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1. 发明授权

US5254880A Large scale integrated circuit having low internal operating voltage 失效
标题翻译：具有低内部工作电压的大规模集成电路
公开(公告)号：US5254880A
公开(公告)日：1993-10-19
申请号：US863705
申请日：1992-04-03
申请人： Masashi Horiguchi , Masakazu Aoki , Kiyoo Itoh , Yoshinobu Nakagome , Norio Miyake , Takaaki Noda , Jun Etoh , Hitoshi Tanaka , Shin ichi Ikenaga
发明人： Masashi Horiguchi , Masakazu Aoki , Kiyoo Itoh , Yoshinobu Nakagome , Norio Miyake , Takaaki Noda , Jun Etoh , Hitoshi Tanaka , Shin ichi Ikenaga
IPC分类号： G05F1/46 , G05F3/24 , G11C5/14 , G11C11/4074 , H01L27/02 , H03K3/01 , H03K5/01
CPC分类号： G05F1/465 , G05F3/245 , G05F3/247 , G11C11/4074 , G11C5/147 , H01L27/0203
摘要： Practical structures of an ultra large scale semiconductor integrated (ULSI) circuit especially a dynamic random access memory of 16M bits or more are involved. The ULSI circuit uses internal operating voltages and how to construct a reference voltage generating circuit and a voltage limiter circuit in the ULSI circuit is a matter of importance. The operation of the reference voltage generating circuit and voltage limiter circuit can be stabilized, characteristics of these circuits are improved, and layout of these circuits as applied to memory cell array, peripheral circuits and the like can be improved. Improved methods of testing these circuits are provided.
摘要翻译：涉及超大规模半导体集成（ULSI）电路的实际结构，特别是16M位以上的动态随机存取存储器。 ULSI电路使用内部工作电压，并且如何构造参考电压发生电路，并且ULSI电路中的限压器电路是重要的。可以使参考电压发生电路和限压器电路的动作稳定，提高这些电路的特性，能够提高应用于存储单元阵列，外围电路等的这些电路的布局。提供了改进的测试这些电路的方法。

2. 发明授权

US5179539A Large scale integrated circuit having low internal operating voltage 失效
标题翻译：具有低内部工作电压的大规模集成电路
公开(公告)号：US5179539A
公开(公告)日：1993-01-12
申请号：US865677
申请日：1992-04-08
申请人： Masashi Horiguchi , Masakazu Aoki , Kiyoo Itoh , Yoshinobu Nakagome , Norio Miyake , Takaaki Noda , Jun Etoh , Hitoshi Tanaka , Shin'ichi Ikenaga
发明人： Masashi Horiguchi , Masakazu Aoki , Kiyoo Itoh , Yoshinobu Nakagome , Norio Miyake , Takaaki Noda , Jun Etoh , Hitoshi Tanaka , Shin'ichi Ikenaga
IPC分类号： G05F1/46 , G05F3/24 , G11C5/14 , G11C11/4074 , H01L27/02
CPC分类号： G11C5/147 , G05F1/465 , G05F3/245 , G05F3/247 , G11C11/4074 , H01L27/0203
摘要： Practical structures of an ultra large scale semiconductor integrated (ULSI) circuit especially a dynamic random access memory of 16 M bits or more are involved. The ULSI circuit uses internal operating voltages and how to construct a reference voltage generating circuit and a voltage limiter circuit in the ULSI circuit is a matter of importance. The operation of the reference voltage generating circuit and voltage limiter circuit can be stabilized, characteristics of these circuits are improved, and layout of these circuits as applied to memory cell array, peripheral circuits and the like can be improved. Improved methods of testing these circuits are provided.
摘要翻译：涉及超大规模半导体集成（ULSI）电路的实际结构，特别是16M位以上的动态随机存取存储器。 ULSI电路使用内部工作电压，并且如何构造参考电压发生电路，并且ULSI电路中的限压器电路是重要的。可以使参考电压发生电路和限压器电路的动作稳定，提高这些电路的特性，能够提高应用于存储单元阵列，外围电路等的这些电路的布局。提供了改进的测试这些电路的方法。

