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    • 1. 发明授权
    • Multi-step landing micro-mirror, method for manufacturing the same and multi-step landing micro-mirror array
    • 多步登陆微镜,制造相同和多步登陆微镜阵列的方法
    • US06922270B2
    • 2005-07-26
    • US10735669
    • 2003-12-16
    • Moon Youn JungChi Hoon JunChang Auck ChoiYun Tae Kim
    • Moon Youn JungChi Hoon JunChang Auck ChoiYun Tae Kim
    • B81B3/00G02B26/08
    • G02B26/0841B81B3/0062B81B2201/042Y10S359/904
    • A multi-step landing micro-mirror, a method for manufacturing the same, and a multi-step landing micro-mirror array are disclosed. The multi-step landing micro-mirror comprises a trench formed in a substrate and having N−1 steps in one side wall thereof; N plates rotated in or on the trench; and 2N springs for connecting the plates to each other; wherein the N plates are composed of an outermost first plate, a second plate connected with the first plate by the spring and located in the first plate, . . . , and a N-th plate connected with a (N−1)-th plate by the spring and located in the (N−1)-th plate, wherein when voltages are applied to the N plates and the trench, respectively, the first plate is subjected to a first landing with a predetermined rotation angle on a first step of the trench due to the constant voltage, the second plate is subjected to a second landing with the predetermined rotation angle on a second step of the trench, . . . , the N-th plate is subjected to a N-th landing with the predetermined rotation angle on the other side wall of the trench. Accordingly, the low voltage driving can be performed by performing the multi-step driving during the electrostatic force is applied, the elastic force of the spring for supporting the mirror can be enhanced, therefore the reliability of the optical switch can be improved.
    • 公开了一种多步着陆微镜,其制造方法以及多台阶着陆微镜阵列。 多台阶着陆微反射镜包括形成在基板中并在其一个侧壁中具有N-1个台阶的沟槽; N个板在沟槽中或沟槽上旋转; 和2N弹簧,用于将板彼此连接; 其中所述N个板由最外面的第一板,通过弹簧与所述第一板连接并位于所述第一板中的第二板组成。 。 。 以及通过弹簧与第(N-1)板连接并位于(N-1)板中的第N板,其中当分别向N个板和沟槽施加电压时, 第一板由于恒定的电压在沟槽的第一台阶上以预定的旋转角度进行第一次着陆,第二板在沟槽的第二台阶上以预定的旋转角进行第二次着陆。 。 。 第N个板在沟槽的另一个侧壁上以预定的旋转角进行第N次着陆。 因此,通过在施加静电力的同时进行多级驱动,可以进行低压驱动,可以提高用于支撑反射镜的弹簧的弹力,从而可以提高光开关的可靠性。
    • 4. 发明授权
    • Thermally actuated wavelength tunable optical filter
    • 热致振动波长可调滤光片
    • US07116863B2
    • 2006-10-03
    • US10819271
    • 2004-04-07
    • Chang Kyu KimMyung Lae LeeChang Auck ChoiChi Hoon JunYun Tae Kim
    • Chang Kyu KimMyung Lae LeeChang Auck ChoiChi Hoon JunYun Tae Kim
    • G02B6/26
    • G02B6/29358G02B6/29395
    • Provided is a wavelength tunable optical filter of a micro-electro-mechanical system (MEMS). The wavelength tunable optical filter comprises two optical fibers or optical waveguides having their optical axes aligned to each other, two lens for collimating light at leading ends of the optical fibers or optical waveguides, two or more mirrors formed on a substrate, thermal actuators supporting at least one of the mirrors, wherein one of the mirrors is actuated by thermal expansion of the actuator. Because all mirrors are formed on a substrate, a manufacturing process is simple and an initial resonance wavelength can be precisely adjusted. Since the thermal expansion is generated by the electrical current directly flowing through the thermal actuators, it can be actuated by a low consumption power. Also, since an electrostatic force is not used to move the mirrors, a sticking phenomenon between the mirrors does not occur, and the wavelength can be tunable in a wide range. Since the planar mirrors are arranged in parallel, the light alignment is easily performed, the line width is constant and the insertion loss is low.
