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1. 发明授权

US06922270B2 Multi-step landing micro-mirror, method for manufacturing the same and multi-step landing micro-mirror array 有权
标题翻译：多步登陆微镜，制造相同和多步登陆微镜阵列的方法
公开(公告)号：US06922270B2
公开(公告)日：2005-07-26
申请号：US10735669
申请日：2003-12-16
申请人： Moon Youn Jung , Chi Hoon Jun , Chang Auck Choi , Yun Tae Kim
发明人： Moon Youn Jung , Chi Hoon Jun , Chang Auck Choi , Yun Tae Kim
IPC分类号： B81B3/00 , G02B26/08
CPC分类号： G02B26/0841 , B81B3/0062 , B81B2201/042 , Y10S359/904
摘要： A multi-step landing micro-mirror, a method for manufacturing the same, and a multi-step landing micro-mirror array are disclosed. The multi-step landing micro-mirror comprises a trench formed in a substrate and having N−1 steps in one side wall thereof; N plates rotated in or on the trench; and 2N springs for connecting the plates to each other; wherein the N plates are composed of an outermost first plate, a second plate connected with the first plate by the spring and located in the first plate, . . . , and a N-th plate connected with a (N−1)-th plate by the spring and located in the (N−1)-th plate, wherein when voltages are applied to the N plates and the trench, respectively, the first plate is subjected to a first landing with a predetermined rotation angle on a first step of the trench due to the constant voltage, the second plate is subjected to a second landing with the predetermined rotation angle on a second step of the trench, . . . , the N-th plate is subjected to a N-th landing with the predetermined rotation angle on the other side wall of the trench. Accordingly, the low voltage driving can be performed by performing the multi-step driving during the electrostatic force is applied, the elastic force of the spring for supporting the mirror can be enhanced, therefore the reliability of the optical switch can be improved.
摘要翻译：公开了一种多步着陆微镜，其制造方法以及多台阶着陆微镜阵列。多台阶着陆微反射镜包括形成在基板中并在其一个侧壁中具有N-1个台阶的沟槽; N个板在沟槽中或沟槽上旋转; 和2N弹簧，用于将板彼此连接; 其中所述N个板由最外面的第一板，通过弹簧与所述第一板连接并位于所述第一板中的第二板组成。。。以及通过弹簧与第（N-1）板连接并位于（N-1）板中的第N板，其中当分别向N个板和沟槽施加电压时，第一板由于恒定的电压在沟槽的第一台阶上以预定的旋转角度进行第一次着陆，第二板在沟槽的第二台阶上以预定的旋转角进行第二次着陆。。。第N个板在沟槽的另一个侧壁上以预定的旋转角进行第N次着陆。因此，通过在施加静电力的同时进行多级驱动，可以进行低压驱动，可以提高用于支撑反射镜的弹簧的弹力，从而可以提高光开关的可靠性。

2. 发明授权

US07362387B2 Programmable mask and method for fabricating biomolecule array using the same 失效
标题翻译：可编程掩模和使用其制造生物分子阵列的方法
公开(公告)号：US07362387B2
公开(公告)日：2008-04-22
申请号：US11299111
申请日：2005-12-08
申请人： Moon Youn Jung , Hae Sik Yang , Chi Hoon Jun , Yun Tae Kim , Young Shin Kim , Dong Ho Shin
发明人： Moon Youn Jung , Hae Sik Yang , Chi Hoon Jun , Yun Tae Kim , Young Shin Kim , Dong Ho Shin
IPC分类号： G02F1/13
CPC分类号： B01J19/0046 , B01J2219/00434 , B01J2219/00527 , B01J2219/00529 , B01J2219/00596 , B01J2219/00605 , B01J2219/00608 , B01J2219/00659 , B01J2219/00675 , B01J2219/00677 , B01J2219/00689 , B01J2219/00711 , B01J2219/00722 , B82Y30/00 , C40B40/06 , C40B60/14 , G02F1/133528 , G02F1/13454 , G02F1/13725 , G02F1/216 , G02F2203/12 , G03F7/70291 , G03F7/7035 , H01L27/146
摘要： A programmable mask used in a photolithography process for fabricating a biomolecule array and a method for fabricating a biomolecule array using the same are disclosed. Particularly, a TFT-LCD type programmable mask for selectively transmitting incident light in accordance with an electrical signal applied thereto and a method for fabricating a biomolecule array using the same are provided. The ultraviolet light is selectively illuminated to a sample substrate so that the biomolecule array having high density can be fabricated.
摘要翻译：公开了用于制造生物分子阵列的光刻工艺中使用的可编程掩模和使用其的生物分子阵列的制造方法。特别地，提供了根据施加到其上的电信号选择性地透射入射光的TFT-LCD型可编程掩模和使用其的制造生物分子阵列的方法。紫外光被选择性地照射到样品基底上，使得可以制造具有高密度的生物分子阵列。

