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1. 发明申请

US20060121735A1 Method for producing insulation structures 有权
标题翻译：绝缘结构的制造方法
公开(公告)号：US20060121735A1
公开(公告)日：2006-06-08
申请号：US10527789
申请日：2003-09-12
申请人： Matthias Aikele , Albert Engelhardt , Marcus Frey , Bernhard Hartmann , Helmut Seidel
发明人： Matthias Aikele , Albert Engelhardt , Marcus Frey , Bernhard Hartmann , Helmut Seidel
IPC分类号： H01L21/302 , H01L21/461
CPC分类号： B81C1/00698 , B81B2201/0235 , B81B2203/033 , B81C2201/0178
摘要： The invention relates to processes for the formation of isolation structures for micro-machined sensors in single-crystal surface technology. In known processes, silicon structures defined by deep trenches are etched and uncovered by a “release etch” step also at their bottom surface towards the substrate. The subsequent lining of these trenches with a non-conducting insulating material, such as silicon dioxide leads to a firm anchoring by means of a surrounding of the silicon structure with the lined trenches on three sides, leaving one side uncovered. It is the main idea of the invention—instead of lining the trenches—to convert thin-walled silicon into an electrically non-conducting material. This can, for instance, be accomplished by means of a thermal oxidation of narrow silicon ribs released prior thereto by trenches. In the minimal configuration, two trenches (holes) per rib with the required structure depth must be etched for this purpose. The silicon rib between them must be narrow enough to permit its complete thermal through oxidation.
摘要翻译：本发明涉及用于在单晶表面技术中形成用于微加工传感器的隔离结构的方法。在已知的工艺中，由深沟槽限定的硅结构通过在其底表面朝向衬底的“释放蚀刻”步骤被蚀刻和未覆盖。这些具有非导电绝缘材料（例如二氧化硅）的这些沟槽的后续衬里导致通过硅结构的周围与三面沟槽在三面上的牢固锚定，留下一侧未覆盖。本发明的主要思想是将薄壁硅转化为非导电材料，而不是将沟槽衬里。这可以例如通过在其之前通过沟槽释放的窄硅肋的热氧化来实现。在最小的构造中，为了这个目的，必须蚀刻每个具有所需结构深度的肋的两个沟槽（孔）。它们之间的硅筋必须足够窄以使其完全通过热氧化。

2. 发明授权

US07862731B2 Method for producing insulation structures 有权
标题翻译：绝缘结构的制造方法
公开(公告)号：US07862731B2
公开(公告)日：2011-01-04
申请号：US10527789
申请日：2003-09-12
申请人： Matthias Aikele , Albert Engelhardt , Marcus Frey , Bernhard Schmid , Helmut Seidel
发明人： Matthias Aikele , Albert Engelhardt , Marcus Frey , Bernhard Schmid , Helmut Seidel
IPC分类号： H01L21/302 , B81C1/00
CPC分类号： B81C1/00698 , B81B2201/0235 , B81B2203/033 , B81C2201/0178
摘要： To form an isolation structure in a semiconductor substrate, at least two trenches are formed with a rib therebetween in the semiconductor substrate, and then the semiconductor material in the area of the trenches and particularly the rib is converted to an electrically insulating material. For example, this is accomplished by thermal oxidation of silicon semiconductor material of the rib.
摘要翻译：为了在半导体衬底中形成隔离结构，在半导体衬底中形成至少两个沟槽，其间沟槽中的半导体材料转变为电绝缘材料。例如，这通过肋的硅半导体材料的热氧化来实现。

3. 发明授权

US09016596B2 Method for process diagnosis and rotary atomizer arrangement 有权
标题翻译：过程诊断和旋转雾化器布置方法
公开(公告)号：US09016596B2
公开(公告)日：2015-04-28
申请号：US12669926
申请日：2008-07-11
申请人： Michael Baumann , Torsten Block , Juergen Haas , Frank Herre , Marcus Frey , Alexander Meissner , Hans-Jurgen Nolte , Bernhard Seiz
发明人： Michael Baumann , Torsten Block , Juergen Haas , Frank Herre , Marcus Frey , Alexander Meissner , Hans-Jurgen Nolte , Bernhard Seiz
IPC分类号： B05B3/02 , B05B5/04
CPC分类号： B05B5/0415 , B05B5/0422 , B05B12/08 , B05B15/14 , H02P29/10
摘要： A rotary atomizer arrangement and methods for operating the same are disclosed. An exemplary atomizer may be used for the coating of work pieces, and may include a bell plate driven by an electric motor. The exemplary atomizer may further be configured for the detection of errors in the spraying process and/or the drive system of the bell plate, such as by analyzing corresponding parameters of typical values of the drive motor.
摘要翻译：公开了一种旋转雾化器装置及其操作方法。示例性的雾化器可以用于工件的涂覆，并且可以包括由电动机驱动的钟板。示例性雾化器还可以被配置为用于检测喷射过程和/或钟板的驱动系统中的错误，例如通过分析驱动马达的典型值的相应参数。

