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1. 发明授权

US07994443B2 Switch array 失效
标题翻译：开关阵列
公开(公告)号：US07994443B2
公开(公告)日：2011-08-09
申请号：US11886856
申请日：2006-03-20
申请人： Masato Hayashi , Masami Yakabe , Tetsuya Hasebe , Muneo Harada , Katsuya Okumura
发明人： Masato Hayashi , Masami Yakabe , Tetsuya Hasebe , Muneo Harada , Katsuya Okumura
IPC分类号： H01H1/00 , H01H9/00
CPC分类号： H01H1/0036 , B81B3/0054 , B81B2201/014 , B81B2203/053 , H01H1/24 , H01H37/46 , H01H67/22 , H01H2001/0042 , H01H2037/008
摘要： A first wiring layer 16 is disposed on an insulating film 14 on the lower surface of an upper substrate 15, while a second wiring layer 13three-dimensionally crossing the first wiring layer 16 is provided on the insulating film 12 on a lower substrate 11. A cantilever 17 has one end connected to the first wiring layer 16 and the other end opposed to the second wiring layer 13 with a space therebetween. A thermoplastic sheet 19 is arranged on the upper substrate 15 so as to cover the through-hole 18. The thermoplastic sheet 19 is pressed by a heated pin 20 against the cantilever 17 and deformed so as to maintain the connection between the cantilever 17and the second wiring layer 13, and therefore close the switch 10.
摘要翻译：第一布线层16设置在上基板15的下表面上的绝缘膜14上，而在下基板11上的绝缘膜12上设置与第一布线层16三维交叉的第二布线层13。悬臂17的一端与第一配线层16连接，另一端与第二配线层13相对置，而其间具有间隔。热塑片19布置在上基板15上以覆盖通孔18.热塑片19被加热的销20压靠在悬臂17上并变形，从而保持悬臂17和第二个之间的连接布线层13，因此闭合开关10。

2. 发明申请

US20090045039A1 Switch Array 失效
标题翻译：开关阵列
公开(公告)号：US20090045039A1
公开(公告)日：2009-02-19
申请号：US11886856
申请日：2006-03-20
申请人： Masato Hayashi , Masami Yakabe , Tetsuya Hasebe , Muneo Harada , Katsuya Okumura
发明人： Masato Hayashi , Masami Yakabe , Tetsuya Hasebe , Muneo Harada , Katsuya Okumura
IPC分类号： H01H9/00
CPC分类号： H01H1/0036 , B81B3/0054 , B81B2201/014 , B81B2203/053 , H01H1/24 , H01H37/46 , H01H67/22 , H01H2001/0042 , H01H2037/008
摘要： A first wiring layer 16 is disposed on an insulating film 14 on the lower surface of an upper substrate 15, while a second wiring layer 13 three-dimensionally crossing the first wiring layer 16 is provided on the insulating film 12 on a lower substrate 11. A cantilever 17 has one end connected to the first wiring layer 16 and the other end opposed to the second wiring layer 13 with a space therebetween. A thermoplastic sheet 19 is arranged on the upper substrate 15 so as to cover the through-hole 18. The thermoplastic sheet 19 is pressed by a heated pin 20 against the cantilever 17 and deformed so as to maintain the connection between the cantilever 17 and the second wiring layer 13, and therefore close the switch 10.
摘要翻译：第一布线层16设置在上基板15的下表面上的绝缘膜14上，而在下基板11上的绝缘膜12上设置三维交叉第一布线层16的第二布线层13。悬臂17的一端与第一配线层16连接，另一端与第二配线层13相对设置，其间具有间隔。热塑片19被布置在上基板15上以覆盖通孔18.热塑片19被加热的销20压靠在悬臂17上并变形，从而保持悬臂17和第二布线层13，因此闭合开关10。