3. 发明授权

US07038229B2 Electric switching device and electric circuit device having the same 失效
标题翻译：电开关装置及其电路装置
公开(公告)号：US07038229B2
公开(公告)日：2006-05-02
申请号：US10721973
申请日：2003-11-24
申请人： Moon Youn Jung , Chi Hoon Jun , Yun Tae Kim
发明人： Moon Youn Jung , Chi Hoon Jun , Yun Tae Kim
IPC分类号： H01L47/00
CPC分类号： G09G3/3648
摘要： Provided are an electric switching device with improved reliability and improved speed characteristics and an electric circuit device having the electric switching device. In the electric switching device, a first area is formed on an insulating substrate, and a second area formed on the insulating substrate such as to be a predetermined apart from the first area. The first and second areas contract or expand depending on the intensity of a laser.
摘要翻译：提供了具有改进的可靠性和改进的速度特性的电开关装置和具有电开关装置的电路装置。在电开关装置中，第一区域形成在绝缘基板上，第二区域形成在绝缘基板上，以便与第一区域成预定的距离。根据激光的强度，第一和第二区域收缩或扩大。

4. 发明申请

US20100279396A1 MICRO-SCALED ANIMAL CELL INCUBATOR AND PRODUCTION METHOD THEREOF 审中-公开
标题翻译：微量级动物细胞培养物及其生产方法
公开(公告)号：US20100279396A1
公开(公告)日：2010-11-04
申请号：US12746093
申请日：2008-06-27
申请人： Yo Han Choi , Kwang Hyo Chung , Dae Sik Lee , Sang Hee Kim , Min Suk Jeong , Chi Hoon Jun , Moon Youn Jung , Seon Hee Park
发明人： Yo Han Choi , Kwang Hyo Chung , Dae Sik Lee , Sang Hee Kim , Min Suk Jeong , Chi Hoon Jun , Moon Youn Jung , Seon Hee Park
IPC分类号： C12M3/00 , H05K3/00
CPC分类号： C12M23/20 , B01L3/5027 , B01L7/00 , C12M23/16 , C12M41/12 , Y10T29/49124
摘要： There is provided a cell culture technology for culturing an animal cell in a separate microstructure. The micro-scaled animal cell incubator includes a lower glass substrate having fine hot wires processed with a metal and formed in an upper surface thereof; a first PDMS film attached onto the lower glass substrate to form two or more liquid and solid storage spaces in a position corresponding to the fine hot wires of the lower glass substrate and gas flow channels coupled respectively to the liquid and solid storage spaces to allow generated gases to flow therethrough; a gas-permeable PDMS thin film attached onto the gas flow channels of the PDMS film to pass the generated gases therethrough; a second PDMS film attached onto the PDMS thin film and having a culture medium storage space for storing a culture medium; and an upper glass substrate attached onto the second PDMS film and having fine hot wires formed in a lower surface thereof, the fine hot wires being covered by the PDMS film. The micro-scaled animal cell incubator may be useful to control a temperature of a culture medium to a suitable temperature level, as well as to self-supply gases required for the animal cell culture in a microstructure.
摘要翻译：提供了用于在单独的微结构中培养动物细胞的细胞培养技术。微型动物细胞培养箱包括具有用金属加工并形成在其上表面的细微热丝的下玻璃基板; 附着在下玻璃基板上的第一PDMS膜，以形成两个或多个液体和固体存储空间，该液体和固体储存空间位于对应于分别与液体和固体储存空间相连的下玻璃基板和气流通道的细热线的位置，以允许产生气体流过其中; 透气的PDMS薄膜，附着在PDMS薄膜的气流通道上，以使产生的气体通过; 附着在PDMS薄膜上并具有用于储存培养基的培养基储存空间的第二PDMS膜; 以及附着在第二PDMS膜上并具有形成在其下表面上的精细热丝的上玻璃基板，细的热丝被PDMS膜覆盖。微量级动物细胞培养箱可用于将培养基的温度控制到合适的温度水平，以及自动供应在微结构中动物细胞培养所需的气体。

