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1. 发明授权

US07209608B2 Wavelength tunable optical filter 失效
标题翻译：波长可调滤光片
公开(公告)号：US07209608B2
公开(公告)日：2007-04-24
申请号：US10923838
申请日：2004-08-24
申请人： Chang Kyu Kim , Myung Lae Lee , Chi Hoon Jun , Chang Auck Choi , Yun Tae Kim
发明人： Chang Kyu Kim , Myung Lae Lee , Chi Hoon Jun , Chang Auck Choi , Yun Tae Kim
IPC分类号： G02B6/28 , G02B6/36 , G02B27/00 , G02B1/10 , G02B5/28
CPC分类号： G02B26/001 , G02B2006/12109
摘要： Provided is a Fabry-Perot type wavelength tunable optical filter, comprising a first mirror; a second mirror located over the first mirror; a driving body located over the first mirror, and having both ends fixed to the first mirror through a spacer; a plurality of electrodes, each formed on both ends of the driving body; a rod structure connecting a center of the driving body and the second mirror; a plurality of fixing means, each fixed to the first mirror at both sides of the rod structure through the spacer; and a plurality of elastic bodies connecting the rod structure with the plurality of fixing means and acting as a rotational axis. And the mirror is driven by the rod structure acting as a lever that has an elastic body as a rotational axis, when warping is generated by electro-thermal expansion, electromagnetic force or external force. Thereby the mirror can be driven in the larger wavelength tunable range and the low power consumption.
摘要翻译：提供了一种法布里 - 珀罗型波长可调谐滤光器，包括第一反射镜; 位于第一镜上的第二镜; 位于所述第一反射镜上方的驱动体，并且其两端通过间隔件固定到所述第一反射镜; 多个电极，各自形成在所述驱动体的两端; 连接驱动体的中心和第二反射镜的杆结构; 多个固定装置，每个固定装置通过间隔件固定到杆结构的两侧的第一反射镜; 以及多个弹性体，其将所述杆结构与所述多个固定装置连接并用作旋转轴线。并且当由作为电热膨胀，电磁力或外力产生翘曲时，作为具有弹性体作为旋转轴的杠杆的杆结构驱动反射镜。从而可以在更大的波长可调范围和低功耗范围内驱动反射镜。

2. 发明授权

US07116863B2 Thermally actuated wavelength tunable optical filter 失效
标题翻译：热致振动波长可调滤光片
公开(公告)号：US07116863B2
公开(公告)日：2006-10-03
申请号：US10819271
申请日：2004-04-07
申请人： Chang Kyu Kim , Myung Lae Lee , Chang Auck Choi , Chi Hoon Jun , Yun Tae Kim
发明人： Chang Kyu Kim , Myung Lae Lee , Chang Auck Choi , Chi Hoon Jun , Yun Tae Kim
IPC分类号： G02B6/26
CPC分类号： G02B6/29358 , G02B6/29395
摘要： Provided is a wavelength tunable optical filter of a micro-electro-mechanical system (MEMS). The wavelength tunable optical filter comprises two optical fibers or optical waveguides having their optical axes aligned to each other, two lens for collimating light at leading ends of the optical fibers or optical waveguides, two or more mirrors formed on a substrate, thermal actuators supporting at least one of the mirrors, wherein one of the mirrors is actuated by thermal expansion of the actuator. Because all mirrors are formed on a substrate, a manufacturing process is simple and an initial resonance wavelength can be precisely adjusted. Since the thermal expansion is generated by the electrical current directly flowing through the thermal actuators, it can be actuated by a low consumption power. Also, since an electrostatic force is not used to move the mirrors, a sticking phenomenon between the mirrors does not occur, and the wavelength can be tunable in a wide range. Since the planar mirrors are arranged in parallel, the light alignment is easily performed, the line width is constant and the insertion loss is low.
摘要翻译：提供了微机电系统（MEMS）的波长可调光滤波器。波长可调光滤波器包括两个光纤或光波导，其光轴彼此对准，用于准直光纤或光波导前端的光的两个透镜，形成在基板上的两个或更多个反射镜，支持在至少一个反射镜，其中一个反射镜由致动器的热膨胀致动。因为所有的反射镜都形成在基板上，所以制造工艺简单，可以精确调节初始共振波长。由于热膨胀是由直接流过热致动器的电流产生的，因此可以通过低功耗来致动。此外，由于不使用静电力来移动反射镜，所以不会发生反射镜之间的粘附现象，并且波长可以在宽范围内可调。由于平面镜平行配置，因此容易进行光对准，线宽恒定，插入损耗低。