3. 发明申请

US20080302185A1 Microstructure Inspecting Apparatus and Microstructure Inspecting Method 审中-公开
标题翻译：微观结构检查仪器和微观结构检测方法
公开(公告)号：US20080302185A1
公开(公告)日：2008-12-11
申请号：US11662478
申请日：2005-09-09
申请人： Masami Yakabe , Toshiyuki Matsumoto , Naoki Ikeuchi , Katsuya Okumura
发明人： Masami Yakabe , Toshiyuki Matsumoto , Naoki Ikeuchi , Katsuya Okumura
IPC分类号： G01H1/00
CPC分类号： G01N29/14 , B81C99/005 , G01N29/4427 , G01N2291/2695 , G01N2291/2697
摘要： Voltage is applied to a chip TP by a voltage drive unit 30 through a probe needle P to move a movable part of a microstructure. A sound produced in response to motion of the movable part of the microstructure is detected by a microphone 3. Then, the sound detected by the microphone 3 is measured by a measurement unit 25. The control unit 20 evaluates the characteristics of the tested chip TP by comparing with a sound detected from an ideal chip TP.
摘要翻译：通过电压驱动单元30通过探针P将电压施加到芯片TP，以移动微结构的可移动部分。通过麦克风3检测响应于微结构的可动部分的运动而产生的声音。然后，由测量单元25测量由麦克风3检测到的声音。控制单元20评估测试芯片TP的特性通过与从理想芯片TP检测到的声音进行比较。

4. 发明申请

US20050279170A1 Device for inspecting micro structure, method for inspecting micro structure and program for inspecting micro structure 失效
标题翻译：微观结构检测装置，微观结构检查方法和微观结构检查程序
公开(公告)号：US20050279170A1
公开(公告)日：2005-12-22
申请号：US11149176
申请日：2005-06-10
申请人： Katsuya Okumura , Toshiyuki Matsumoto , Naoki Ikeuchi , Masami Yakabe
发明人： Katsuya Okumura , Toshiyuki Matsumoto , Naoki Ikeuchi , Masami Yakabe
IPC分类号： B81C99/00 , G01C19/56 , G01C25/00 , G01N29/00 , G01N29/09 , G01N29/12 , G01N29/30 , G01N29/42 , G01N29/46 , G01P15/12 , G01P21/00 , H01L29/84
CPC分类号： G01C19/5719 , B81C99/005 , G01C25/005 , G01N29/12 , G01N29/30 , G01N29/42 , G01N29/46 , G01N2291/2695 , G01N2291/2697 , G01P15/123 , G01P21/00 , G01P2015/0842
摘要： Test sound wave is outputted from a speaker. A movable part of a three-axis acceleration sensor, which is a micro structure of a chip to be tested TP, moves due to the arrival of the test sound wave which is compression wave outputted from the speaker, that is, due to air vibrations. A change in the resistance value that changes in accordance with this movement is measured on the basis of an output voltage that is provided via a probe needles. A control part determines the property of the three-axis acceleration sensor on the basis of the measured property values, that is, measured data.
摘要翻译：测试声波从扬声器输出。作为被测试芯片TP的微结构的三轴加速度传感器的可动部分由于扬声器输出的压缩波的测试声波的到来而移动，即由于空气振动。基于通过探针提供的输出电压来测量根据该移动而变化的电阻值的变化。控制部件基于测量的属性值，即测量数据来确定三轴加速度传感器的特性。