5. 发明授权

US07861575B2 Micro gas sensor and manufacturing method thereof 有权
标题翻译：微气体传感器及其制造方法
公开(公告)号：US07861575B2
公开(公告)日：2011-01-04
申请号：US12142695
申请日：2008-06-19
申请人： Chi Hoon Jun , Sang Choon Ko , Moon Youn Jung , Seon Hee Park
发明人： Chi Hoon Jun , Sang Choon Ko , Moon Youn Jung , Seon Hee Park
IPC分类号： G01N7/00 , G01N27/12
CPC分类号： G01N33/0027 , G01N27/128
摘要： A micro gas sensor is disclosed including a substrate; an open cavity formed in the substrate; an electrode pad separation groove formed on the substrate; a first and a second electrode pads formed over the substrate and electrically insulated from each other by the electrode pad separation groove; a micro heater connected to the first electrode pad and configured of a bridge structure suspended over the open cavity; a first sensing electrode extending from the first electrode pad and suspended over the open cavity; a second sensing electrode extending from the first electrode pad and suspended over the open cavity; and a gas sensing film electrically coupled to the micro heater and filling a gap between the first and the second sensing electrodes.
摘要翻译：公开了一种包括基板的微气体传感器; 在所述基板中形成的开放空腔; 形成在所述基板上的电极焊盘分离槽; 第一和第二电极焊盘，形成在所述衬底上并且由所述电极焊盘分离槽彼此电绝缘; 连接到第一电极焊盘并由悬挂在开放空腔上的桥结构构成的微加热器; 第一感测电极，其从所述第一电极焊盘延伸并悬挂在所述开放腔上; 第二感测电极，其从所述第一电极焊盘延伸并悬挂在所述开口腔上; 以及电气耦合到微加热器并填充第一和第二感测电极之间的间隙的气体感测膜。

6. 发明授权

US06951708B2 Method of forming photosensitive film pattern 失效
标题翻译：形成感光膜图案的方法
公开(公告)号：US06951708B2
公开(公告)日：2005-10-04
申请号：US10704624
申请日：2003-11-12
申请人： Moon Youn Jung , Chi Hoon Jun
发明人： Moon Youn Jung , Chi Hoon Jun
IPC分类号： H01L21/027 , G03C7/00 , G03C7/20 , G03F7/00 , G03F7/16 , G03F7/20
CPC分类号： B81C1/00492 , G03F7/0035 , G03F7/161
摘要： The present invention relates to a method of forming a photosensitive film pattern. It provides a method of forming a photosensitive film pattern capable of performing a photolithography process by blocking an opening of a high aspect ratio trench with a DFR film, during forming a semiconductor element and an MEMS element. In addition, it is possible to prevent the photoresist from flowing into the trench when the liquid photoresist is deposited by a spin coating method to form the photosensitive film pattern for metal pattern to apply electric signal from outside to inside of trench.
摘要翻译：本发明涉及形成感光膜图案的方法。它提供了一种在形成半导体元件和MEMS元件期间形成能够通过用DFR膜阻挡高纵横比沟槽的开口来进行光刻工艺的感光膜图案的方法。此外，当通过旋涂方法沉积液态光致抗蚀剂以形成用于金属图案的感光膜图案以从外部到沟槽内部施加电信号时，可以防止光致抗蚀剂流入沟槽。