    • 提供了微机电系统(MEMS)的波长可调光滤波器。 波长可调光滤波器包括两个光纤或光波导,其光轴彼此对准,用于准直光纤​​或光波导前端的光的两个透镜,形成在基板上的两个或更多个反射镜,支持在 至少一个反射镜,其中一个反射镜由致动器的热膨胀致动。 因为所有的反射镜都形成在基板上,所以制造工艺简单,可以精确调节初始共振波长。 由于热膨胀是由直接流过热致动器的电流产生的,因此可以通过低功耗来致动。 此外,由于不使用静电力来移动反射镜,所以不会发生反射镜之间的粘附现象,并且波长可以在宽范围内可调。 由于平面镜平行配置,因此容易进行光对准,线宽恒定,插入损耗低。
    • 5. 发明授权
    • Wavelength tunable optical filter
    • 波长可调滤光片
    • US07209608B2
    • 2007-04-24
    • US10923838
    • 2004-08-24
    • Chang Kyu KimMyung Lae LeeChi Hoon JunChang Auck ChoiYun Tae Kim
    • Chang Kyu KimMyung Lae LeeChi Hoon JunChang Auck ChoiYun Tae Kim
    • G02B6/28G02B6/36G02B27/00G02B1/10G02B5/28
    • G02B26/001G02B2006/12109
    • Provided is a Fabry-Perot type wavelength tunable optical filter, comprising a first mirror; a second mirror located over the first mirror; a driving body located over the first mirror, and having both ends fixed to the first mirror through a spacer; a plurality of electrodes, each formed on both ends of the driving body; a rod structure connecting a center of the driving body and the second mirror; a plurality of fixing means, each fixed to the first mirror at both sides of the rod structure through the spacer; and a plurality of elastic bodies connecting the rod structure with the plurality of fixing means and acting as a rotational axis. And the mirror is driven by the rod structure acting as a lever that has an elastic body as a rotational axis, when warping is generated by electro-thermal expansion, electromagnetic force or external force. Thereby the mirror can be driven in the larger wavelength tunable range and the low power consumption.
    • 提供了一种法布里 - 珀罗型波长可调谐滤光器,包括第一反射镜; 位于第一镜上的第二镜; 位于所述第一反射镜上方的驱动体,并且其两端通过间隔件固定到所述第一反射镜; 多个电极,各自形成在所述驱动体的两端; 连接驱动体的中心和第二反射镜的杆结构; 多个固定装置,每个固定装置通过间隔件固定到杆结构的两侧的第一反射镜; 以及多个弹性体,其将所述杆结构与所述多个固定装置连接并用作旋转轴线。 并且当由作为电热膨胀,电磁力或外力产生翘曲时,作为具有弹性体作为旋转轴的杠杆的杆结构驱动反射镜。 从而可以在更大的波长可调范围和低功耗范围内驱动反射镜。
    • 6. 发明授权
    • Micro-optical switch and method for manufacturing the same
    • 微光开关及其制造方法
    • US06791731B2
    • 2004-09-14
    • US10329702
    • 2002-12-27
    • Ho Jun RyuDoo Young HahChi Hoon JunYun Tae Kim
    • Ho Jun RyuDoo Young HahChi Hoon JunYun Tae Kim
    • G02B2608
    • G02B26/085Y10S359/90
    • The present invention relates to a micro-optical switch and comprises an external frame having a plurality of holes inside; an internal frame positioned in the plurality of holes and having holes inside; light reflecting means positioned inside the holes of the internal frame; external magnetic substances positioned at both sides of the external frame; outside torsion hinge for connecting the external frame to the internal frame and having 45° to the magnetic field produced by the external magnetic substances; inside torsion hinge for connecting the internal frame to the light reflecting means and for being perpendicular to said outside torsion hinge; an outside coil wired in the internal frame; and an inside coil wired in the light reflecting means, and is characterized in that the light reflecting means and the internal frame are preferably rotated by the inside torsion hinge and the outside torsion hinge as an axis when a current is applied to the inside coil and the outside coil.
