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1. 发明授权

US08837924B2 Vacuum heating/cooling apparatus and manufacturing method of magnetoresistance element 有权
标题翻译：真空加热/冷却装置和磁阻元件的制造方法
公开(公告)号：US08837924B2
公开(公告)日：2014-09-16
申请号：US13307673
申请日：2011-11-30
申请人： Koji Tsunekawa , Yoshinori Nagamine , Shinji Furukawa
发明人： Koji Tsunekawa , Yoshinori Nagamine , Shinji Furukawa
IPC分类号： F27B5/14 , F27B5/16 , F27D5/00 , H01L21/68 , H01L43/12 , H01L21/67
CPC分类号： H01L21/6719 , H01L21/67109 , H01L21/67115 , H01L43/12
摘要： The present invention provides a vacuum heating/cooling apparatus capable of rapidly heating and also rapidly cooling only a substrate while a high vacuum degree is maintained after film-formation processing. The vacuum heating/cooling apparatus according to an embodiment of the present invention includes a vacuum chamber (1), a halogen lamp (2) which emits heating light, a quartz window (3) for allowing the heating light to enter the vacuum chamber (1), a substrate supporting base (9) having a cooling function, and a lift pin (13) which causes the substrate (5) to stand still at a heating position P3 and a cooling position P1 and moves the substrate (5) between the heating position P3 and the cooling position P1.
摘要翻译：本发明提供了一种真空加热/冷却装置，其能够在成膜处理之后保持高真空度的同时快速加热并且仅快速冷却基板。根据本发明实施例的真空加热/冷却装置包括真空室（1），发出加热灯的卤素灯（2），用于使加热光进入真空室的石英窗（3） 1），具有冷却功能的基板支撑基座（9）和提升销（13），其使基板（5）静止在加热位置P3和冷却位置P1，并使基板（5）在加热位置P3和冷却位置P1。

2. 发明申请

US20120193071A1 VACUUM HEATING/COOLING APPARATUS AND MANUFACTURING METHOD OF MAGNETORESISTANCE ELEMENT 有权
标题翻译：真空加热/冷却装置及其制造方法
公开(公告)号：US20120193071A1
公开(公告)日：2012-08-02
申请号：US13307673
申请日：2011-11-30
申请人： Koji Tsunekawa , Yoshinori Nagamine , Shinji Furukawa
发明人： Koji Tsunekawa , Yoshinori Nagamine , Shinji Furukawa
IPC分类号： H01L21/477 , F27D11/12 , F25B29/00
CPC分类号： H01L21/6719 , H01L21/67109 , H01L21/67115 , H01L43/12
摘要： The present invention provides a vacuum heating/cooling apparatus capable of rapidly heating and also rapidly cooling only a substrate while a high vacuum degree is maintained after film-formation processing. The vacuum heating/cooling apparatus according to an embodiment of the present invention includes a vacuum chamber (1), a halogen lamp (2) which emits heating light, a quartz window (3) for allowing the heating light to enter the vacuum chamber (1), a substrate supporting base (9) having a cooling function, and a lift pin (13) which causes the substrate (5) to stand still at a heating position P3 and a cooling position P1 and moves the substrate (5) between the heating position P3 and the cooling position P1.
摘要翻译：本发明提供了一种真空加热/冷却装置，其能够在成膜处理之后保持高真空度的同时快速加热并且仅快速冷却基板。根据本发明实施例的真空加热/冷却装置包括真空室（1），发出加热灯的卤素灯（2），用于使加热光进入真空室的石英窗（3） 1），具有冷却功能的基板支撑基座（9）和提升销（13），其使基板（5）静止在加热位置P3和冷却位置P1，并使基板（5）在加热位置P3和冷却位置P1。

