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    • 1. 发明授权
    • Passive millimeter wave sensor using high temperature superconducting leads
    • 无源毫米波传感器采用高温超导导线
    • US07132655B2
    • 2006-11-07
    • US10727187
    • 2003-12-02
    • Michael D. JackEli E. Gordon
    • Michael D. JackEli E. Gordon
    • G01J5/00
    • H01Q21/26G01J5/08G01J5/0837G01J5/20H01Q1/002H01Q1/364
    • A radiation sensor (20) has a substrate (34); an antenna (24) coupled to the substrate (34), a thermal detector unit TDU (22) spaced from the antenna (24) and the substrate (34); and a multi-layered conductive lead (30). The conductive lead (30) physically contacts the antenna (24) and the TDU (22). The conductive lead (30) defines a support layer (44) adjacent to the substrate (34) for structurally supporting the TDU (22) over a cavity defined by the substrate (34), a buffer layer (46) disposed on the support layer (44), and a superconductive layer (48) disposed on the buffer layer (46). The buffer layer has a crystalline structure to facilitate bonding with other layers. A method for making the sensor (20) is disclosed wherein the superconductive layer (48) and the buffer layer (46) are deposited using laser deposit, the buffer layer (46) with ion beam assist for alignment.
    • 辐射传感器(20)具有基板(34); 耦合到所述衬底(34)的天线(24),与所述天线(24)和所述衬底(34)间隔开的热检测器单元TDU(22); 和多层导电引线(30)。 导电引线(30)物理地接触天线(24)和TDU(22)。 导电引线(30)限定与衬底(34)相邻的支撑层(44),用于在由衬底(34)限定的空腔上结构地支撑TDU(22);缓冲层(46),设置在支撑层 (44)和设置在缓冲层(46)上的超导层(48)。 缓冲层具有便于与其它层结合的晶体结构。 公开了一种用于制造传感器(20)的方法,其中使用激光沉积沉积超导层(48)和缓冲层(46),缓冲层(46)具有用于对准的离子束辅助。
    • 3. 发明授权
    • Systems and methods for determining compliance of moving vehicles with
emission-concentration standards
    • 确定移动车辆符合排放浓度标准的系统和方法
    • US5719396A
    • 1998-02-17
    • US674075
    • 1996-07-01
    • Michael D. JackTroy P. BahanJeffrey L. HansonDavid R. NelsonAllen J. PaneralJay Peterson
    • Michael D. JackTroy P. BahanJeffrey L. HansonDavid R. NelsonAllen J. PaneralJay Peterson
    • G01N21/35G01N21/00
    • G01N21/3504
    • An emission-concentration monitoring system (20)includes first and second monitor stations (22,32) which are separated by a sensing space (40) along a path (28) of a moving vehicle (26). Each station has a source of electromagnetic radiation (64) which is directed through the vehicle's exhaust plume. Each station also has a set of detectors (66) which are positioned to receive the radiation and configured to measure transmittances at wavelengths which are absorbed by molecular species of exhaust plume (e.g., hydrocarbons, nitric oxide, carbon monoxide and carbon dioxide). These sensed transmittances are converted to emission concentrations by a data processor (50) and compared to a set of emission-concentration standards. The vehicle is determined to be in violation only if its emission concentrations at both the first and second monitor stations exceeds the standards. To insure visual identification of the vehicle, images of it are formed at both stations with video cameras (42, 44) and a license plate reader (46). It has been found that the monitoring system improves testing accuracy because the first and second stations essentially form a check against each other to remove errors due, for example, to vehicular temporal variabilities.
