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    • 5. 发明授权
    • Semiconductor physical quantity sensor
    • 半导体物理量传感器
    • US06450031B1
    • 2002-09-17
    • US09625860
    • 2000-07-26
    • Minekazu SakaiMinoru MurataSeiki AoyamaYouko Nakagawa
    • Minekazu SakaiMinoru MurataSeiki AoyamaYouko Nakagawa
    • G01P1500
    • G01P15/125B81B3/0086B81B2201/0235B81B2203/0109B81B2203/051G01P15/0802G01P2015/0814
    • A semiconductor physical quantity sensor from which a stable sensor output can be obtained even when the usage environment changes. A silicon thin film is disposed on an insulating film on a supporting substrate, and a bridge structure having a weight part and moving electrodes and cantilever structures having fixed electrodes are formed as separate sections from this silicon thin film. The moving electrodes provided on the weight part and the cantilevered fixed electrodes are disposed facing each other. Slits are formed at root portions of the cantilevered fixed electrodes at the fixed ends thereof, and the width W1 of the root portions is thereby made narrower than the width W2 of the fixed electrodes proper. As a result, the transmission of warp of the supporting substrate to the cantilevered fixed electrodes is suppressed.
    • 一种半导体物理量传感器,即使在使用环境变化的情况下也能够获得稳定的传感器输出。 将硅薄膜设置在支撑基板上的绝缘膜上,并且具有重量部分的电桥结构和具有固定电极的移动电极和悬臂结构形成为与该硅薄膜分开的部分。 设置在重量部分和悬臂固定电极上的移动电极彼此面对地设置。 在悬臂固定电极的固定端的根部处形成狭缝,从而使根部的宽度W1比固定电极本体的宽度W2窄。 结果,抑制了支撑基板的翘曲向悬臂固定电极的传递。
    • 6. 发明授权
    • Welding apparatus for fuel rod end plugs
    • 燃料棒端塞焊接装置
    • US5319178A
    • 1994-06-07
    • US976338
    • 1992-11-13
    • Akio SandoMinoru MurataEiji Yoneda
    • Akio SandoMinoru MurataEiji Yoneda
    • G21C3/10B23K9/00
    • G21C3/10Y02E30/40
    • A welding apparatus for welding an end plug on the end of a pellet filled nuclear fuel rod includes a holding mechanism, an abutting member, a torch and a pressing mechanism. The holding mechanism is for holding the external periphery of the fuel rod with the end plug attached thereto. The abutting member is disposed opposite to the holding mechanism, and the end plug of the fuel rod butts up against the abutting member. The torch is disposed between the holding mechanism and the abutting member, and is placed diametrically opposite to the external surface of the fuel rod. The holding mechanism and the abutting member are made so that the distance therebetween can be adjusted, and the pressing mechanism is provided on one of the holding mechanism or the abutting member, and operates to move the holding mechanism and the abutting member to approach each other. In a welding apparatus of such a design, the fuel rod is held by the holding mechanism, and the pressing mechanism pushes the holding mechanism toward the abutting member, and while retaining such a position at a constant compressive force, welding of the end plug is performed. Therefore, the welding is performed without being affected by the variations in the compressive force caused by welding heat distortions, thereby providing a weld of high integrity and quality.
    • 用于焊接填充颗粒填充的核燃料棒的端部上的端塞的焊接装置包括保持机构,抵接构件,手电筒和按压机构。 保持机构用于保持安装有端塞的燃料棒的外周。 抵接构件与保持机构相对设置,并且燃料棒的端塞抵靠抵靠构件。 手柄设置在保持机构和抵接构件之间,并且与燃料棒的外表面径向相对设置。 保持机构和抵接构件被制成使得可以调节它们之间的距离,并且按压机构设置在保持机构或抵接构件中的一个上,并且操作以使保持机构和抵接构件相互靠近 。 在这种设计的焊接装置中,燃料棒由保持机构保持,并且按压机构将保持机构推向抵接部件,并且在以一定的压缩力保持这样的位置的同时,端塞的焊接 执行。 因此,焊接不受焊接热变形引起的压缩力的变化的影响,从而提供高完整性和高质量的焊接。
    • 9. 发明授权
    • Physical quantity sensor having movable portion
    • 具有可移动部分的物理量传感器
    • US07302847B2
    • 2007-12-04
    • US11201271
    • 2005-08-11
    • Takeshi ItoMinoru Murata
    • Takeshi ItoMinoru Murata
    • G01P9/04
    • G01C19/5719
    • An angular rate sensor includes: a support substrate; a semiconductor layer; and a movable portion. The movable portion includes a driving vibration portion and a detecting vibration portion. The driving vibration portion is capable of vibrating in a first direction. The detecting vibration portion is capable of vibrating in a second direction. The driving vibration portion includes through holes, and the detecting vibration portion includes thorough holes. Each through hole of the driving vibration portion has an elongated shape extending in the first direction. Each through hole of the detecting vibration portion has an elongated shape extending in the second direction.
    • 角速度传感器包括:支撑基板; 半导体层; 和可动部。 可动部包括驱动振动部和检测振动部。 驱动振动部能够沿第一方向振动。 检测振动部能够沿第二方向振动。 驱动振动部分包括通孔,检测振动部分包括通孔。 驱动振动部分的每个通孔具有在第一方向上延伸的细长形状。 检测振动部分的每个通孔具有在第二方向上延伸的细长形状。
    • 10. 发明申请
    • Physical quantity sensor having movable portion
    • 具有可移动部分的物理量传感器
    • US20060055096A1
    • 2006-03-16
    • US11201271
    • 2005-08-11
    • Takeshi ItoMinoru Murata
    • Takeshi ItoMinoru Murata
    • F16F15/00
    • G01C19/5719
    • An angular rate sensor includes: a support substrate; a semiconductor layer; and a movable portion. The movable portion includes a driving vibration portion and a detecting vibration portion. The driving vibration portion is capable of vibrating in a first direction. The detecting vibration portion is capable of vibrating in a second direction. The driving vibration portion includes through holes, and the detecting vibration portion includes thorough holes. Each through hole of the driving vibration portion has an elongated shape extending in the first direction. Each through hole of the detecting vibration portion has an elongated shape extending in the second direction.
    • 角速度传感器包括:支撑基板; 半导体层; 和可动部。 可动部包括驱动振动部和检测振动部。 驱动振动部能够沿第一方向振动。 检测振动部能够沿第二方向振动。 驱动振动部分包括通孔,检测振动部分包括通孔。 驱动振动部分的每个通孔具有在第一方向上延伸的细长形状。 检测振动部分的每个通孔具有在第二方向上延伸的细长形状。