3. 发明授权

US08932438B2 Method of manufacturing magnetoresistive element, sputter deposition chamber, apparatus for manufacturing magnetoresistive element having sputter deposition chamber, program and storage medium 有权
标题翻译：制造磁阻元件的方法，溅射沉积室，用于制造具有溅射沉积室的磁阻元件的装置，程序和存储介质
公开(公告)号：US08932438B2
公开(公告)日：2015-01-13
申请号：US12972823
申请日：2010-12-20
申请人： Koji Tsunekawa , Hiroyuki Hosoya , Yoshinori Nagamine , Shinji Furukawa , Naoki Watanabe
发明人： Koji Tsunekawa , Hiroyuki Hosoya , Yoshinori Nagamine , Shinji Furukawa , Naoki Watanabe
IPC分类号： C23C14/34 , G11B5/39 , B82Y10/00 , B82Y25/00 , B82Y40/00 , C23C14/14 , C23C14/22 , G01R33/09 , H01F10/32 , H01F41/18 , H01F41/30 , H01L43/12 , G11B5/31
CPC分类号： G11B5/3909 , B82Y10/00 , B82Y25/00 , B82Y40/00 , C23C14/14 , C23C14/225 , C23C14/3464 , G01R33/093 , G01R33/098 , G11B5/3163 , G11B5/3903 , G11B2005/3996 , H01F10/325 , H01F10/3254 , H01F10/3272 , H01F41/18 , H01F41/302 , H01L43/12
摘要： The magnetic anisotropy of a magnetic layer in a spin valve tunnel magnetoresistive element or giant magnetoresistive element is enhanced. Deposition of the magnetic layer is performed by making sputtering particles obliquely incident on a substrate from a certain incident direction at a certain incident angle.
摘要翻译：自旋阀隧道磁阻元件或巨磁阻元件中的磁性层的磁各向异性增强。通过使溅射粒子以一定的入射角从特定的入射方向倾斜入射到基板上来进行磁性层的沉积。

4. 发明申请

US20110139606A1 METHOD OF MANUFACTURING MAGNETORESISTIVE ELEMENT, SPUTTER DEPOSITION CHAMBER, APPARATUS FOR MANUFACTURING MAGNETORESISTIVE ELEMENT HAVING SPUTTER DEPOSITION CHAMBER, PROGRAM AND STORAGE MEDIUM 有权
标题翻译：制造磁性元件，溅射沉积室的方法，用于制造具有溅射沉积室的磁性元件的装置，程序和存储介质
公开(公告)号：US20110139606A1
公开(公告)日：2011-06-16
申请号：US12972823
申请日：2010-12-20
申请人： Koji TSUNEKAWA , Hiroyuki Hosoya , Yoshinori Nagamine , Shinji Furukawa , Naoki Watanabe
发明人： Koji TSUNEKAWA , Hiroyuki Hosoya , Yoshinori Nagamine , Shinji Furukawa , Naoki Watanabe
IPC分类号： C23C14/34 , C23C14/06
CPC分类号： G11B5/3909 , B82Y10/00 , B82Y25/00 , B82Y40/00 , C23C14/14 , C23C14/225 , C23C14/3464 , G01R33/093 , G01R33/098 , G11B5/3163 , G11B5/3903 , G11B2005/3996 , H01F10/325 , H01F10/3254 , H01F10/3272 , H01F41/18 , H01F41/302 , H01L43/12
摘要： The magnetic anisotropy of a magnetic layer in a spin valve tunnel magnetoresistive element or giant magnetoresistive element is enhanced. Deposition of the magnetic layer is performed by making sputtering particles obliquely incident on a substrate from a certain incident direction at a certain incident angle.
摘要翻译：自旋阀隧道磁阻元件或巨磁阻元件中的磁性层的磁各向异性增强。通过使溅射粒子以一定的入射角从特定的入射方向倾斜入射到基板上来进行磁性层的沉积。

5. 发明授权

US07824497B2 Apparatus for manufacturing magnetic recording disk, and in-line type substrate processing apparatus 有权
标题翻译：用于制造磁记录盘的设备和在线型衬底处理设备
公开(公告)号：US07824497B2
公开(公告)日：2010-11-02
申请号：US12037021
申请日：2008-02-25
申请人： Naoki Watanabe , Nobuyoshi Watanabe , Kazunori Tani , Shinji Furukawa , Hiromi Sasaki , Osamu Watabe
发明人： Naoki Watanabe , Nobuyoshi Watanabe , Kazunori Tani , Shinji Furukawa , Hiromi Sasaki , Osamu Watabe
IPC分类号： C23C16/00 , C23C14/00
CPC分类号： C23C14/352 , C23C14/50 , C23C14/568 , C23C16/26 , G11B5/84 , G11B5/8408 , Y10S414/135 , Y10S414/136 , Y10S414/137 , Y10S414/138 , Y10S414/139 , Y10S414/14 , Y10S414/141
摘要： An apparatus for manufacturing a magnetic recording disk includes a magnetic-film deposition chamber in which a magnetic film for a recording layer is deposited on a substrate; a lubricant-layer preparation chamber in which a lubricant layer is prepared on the substrate in vacuum; and a cleaning chamber in which the substrate is cleaned in vacuum after the magnetic-film deposition in the magnetic-film chamber and before the lubricant-layer preparation in the lubricant-layer chamber. The apparatus may further include a transfer system that transfers the substrate from the cleaning chamber to the lubricant-layer preparation chamber without exposing the substrate to the atmosphere.
摘要翻译：一种用于制造磁记录盘的设备包括：磁性沉积室，其中用于记录层的磁性膜沉积在基底上; 在真空中在基板上制备润滑剂层的润滑剂层制备室; 以及清洁室，其中在磁膜沉积后在真空中清洁基板，并且在润滑剂层室中的润滑剂层制备之前。该设备还可以包括将基板从清洁室转移到润滑剂层制备室而不将基板暴露于大气的转移系统。