3. 发明授权

US4994688A Semiconductor device having a reference voltage generating circuit 失效
标题翻译：具有基准电压发生电路的半导体装置
公开(公告)号：US4994688A
公开(公告)日：1991-02-19
申请号：US323966
申请日：1989-03-15
申请人： Masashi Horiguchi , Masakazu Aoki , Kiyoo Itoh , Yoshinobu Nakagome , Norio Miyake , Takaaki Noda , Jun Etoh , Hitoshi Tanaka , Shin'ichi Ikenaga
发明人： Masashi Horiguchi , Masakazu Aoki , Kiyoo Itoh , Yoshinobu Nakagome , Norio Miyake , Takaaki Noda , Jun Etoh , Hitoshi Tanaka , Shin'ichi Ikenaga
IPC分类号： G05F1/46 , G05F3/24 , G11C5/14 , G11C11/4074 , H01L27/02
CPC分类号： G11C5/147 , G05F1/465 , G05F3/245 , G05F3/247 , G11C11/4074 , H01L27/0203 , Y10S323/907
摘要： Practical structures of an ultra large scale semiconductor integrated (ULSI) circuit especially a dynamic random access memory of 16 M bits or more are involved. The ULSI circuit uses internal operating voltages and how to construct a reference voltage generating circuit and a voltage limiter circuit in the ULSI circuit is a matter of importance. The operation of the reference voltage generating circuit and voltage limiter circuit can be stabilized, characteristics of these circuits are improved, and layout of these circuits as applied to memory cell array, peripheral circuits and the like can be improved. Improved methods of testing these circuits are provided.
摘要翻译：涉及超大规模半导体集成（ULSI）电路的实际结构，特别是16M位以上的动态随机存取存储器。 ULSI电路使用内部工作电压，并且如何构造参考电压发生电路，并且ULSI电路中的限压器电路是重要的。可以使参考电压发生电路和限压器电路的动作稳定，提高这些电路的特性，能够提高应用于存储单元阵列，外围电路等的这些电路的布局。提供了改进的测试这些电路的方法。

4. 发明授权

US5376839A Large scale integrated circuit having low internal operating voltage 失效
标题翻译：具有低内部工作电压的大规模集成电路
公开(公告)号：US5376839A
公开(公告)日：1994-12-27
申请号：US104340
申请日：1993-08-09
申请人： Masashi Horiguchi , Masakazu Aoki , Kiyoo Itoh , Yoshinobu Nakagome , Norio Miyake , Takaaki Noda , Jun Etoh , Hitoshi Tanaka , Shin'ichi Ikenaga
发明人： Masashi Horiguchi , Masakazu Aoki , Kiyoo Itoh , Yoshinobu Nakagome , Norio Miyake , Takaaki Noda , Jun Etoh , Hitoshi Tanaka , Shin'ichi Ikenaga
IPC分类号： G05F1/46 , G05F3/24 , G11C5/14 , G11C11/4074 , H01L27/02 , H03K3/01 , H03K3/26
CPC分类号： G05F1/465 , G05F3/245 , G05F3/247 , G11C11/4074 , G11C5/147 , H01L27/0203
摘要： Practical structures of an ultra large scale semiconductor integrated (ULSI) circuit especially a dynamic random access memory of 16M bits or more are involved. The ULSI circuit uses internal operating voltages and how to construct a reference voltage generating circuit and a voltage limiter circuit in the ULSI circuit is a matter of importance. The operation of the reference voltage generating circuit and voltage limiter circuit can be stabilized, characteristics of these circuits are improved, and layout of these circuits as applied to memory cell array, peripheral circuits and the like can be improved. Improved methods of testing these circuits are provided.
摘要翻译：涉及超大规模半导体集成（ULSI）电路的实际结构，特别是16M位以上的动态随机存取存储器。 ULSI电路使用内部工作电压，并且如何构造参考电压发生电路，并且ULSI电路中的限压器电路是重要的。可以使参考电压发生电路和限压器电路的动作稳定，提高这些电路的特性，能够提高应用于存储单元阵列，外围电路等的这些电路的布局。提供了改进的测试这些电路的方法。