7. 发明授权

US07760274B2 Programmable mask for fabricating biomolecule array or polymer array, apparatus for fabricating biomolecule array or polymer array including the programmable mask, and method of fabricating biomolecule array or polymer array using the programmable mask 失效
标题翻译：用于制造生物分子阵列或聚合物阵列的可编程掩模，用于制造包括可编程掩模的生物分子阵列或聚合物阵列的装置，以及使用可编程掩模制造生物分子阵列或聚合物阵列的方法
公开(公告)号：US07760274B2
公开(公告)日：2010-07-20
申请号：US11634408
申请日：2006-12-06
申请人： Moon Youn Jung , Dong Ho Shin , Se Ho Park , Hyeon Bong Pyo , Chi Hoon Jun
发明人： Moon Youn Jung , Dong Ho Shin , Se Ho Park , Hyeon Bong Pyo , Chi Hoon Jun
IPC分类号： G02F1/13
CPC分类号： G03F7/70291 , B01J19/0046 , B01J2219/00286 , B01J2219/00434 , B01J2219/00448 , B01J2219/00527 , B01J2219/00585 , B01J2219/00596 , B01J2219/00605 , B01J2219/00608 , B01J2219/00612 , B01J2219/00637 , B01J2219/00659 , B01J2219/00689 , B01J2219/00711 , B01J2219/0072 , B01J2219/00722 , B82Y30/00 , G03F7/70275
摘要： Provided are a programmable mask for promptly fabricating a biomolecule or polymer array having high density, an apparatus for fabricating a biomolecule or polymer array including the mask, and a method of fabricating a biomolecule or polymer array using the programmable mask. The programmable mask for fabricating a biomolecule array or polymer array includes a first substrate including a black matrix having openings and first pixel electrodes; a second substrate including thin film transistors for switching pixel regions which correspond to the openings according to applied electric signals and second pixel electrodes connected to drain electrodes of the thin film transistors; a liquid crystal layer interposed between the first substrate and the second substrate, the liquid crystal layer including liquid crystal whose arrangement can be changed according to electric signals of the thin film transistors so as to selectively transmit light; a first polarizing plate laminated on one side of the first substrate; a second polarizing plate laminated on one side of the second substrate; and a lens array layer laminated on one side of the second polarizing plate including lenses which correspond to the pixel regions.
摘要翻译：提供了一种用于及时制造具有高密度的生物分子或聚合物阵列的可编程掩模，用于制造包括掩模的生物分子或聚合物阵列的装置，以及使用可编程掩模制造生物分子或聚合物阵列的方法。用于制造生物分子阵列或聚合物阵列的可编程掩模包括包括具有开口的黑矩阵的第一基底和第一像素电极; 第二基板，包括用于根据施加的电信号切换对应于开口的像素区域的薄膜晶体管和连接到薄膜晶体管的漏极的第二像素电极; 介于所述第一基板和所述第二基板之间的液晶层，所述液晶层包括可根据所述薄膜晶体管的电信号而配置的液晶，以选择性地透射光; 层叠在第一基板的一侧的第一偏振片; 层叠在所述第二基板的一侧的第二偏振片; 以及层叠在第二偏振片的一侧上的透镜阵列层，其包括对应于像素区域的透镜。