4. 发明授权

US08864049B2 Rotary atomizer with a spraying body 有权
标题翻译：旋转雾化器与喷雾体
公开(公告)号：US08864049B2
公开(公告)日：2014-10-21
申请号：US12692067
申请日：2010-01-22
申请人： Hans-Jurgen Nolte , Harry Krumma , Frank Herre , Michael Baumann , Marcus Frey , Rainer Melcher , Eberhard Streisel , Bernhard Seiz , Peter Marquardt
发明人： Hans-Jurgen Nolte , Harry Krumma , Frank Herre , Michael Baumann , Marcus Frey , Rainer Melcher , Eberhard Streisel , Bernhard Seiz , Peter Marquardt
IPC分类号： B05B3/10 , B05B15/06 , B05B3/00
CPC分类号： B05B3/1035 , B05B3/001 , B05B3/1014 , B05B3/1042 , B05B15/65
摘要： A rotary sprayer for a coating apparatus is disclosed. An exemplary rotary sprayer may include a spraying body configured to be mounted on a drive shaft of a drive motor for rotation with the drive shaft. The spraying body may further include a detachable mounting device for coaxial connection of the spraying body to the drive shaft. The detachable mounting device may include a spraying body thread that mates with a driveshaft thread defined by the drive shaft, and a plurality of elastic tabs configured to abut a corresponding cavity defined by the driveshaft, such that rotation of the spraying body increases an abutment force between the elastic tabs and the corresponding cavity of the driveshaft.
摘要翻译：公开了一种用于涂布装置的旋转喷雾器。示例性旋转喷雾器可以包括喷雾体，其构造成安装在驱动马达的驱动轴上，用于与驱动轴一起旋转。喷雾体还可以包括可拆卸的安装装置，用于使喷射体与驱动轴同轴连接。可拆卸的安装装置可以包括与由驱动轴限定的驱动轴线配合的喷射体螺纹，以及构造成邻接由驱动轴限定的相应空腔的多个弹性突出部，使得喷射体的旋转增加邻接力在弹性翼片和驱动轴的相应空腔之间。

5. 发明授权

US08807077B2 Coating device and coating method having a constant directing air temperature 有权
标题翻译：涂布装置和涂布方法具有恒定的引导空气温度
公开(公告)号：US08807077B2
公开(公告)日：2014-08-19
申请号：US12667249
申请日：2008-06-20
申请人： Alexander Meissner , Frank Herre , Marcus Frey , Torsten Block , Michael Baumann
发明人： Alexander Meissner , Frank Herre , Marcus Frey , Torsten Block , Michael Baumann
IPC分类号： B05C11/10 , B05B3/00 , B05B3/10 , B05B1/28
CPC分类号： B05B3/1092 , B05B3/001
摘要： Exemplary coating devices and methods are disclosed. An exemplary coating device may include an atomizer for applying a spray jet of a coating means or material to a component, at least one directing air nozzle for outputting shaping or directing air in order to shape the spray jet, and a temperature-control device for controlling the temperature of the directing air. The coating device may further include a control unit which activates the temperature-control device as a function of at least one operating variable of the atomizer in order to set a predetermined directing air temperature.
摘要翻译：公开了示例性的涂覆装置和方法。示例性的涂覆装置可以包括用于将涂覆装置或材料的喷射射流施加到部件的雾化器，至少一个引导空气喷嘴，用于输出成形或引导空气以便形成喷射射流;以及温度控制装置，控制导向空气的温度。涂覆装置还可以包括控制单元，其根据雾化器的至少一个操作变量激活温度控制装置，以便设定预定的引导空气温度。