5. 发明授权

US07383732B2 Device for inspecting micro structure, method for inspecting micro structure and program for inspecting micro structure 失效
标题翻译：微观结构检测装置，微观结构检查方法和微观结构检查程序
公开(公告)号：US07383732B2
公开(公告)日：2008-06-10
申请号：US11149176
申请日：2005-06-10
申请人： Katsuya Okumura , Toshiyuki Matsumoto , Naoki Ikeuchi , Masami Yakabe
发明人： Katsuya Okumura , Toshiyuki Matsumoto , Naoki Ikeuchi , Masami Yakabe
IPC分类号： G01N29/00 , H01L41/00
CPC分类号： G01C19/5719 , B81C99/005 , G01C25/005 , G01N29/12 , G01N29/30 , G01N29/42 , G01N29/46 , G01N2291/2695 , G01N2291/2697 , G01P15/123 , G01P21/00 , G01P2015/0842
摘要： Test sound wave is outputted from a speaker. A movable part of a three-axis acceleration sensor, which is a micro structure of a chip to be tested TP, moves due to the arrival of the test sound wave which is compression wave outputted from the speaker, that is, due to air vibrations. A change in the resistance value that changes in accordance with this movement is measured on the basis of an output voltage that is provided via a probe needles. A control part determines the property of the three-axis acceleration sensor on the basis of the measured property values, that is, measured data.
摘要翻译：测试声波从扬声器输出。作为被测试芯片TP的微结构的三轴加速度传感器的可动部分由于扬声器输出的压缩波的测试声波的到来而移动，即由于空气振动。基于通过探针提供的输出电压来测量根据该移动而变化的电阻值的变化。控制部件基于测量的属性值，即测量数据来确定三轴加速度传感器的特性。

6. 发明申请

US20090128171A1 Microstructure Probe Card, and Microstructure Inspecting Device, Method, and Computer Program 审中-公开
标题翻译：微结构探针卡，微结构检测装置，方法和计算机程序
公开(公告)号：US20090128171A1
公开(公告)日：2009-05-21
申请号：US11887476
申请日：2006-03-30
申请人： Katsuya Okumura , Masami Yakabe , Naoki Ikeuchi
发明人： Katsuya Okumura , Masami Yakabe , Naoki Ikeuchi
IPC分类号： G01R31/02
CPC分类号： G01C19/56 , B81C99/005 , G01P15/123 , G01P15/18 , G01P21/00 , G01P2015/084 , G01P2015/0842
摘要： An inspecting method which is for a microstructure with a movable portion and executes a highly precise inspection without damaging a probe or an inspection electrode by supressing the effect of a needle pressure in contacting the probe to the inspection electrode is provided.When inspection on a microstructure is performed, first a pair of probes (2) are caused to contact respective electrode pads (PD), and the pair of probes (2) and a fritting power source (50) are connected together through relays (30). Next a voltage is applied from the fritting power source (50) to one probe (2) in the pair of probes (2). As the voltage is gradually increased, an oxide film between the pair of probes (2) is destroyed and a current flows between the pair of probes (2) by fritting phenomenon, and the probes (2) and the electrode pad (PD) are electrically conducted each other. Subsequently, the pair of probes (2) are switched to a measuring unit (40) side from the fritting power source (50) through the relays (30), and electrically connected to the measuring unit (40).
摘要翻译：提供了一种用于具有可移动部分的微结构的检查方法，并且通过抑制将探针接触检查电极的针头压力的影响来执行高精度检查而不损坏探针或检查电极。当对微结构进行检查时，首先使一对探针（2）与相应的电极焊盘（PD）接触，并且一对探针（2）和熔接电源（50）通过继电器（30）连接在一起）。接下来，从熔接电源（50）向一对探针（2）中的一个探针（2）施加电压。随着电压逐渐增加，一对探针（2）之间的氧化膜被破坏，并且通过烧结现象在一对探针（2）之间流动电流，并且探针（2）和电极焊盘（PD）是相互导电。随后，一对探针（2）通过继电器（30）从熔接电源（50）切换到测量单元（40）侧，并且电连接到测量单元（40）。