6. 发明授权

US07731825B2 Manufacturing apparatus of magnetoresistance elements 有权
标题翻译：磁阻元件制造装置
公开(公告)号：US07731825B2
公开(公告)日：2010-06-08
申请号：US11161981
申请日：2005-08-24
申请人： Toru Kitada , Naoki Watanabe , Shinji Takagi , Shinji Furukawa
发明人： Toru Kitada , Naoki Watanabe , Shinji Takagi , Shinji Furukawa
IPC分类号： C25B9/00 , C25B11/00 , C25B13/00 , C23C14/00
CPC分类号： H01L43/12 , B82Y25/00 , B82Y40/00 , C23C14/228 , C23C14/35 , H01F41/18 , H01F41/302
摘要： A manufacturing method of a magnetoresistance element having a pinned magnetic layer, a non-magnetic intermediate layer, and a free magnetic layer, the method includes forming at least one thin film of the non-magnetic intermediate layer and the free magnetic layer at a pressure of 8.0×10−3 Pa or less in the vicinity of a substrate using a sputtering apparatus. The apparatus includes a vacuum chamber in which a cathode and a substrate holder are arranged, a first exhausting apparatus connected to an exhausting port of the vacuum chamber, a gas introduction mechanism to introduce a gas toward the target, a first pressure regulator to cause a pressure difference between a target space and a center space outside the target space, a second pressure regulator to cause a pressure difference between the center space and a substrate space, and a second exhausting apparatus to exhaust the center space.
摘要翻译：一种具有钉扎磁性层，非磁性中间层和自由磁性层的磁阻元件的制造方法，所述方法包括在压力下形成至少一个非磁性中间层和自由磁性层的薄膜在使用溅射装置的基板附近为8.0×10 -3 Pa以下。该装置包括：真空室，其中布置有阴极和基板保持器;第一排气装置，连接到真空室的排气口;气体导入机构，用于将气体引向目标;第一压力调节器，目标空间与目标空间外的中心空间之间的压力差，使中心空间与基板空间之间产生压力差的第二压力调节器，以及排出中心空间的第二排气装置。

7. 发明申请

US20050115830A1 Film forming apparatus 有权
标题翻译：成膜装置
公开(公告)号：US20050115830A1
公开(公告)日：2005-06-02
申请号：US10957864
申请日：2004-10-04
申请人： Shinji Furukawa , Masahiro Shibamoto
发明人： Shinji Furukawa , Masahiro Shibamoto
IPC分类号： B65G49/07 , C23C14/32 , C23C14/56 , C23C16/00 , C23C16/44 , C23C16/54 , G11B5/85 , H01L21/306 , H01L21/673 , H01L21/677 , H01L21/68
CPC分类号： C23C14/564 , C23C14/568 , C23C16/54
摘要： The invention provides a multi-film forming apparatus including a substrate holder stock chamber for storing a plurality of substrate holders separately from a path in the multi-film forming apparatus, so that production can be performed without being affected by the process of removing a film accumulated on the surface of the substrate holder and the process of replacing the substrate holder, or by the process of removing a film accumulated on the surface of the substrate holder or the process of replacing the substrate holder, and hence high-throughput production is possible. A branch path is provided on the path of the multi-film forming apparatus, and a substrate holder stock chamber for storing a plurality of substrate holders which enables retrieval of the substrate holder from the path and feeding of the substrate holder to the path is provided.
摘要翻译：本发明提供了一种多层膜形成装置，其包括：基板保持架储存室，用于与多膜成形装置中的路径分开地存储多个基板保持器，从而可以进行生产而不受去除膜的处理积聚在基板保持器的表面上，更换基板保持器的过程，或者通过除去积聚在基板保持器的表面上的膜或更换基板保持器的过程，因此可以进行高通量生产。在多层膜形成装置的路径上设置分支路径，并且设置用于存储多个基板保持件的基板保持架存放室，该基板保持器能够使基板保持器从路径中回收并且将基板保持器馈送到路径。