3. 发明授权

US07012752B2 Tunable-wavelength optical filter and method of manufacturing the same 有权
标题翻译：可调谐波长光学滤波器及其制造方法
公开(公告)号：US07012752B2
公开(公告)日：2006-03-14
申请号：US11045554
申请日：2005-01-27
申请人： Chang Auck Choi , Myung Lae Lee , Chang Kyu Kim , Chi Hoon Jun , Youn Tae Kim
发明人： Chang Auck Choi , Myung Lae Lee , Chang Kyu Kim , Chi Hoon Jun , Youn Tae Kim
IPC分类号： G02B27/00
CPC分类号： G02B26/001 , G01J3/26 , G02B5/0833 , G02B6/29361 , G02B6/29389 , G02B6/29395
摘要： An active type tunable wavelength optical filter having a Fabry-Perot structure is disclosed. A tunable wavelength optical filter which comprises a lower mirror in which silicon films and oxide films are sequentially laminated in a multi-layer and the silicon film is laminated on the highest portion; an upper mirror in which silicon films and oxide films are sequentially laminated in a multi-layer and the silicon film is laminated on the highest portion and which is spaced away from the lower mirror by a predetermined distance; a connecting means for connecting and supporting the lower mirror and the upper mirror to a semiconductor substrate; and electrode pads for controlling the gap between the lower mirror and the upper mirror by an electrostatic force and the method of manufacturing the same are provided. Thereby, by finely driving the upper and lower mirrors composed of a multi-layer structure of the silicon film and the oxide film by the electrostatic force, the wavelength of the transmitted light with respect to the incident light can be selectively sent.
摘要翻译：公开了一种具有法布里 - 珀罗结构的有源型可调谐波长滤光器。一种可调波长滤光器，包括下反射镜，其中硅膜和氧化物膜顺次层叠在多层中，并且硅膜层压在最高部分上; 其中硅膜和氧化物膜顺次层叠在多层中并且硅膜层压在最高部分上并且与下反射镜间隔预定距离的上反射镜; 用于将下反射镜和上反射镜连接和支撑到半导体基板的连接装置; 以及用于通过静电力控制下反射镜和上反射镜之间的间隙的电极焊盘及其制造方法。由此，通过利用静电力微细地驱动由硅膜和氧化膜构成的上反射镜和下反射镜，可以选择性地发送透射光相对于入射光的波长。

4. 发明授权

US06947656B2 Variable optical attenuator with tunable wavelength selectivity 有权
公开(公告)号：US06947656B2
公开(公告)日：2005-09-20
申请号：US10412580
申请日：2003-04-14
申请人： Chang-Kyu Kim , Myung Lae Lee , Chi Hoon Jun , Chang Auck Choi , Youn Tae Kim
发明人： Chang-Kyu Kim , Myung Lae Lee , Chi Hoon Jun , Chang Auck Choi , Youn Tae Kim
IPC分类号： G02B26/02 , G02B6/26 , G02B6/34 , G02B6/35 , G02B6/00
CPC分类号： G02B6/352 , G02B6/266 , G02B6/29358 , G02B6/29389 , G02B6/29395 , G02B6/3514 , G02B6/3552 , G02B6/356 , G02B6/357 , G02B6/3572 , G02B6/3576 , G02B6/3578 , G02B6/3594
摘要： A variable optical attenuator with tunable wavelength selectivity includes at least two reflectors disposed parallel to each other at a predetermined angle from an optic axis and driving units connected to said at least two reflectors for allowing the reflectors to move back and forth in a direction perpendicular or parallel to the optic axis or to revolve centering on an axis perpendicular or parallel to the optic axis. Since the variable optical attenuator of the present invention serves as a variable optical attenuator and, at the same time, as a tunable wavelength filter, problems of insertion loss and optical alignment that might be caused by separately installing a variable optical attenuator and a wavelength filter can be effectively prevented. Moreover, by implementing the variable optical attenuator and the tunable wavelength filter by using a single device, the size of a system using the optical attenuator can be reduced.