    • 发射浓度监测系统(20)包括沿着移动车辆(26)的路径(28)由感测空间(40)分开的第一和第二监测站(22,32)。 每个站具有电磁辐射源(64),其被引导通过车辆的排气羽流。 每个站还具有一组检测器(66),其被定位成接收辐射并且被配置成测量在被排气羽流(例如烃,一氧化氮,一氧化碳和二氧化碳)的分子物种吸收的波长处的透射率。 这些感测的透射率由数据处理器(50)转换为发射浓度,并与一组发射浓度标准进行比较。 如果第一和第二监测站的排放浓度超过标准,车辆才被确定为违法。 为了确保车辆的视觉识别,在具有摄像机(42,44)和牌照读取器(46)的两个车站形成图像。 已经发现,监控系统提高了测试精度,因为第一站和第二站基本上形成对对方的检查,以消除由于例如车辆时间变化引起的错误。
    • 5. 发明授权
    • Integrated IR, visible and NIR sensor and methods of fabricating same
    • 集成IR,可见光和近红外传感器及其制造方法
    • US5808350A
    • 1998-09-15
    • US778934
    • 1997-01-03
    • Michael D. JackMichael RayRichard H. Wyles
    • Michael D. JackMichael RayRichard H. Wyles
    • G01J5/10G01J5/34H01L27/146H01L37/02H01L31/0256H01L27/148H01L31/0232
    • H01L37/02G01J5/10G01J5/34H01L27/14652
    • An imaging device (10) has a plurality of unit cells that contribute to forming an image of a scene. The imaging device includes a layer of semiconductor material (16), for example silicon, that has low noise photogate charge-mode readout circuitry (20, 21, 26, 28) (e.g., CCD or CMOS readout circuitry and structures) that is disposed upon a first surface (18) of the layer. A second, opposing surface of the layer is a radiation admitting surface of the layer. The layer has a bandgap selected for absorbing electromagnetic radiation having wavelengths shorter than about one micrometer and for generating charge carriers from the absorbed radiation. The generated charge carriers are collected by the photogate charge-mode readout circuitry. A thermal sensing element (22) is disposed above and is thermally isolated from the first surface of the layer. The thermal sensing element may be, by example, one of a bolometer element, a pyroelectric element, or a thermopile element. A layer (12) of narrower bandgap semiconductor material can also be employed with this invention, wherein the layer of narrower bandgap semiconductor material (such as InGaAs or HgCdTe) is atomically bonded to the second surface along a heterojunction interface that is continuous or apertured across the second surface. The bonded layer is used to absorb NIR and visible light.
    • 成像装置(10)具有有助于形成场景图像的多个单位单元。 该成像装置包括半导体材料层(16),例如硅,其具有低噪声光栅充电模式读出电路(20,21,26,28)(例如,CCD或CMOS读出电路和结构),其被布置 在该层的第一表面(18)上。 层的第二相对表面是该层的辐射入射表面。 该层具有选择用于吸收波长短于约一微米的电磁辐射的带隙,并用于从吸收的辐射产生电荷载流子。 产生的电荷载流子由光栅充电模式读出电路收集。 热敏元件(22)设置在层的第一表面的上方并与之隔离。 热敏元件可以是例如测辐射热计元件,热电元件或热电堆元件之一。 窄带隙半导体材料的层(12)也可以用于本发明,其中较窄带隙半导体材料(例如InGaAs或HgCdTe)的层沿着连续或有孔跨越的异质结界面原子键合到第二表面 第二个表面。 接合层用于吸收近红外和可见光。
    • 6. 发明授权
    • Integrated thermopile sensor for automotive, spectroscopic and imaging
applications, and methods of fabricating same
    • 用于汽车,光谱和成像应用的集成热电堆传感器及其制造方法
    • US5689087A
    • 1997-11-18
    • US322442
    • 1994-10-04
    • Michael D. Jack
    • Michael D. Jack
    • G01J5/12G01K7/02H01L35/02
    • G01J5/12G01K7/02
    • A highly integrated thermal sensor (10) is responsive to radiation having wavelengths within a predetermined band of wavelengths. The sensor, which may be a thermopile, is comprised of a substrate (16) comprised of at least one semiconductor material. The substrate includes at least one active region disposed within a first surface of the substrate. The sensor further includes a plurality of thermally-responsive junctions (HJ, CJ) between dissimilar materials (22, 24) that are disposed within the at least one active region, wherein at least one of the thermally-responsive junctions is a hot junction. The hot junction is thermally isolated from the substrate by being suspended from the substrate on dielectric bridges or, in another embodiment, by a thermally insulating and patterned polymer. In a backside illuminated embodiment of this invention the sensor further includes an optical cavity (26) formed within a second surface of the substrate in registration with the active region. The optical cavity includes a radiation absorbing region (28) that is thermally coupled to the at least one hot junction. The sensor further includes an optical filter (30) that is disposed over the optical cavity for admitting radiation within the predetermined band of wavelengths into the optical cavity for absorption by the radiation absorbing region.
