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1. 发明授权

US06329649B1 Mm-wave/IR monolithically integrated focal plane array 有权
标题翻译： Mm波/ IR单片集成焦平面阵列
公开(公告)号：US06329649B1
公开(公告)日：2001-12-11
申请号：US09414988
申请日：1999-10-07
申请人： Michael D. Jack , Jan Grinberg , Franklin A. Dolezal , Ray Balcerak
发明人： Michael D. Jack , Jan Grinberg , Franklin A. Dolezal , Ray Balcerak
IPC分类号： G01R2302
CPC分类号： H01Q3/2658 , F41G7/008 , F41G7/2286 , F41G7/2293 , G01J5/20 , G01J5/34 , G01R29/0878 , H01Q9/285 , H01Q21/0087 , H01Q21/24
摘要： An integrated infrared and millimeter-wave monolithic focal plane sensor array having a substrate upon which an integrated array of infrared sensors and mm-wave sensors are provided at a first planar level on the same side of the substrate, and a planar antenna for receiving incident millimeter-wave radiation located at a second planar level located between the integrated array of sensors and the surface of the substrates for coupling the mm-wave radiation field to the mm-wave sensor. The antenna receiver of electromagnetic radiation, in one embodiment, is an antenna having a crossed bowtie configuration which efficiently couples the radiation field to the mm-wave sensor. The invention also is directed to a method of fabricating such a radiation sensor.
摘要翻译：一种具有基板的集成的红外和毫米波单片焦平面传感器阵列，在该基板上在基板的同一侧上的第一平面级设置有红外传感器和mm波传感器的集成阵列，以及用于接收事件的平面天线毫米波辐射位于位于集成传感器阵列和基板表面之间的第二平面水平处，用于将毫米波辐射场耦合到毫米波传感器。在一个实施例中，电磁辐射的天线接收器是具有交叉的弓形配置的天线，其有效地将辐射场耦合到毫米波传感器。本发明还涉及一种制造这种辐射传感器的方法。

2. 发明授权

US5808350A Integrated IR, visible and NIR sensor and methods of fabricating same 失效
标题翻译：集成IR，可见光和近红外传感器及其制造方法
公开(公告)号：US5808350A
公开(公告)日：1998-09-15
申请号：US778934
申请日：1997-01-03
申请人： Michael D. Jack , Michael Ray , Richard H. Wyles
发明人： Michael D. Jack , Michael Ray , Richard H. Wyles
IPC分类号： G01J5/10 , G01J5/34 , H01L27/146 , H01L37/02 , H01L31/0256 , H01L27/148 , H01L31/0232
CPC分类号： H01L37/02 , G01J5/10 , G01J5/34 , H01L27/14652
摘要： An imaging device (10) has a plurality of unit cells that contribute to forming an image of a scene. The imaging device includes a layer of semiconductor material (16), for example silicon, that has low noise photogate charge-mode readout circuitry (20, 21, 26, 28) (e.g., CCD or CMOS readout circuitry and structures) that is disposed upon a first surface (18) of the layer. A second, opposing surface of the layer is a radiation admitting surface of the layer. The layer has a bandgap selected for absorbing electromagnetic radiation having wavelengths shorter than about one micrometer and for generating charge carriers from the absorbed radiation. The generated charge carriers are collected by the photogate charge-mode readout circuitry. A thermal sensing element (22) is disposed above and is thermally isolated from the first surface of the layer. The thermal sensing element may be, by example, one of a bolometer element, a pyroelectric element, or a thermopile element. A layer (12) of narrower bandgap semiconductor material can also be employed with this invention, wherein the layer of narrower bandgap semiconductor material (such as InGaAs or HgCdTe) is atomically bonded to the second surface along a heterojunction interface that is continuous or apertured across the second surface. The bonded layer is used to absorb NIR and visible light.
摘要翻译：成像装置（10）具有有助于形成场景图像的多个单位单元。该成像装置包括半导体材料层（16），例如硅，其具有低噪声光栅充电模式读出电路（20,21,26,28）（例如，CCD或CMOS读出电路和结构），其被布置在该层的第一表面（18）上。层的第二相对表面是该层的辐射入射表面。该层具有选择用于吸收波长短于约一微米的电磁辐射的带隙，并用于从吸收的辐射产生电荷载流子。产生的电荷载流子由光栅充电模式读出电路收集。热敏元件（22）设置在层的第一表面的上方并与之隔离。热敏元件可以是例如测辐射热计元件，热电元件或热电堆元件之一。窄带隙半导体材料的层（12）也可以用于本发明，其中较窄带隙半导体材料（例如InGaAs或HgCdTe）的层沿着连续或有孔跨越的异质结界面原子键合到第二表面第二个表面。接合层用于吸收近红外和可见光。