7. 发明申请

US20070181556A1 Capacitor and manufacturing method thereof 审中-公开
标题翻译：电容及其制造方法
公开(公告)号：US20070181556A1
公开(公告)日：2007-08-09
申请号：US11508156
申请日：2006-08-23
申请人： Yoshiki Yamanishi , Muneo Harada , Takahiro Kitano , Tatsuzo Kawaguchi , Yoshihiro Hirota , Kenji Matsuda , Kinji Yamada , Tomotaka Shinoda , Daohai Wang , Katsuya Okumura
发明人： Yoshiki Yamanishi , Muneo Harada , Takahiro Kitano , Tatsuzo Kawaguchi , Yoshihiro Hirota , Kenji Matsuda , Kinji Yamada , Tomotaka Shinoda , Daohai Wang , Katsuya Okumura
IPC分类号： F27B5/14
CPC分类号： H01L28/55
摘要： Atmosphere in processing apparatus is adjusted to, for example, oxygen atmosphere, by gas supply source and the like. Interior of thermal processing apparatus is set to oxygen atmosphere and raised to predetermined temperature. A wafer boat containing wafer W having dielectric precursor layer formed is loaded into thermal processing apparatus at speed at which no defects are produced in wafer W. Thereafter, reaction tube of thermal processing apparatus has its internal temperature raised to baking temperature, to perform baking for predetermined time. The wafer W is cooled to predetermined temperature in thermal processing apparatus and then to room temperature in processing apparatus, and carried out from processing apparatus. Before dielectric precursor layer is baked, it is maintained for predetermined time at temperature higher than temperature at which solvent in dielectric precursor layer is volatilized and lower than temperature at which dielectric precursor layer starts crystallization to vaporize residual solvent.
摘要翻译：处理装置中的气氛通过气体供给源等调节为例如氧气氛。热处理装置的内部设定为氧气氛并升温至规定温度。包含形成有电介质前体层的晶片W的晶片舟以晶片W中没有产生缺陷的速度装载到热处理装置中。之后，热处理装置的反应管的内部温度升高到烘烤温度，进行烘烤预定时间将晶片W在热处理装置中冷却至规定温度，然后在处理装置中冷却至室温，并从处理装置进行。在电介质前体层被烘烤之前，在高于电介质前体层中的溶剂挥发并且低于电介质前体层开始结晶以蒸发残留溶剂的温度的温度下将其保持预定时间。

8. 发明授权

US07742277B2 Dielectric film capacitor and method of manufacturing the same 有权
标题翻译：介电薄膜电容器及其制造方法
公开(公告)号：US07742277B2
公开(公告)日：2010-06-22
申请号：US11508204
申请日：2006-08-23
申请人： Tomotaka Shinoda , Kinji Yamada , Takahiro Kitano , Yoshiki Yamanishi , Muneo Harada , Tatsuzo Kawaguchi , Yoshihiro Hirota , Katsuya Okumura , Shuichi Kawano
发明人： Tomotaka Shinoda , Kinji Yamada , Takahiro Kitano , Yoshiki Yamanishi , Muneo Harada , Tatsuzo Kawaguchi , Yoshihiro Hirota , Katsuya Okumura , Shuichi Kawano
IPC分类号： H01G4/06 , H01G4/005
CPC分类号： H01L28/65 , H01L27/11507 , H01L28/55 , Y10T29/435
摘要： A dielectric film capacitor includes a lower electrode having an opening and formed of a material including platinum, a dielectric film provided over the lower electrode and including an oxide having an ABOx crystal structure, and an upper electrode provided over the dielectric film. The planar area of the lower electrode is 50% or more of the area of a formation region of the dielectric film. A dielectric film capacitor includes a lower electrode formed of a material including platinum and having a thickness of 10 to 100 nm, a dielectric film provided over the lower electrode and including an oxide having an ABOx crystal structure, and an upper electrode provided over the dielectric film.
摘要翻译：电介质膜电容器包括具有开口并由包括铂的材料形成的下电极，设置在下电极上并包括具有ABOx晶体结构的氧化物的电介质膜和设置在电介质膜上的上电极。下部电极的平面面积为电介质膜的形成区域的面积的50％以上。电介质膜电容器包括由包括铂的材料形成的厚度为10至100nm的下电极，设置在下电极上并包括具有ABOx晶体结构的氧化物的电介质膜，以及设置在电介质上的上电极电影。

