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    • 2. 发明授权
    • Semiconductor device with negative differential resistance characteristics
    • 具有负差分电阻特性的半导体器件
    • US06690030B2
    • 2004-02-10
    • US09798923
    • 2001-03-06
    • Junji KogaKen UchidaRyuji OhbaAkira Toriumi
    • Junji KogaKen UchidaRyuji OhbaAkira Toriumi
    • H01L2940
    • H01L27/1104H01L21/28273H01L27/115H01L29/42324H01L29/511H01L29/7881
    • A gate oxide film formed on the surface of a silicon substrate is partly reduced in thickness or “thinned” at its specified part overlying a source region. In a gate region, a multilayer structure is formed which includes a first polycrystalline silicon or “polysilicon” film of a p-type conductivity, a tunnel oxide film, and a second p-type polysilicon film in this order of lamination. The source region and the first polysilicon film make up a high-concentration impurity-doped pn junction with a thin silicon oxide film laid therebetween, providing a tunnel diode also known as Esaki diode. The diode is used for a negative differential resistance. Further, a portion between the first and second polysilicon films is a non-linear tunnel resistor, which serves as a load. The negative differential resistance and the load are serially connected together between a low-voltage power supply (ground potential) Vss and a high-voltage power supply Vdd, thus enabling forming a transistor with a built-in bistable circuit. Potential information of the first polysilicon film for use as a data storage node is read with a transistor amplification applied thereto. Thus, data read is performed at high speeds. Simultaneously, a current flowing between the power supplies is suppressed to a lower level, thereby minimizing power consumption in wait modes.
    • 形成在硅衬底表面上的栅极氧化膜的厚度部分地减小或者在其源区域上的指定部分“薄化”。 在栅极区域中,以层叠的顺序形成包括p型导电体的第一多晶硅或“多晶硅”膜,隧道氧化物膜和第二p型多晶硅膜的多层结构。 源极区域和第一多晶硅膜构成了高浓度杂质掺杂的pn结,其间铺设有薄的氧化硅膜,提供了也称为Esaki二极管的隧道二极管。 二极管用于负差分电阻。 此外,第一和第二多晶硅膜之间的部分是用作负载的非线性隧道电阻器。 负的差分电阻和负载在低压电源(接地电位)Vss和高压电源Vdd之间串联连接在一起,从而能够形成具有内置双稳态电路的晶体管。 读取用作数据存储节点的第一多晶硅膜的电位信息,并施加晶体管放大。 因此,高速执行数据读取。 同时,在电源之间流动的电流被抑制到较低的电平,从而使等待模式中的功耗最小化。
    • 5. 发明授权
    • Logic apparatus and logic circuit
    • 逻辑设备和逻辑电路
    • US06787795B2
    • 2004-09-07
    • US09990362
    • 2001-11-23
    • Ken UchidaJunji KogaRyuji Ohba
    • Ken UchidaJunji KogaRyuji Ohba
    • H01L2906
    • B82Y10/00H01L29/7888H01L49/006H03K19/08
    • A logic apparatus having first and second single-electron devices connected serially or in parallel. Each of the single-electron devices includes a conductive island insulatively disposed between two tunnel barriers, which separate the conductive island from respective source/drain electrodes. A first charge storage region is insulatively disposed over and under the conductive island and a gate electrode, respectively. When charges are accumulated in the charge storage region, a Coulomb oscillation of the respective device is shifted by a half-period from the Coulomb oscillation that results when no charge has accumulated therein.
    • 具有串联或并联连接的第一和第二单电子器件的逻辑器件。 每个单电子器件包括绝缘地设置在两个隧道势垒之间的导电岛,其将导电岛与相应的源/漏电极分离。 第一电荷存储区分别绝缘地设置在导电岛和栅电极之上和之下。 当在电荷存储区域中累积电荷时,各器件的库仑振荡从库仑振荡偏移了半周期,当没有电荷累积时产生库仑振荡。
    • 6. 发明授权
    • Semiconductor storage element
    • 半导体存储元件
    • US06680505B2
    • 2004-01-20
    • US10107440
    • 2002-03-28
    • Ryuji OhbaJunji KogaKen Uchida
    • Ryuji OhbaJunji KogaKen Uchida
    • H01L2972
    • G11C11/5671H01L21/28273H01L29/7883
    • A nonvolatile semiconductor storage element which has a charge stored layer as a floating gate, and whose storage time is made sufficiently long. The storage element comprises a channel region formed between a source region and a drain region; first and second tunnel insulator layers formed over the channel region and through which electrons can directly tunnel quantum-mechanically; and a conductive particle layer which is sandwiched in between the first and second tunnel insulator layers; the charge stored layer being formed on the second tunnel insulator layer. An energy level at which the information electron in the charge stored layer is injected is lower than the energy level of a conduction band edge in the channel region.
    • 一种具有电荷存储层作为浮动栅极并且其存储时间足够长的非易失性半导体存储元件。 存储元件包括形成在源极区域和漏极区域之间的沟道区域; 形成在通道区域上的第一和第二隧道绝缘体层,电子可以通过其直接隧道量子力学; 以及夹在所述第一和第二隧道绝缘体层之间的导电性粒子层; 电荷存储层形成在第二隧道绝缘体层上。 注入电荷存储层中的信息电子的能级低于沟道区的导带边缘的能级。
    • 8. 发明授权
    • Non-volatile semiconductor storage device and method for manufacturing the same
    • 非易失性半导体存储装置及其制造方法
    • US07737486B2
    • 2010-06-15
    • US11859142
    • 2007-09-21
    • Masumi SaitohKen Uchida
    • Masumi SaitohKen Uchida
    • H01L29/788
    • H01L29/42324H01L21/28273H01L29/165H01L29/7881
    • A non-volatile semiconductor storage device includes: a semiconductor substrate; a source region and a drain region formed in the semiconductor substrate so as to be separated from each other; a first insulating film formed between the source region and the drain region, on the semiconductor substrate; a floating electrode formed on the first insulating film and including a semiconductor conductive material layer having extension strain; a second insulating film formed on the floating electrode; and a control electrode formed on the second insulating film. The extension strain of the floating electrode becomes gradually small as the location advances from the second insulating film toward the first insulating film, and the floating electrode has extension strain of 0.01% or more at an interface between the floating electrode and the second insulating film, and has extension strain less than 0.01% at an interface between the floating electrode and the first insulating film.
    • 非易失性半导体存储器件包括:半导体衬底; 源极区域和漏极区域,形成在半导体衬底中以便彼此分离; 在所述半导体衬底上形成在所述源极区域和所述漏极区域之间的第一绝缘膜; 形成在所述第一绝缘膜上并具有延伸应变的半导体导电材料层的浮动电极; 形成在浮置电极上的第二绝缘膜; 以及形成在所述第二绝缘膜上的控制电极。 浮动电极的延伸应变随着位置从第二绝缘膜向第一绝缘膜前进而逐渐变小,浮动电极在浮动电极和第二绝缘膜之间的界面具有0.01%以上的延伸应变, 并且在浮动电极和第一绝缘膜之间的界面处具有小于0.01%的延伸应变。