5. 再颁专利

USRE44356E1 Tunable-wavelength optical filter and method of manufacturing the same 有权
标题翻译：可调谐波长光学滤波器及其制造方法
公开(公告)号：USRE44356E1
公开(公告)日：2013-07-09
申请号：US12828908
申请日：2010-07-01
申请人： Chang Auck Choi , Myung Lae Lee , Chang Kyu Kim , Chi Hoon Jun , Youn Tae Kim
发明人： Chang Auck Choi , Myung Lae Lee , Chang Kyu Kim , Chi Hoon Jun , Youn Tae Kim
IPC分类号： H01L21/302 , B29D11/00
CPC分类号： G02B26/001 , G01J3/26 , G02B5/0833 , G02B6/29361 , G02B6/29389 , G02B6/29395
摘要： A method of manufacturing a tunable wavelength optical filter. The method includes steps of forming a first sacrificial oxide film for floating a lower mirror on a semiconductor substrate; sequentially laminating conductive silicon films and oxide films for defining a mirror region on the first sacrificial oxide film in a multi-layer and laminating another conductive silicon film to form a lower mirror; sequentially laminating conductive silicon films and oxide films for defining the mirror region on a second sacrificial oxide film in a multi-layer and laminating another conductive silicon film to form an upper mirror and forming an optical tuning space between the lower mirror and the upper mirror and etching the first sacrificial oxide film and the second sacrificial oxide film such that the lower mirror is floated on the semiconductor substrate.
摘要翻译：一种可调波长光学滤波器的制造方法。该方法包括以下步骤：在半导体衬底上形成用于浮置下反射镜的第一牺牲氧化膜; 依次层叠导电硅膜和用于在多层中在第一牺牲氧化膜上限定反射镜区域的氧化物膜，并层叠另一导电硅膜以形成下反射镜; 依次层叠导电硅膜和用于在多层中的第二牺牲氧化膜上限定反射镜区域的氧化物膜，并层叠另一导电硅膜以形成上反射镜并在下反射镜和上反射镜之间形成光学调谐空间，以及蚀刻第一牺牲氧化物膜和第二牺牲氧化物膜，使得下反射镜浮在半导体衬底上。

6. 发明授权

US07167612B2 Wavelength tunable filter capable of being bidirectionally driven by electromagnetic forces 失效
标题翻译：波长可调滤波器能够被电磁力双向驱动
公开(公告)号：US07167612B2
公开(公告)日：2007-01-23
申请号：US10745641
申请日：2003-12-29
申请人： Chang Kyu Kim , Myung Lae Lee , Chang Auck Choi , Chi Hoon Jun
发明人： Chang Kyu Kim , Myung Lae Lee , Chang Auck Choi , Chi Hoon Jun
IPC分类号： G02B6/26 , G02B6/42 , G02B27/00 , G02B1/10 , G02B5/28
CPC分类号： G02B6/29358 , G02B6/29389 , G02B6/29395 , G02B6/32
摘要： A wavelength tunable filter capable of being driven such that reflecting mirrors move more distant as well as closer by using the principle that a direction of the electromagnetic forces changes depending on the direction of the current flowing perpendicular to the external magnetic field. According to the wavelength tunable filter of the present invention, when it is necessary to have the wavelength tuning range and mechanical structure similar to the conventional wavelength tunable filter driven in only one direction, it is possible to lower the maximum force needed to drive the filter to a half, and reduce a probability that a pull-in phenomenon occurs. On the other hand, it is possible to reduce a wavelength change time of the element by increasing a resonant frequency when the same wavelength tuning ranges are implemented by using the same maximum driving forces.
摘要翻译：能够被驱动的波长可调滤波器，使得反射镜通过使用电磁力的方向根据垂直于外部磁场流动的电流的方向而变化的原理移动得更远和更近。根据本发明的波长可调滤波器，当需要使波长调谐范围和机械结构类似于在一个方向上驱动的常规波长可调滤波器时，可以降低驱动滤波器所需的最大力降低引入现象发生的可能性。另一方面，当通过使用相同的最大驱动力来实现相同的波长调谐范围时，可以通过增加谐振频率来减小元件的波长变化时间。

