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    • 5. 发明授权
    • Semiconductor device inspection apparatus and semiconductor device inspection method
    • 半导体装置检查装置及半导体装置检查方法
    • US06681361B1
    • 2004-01-20
    • US09565505
    • 2000-05-05
    • Masahito Nakano
    • Masahito Nakano
    • G06F1100
    • G01R31/31908G01R31/01G01R31/2851G01R31/2893G01R31/31718G01R35/005
    • A semiconductor device handler includes a handler section and a measurement section. A reference sample is mounted into a plurality of DUT sections provided in the measurement section. A prescribed test item of the reference sample is stored. A test item with regard to the reference sample is measured and the results of the measurement are stored. Difference values are calculated between the measured value of the reference sample in each of the DUT sections and the stored prescribed test item's values of the reference sample. A compensation value is determined for each of the DUT sections. The compensation values established for each DUT section are used in executing prescribed inspection processing for each semiconductor device unit under test in each DUT section. A prescribed characteristics value is determined for each of the semiconductor devices. The devices under test are classified into prescribed categories according to the inspection results.
    • 半导体器件处理器包括处理器部分和测量部分。 参考样品安装在设置在测量部分中的多个DUT部分中。 存储参考样品的规定测试项目。 测量关于参考样品的测试项目,并且存储测量结果。 在每个DUT部分中的参考样本的测量值与存储的规定测试项目的参考样本的值之间计算差值。 为每个DUT部分确定补偿值。 在每个DUT部分中,为每个DUT部分建立的补偿值用于对被测试的每个半导体器件单元执行规定的检查处理。 为每个半导体器件确定规定的特性值。 被检设备根据检验结果分为规定类别。