5. 发明授权

US09523918B2 Illumination optical assembly, exposure device, and device manufacturing method 有权
标题翻译：照明光学组件，曝光装置和器件制造方法
公开(公告)号：US09523918B2
公开(公告)日：2016-12-20
申请号：US14126126
申请日：2011-11-25
申请人： Norio Miyake , Kinya Kato
发明人： Norio Miyake , Kinya Kato
IPC分类号： G03B27/54 , G03F7/20 , G02B5/30 , G02B26/08 , G02B27/09 , G02B27/28
CPC分类号： G03F7/7015 , G02B5/3083 , G02B26/0816 , G02B27/0927 , G02B27/286 , G03F7/20 , G03F7/70075 , G03F7/70116 , G03F7/70566
摘要： There is provided an illumination optical system for illuminating an illumination objective surface. The illumination optical system includes a first spatial light modulator which has a plurality of optical elements arranged on a first plane, a polarizing member which is arranged in an optical path on an illumination objective surface side with respect to the first plane and which gives a polarization state change to a first light beam passes through a first area in a plane intersecting an optical axis of the illumination optical system, the polarization state change being different from a polarization state change given to a second light beam passes through a second area in the intersecting plane, and a second spatial light modulator which has a plurality of optical elements controlled individually and arranged on a second plane, and which variably forms a light intensity distribution on an illumination pupil of the illumination optical system.
摘要翻译：提供了一种用于照明照明物镜表面的照明光学系统。照明光学系统包括：第一空间光调制器，其具有布置在第一平面上的多个光学元件;偏振构件，其布置在相对于第一平面的照明物镜表面侧上的光路中，并且具有偏振对第一光束的状态变化通过与照明光学系统的光轴相交的平面中的第一区域，与给予第二光束的偏振态变化不同的偏振态变化通过相交的第二区域平面和第二空间光调制器，其具有单独控制并且布置在第二平面上的多个光学元件，并且可变地在照明光学系统的照明光瞳上形成光强度分布。

6. 发明申请

US20090284727A1 Illumination optical system, exposure apparatus, device manufacturing method, compensation filter, and exposure optical system 有权
标题翻译：照明光学系统，曝光装置，装置制造方法，补偿滤光片和曝光光学系统
公开(公告)号：US20090284727A1
公开(公告)日：2009-11-19
申请号：US12366429
申请日：2009-02-05
申请人： Kouji Muramatsu , Osamu Tanitsu , Hirohisa Tanaka , Masaya Yamamoto , Norio Miyake , Yasushi Mizuno , Ryuji Takaya , Risa Yoshimoto , Hiroyuki Hirota
发明人： Kouji Muramatsu , Osamu Tanitsu , Hirohisa Tanaka , Masaya Yamamoto , Norio Miyake , Yasushi Mizuno , Ryuji Takaya , Risa Yoshimoto , Hiroyuki Hirota
IPC分类号： G03B27/54 , G03B27/72
CPC分类号： G02B3/06 , G02B3/08 , G02B19/0014 , G02B19/0047 , G02B27/0927 , G02B27/0988 , G03F7/70141 , G03F7/70191 , G03F7/70308 , G03F7/70825
摘要： An illumination optical system is one for illuminating a surface to be illuminated with light from a light source, which has a distribution forming optical system including an optical integrator and forming a pupil intensity distribution on an illumination pupil located behind the optical integrator, and an optical attenuator arranged on a predetermined surface in an optical path behind the optical integrator and having an attenuation characteristic of varying an attenuation rate depending upon an angle of incidence to the predetermined surface.
摘要翻译：照明光学系统是用于利用来自光源的光照射被照射的表面的照明光学系统，其具有包括光学积分器的分布形成光学系统并且在位于光学积分器后面的照明光瞳上形成光瞳强度分布，以及光学衰减器布置在光学积分器后面的光路中的预定表面上，并且具有根据与预定表面的入射角度改变衰减率的衰减特性。