7. 发明授权

US07393793B2 Tunable-wavelength optical filter and method of manufacturing the same 有权
标题翻译：可调谐波长光学滤波器及其制造方法
公开(公告)号：US07393793B2
公开(公告)日：2008-07-01
申请号：US11508017
申请日：2006-08-21
申请人： Chang Auck Choi , Myung Lae Lee , Chang Kyu Kim , Chi Hoon Jun , Youn Tae Kim
发明人： Chang Auck Choi , Myung Lae Lee , Chang Kyu Kim , Chi Hoon Jun , Youn Tae Kim
IPC分类号： H01L21/302
CPC分类号： G02B26/001 , G01J3/26 , G02B5/0833 , G02B6/29361 , G02B6/29389 , G02B6/29395
摘要： A method of manufacturing a tunable wavelength optical filter. The method includes steps of forming a first sacrificial oxide film for floating a lower mirror on a semiconductor substrate; sequentially laminating conductive silicon films and oxide films for defining a mirror region on the first sacrificial oxide film in a multi-layer and laminating another conductive silicon film to form a lower mirror; sequentially laminating conductive silicon films and oxide films for defining the mirror region on a second sacrificial oxide film in a multi-layer and laminating another conductive silicon film to form an upper mirror and forming an optical tuning space between the lower mirror and the upper mirror and etching the first sacrificial oxide film and the second sacrificial oxide film such that the lower mirror is floated on the semiconductor substrate.
摘要翻译：一种可调波长光学滤波器的制造方法。该方法包括以下步骤：在半导体衬底上形成用于浮置下反射镜的第一牺牲氧化膜; 依次层叠导电硅膜和用于在多层中在第一牺牲氧化膜上限定反射镜区域的氧化物膜，并层叠另一导电硅膜以形成下反射镜; 依次层叠导电硅膜和用于在多层中的第二牺牲氧化膜上限定反射镜区域的氧化物膜，并层叠另一导电硅膜以形成上反射镜并在下反射镜和上反射镜之间形成光学调谐空间，以及蚀刻第一牺牲氧化物膜和第二牺牲氧化物膜，使得下反射镜浮在半导体衬底上。

8. 发明授权

US07163872B2 Tunable-wavelength optical filter and method of manufacturing the same 有权
标题翻译：可调谐波长光学滤波器及其制造方法
公开(公告)号：US07163872B2
公开(公告)日：2007-01-16
申请号：US10671825
申请日：2003-09-25
申请人： Chang Auck Choi , Myung Lae Lee , Chang Kyu Kim , Chi Hoon Jun , Youn Tae Kim
发明人： Chang Auck Choi , Myung Lae Lee , Chang Kyu Kim , Chi Hoon Jun , Youn Tae Kim
IPC分类号： H01L21/00
CPC分类号： G02B26/001 , G01J3/26 , G02B5/0833 , G02B6/29361 , G02B6/29389 , G02B6/29395
摘要： An active type tunable wavelength optical filter having a Fabry-Perot structure is disclosed. A tunable wavelength optical filter which comprises a lower mirror in which silicon films and oxide films are sequentially laminated in a multi-layer and the silicon film is laminated on the highest portion; an upper mirror in which silicon films and oxide films are sequentially laminated in a multi-layer and the silicon film is laminated on the highest portion and which is spaced away from the lower mirror by a predetermined distance; a connecting means for connecting and supporting the lower mirror and the upper mirror to a semiconductor substrate; and electrode pads for controlling the gap between the lower mirror and the upper mirror by an electrostatic force and the method of manufacturing the same are provided. Thereby, by finely driving the upper and lower mirrors composed of a multi-layer structure of the silicon film and the oxide film by the electrostatic force, the wavelength of the transmitted light with respect to the incident light can be selectively sent.
摘要翻译：公开了一种具有法布里 - 珀罗结构的有源型可调谐波长滤光器。一种可调波长滤光器，包括下反射镜，其中硅膜和氧化物膜顺次层叠在多层中，并且硅膜层压在最高部分上; 其中硅膜和氧化物膜顺次层叠在多层中并且硅膜层压在最高部分上并且与下反射镜间隔预定距离的上反射镜; 用于将下反射镜和上反射镜连接和支撑到半导体基板的连接装置; 以及用于通过静电力控制下反射镜和上反射镜之间的间隙的电极焊盘及其制造方法。由此，通过利用静电力微细地驱动由硅膜和氧化膜构成的上反射镜和下反射镜，可以有选择地发射透射光相对于入射光的波长。