8. 发明申请

US20130161533A1 BIOCHIP ANALYSIS DEVICE 审中-公开
标题翻译：生物分析装置
公开(公告)号：US20130161533A1
公开(公告)日：2013-06-27
申请号：US13615073
申请日：2012-09-13
申请人： Dong-Ho SHIN , Moon Youn Jung
发明人： Dong-Ho SHIN , Moon Youn Jung
IPC分类号： G02F1/01 , G01N21/64
CPC分类号： G01N21/6452 , G01N21/6454 , G01N2021/6471
摘要： Disclosed is a biochip analysis device which includes first and second spatial light modulators; and a spatial light modulation driver configured to drive the first and second spatial light modulators, wherein the first spatial light modulator varies a wavelength of light to be irradiated to a biochip in response to a control of the spatial light modulation driver and the spatial light modulator passes a fluorescence signal selected from fluorescence signals generated by the biochip in response to a control of the spatial light modulation driver.
摘要翻译：公开了一种生物芯片分析装置，其包括第一和第二空间光调制器; 以及空间光调制驱动器，被配置为驱动第一和第二空间光调制器，其中响应于空间光调制驱动器和空间光调制器的控制，第一空间光调制器改变要照射到生物芯片的光的波长响应于空间光调制驱动器的控制，传递从生物芯片产生的荧光信号中选择的荧光信号。

9. 发明申请

US20100267570A1 PS-SPCL SEARCHING APPARATUS AND METHOD USING SURFACE PLASMON RESONANCE 审中-公开
标题翻译： PS-SPCL搜索设备和使用表面等离子体共振的方法
公开(公告)号：US20100267570A1
公开(公告)日：2010-10-21
申请号：US12746992
申请日：2008-04-17
申请人： Yo Han Choi , Moon Youn Jung , Seon Hee Park
发明人： Yo Han Choi , Moon Youn Jung , Seon Hee Park
IPC分类号： C40B30/00 , C40B60/12
CPC分类号： G01N33/54373 , C40B30/00 , G01N21/553
摘要： A Positional Scanning—Synthetic Peptide Combinatorial Library (PS-SPC) searching apparatus and method using Surface Plasmon Resonance (SPR) are provided. The method includes spotting and fixing each of a plurality of peptide pools to a top of one thin metal film, inputting specific materials to the top of the thin metal film, applying a TM-mode light to a bottom of the thin metal film and exciting SPR for the thin metal film, and detecting a TM mode reflected light reflected from the thin metal film and displaying the detected light as a two-dimensional image.
摘要翻译：提供了使用表面等离子体共振（SPR）的位置扫描合成肽组合库（PS-SPC）搜索装置和方法。该方法包括将多个肽池中的每一个点样并固定到一个薄金属膜的顶部，将特定材料输入到金属薄膜的顶部，向薄金属膜的底部施加TM模式的光，并激发 SPR，并且检测从薄金属膜反射的TM模式反射光，并将检测到的光显示为二维图像。

10. 发明授权

US06096622A Method of forming shallow trench isolation of semiconductor device 有权
标题翻译：形成半导体器件浅沟槽隔离的方法
公开(公告)号：US06096622A
公开(公告)日：2000-08-01
申请号：US384893
申请日：1999-08-27
申请人： Chang Gyu Kim , Moon Youn Jung
发明人： Chang Gyu Kim , Moon Youn Jung
IPC分类号： H01L21/76 , H01L21/316 , H01L21/762
CPC分类号： H01L21/76224
摘要： The present invention discloses a method of a shallow trench isolation of a semiconductor device. The method comprises the steps of: forming a mask layer having a silicon layer on a semiconductor substrate; forming a trench mask pattern by etching a selected portion of the mask layer; forming a trench by etching the semiconductor substrate by using the trench mask pattern; forming an insulating layer for filling on the trench mask pattern so as to fill the trench; forming a crack in the insulating layer for filling formed on the trench mask pattern; removing a selected portion of the insulating layer for filling; and removing the trench mask pattern.
摘要翻译：本发明公开了半导体器件的浅沟槽隔离的方法。该方法包括以下步骤：在半导体衬底上形成具有硅层的掩模层; 通过蚀刻所述掩模层的选定部分来形成沟槽掩模图案; 通过使用沟槽掩模图案蚀刻半导体衬底来形成沟槽; 形成用于填充沟槽掩模图案以便填充沟槽的绝缘层; 在形成在沟槽掩模图案上的用于填充的绝缘层中形成裂纹; 去除用于填充的绝缘层的选定部分; 并去除沟槽掩模图案。

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