7. 发明授权

US08908151B2 Illumination optical system, exposure apparatus, device manufacturing method, compensation filter, and exposure optical system 有权
标题翻译：照明光学系统，曝光装置，装置制造方法，补偿滤光片和曝光光学系统
公开(公告)号：US08908151B2
公开(公告)日：2014-12-09
申请号：US12366429
申请日：2009-02-05
申请人： Kouji Muramatsu , Osamu Tanitsu , Hirohisa Tanaka , Masaya Yamamoto , Norio Miyake , Yasushi Mizuno , Ryuji Takaya , Risa Yoshimoto , Hiroyuki Hirota
发明人： Kouji Muramatsu , Osamu Tanitsu , Hirohisa Tanaka , Masaya Yamamoto , Norio Miyake , Yasushi Mizuno , Ryuji Takaya , Risa Yoshimoto , Hiroyuki Hirota
IPC分类号： G03B27/72 , G03F7/20 , G02B27/09 , G02B3/08 , G02B3/06 , G02B19/00
CPC分类号： G02B3/06 , G02B3/08 , G02B19/0014 , G02B19/0047 , G02B27/0927 , G02B27/0988 , G03F7/70141 , G03F7/70191 , G03F7/70308 , G03F7/70825
摘要： An illumination optical system is one for illuminating a surface to be illuminated with light from a light source, which has a distribution forming optical system including an optical integrator and forming a pupil intensity distribution on an illumination pupil located behind the optical integrator, and an optical attenuator arranged on a predetermined surface in an optical path behind the optical integrator and having an attenuation characteristic of varying an attenuation rate depending upon an angle of incidence to the predetermined surface.
摘要翻译：照明光学系统是用于利用来自光源的光照射被照射的表面的照明光学系统，其具有包括光学积分器的分布形成光学系统并且在位于光学积分器后面的照明光瞳上形成光瞳强度分布，以及光学衰减器布置在光学积分器后面的光路中的预定表面上，并且具有根据与预定表面的入射角度改变衰减率的衰减特性。

8. 发明申请

US20140211174A1 ILLUMINATION OPTICAL ASSEMBLY, EXPOSURE DEVICE, AND DEVICE MANUFACTURING METHOD 有权
标题翻译：照明光学组件，曝光装置和器件制造方法
公开(公告)号：US20140211174A1
公开(公告)日：2014-07-31
申请号：US14126126
申请日：2011-11-25
申请人： Norio Miyake , Kinya Kato
发明人： Norio Miyake , Kinya Kato
IPC分类号： G03F7/20 , G02B26/08 , G02B5/30 , G02B27/09 , G02B27/28
CPC分类号： G03F7/7015 , G02B5/3083 , G02B26/0816 , G02B27/0927 , G02B27/286 , G03F7/20 , G03F7/70075 , G03F7/70116 , G03F7/70566
摘要： There is provided an illumination optical system for illuminating an illumination objective surface. The illumination optical system includes a first spatial light modulator which has a plurality of optical elements arranged on a first plane, a polarizing member which is arranged in an optical path on an illumination objective surface side with respect to the first plane and which gives a polarization state change to a first light beam passes through a first area in a plane intersecting an optical axis of the illumination optical system, the polarization state change being different from a polarization state change given to a second light beam passes through a second area in the intersecting plane, and a second spatial light modulator which has a plurality of optical elements controlled individually and arranged on a second plane, and which variably forms a light intensity distribution on an illumination pupil of the illumination optical system.
摘要翻译：提供了一种用于照明照明物镜表面的照明光学系统。照明光学系统包括：第一空间光调制器，其具有布置在第一平面上的多个光学元件;偏振构件，其布置在相对于第一平面的照明物镜表面侧上的光路中，并且具有偏振对第一光束的状态变化通过与照明光学系统的光轴相交的平面中的第一区域，与给予第二光束的偏振态变化不同的偏振态变化通过相交的第二区域平面和第二空间光调制器，其具有单独控制并且布置在第二平面上的多个光学元件，并且可变地在照明光学系统的照明光瞳上形成光强度分布。

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