9. 发明申请

US20100032357A1 CHROMATOGRAPHY COLUMN AND MANUFACTURING METHOD OF THE SAME 审中-公开
标题翻译：色谱柱及其制造方法
公开(公告)号：US20100032357A1
公开(公告)日：2010-02-11
申请号：US12377274
申请日：2007-08-14
申请人： Tomofumi Kiyomoto , Muneo Harada , Hiroyuki Moriyama , Katsuya Okumura
发明人： Tomofumi Kiyomoto , Muneo Harada , Hiroyuki Moriyama , Katsuya Okumura
IPC分类号： B01D15/08 , B44C1/22
CPC分类号： G01N30/6095 , G01N30/52 , G01N2030/525
摘要： A high separation efficiency column 10 for chromatography and a manufacturing method thereof are provided. The column 10 for chromatography includes a first substrate 11 having a plurality of pillars 22 formed on one surface thereof and a second substrate 12 bonded to the one surface of the first substrate 11 and constituting a flow path 13 together with the plurality of pillars 22 formed on the first substrate. At least a surface of each pillar is formed in a porous shape.
摘要翻译：提供了用于色谱法的高分离效率柱10及其制造方法。用于层析的柱10包括：第一基板11，其具有在其一个表面上形成的多个柱22;以及第二基板12，其与第一基板11的一个表面接合，并与形成的多个柱22一起构成流路13 在第一基板上。每个柱的至少一个表面形成为多孔形状。

10. 发明申请

US20060255182A1 Pattern forming apparatus and method of manufacturing pattern forming apparatus 审中-公开
标题翻译：图案形成装置和图案形成装置的制造方法
公开(公告)号：US20060255182A1
公开(公告)日：2006-11-16
申请号：US11411983
申请日：2006-04-27
申请人： Katsuya Okumura , Manabu Yabe , Yasuyuki Koyagi , Muneo Harada , Tomofumi Kiyomoto
发明人： Katsuya Okumura , Manabu Yabe , Yasuyuki Koyagi , Muneo Harada , Tomofumi Kiyomoto
IPC分类号： B05B1/26 , B05B1/34
CPC分类号： B41J2/1609 , B05C5/007 , B05C5/0212 , B05C5/027 , B41J2/1628 , B41J2/1631 , H01J9/242
摘要： Using a silicon single crystal with (100) plane orientation as a base material, a pectinate portion having a slope portion and a patterning material guiding groove is formed through photolithography process. A liquid reservoir for keeping a patterning material common to tooth portions of the pectinate portion is formed in the same step as a step for forming the guiding grooves. In forming slope portion, anisotropic wet etching allows easy and accurate formation of a slope portion with (111) plane orientation to (100) plane orientation, by taking advantage of differences in speed due to the plane orientations. In addition, by forming a groove portion using anisotropic dry etching, the patterning material guiding groove having a perpendicular sidewall reaching the slope portion may be formed at high accuracy. A pattern forming apparatus with high accuracy and low cost is provided.
摘要翻译：使用具有（100）面取向的硅单晶作为基材，通过光刻工艺形成具有倾斜部分和图案形成材料引导槽的果胶部分。在与用于形成导向槽的步骤相同的步骤中形成用于保持图形材料的共同于图形部分的牙齿部分的图案材料的液体储存器。在形成斜坡部分时，通过利用由于平面取向的速度差异，各向异性湿蚀刻允许容易且准确地形成具有（111）面取向到（100）面取向的斜面部分。此外，通过使用各向异性干蚀刻形成槽部，可以高精度地形成具有到达斜面部的垂直侧壁的图案形成材料导向槽。提供了一种高精度，低成本的图案形成装置。

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