3. 发明授权

US5689087A Integrated thermopile sensor for automotive, spectroscopic and imaging applications, and methods of fabricating same 失效
标题翻译：用于汽车，光谱和成像应用的集成热电堆传感器及其制造方法
公开(公告)号：US5689087A
公开(公告)日：1997-11-18
申请号：US322442
申请日：1994-10-04
申请人： Michael D. Jack
发明人： Michael D. Jack
IPC分类号： G01J5/12 , G01K7/02 , H01L35/02
CPC分类号： G01J5/12 , G01K7/02
摘要： A highly integrated thermal sensor (10) is responsive to radiation having wavelengths within a predetermined band of wavelengths. The sensor, which may be a thermopile, is comprised of a substrate (16) comprised of at least one semiconductor material. The substrate includes at least one active region disposed within a first surface of the substrate. The sensor further includes a plurality of thermally-responsive junctions (HJ, CJ) between dissimilar materials (22, 24) that are disposed within the at least one active region, wherein at least one of the thermally-responsive junctions is a hot junction. The hot junction is thermally isolated from the substrate by being suspended from the substrate on dielectric bridges or, in another embodiment, by a thermally insulating and patterned polymer. In a backside illuminated embodiment of this invention the sensor further includes an optical cavity (26) formed within a second surface of the substrate in registration with the active region. The optical cavity includes a radiation absorbing region (28) that is thermally coupled to the at least one hot junction. The sensor further includes an optical filter (30) that is disposed over the optical cavity for admitting radiation within the predetermined band of wavelengths into the optical cavity for absorption by the radiation absorbing region.
摘要翻译：高度集成的热传感器（10）响应于具有预定波段范围内的波长的辐射。可以是热电堆的传感器包括由至少一种半导体材料构成的衬底（16）。衬底包括设置在衬底的第一表面内的至少一个有源区。所述传感器还包括设置在所述至少一个活性区域内的不同材料（22,24）之间的多个热响应结（HJ，CJ），其中所述热响应结中的至少一个是热连接。热接点通过从电介质桥上的衬底悬挂或者在另一个实施例中通过隔热和图案化的聚合物而与衬底热隔离。在本发明的背面照明实施例中，传感器还包括形成在衬底的与有源区域对准的第二表面内的光学腔（26）。光腔包括热耦合到至少一个热接头的辐射吸收区域（28）。传感器还包括光学滤光器（30），其设置在光学腔上方，用于将预定波长带内的辐射进入光学腔以供辐射吸收区吸收。

4. 发明授权

US4982080A Radiation detecting array including unit cells with periodic output signals each within a unique frequency band 失效
标题翻译：辐射检测阵列包括具有每个在唯一频带内的周期性输出信号的单位单元
公开(公告)号：US4982080A
公开(公告)日：1991-01-01
申请号：US266743
申请日：1988-11-03
申请人： Jerry A. Wilson , Michael D. Jack
发明人： Jerry A. Wilson , Michael D. Jack
IPC分类号： G01J1/44 , G01J5/20 , G01J5/28 , G01J5/30 , H04N5/335
CPC分类号： G01J5/30 , G01J2001/4426 , G01J2005/208 , G01J2005/283
摘要： A radiation detecting array 10 has a frequency domain architecture wherein incident radiation is imaged in parallel by an array of radiation detectors 12-16. Each radiation detector has an associated amplitude to frequency conversion device 18-22 for providing output signals wherein the output of each photodetector is represented as a frequency within a uniquely identified band of frequencies, the specific frequency being a function of the output signal amplitude of the photodetector. The readout of one or more selected detectors is accomplished by providing a swept frequency band or bands associated with the desired detector or detectors and mixing the detector frequencies with the swept band. The frequency representing the photodetector output may be input directly to a low dispersion transmission line 30. The unit cells may include radiation detectors comprised of superconducting material and also superconducting components that inherently manifest current or voltage to frequency conversion characteristics in accordance with the Josepson effect. An array having high temperature superconducting components includes photodetectors 60, associated voltage to frequency convertors 64 and a transmission line 70 integrated upon a common substrate.
摘要翻译：辐射检测阵列10具有频域结构，其中入射辐射由辐射探测器12-16的阵列平行成像。每个辐射检测器具有相关联的幅度到频率转换装置18-22，用于提供输出信号，其中每个光电检测器的输出被表示为在唯一标识的频带内的频率，该特定频率是信号幅度的函数光电探测器通过提供与期望的检测器或检测器相关联的扫描频带或频带并将检测器频率与扫频带混合来实现一个或多个选择的检测器的读出。表示光电检测器输出的频率可以直接输入到低色散传输线30.单元电池可以包括由超导材料组成的辐射检测器以及根据Josepson效应固有地表现电流或电压与频率转换特性的超导部件。具有高温超导元件的阵列包括光电探测器60，与变频器64相关联的电压以及集成在公共衬底上的传输线70。