6. 发明授权

US08544409B2 Coating zone with inclined guide rails 有权
标题翻译：涂层带倾斜导轨
公开(公告)号：US08544409B2
公开(公告)日：2013-10-01
申请号：US12666632
申请日：2008-06-23
申请人： Frank Herre , Juergen Haas , Michael Baumann , Marcus Frey , Hans Vetters , Jan Grigoleit
发明人： Frank Herre , Juergen Haas , Michael Baumann , Marcus Frey , Hans Vetters , Jan Grigoleit
IPC分类号： B05C5/02 , B05C15/00
CPC分类号： B05B13/0452 , B05B13/0431 , B05B16/40 , B05B16/60
摘要： A coating zone comprises a conveyor for transporting an application object. At least one guide rail extends through the coating zone adjacent the conveyor, arranged above the conveyor at a height at least at the level of the top of the object. At least one robot may move along the conveyor on the guide rail, the robot having a first axis for joint rotation of at least one moving member of the robot in relation to a main body guided along the guide rail. A load-bearing structure supports the at least one guide rail, the load-bearing structure including at least one load-bearing pillar extending substantially vertically downwards from the level of the guide rail. The guide rail and the main body of the robot are arranged in such a way that the first axis of the robot is inclined relative to a vertical plane parallel to the conveying direction.
摘要翻译：涂覆区域包括用于输送应用物体的输送机。至少一个导轨延伸穿过邻近输送机的涂覆区域，其布置在输送机上方至少在物体顶部的高度处的高度。至少一个机器人可以沿着导轨上的输送机移动，机器人具有用于相对于沿导轨引导的主体的机器人的至少一个移动部件的关节旋转的第一轴线。承载结构支撑至少一个导轨，所述承载结构包括至少一个从所述导轨的高度垂直向下延伸的承载支柱。导轨和机器人的主体以使机器人的第一轴相对于平行于传送方向的垂直平面倾斜的方式布置。

7. 发明授权

US07908994B2 Automatically steered coating machine also a container for the coating material 有权
标题翻译：自动转向涂布机也是涂料的容器
公开(公告)号：US07908994B2
公开(公告)日：2011-03-22
申请号：US11551104
申请日：2006-10-19
申请人： Frank Herre , Jürgen Haas , Hans Vetters , Michael Baumann , Thomas Hezel , Bekim Maxharraj , Nedime Maxharraj, legal representative , Jan Grigoleit , Marcus Frey , Herbert Martin
发明人： Frank Herre , Jürgen Haas , Hans Vetters , Michael Baumann , Thomas Hezel , Bekim Maxharraj , Jan Grigoleit , Marcus Frey , Herbert Martin
IPC分类号： B05C5/02
CPC分类号： B05B12/1454 , B05B5/1633 , B05B5/1675 , B05B12/14 , B05B13/0431
摘要： The piston dispenser for the measured supplying of material to the atomizer of a painting robot is arranged in the hand joint of the robot. Various feasible embodiments of the dispensing cylinder of this piston dispenser are described.
摘要翻译：用于向涂装机器人的雾化器测量的材料供应的活塞分配器布置在机器人的手关节中。描述了该活塞分配器的分配缸的各种可行的实施例。

8. 发明授权

US08097293B2 Operating method for an atomiser and a corresponding coating apparatus 有权
标题翻译：雾化器和相应涂层设备的操作方法
公开(公告)号：US08097293B2
公开(公告)日：2012-01-17
申请号：US12162457
申请日：2007-09-19
申请人： Benjamin Wöhr , Hans-Jürgen Nolte , Andreas Fischer , Peter Marquardt , Frank Herre , Marcus Frey
发明人： Benjamin Wöhr , Hans-Jürgen Nolte , Andreas Fischer , Peter Marquardt , Frank Herre , Marcus Frey
IPC分类号： B05D1/06 , B05B5/057
CPC分类号： B05B3/1014 , B05B5/0403 , B05B5/0426 , B05B12/08 , B05B12/084 , B05B12/10 , B05B13/0405 , B05B13/0426 , B05B13/0431
摘要： The invention relates to an operating method for an atomiser (1) for the coating of structural components, particularly of vehicle body parts, with the following steps: Application of a spray jet of a coating agent through the atomiser (1); discharge of a first guide air flow (11) for the formation of a spray jet; determination of at least one application parameter (η, γ, T, BC/CC, Qvarnish, n, U,) which reproduces a property (η, γ, T, BC/CC) of the applied coating agent or an operating variable (Qvarnish, n, U) of the atomiser (1) as well as influencing of the first guide air flow (11) as a factor of the application parameter (η, γ, T, BC/CC, Qvarnish, n, U,). Within the framework of the invention, there is the alternative option that fluctuations of the application parameters and, based thereon, variations of the spray jet width are taken into account by means of an adaptation of the path spacing (d) between the adjacent coating agent paths for the purpose of keeping the path overlapping constant. Furthermore, the invention comprises a corresponding coating apparatus.
摘要翻译：本发明涉及一种用于涂覆结构部件，特别是车身部件的雾化器（1）的操作方法，具有以下步骤：通过喷雾器（1）施加涂覆剂的喷射射流; 排出用于形成喷射射流的第一引导空气流（11）; 确定再现施加的涂覆剂的性质（＆eegr，γ，T，BC / CC）的至少一个应用参数（＆eegr;γ，T，BC / CC，Qvarnish，n，U）雾化器（1）的变量（Qvarnish，n，U）以及第一引导空气流（11）的影响作为应用参数（＆egr，γ，T，BC / CC，Qvarnish，n， U，）。在本发明的框架内，存在替代选择，通过适应相邻涂层剂之间的路径间距（d）来考虑应用参数的波动和基于其的喷雾宽度的变化，保持路径重叠的路径不变。此外，本发明包括相应的涂覆装置。

