material layer, and an upper electrode to cause a change of pressure in the pressure-generating chamber. The piezoelectric material layer has a thickness of 5 μm or less and is made of a perovskite-type crystal and is configured such that the distance between an X-ray diffraction peak position derived from the (220) plane of the passage-forming substrate and an X-ray diffraction peak position derived from the (110) plane of the piezoelectric material layer is within a range of 2θ=16.262±0.1 degrees.
摘要翻译：液体喷射头包括通道形成基板，该通道形成基板由具有与喷嘴孔连通的压力产生室和设置在通道形成基板上的压电元件的晶体基板构成，并且每个由下电极，压电材料层和上部电极引起压力发生室中的压力变化。压电材料层的厚度为5μm以下，由钙钛矿型晶体构成，使得从通道形成基板的（220）面导出的X射线衍射峰值位置与衍生自压电材料层的（110）面的X射线衍射峰位置在2θ= 16.262±0.1度的范围内。

9. 发明授权

US07896479B2 Liquid jet head and a piezoelectric element 有权
标题翻译：液体喷头和压电元件
公开(公告)号：US07896479B2
公开(公告)日：2011-03-01
申请号：US12433177
申请日：2009-04-30
申请人： Hironobu Kazama , Yuka Yonekura , Koji Sumi
发明人： Hironobu Kazama , Yuka Yonekura , Koji Sumi
IPC分类号： B41J2/045
CPC分类号： B41J2/14233 , B41J2002/14241 , B41J2002/14419 , B41J2002/14491 , B41J2202/03 , H01L41/0973
摘要： A liquid jet head has a channel-forming substrate composed of a crystal substrate having a pressure-generating chamber linked to a nozzle opening as well as a piezoelectric element composed of a lower electrode, a piezoelectric layer, and an upper electrode and formed on the channel-forming substrate so that the pressure in the pressure-generating chamber can be changed, with the piezoelectric layer having a thickness equal to or smaller than 5 μm, made of a perovskite-type crystal, and formed so that the interval between the X-ray diffraction peak position derived from the (220) plane of the channel-forming substrate and the X-ray diffraction peak position derived from the (111) plane of the piezoelectric layer falls within the range 2θ=9.059±0.1°.
摘要翻译：液体喷射头具有由具有连接到喷嘴开口的压力产生室的晶体基板以及由下电极，压电层和上电极构成的压电元件构成的沟道形成基板，使得压电层的厚度等于或小于5μm，由钙钛矿型晶体制成，使得压力发生室中的压力可以改变，使得X 衍生自沟道形成基板的（220）面的衍射峰值位置和从压电层的（111）面导出的X射线衍射峰值位于2＆amp; t = 9.059±0.1°的范围内。

10. 发明授权

US07918543B2 Liquid jet head and an actuator apparatus 有权
标题翻译：液体喷头和致动器装置
公开(公告)号：US07918543B2
公开(公告)日：2011-04-05
申请号：US12433213
申请日：2009-04-30
申请人： Hironobu Kazama , Yuka Yonekura , Koji Sumi
发明人： Hironobu Kazama , Yuka Yonekura , Koji Sumi
IPC分类号： B41J2/045
CPC分类号： B41J2/161 , B41J2/14233 , B41J2/1634 , B41J2/1646 , H01L41/0477 , H01L41/0973 , H01L41/18
摘要： A liquid jet head includes a flow passage forming substrate formed of a crystal substrate provided with a pressure generating chamber communicating with nozzle openings, and a piezoelectric element including a lower electrode, a piezoelectric layer, and an upper electrode, which are provided on the flow passage forming substrate to change pressure in the pressure generating chamber. The piezoelectric layer has a thickness of 5 μm or less and is formed of perovskite type crystals, and the distance between a diffraction peak position A of an X-ray derived from a surface (220) of the flow passage forming substrate and a diffraction peak position B of an X-ray derived from a surface (100) of the piezoelectric layer is within the range of 2θ=25.487±0.1°.
摘要翻译：液体喷射头包括由具有与喷嘴开口连通的压力产生室的晶体基板形成的流路形成基板，以及设置在该流体上的压电元件，包括下电极，压电层和上电极通道形成基板以改变压力发生室中的压力。压电体层的厚度为5μm以下，由钙钛矿型结晶构成，衍生自流路形成用基材的表面（220）的X射线的衍射峰值位置A与衍射峰来自压电体层的表面（100）的X射线的位置B在2θ的范围内= 25.487±0.1°。

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