    • 微型光开关技术领域本发明涉及一种微型光开关,其包括:内部具有多个孔的外框; 定位在所述多个孔中并在其内部具有孔的内部框架; 位于内部框架的孔内的光反射装置; 位于外框架两侧的外部磁性物质; 外部扭转铰链,用于将外部框架连接到内部框架,并且与由外部磁性物质产生的磁场成45°; 内部扭转铰链,用于将内部框架连接到光反射装置并且用于垂直于所述外部扭转铰链; 外部线圈连接在内部框架中; 以及布线在光反射装置中的内部线圈,其特征在于,当电流施加到内侧线圈时,光反射装置和内部框架优选地通过内部扭转铰链和外部扭转铰链作为轴线旋转, 外线圈。
    • 7. 发明授权
    • Method for forming micro cavity
    • 微孔形成方法
    • US06342427B1
    • 2002-01-29
    • US09473968
    • 1999-12-29
    • Chang Auck ChoiChi Hoon JunWon Ick JangYun Tae Kim
    • Chang Auck ChoiChi Hoon JunWon Ick JangYun Tae Kim
    • H01L2100
    • B81C1/00047B81B2203/033B81C2201/0133B81C2201/0178B81C2203/0136
    • A method for forming a micro cavity is disclosed. In the method for forming the cavity, a first layer is formed on a silicon layer and a trench is formed in the silicon layer by selectively etching the silicon layer. A second and a third layers are formed on the trench and on the silicon layer. Etching holes are formed through the third layer by partially etching the third layer. A cavity is formed between the silicon layer and the third layer after the second layer is removed through the etching holes. Therefore, the cavity having a large size can be easily formed and sealed in the silicon layer by utilizing the volume expansion of the silicon or the poly silicon layer. Also, a vacuum micro cavity can be formed according as a low vacuum CVD oxide layer or a nitride layer formed on the etching holes which are partially opened after the thermal oxidation process by controlling the size of the etching holes concerning the other portion of the poly silicon layer.
    • 公开了一种用于形成微腔的方法。 在形成空腔的方法中,在硅层上形成第一层,并且通过选择性地蚀刻硅层,在硅层中形成沟槽。 在沟槽和硅层上形成第二和第三层。 通过部分地蚀刻第三层,通过第三层形成蚀刻孔。 在通过蚀刻孔除去第二层之后,在硅层和第三层之间形成空穴。 因此,通过利用硅或多晶硅层的体积膨胀,可以容易地在硅层中形成并密封具有大尺寸的空腔。 此外,可以根据在热氧化处理后部分打开的蚀刻孔上形成的低真空CVD氧化物层或氮化物层,通过控制与聚合物的其它部分相关的蚀刻孔的尺寸,形成真空微腔 硅层。
    • 9. 发明授权
    • Method for driving glasses-type stereoscopic display preventing visual fatigue and refractive index-variable shutter glasses
    • 用于驱动眼镜型立体显示器防止视觉疲劳和折射率可变快门眼镜的方法
    • US08908017B2
    • 2014-12-09
    • US12382819
    • 2009-03-24
    • Gee Young SungDu Sik ParkDong Kyung NamYun Tae KimJu Yong Park
    • Gee Young SungDu Sik ParkDong Kyung NamYun Tae KimJu Yong Park
    • H04N13/04
    • H04N13/341H04N13/337
    • Disclosed are a method for driving a glasses-type stereoscopic display preventing visual fatigue and refractive index-variable shutter glasses. The method includes generating a plurality of left-eye viewing point images and a plurality of right-eye viewing point images. The plurality of left-eye viewing point images and right-eye viewing point images have viewing points different from each other. An initial left-eye viewing point image and a subsequent left-eye viewing point image of the plurality of left-eye viewing point images are output, and an initial right-eye viewing point image and a subsequent right-eye viewing point image of the plurality of right-eye viewing point images are output. Each of the plurality of left-eye viewing point images and right-eye viewing point images is inputted into a single pupil. The glasses include a refractive index control unit to control a strength of an electric field to vary a refractive index of the glasses.
    • 公开了一种用于驱动眼镜型立体显示器来防止视觉疲劳和折射率可变快门眼镜的方法。 该方法包括生成多个左眼观察点图像和多个右眼视点图像。 多个左眼视点图像和右眼视点图像具有彼此不同的观察点。 输出多个左眼视点图像的初始左眼视点图像和随后的左眼观察点图像,并且输出初始右眼视点图像和右眼视点图像 输出多个右眼观察点图像。 将多个左眼视点图像和右眼视点图像中的每一个输入到单个瞳孔中。 眼镜包括折射率控制单元,用于控制电场的强度以改变眼镜的折射率。