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    • 10. 发明授权
    • Charged beam pattern defect inspection apparatus
    • 充电光束图案缺陷检查装置
    • US4794646A
    • 1988-12-27
    • US896213
    • 1986-08-14
    • Susumu TakeuchiKoichi Moriizumi
    • Susumu TakeuchiKoichi Moriizumi
    • H01L21/66G01N23/18G01Q10/06G06T7/00H01J37/28G06K9/00G06K9/62
    • G06T7/001G01N23/18G06T2207/10061G06T2207/20036G06T2207/30148
    • A charged beam pattern defect inspection apparatus for inspecting pattern defects on materials such as masks or wafers comprising: a collecting charged beam irradiation apparatus including scanning deflection device for accelerating and focusing the scanning beam, and a detector for detecting phenomenon produced by incident particles such as reflected electrons, secondary electrons, cathodeluminescent light, X rays, or absorption currents; a scanning and synchronous signal generator for generating a scanning signal to be control the scanning deflection means and a synchronous signal to fed into an A/D converter; a two-dimensional video memory including an A/D converter and an address signal generator; a video signal operator for operating the video signal stored in the two-dimensional video memory; a stage driving apparatus for driving a stage for holding the material to be inspected, which includes a position detector for detecting the position of the stage; an auxiliary memory device for storing inspection data; and a control operation apparatus for controlling the scanning and synchronous signal generator, the two dimensional video memory, the video signal operator, the stage driving apparatus, and the auxiliary memory device, and for outputting the output of the video signal operator as the result of pattern defect inspection.
    • 一种用于检查诸如掩模或晶片的材料上的图案缺陷的带电束图案缺陷检查装置,包括:包括用于加速和聚焦扫描光束的扫描偏转装置的收集带电束照射装置,以及用于检测由诸如 反射电子,二次电子,阴极发光,X射线或吸收电流; 用于产生要控制扫描偏转装置的扫描信号和馈送到A / D转换器的同步信号的扫描和同步信号发生器; 包括A / D转换器和地址信号发生器的二维视频存储器; 用于操作存储在二维视频存储器中的视频信号的视频信号操作器; 用于驱动用于保持待检查材料的台架的舞台驱动装置,其包括用于检测舞台位置的位置检测器; 用于存储检查数据的辅助存储装置; 以及用于控制扫描和同步信号发生器,二维视频存储器,视频信号操作器,平台驱动装置和辅助存储装置的控制操作装置,并且用于输出视频信号操作器的输出作为结果 图案缺陷检查。