9. 发明授权

US06342427B1 Method for forming micro cavity 有权
标题翻译：微孔形成方法
公开(公告)号：US06342427B1
公开(公告)日：2002-01-29
申请号：US09473968
申请日：1999-12-29
申请人： Chang Auck Choi , Chi Hoon Jun , Won Ick Jang , Yun Tae Kim
发明人： Chang Auck Choi , Chi Hoon Jun , Won Ick Jang , Yun Tae Kim
IPC分类号： H01L2100
CPC分类号： B81C1/00047 , B81B2203/033 , B81C2201/0133 , B81C2201/0178 , B81C2203/0136
摘要： A method for forming a micro cavity is disclosed. In the method for forming the cavity, a first layer is formed on a silicon layer and a trench is formed in the silicon layer by selectively etching the silicon layer. A second and a third layers are formed on the trench and on the silicon layer. Etching holes are formed through the third layer by partially etching the third layer. A cavity is formed between the silicon layer and the third layer after the second layer is removed through the etching holes. Therefore, the cavity having a large size can be easily formed and sealed in the silicon layer by utilizing the volume expansion of the silicon or the poly silicon layer. Also, a vacuum micro cavity can be formed according as a low vacuum CVD oxide layer or a nitride layer formed on the etching holes which are partially opened after the thermal oxidation process by controlling the size of the etching holes concerning the other portion of the poly silicon layer.
摘要翻译：公开了一种用于形成微腔的方法。在形成空腔的方法中，在硅层上形成第一层，并且通过选择性地蚀刻硅层，在硅层中形成沟槽。在沟槽和硅层上形成第二和第三层。通过部分地蚀刻第三层，通过第三层形成蚀刻孔。在通过蚀刻孔除去第二层之后，在硅层和第三层之间形成空穴。因此，通过利用硅或多晶硅层的体积膨胀，可以容易地在硅层中形成并密封具有大尺寸的空腔。此外，可以根据在热氧化处理后部分打开的蚀刻孔上形成的低真空CVD氧化物层或氮化物层，通过控制与聚合物的其它部分相关的蚀刻孔的尺寸，形成真空微腔硅层。

10. 发明授权

US06922270B2 Multi-step landing micro-mirror, method for manufacturing the same and multi-step landing micro-mirror array 有权
标题翻译：多步登陆微镜，制造相同和多步登陆微镜阵列的方法
公开(公告)号：US06922270B2
公开(公告)日：2005-07-26
申请号：US10735669
申请日：2003-12-16
申请人： Moon Youn Jung , Chi Hoon Jun , Chang Auck Choi , Yun Tae Kim
发明人： Moon Youn Jung , Chi Hoon Jun , Chang Auck Choi , Yun Tae Kim
IPC分类号： B81B3/00 , G02B26/08
CPC分类号： G02B26/0841 , B81B3/0062 , B81B2201/042 , Y10S359/904
摘要： A multi-step landing micro-mirror, a method for manufacturing the same, and a multi-step landing micro-mirror array are disclosed. The multi-step landing micro-mirror comprises a trench formed in a substrate and having N−1 steps in one side wall thereof; N plates rotated in or on the trench; and 2N springs for connecting the plates to each other; wherein the N plates are composed of an outermost first plate, a second plate connected with the first plate by the spring and located in the first plate, . . . , and a N-th plate connected with a (N−1)-th plate by the spring and located in the (N−1)-th plate, wherein when voltages are applied to the N plates and the trench, respectively, the first plate is subjected to a first landing with a predetermined rotation angle on a first step of the trench due to the constant voltage, the second plate is subjected to a second landing with the predetermined rotation angle on a second step of the trench, . . . , the N-th plate is subjected to a N-th landing with the predetermined rotation angle on the other side wall of the trench. Accordingly, the low voltage driving can be performed by performing the multi-step driving during the electrostatic force is applied, the elastic force of the spring for supporting the mirror can be enhanced, therefore the reliability of the optical switch can be improved.
摘要翻译：公开了一种多步着陆微镜，其制造方法以及多台阶着陆微镜阵列。多台阶着陆微反射镜包括形成在基板中并在其一个侧壁中具有N-1个台阶的沟槽; N个板在沟槽中或沟槽上旋转; 和2N弹簧，用于将板彼此连接; 其中所述N个板由最外面的第一板，通过弹簧与所述第一板连接并位于所述第一板中的第二板组成。。。以及通过弹簧与第（N-1）板连接并位于（N-1）板中的第N板，其中当分别向N个板和沟槽施加电压时，第一板由于恒定的电压在沟槽的第一台阶上以预定的旋转角度进行第一次着陆，第二板在沟槽的第二台阶上以预定的旋转角进行第二次着陆。。。第N个板在沟槽的另一个侧壁上以预定的旋转角进行第N次着陆。因此，通过在施加静电力的同时进行多级驱动，可以进行低压驱动，可以提高用于支撑反射镜的弹簧的弹力，从而可以提高光开关的可靠性。

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