5. 发明授权

US09091748B2 Methods and apparatus for 3D UV imaging 有权
标题翻译： 3D紫外成像的方法和装置
公开(公告)号：US09091748B2
公开(公告)日：2015-07-28
申请号：US13449637
申请日：2012-04-18
申请人： Adam M. Kennedy , Michael D. Jack , James Asbrock , Frank B. Jaworski
发明人： Adam M. Kennedy , Michael D. Jack , James Asbrock , Frank B. Jaworski
IPC分类号： H04N13/02 , G01S7/486 , G01S17/89 , G01S7/48
CPC分类号： H04N13/20 , G01S7/4802 , G01S7/4861 , G01S17/89
摘要： A 3D ultraviolet (UV) imaging LADAR system includes a UV source configured to generate a UV interrogation beam, a sensor configured to receive a UV return beam reflected from a target and to produce an electrical signal, and an imaging module coupled to the sensor and configured to receive the electrical signal and to generate a corresponding 3D image of the target. In one example, the sensor includes a down-shifting device configured to down-shift the UV return beam to a down-shifted light beam of a different wavelength, for example, in the visible or SWIR wavelength ranges.
摘要翻译： 3D紫外（UV）成像LADAR系统包括被配置为产生UV询问光束的UV源，被配置为接收从目标物反射并产生电信号的UV返回光束的传感器，以及耦合到传感器的成像模块，被配置为接收电信号并产生目标的相应3D图像。在一个示例中，传感器包括下移装置，其被配置为将UV返回光束向下移位到例如在可见光或SWIR波长范围内的不同波长的向下移动的光束。

6. 发明授权

US5719396A Systems and methods for determining compliance of moving vehicles with emission-concentration standards 失效
标题翻译：确定移动车辆符合排放浓度标准的系统和方法
公开(公告)号：US5719396A
公开(公告)日：1998-02-17
申请号：US674075
申请日：1996-07-01
申请人： Michael D. Jack , Troy P. Bahan , Jeffrey L. Hanson , David R. Nelson , Allen J. Paneral , Jay Peterson
发明人： Michael D. Jack , Troy P. Bahan , Jeffrey L. Hanson , David R. Nelson , Allen J. Paneral , Jay Peterson
IPC分类号： G01N21/35 , G01N21/00
CPC分类号： G01N21/3504
摘要： An emission-concentration monitoring system (20)includes first and second monitor stations (22,32) which are separated by a sensing space (40) along a path (28) of a moving vehicle (26). Each station has a source of electromagnetic radiation (64) which is directed through the vehicle's exhaust plume. Each station also has a set of detectors (66) which are positioned to receive the radiation and configured to measure transmittances at wavelengths which are absorbed by molecular species of exhaust plume (e.g., hydrocarbons, nitric oxide, carbon monoxide and carbon dioxide). These sensed transmittances are converted to emission concentrations by a data processor (50) and compared to a set of emission-concentration standards. The vehicle is determined to be in violation only if its emission concentrations at both the first and second monitor stations exceeds the standards. To insure visual identification of the vehicle, images of it are formed at both stations with video cameras (42, 44) and a license plate reader (46). It has been found that the monitoring system improves testing accuracy because the first and second stations essentially form a check against each other to remove errors due, for example, to vehicular temporal variabilities.
摘要翻译：发射浓度监测系统（20）包括沿着移动车辆（26）的路径（28）由感测空间（40）分开的第一和第二监测站（22,32）。每个站具有电磁辐射源（64），其被引导通过车辆的排气羽流。每个站还具有一组检测器（66），其被定位成接收辐射并且被配置成测量在被排气羽流（例如烃，一氧化氮，一氧化碳和二氧化碳）的分子物种吸收的波长处的透射率。这些感测的透射率由数据处理器（50）转换为发射浓度，并与一组发射浓度标准进行比较。如果第一和第二监测站的排放浓度超过标准，车辆才被确定为违法。为了确保车辆的视觉识别，在具有摄像机（42,44）和牌照读取器（46）的两个车站形成图像。已经发现，监控系统提高了测试精度，因为第一站和第二站基本上形成对对方的检查，以消除由于例如车辆时间变化引起的错误。