9. 发明申请

US20110045194A1 ROBOT COMPRISING A CLEANING DEVICE AND ASSOCIATED OPERATING METHOD 有权
标题翻译：包含清洁装置的机器人和相关的操作方法
公开(公告)号：US20110045194A1
公开(公告)日：2011-02-24
申请号：US12682205
申请日：2008-10-06
申请人： Frank Herre , Rainer Melcher , Manfred Michelfelder , Thomas Hezel , Juergen Haas , Bernd Leiensetter , Alexander Meissner , Marcus Frey
发明人： Frank Herre , Rainer Melcher , Manfred Michelfelder , Thomas Hezel , Juergen Haas , Bernd Leiensetter , Alexander Meissner , Marcus Frey
IPC分类号： B05D1/02 , B05C13/00 , B05C21/00 , B25J19/00
CPC分类号： B05B13/0292 , B05B13/0285 , Y10S901/49
摘要： Exemplary robots and corresponding exemplary operating methods for a painting system are disclosed. In one example, the robot is a handling robot for opening and closing doors or bonnets of motor vehicle bodies. A robot element of a handling robot that is susceptible to dirt retention, e.g., a handling tool, may be arranged away from the spray jet of a paint during the painting operation and is applied to the component that is to be painted. The robot may include a cleaning device for cleaning or for keeping the robot element of the handling robot that is susceptible to dirt retention clean from paint that is applied with spray jet in the painting operation.
摘要翻译：公开了用于绘画系统的示例性机器人和相应的示例性操作方法。在一个示例中，机器人是用于打开和关闭机动车体的门或阀盖的处理机器人。在涂装操作期间，可以将远离涂料的喷射喷射布置的易于污染的处理机器人的机器人元件，例如处理工具，并且被施加到待涂漆的部件上。机器人可以包括用于清洁或保持处理机器人的机器人元件的清洁装置，其易于在涂漆操作中施加有喷射喷射的涂料清洁。

10. 发明申请

US20100211205A1 METHOD FOR PROCESS DIAGNOSIS AND ROTARY ATOMIZER ARRANGEMENT 有权
标题翻译：过程诊断和旋转原子装置的方法
公开(公告)号：US20100211205A1
公开(公告)日：2010-08-19
申请号：US12669926
申请日：2008-07-11
申请人： Michael Baumann , Torsten Block , Juergen Haas , Frank Herre , Marcus Frey , Alexander Meissner , Hans-Jurgen Nolte , Bernhard Seiz
发明人： Michael Baumann , Torsten Block , Juergen Haas , Frank Herre , Marcus Frey , Alexander Meissner , Hans-Jurgen Nolte , Bernhard Seiz
IPC分类号： G06F17/00 , B05B3/02 , G05D7/06
CPC分类号： B05B5/0415 , B05B5/0422 , B05B12/08 , B05B15/14 , H02P29/10
摘要： A rotary atomizer arrangement and methods for operating the same are disclosed. An exemplary atomizer may be used for the coating of work pieces, and may include a bell plate driven by an electric motor. The exemplary atomizer may further be configured for the detection of errors in the spraying process and/or the drive system of the bell plate, such as by analyzing corresponding parameters of typical values of the drive motor.
摘要翻译：公开了一种旋转雾化器装置及其操作方法。示例性的雾化器可以用于工件的涂覆，并且可以包括由电动机驱动的钟板。示例性雾化器还可以被配置为用于检测喷射过程和/或钟板的驱动系统中的错误，例如通过分析驱动马达的典型值的相应参数。

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