8. 发明授权

US06572934B2 Method for manufacturing a magnetic recording disk 有权
标题翻译：磁记录盘的制造方法
公开(公告)号：US06572934B2
公开(公告)日：2003-06-03
申请号：US09774887
申请日：2001-02-01
申请人： Naoki Watanabe , Nobuyoshi Watanabe , Kazunori Tani , Shinji Furukawa , Hiromi Sasaki , Osamu Watabe
发明人： Naoki Watanabe , Nobuyoshi Watanabe , Kazunori Tani , Shinji Furukawa , Hiromi Sasaki , Osamu Watabe
IPC分类号： C23C1402
CPC分类号： C23C14/352 , C23C14/50 , C23C14/568 , C23C16/26 , G11B5/84 , G11B5/8408 , Y10S414/135 , Y10S414/136 , Y10S414/137 , Y10S414/138 , Y10S414/139 , Y10S414/14 , Y10S414/141
摘要： In manufacturing a magnetic recording disk, a magnetic film for a recording layer is deposited on a substrate of the magnetic recording disk in a magnetic-film deposition chamber, and the substrate is transferred from the magnetic-film deposition chamber to a lubricant-layer preparation chamber without exposing the substrate to the atmosphere. Then, a lubricant layer is prepared on the substrate in the lubricant-layer preparation chamber.
摘要翻译：在制造磁记录盘时，在磁性成膜室中将用于记录层的磁性膜沉积在磁记录盘的基板上，并且将基板从磁膜沉积室转移到润滑剂层制备不将基板暴露在大气中。然后，在润滑层制备室中的基板上制备润滑剂层。

9. 发明授权

US5989691A Magnetic element 失效
标题翻译：磁性元件
公开(公告)号：US5989691A
公开(公告)日：1999-11-23
申请号：US808217
申请日：1997-02-28
申请人： Shinji Furukawa , Nobuyoshi Yano
发明人： Shinji Furukawa , Nobuyoshi Yano
IPC分类号： G01V3/00 , G01R33/02 , G01V3/40 , G01V15/00 , G08B13/24 , H01F1/03 , H01F10/08 , H01F10/12 , H01F10/13 , H01F10/14 , H01F10/16 , H01F10/26 , H01F10/32 , B32B7/02
CPC分类号： G08B13/2408 , G08B13/2434 , G08B13/2442 , H01F1/0304 , H01F10/13 , H01F10/14 , H01F10/16 , H01F10/26 , Y10S428/90 , Y10T428/24975 , Y10T428/249921 , Y10T428/265 , Y10T428/266 , Y10T428/269 , Y10T428/29
摘要： A magnetic element comprising a thin film having a uniaxial magnetic anisotropy partly disposed on a polymer substrate. The magnetic element exhibits a discontinuous magnetic reversal under an applied magnetic field having a magnitude that is not smaller than a predetermined value. Despite its simple structure, the magnetic element exhibits excellent magnetic characteristics. Furthermore, the magnetic element exhibits little variation in magnetic characteristics and its magnetic characteristics are therefore high reproducible.
摘要翻译：一种磁性元件，包括部分地设置在聚合物基底上的具有单轴磁各向异性的薄膜。磁性元件在具有不小于预定值的幅度的施加磁场下呈现不连续的磁反转。尽管结构简单，磁性元件表现出优异的磁特性。此外，磁性元件在磁特性方面几乎没有变化，因此其磁特性可高度重现。

10. 发明授权

US09001236B2 Image processing apparatus, method, and recording medium for extracting images from a composite image file 有权
标题翻译：用于从合成图像文件中提取图像的图像处理装置，方法和记录介质
公开(公告)号：US09001236B2
公开(公告)日：2015-04-07
申请号：US13240876
申请日：2011-09-22
申请人： Shinji Furukawa
发明人： Shinji Furukawa
IPC分类号： H04N5/76 , H04N5/265 , H04N1/387 , G06T11/00
CPC分类号： H04N1/387 , G06T11/00 , G06T2200/32
摘要： An image processing apparatus includes an image file creation unit, a storage control unit, an extracting unit, and a display controller. The image file creation unit is configured to create a file including a plurality of images, first management information indicating a specified Exif version, and second management information including an image size and a total number of the images in the file. The storage control unit is configured to store the image file in a storage. The extraction unit is configured to extract the image from the image file in the storage based on the second management information. The display controller is configured to display the image on a display.
摘要翻译：图像处理装置包括图像文件创建单元，存储控制单元，提取单元和显示控制器。图像文件创建单元被配置为创建包括多个图像的文件，指示指定的Exif版本的第一管理信息，以及包括文件中的图像大小和总数的第二管理信息。存储控制单元被配置为将图像文件存储在存储器中。提取单元被配置为基于第二管理信息从存储器中的图像文件中提取图像。显示控制器被配置为在显示器上显示图像。

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