7. 再颁专利

USRE44214E1 Unmanned integrated optical remote emissions sensor (RES) for motor vehicles 有权
公开(公告)号：USRE44214E1
公开(公告)日：2013-05-14
申请号：US12489349
申请日：2009-06-22
申请人： Jay Peterson , David R Nelson , Troy P. Bahan , George C. Polchin , Michael D. Jack
发明人： Jay Peterson , David R Nelson , Troy P. Bahan , George C. Polchin , Michael D. Jack
IPC分类号： G01N21/00 , G01N21/35 , G01N21/25
CPC分类号： G01N21/3504
摘要： An unmanned integrated RES 12 integrates all of its components except the reflector 22 into a single console 30 that is positioned at the side of a road and has a CPU 36 that controls calibration, verification and data gathering. The RES's source 32 and receiver 34 are preferably stacked one on top of the other such that the IR beam 24 traverses a low and high path as it crosses the road 14. This allows the RES to detect both low and high ground clearance vehicles. To maintain the vehicle processing and identification throughput, the speed sensor 54 and ALPR 48,50 detect the passing vehicles at steep angles, approximately 20 to 35 degrees. In a preferred system, a manned control center 16 communicates with a large number of the unmanned integrated RES to download emissions data, perform remote diagnostics, and, if necessary, dispatch a technician to perform maintenance on a particular RES.

8. 发明申请

US20090109582A1 Method of protecting circuits using integrated array fuse elements and process for fabrication 审中-公开
标题翻译：使用集成阵列熔丝元件保护电路的方法和制造工艺
公开(公告)号：US20090109582A1
公开(公告)日：2009-04-30
申请号：US11980150
申请日：2007-10-30
申请人： Michael D. Jack , Michael Ray , Robert E. Kvaas , Gina M. Crawford
发明人： Michael D. Jack , Michael Ray , Robert E. Kvaas , Gina M. Crawford
IPC分类号： H02H9/00 , G01T1/24 , H01L27/00 , H01L21/44
CPC分类号： H01L23/62 , H01H85/0047 , H01H85/046 , H01H85/06 , H01L23/5256 , H01L2924/0002 , H01L2924/00
摘要： In one exemplary embodiment, a detector of electromagnetic radiation includes: a substrate; at least one layer of semiconductor material formed on the substrate, said at least one layer of semiconductor material defining a radiation absorbing and detecting region; an electrical contact configured to couple said region to a readout circuit; and a fuse coupled between the region and the electrical contact. In another exemplary embodiment, a fusible link between a first component and a second component is provided and includes: a fuse with an undercut located underneath at least a portion of the fuse; a first contact coupling the first component to the fuse; and a second contact coupling the second component to the fuse, wherein the undercut is disposed between the first contact and the second contact. In another exemplary embodiment, a fusible link includes a fuse having a layer of material having a negative temperature coefficient of resistance.
摘要翻译：在一个示例性实施例中，电磁辐射检测器包括：基底; 形成在所述衬底上的至少一层半导体材料，所述至少一层半导体材料限定辐射吸收和检测区域; 电触点，被配置为将所述区域耦合到读出电路; 以及耦合在所述区域和所述电触点之间的熔丝。在另一个示例性实施例中，提供了第一部件和第二部件之间的可熔连接件，并且包括：具有位于熔断器的至少一部分下方的底切的熔断器; 将所述第一部件耦合到所述保险丝的第一接触件; 以及将所述第二部件耦合到所述保险丝的第二触点，其中所述底切设置在所述第一触点和所述第二触点之间。在另一示例性实施例中，可熔连接件包括具有负温度系数电阻的材料层的保险丝。