    • 高度集成的热传感器(10)响应于具有预定波段范围内的波长的辐射。 可以是热电堆的传感器包括由至少一种半导体材料构成的衬底(16)。 衬底包括设置在衬底的第一表面内的至少一个有源区。 所述传感器还包括设置在所述至少一个活性区域内的不同材料(22,24)之间的多个热响应结(HJ,CJ),其中所述热响应结中的至少一个是热连接。 热接点通过从电介质桥上的衬底悬挂或者在另一个实施例中通过隔热和图案化的聚合物而与衬底热隔离。 在本发明的背面照明实施例中,传感器还包括形成在衬底的与有源区域对准的第二表面内的光学腔(26)。 光腔包括热耦合到至少一个热接头的辐射吸收区域(28)。 传感器还包括光学滤光器(30),其设置在光学腔上方,用于将预定波长带内的辐射进入光学腔以供辐射吸收区吸收。
    • 7. 发明授权
    • Radiation detecting array including unit cells with periodic output
signals each within a unique frequency band
    • 辐射检测阵列包括具有每个在唯一频带内的周期性输出信号的单位单元
    • US4982080A
    • 1991-01-01
    • US266743
    • 1988-11-03
    • Jerry A. WilsonMichael D. Jack
    • Jerry A. WilsonMichael D. Jack
    • G01J1/44G01J5/20G01J5/28G01J5/30H04N5/335
    • G01J5/30G01J2001/4426G01J2005/208G01J2005/283
    • A radiation detecting array 10 has a frequency domain architecture wherein incident radiation is imaged in parallel by an array of radiation detectors 12-16. Each radiation detector has an associated amplitude to frequency conversion device 18-22 for providing output signals wherein the output of each photodetector is represented as a frequency within a uniquely identified band of frequencies, the specific frequency being a function of the output signal amplitude of the photodetector. The readout of one or more selected detectors is accomplished by providing a swept frequency band or bands associated with the desired detector or detectors and mixing the detector frequencies with the swept band. The frequency representing the photodetector output may be input directly to a low dispersion transmission line 30. The unit cells may include radiation detectors comprised of superconducting material and also superconducting components that inherently manifest current or voltage to frequency conversion characteristics in accordance with the Josepson effect. An array having high temperature superconducting components includes photodetectors 60, associated voltage to frequency convertors 64 and a transmission line 70 integrated upon a common substrate.
    • 辐射检测阵列10具有频域结构,其中入射辐射由辐射探测器12-16的阵列平行成像。 每个辐射检测器具有相关联的幅度到频率转换装置18-22,用于提供输出信号,其中每个光电检测器的输出被表示为在唯一标识的频带内的频率,该特定频率是信号幅度的函数 光电探测器 通过提供与期望的检测器或检测器相关联的扫描频带或频带并将检测器频率与扫频带混合来实现一个或多个选择的检测器的读出。 表示光电检测器输出的频率可以直接输入到低色散传输线30.单元电池可以包括由超导材料组成的辐射检测器以及根据Josepson效应固有地表现电流或电压与频率转换特性的超导部件。 具有高温超导元件的阵列包括光电探测器60,与变频器64相关联的电压以及集成在公共衬底上的传输线70。