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    • 6. 发明授权
    • Solid-state image pickup device
    • 固态图像拾取装置
    • US07402450B2
    • 2008-07-22
    • US11821715
    • 2007-06-25
    • Takayuki EzakiTeruo Hirayama
    • Takayuki EzakiTeruo Hirayama
    • H01L21/00
    • H01L27/14683H01L27/14603H01L27/14612H01L27/14614H01L27/14621H01L27/14627H01L27/1464H01L27/14643H01L27/14689
    • A solid-state image pickup device 1 according to the present invention includes a semiconductor substrate 2 on which a pixel 20 composed of a photodiode 3 and a transistor is formed. The transistor comprising the pixel 20 is formed on the surface of the semiconductor substrate, a pn junction portion formed between high concentration regions of the photodiode 3 is provided within the semiconductor substrate 2 and a part of the pn junction portion of the photodiode 3 is extended to a lower portion of the transistor formed on the surface of the semiconductor substrate 2. According to the present invention, there is provided a solid-state image pickup device in which a pixel size can be microminiaturized without lowering a saturated electric charge amount (Qs) and sensitivity.
    • 根据本发明的固态图像拾取器件1包括其上形成有由光电二极管3和晶体管构成的像素20的半导体衬底2。 包括像素20的晶体管形成在半导体衬底的表面上,在半导体衬底2内部设置形成在光电二极管3的高浓度区域之间的pn结部分,并且光电二极管3的pn结部分的一部分被延伸 到形成在半导体衬底2的表面上的晶体管的下部。 根据本发明,提供一种固态图像拾取装置,其中像素尺寸可以在不降低饱和电荷量(Qs)和灵敏度的情况下被微型化。
    • 8. 发明授权
    • Static random access memory having transistor elements formed on side
walls of a trench in a semiconductor substrate
    • 具有形成在半导体衬底中的沟槽的侧壁上的晶体管元件的静态随机存取存储器
    • US5814895A
    • 1998-09-29
    • US769121
    • 1996-12-19
    • Teruo Hirayama
    • Teruo Hirayama
    • H01L21/8244H01L27/11H01L29/94
    • H01L27/11H01L27/1112Y10S257/904
    • In a static random access memory (SRAM), a memory cell ratio is increased without deteriorating an integration degree of this SRAM. The static random access memory is arranged by: trenches formed in a semiconductor substrate and an insulating layer for isolating elements within a memory cell forming region; one pair of word transistors; one pair of driver transistors for constituting a flip-flop by forming channel regions of the driver transistors in side surfaces of the trenches and by cross-connecting gate electrodes thereof and drain electrodes thereof at one pair of input/output terminals of the flip-flop; and one pair of word transistors connected between the one pair of input/output terminals of the flip-flop and a bit line.
    • 在静态随机存取存储器(SRAM)中,存储单元比率增加而不降低该SRAM的积分度。 静态随机存取存储器通过以下方式排列:形成在半导体衬底中的沟槽和用于隔离存储单元形成区域内的元件的绝缘层; 一对字晶体管; 一对驱动器晶体管,用于通过在沟槽的侧表面中形成驱动晶体管的沟道区域以及通过在其触发器的一对输入/输出端子上与其栅电极和漏电极交叉连接来构成触发器 ; 以及连接在触发器的一对输入/输出端子和位线之间的一对字晶体管。