9. 发明授权

US06441368B1 Infrared/visible energy protection for millimeter wave bolometer antenna method and apparatus 有权
标题翻译：毫米波辐射热量计天线方法和装置的红外/可见光能量保护
公开(公告)号：US06441368B1
公开(公告)日：2002-08-27
申请号：US10000591
申请日：2001-10-23
申请人： Jan Grinberg , Michael D. Jack
发明人： Jan Grinberg , Michael D. Jack
IPC分类号： H01J502
CPC分类号： H01Q1/42 , G01J5/08 , G01J5/0806 , G01J5/0837 , G01J5/0884 , G01J2005/202
摘要： A method and apparatus for protecting a bolometer antenna imaging array from out of band electromagnetic energy is disclosed. Protective pads are disposed upon a window in an optical system forming a millimeter wave image on an array of bolometer antenna sensors. The protective pads are effectively opaque to infrared and visible emissions and are aligned to shade the bolometer portion of the bolometer antennas from infrared and visible emissions, while leaving the antenna portion of each sensor in the array exposed to intercept the millimeter wave energy incident upon them.
摘要翻译：公开了一种用于保护测辐射热量计天线成像阵列免受带外电磁能的方法和装置。保护垫设置在形成测辐射热计天线传感器阵列上的毫米波图像的光学系统中的窗口上。保护垫对于红外线和可见光发射实际上是不透明的，并且对准以使辐射计天线的测辐射热计部分从红外和可见发射中遮蔽，同时使阵列中的每个传感器的天线部分暴露以拦截入射到其上的毫米波能量。

10. 发明授权

US6144030A Advanced small pixel high fill factor uncooled focal plane array 失效
标题翻译：先进的小像素高填充因子非冷却焦平面阵列
公开(公告)号：US6144030A
公开(公告)日：2000-11-07
申请号：US959143
申请日：1997-10-28
申请人： Michael Ray , Michael D. Jack , William A. Radford , Daniel F. Murphy
发明人： Michael Ray , Michael D. Jack , William A. Radford , Daniel F. Murphy
IPC分类号： G01J5/20
CPC分类号： G01J5/20
摘要： A microbolometer detector element (10) for a focal plane array is provided including an optically absorptive material structure (12) characterized by an electrical resistivity that varies as a function of its temperature coupled in spaced relation to a thermal isolation structure (20). The thermal isolation structure (20) is coupled in spaced relation to a sensor (34) connected to the optically absorptive material structure (12) for sensing the absorptive structure's (12) electrical resistivity. The thermal isolation structure (20) facilitates very high fill factors even when the pixel size is shrunk below the baseline fifty micron size. The thickness of the optically absorptive material structure (12) and the thermal isolation structure (20) can be independently controlled since the thermal isolation structure (20) is disposed in spaced relation under the absorptive material structure (12). The thermal isolation structure (20) can be made several times longer than prior art designs to increase the thermal isolation of the optically absorptive material structure (12) and to increase pixel responsivity. The thermal isolation structure (20) may include a planar member (26) for reflecting incident optical radiation not absorbed by the absorptive material (12) back to the absorptive material (12). In a preferred embodiment of the present invention, the absorptive structure (12) is a polycrystalline semiconductive layer supported above the thermal isolation structure (20) by downwardly projecting leg members (18). The thermal isolation structure (20) also includes downwardly projecting leg members (28) for supporting it in spaced relation above a silicon substrate surface (30) overlying an integrated readout circuit (34).
摘要翻译：提供了一种用于焦平面阵列的微辐射热计检测器元件（10），其包括光学吸收材料结构（12），其特征在于电阻率随着其与热隔离结构（20）间隔开的关系而变化。热隔离结构（20）以与光学吸收材料结构（12）连接的传感器（34）间隔开来耦合，用于感测吸收结构（12）的电阻率。即使当像素尺寸缩小到基线五十微米尺寸以下时，热隔离结构（20）也有助于非常高的填充因子。光吸收材料结构（12）和热隔离结构（20）的厚度可以被独立地控制，因为热隔离结构（20）以间隔关系设置在吸收材料结构（12）下。热隔离结构（20）可以比现有技术的设计长几倍，以增加光吸收材料结构（12）的热隔离并增加像素响应度。热隔离结构（20）可以包括用于将未被吸收材料（12）吸收的入射光辐射反射回吸收材料（12）的平面构件（26）。在本发明的优选实施例中，吸收结构（12）是通过向下突出的腿部构件（18）而支撑在热隔离结构（20）上方的多晶半导体层。热隔离结构（20）还包括向下突出的腿部构件（28），用于以覆盖集成读出电路（34）的硅衬底表面（30）上方间隔开地支撑它们。

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