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    • 2. 发明授权
    • Positioning substrate for semiconductor process
    • 半导体工艺定位基板
    • US06950721B2
    • 2005-09-27
    • US10391574
    • 2003-03-20
    • Makoto TashiroKeisuke KondohHiroaki Saeki
    • Makoto TashiroKeisuke KondohHiroaki Saeki
    • H01L21/027H01L21/02H01L21/68G06F7/00
    • H01L21/68Y10S414/135
    • A positioning substrate is used for performing a teaching operation on a transfer mechanism for transferring a target substrate in a semiconductor processing system. The positioning substrate includes a substrate body made of a material selected from the group consisting of the same material as the target substrate, semiconductor, compound semiconductor, and ceramic. The substrate body has an outer contour sized to be handled by the transfer mechanism as an alternative to the target substrate. The positioning substrate also includes a positioning assistant having a combination of a positioning hole and a positioning reference line formed in the substrate body. The positioning hole is formed to penetrate the substrate body in a thickness direction. The positioning reference line is formed on a surface of the substrate body to extend across an opening of the positioning hole and have a predetermined width.
    • 定位基板用于对在半导体处理系统中传送目标基板的转印机构进行示教操作。 定位基板包括由与靶基板,半导体,化合物半导体和陶瓷相同的材料组成的组中选择的材料制成的基板主体。 基板主体具有外形轮廓,其尺寸设置成由作为目标基板的替代的传送机构来处理。 定位基板还包括具有定位孔和形成在基板主体中的定位基准线的组合的定位辅助件。 定位孔形成为在厚度方向上穿透基体。 定位参考线形成在基体的表面上,以延伸穿过定位孔的开口并具有预定的宽度。
    • 3. 发明授权
    • Recovery apparatus having buckets for scooping up floating matter
    • 具有用于舀取浮动物质的桶的回收装置
    • US07243803B2
    • 2007-07-17
    • US11315291
    • 2005-12-23
    • Minoru TashiroMakoto Tashiro
    • Minoru TashiroMakoto Tashiro
    • C02F1/40
    • B23Q11/10Y10S210/923
    • A recovery apparatus comprising a running member which runs between a first position where the member is immersed in the liquid stored in a reserve tank and a second position where the member projects upwards from a surface level of the liquid, and a bucket which is secured to the running member and which scoops the floating matter floating at the surface level of the liquid, while moving from the first position to the second position. The bucket comprises a bucket body which has an opening for allowing the liquid containing the floating matter to flow in, and which gradually narrows downwards from the opening, partition plates which extend downwards from the opening and face each other and which block the floating matter flowing from the opening, and discharge ports which are made in the bucket body and open at a position lower than the opening.
    • 一种回收装置,包括在第一位置和第二位置之间延伸的运行构件,所述第一位置将所述构件浸入存储在储备箱中的液体中,并且所述构件从所述液体的表面水平向上突出的第二位置,以及固定到 在从第一位置移动到第二位置时,运行构件并且漂浮在液体的表面水平面上的浮动物质。 铲斗包括一个桶体,该桶体具有允许包含浮动物质的液体流入,并且从开口向下逐渐变窄的隔板,该隔板从开口向下延伸并面对彼此,并且阻挡浮动物质的流动 从开口形成的排出口和在桶体中制成的排出口,并且在比开口低的位置开口。
    • 4. 发明申请
    • Cyclone-type separator for separating foreign matters by utilizing a centrifugal force
    • 用于通过利用离心力分离异物的旋风型分离器
    • US20060091071A1
    • 2006-05-04
    • US11304706
    • 2005-12-16
    • Minoru TashiroMakoto Tashiro
    • Minoru TashiroMakoto Tashiro
    • B01D21/26
    • B23Q11/1069B04C5/12B04C9/00B04C2009/002B23Q11/0057Y02P70/171
    • A cyclone-type separator comprises a hollow cylindrical main body in to which liquid containing foreign matter is introduced, a clean room provided in an upper end of the main body, a communication pipe which connects the clean room to an interior of the main body, and a porous separating pipe arranged in the clean room. As the liquid swirls in the main body, an eddy stream is generated. A columnar air layer and a clean liquid layer are formed, both aligned with the centerline of the eddy stream. The air layer and the liquid layer are guided via the communication pipe into the separating pipe. At the bottom of the clean room, there are provided a first reservoir for storing the liquid coming through the separating pipe, a second reservoir for storing the liquid flowing from the first reservoir, and a coolant outlet port for discharging the clean liquid.
    • 旋风型分离器包括中空圆柱形主体,其中引入含异物的液体,设置在主体上端的洁净室,连接洁净室至主体内部的连通管, 以及布置在洁净室中的多孔分离管。 当液体在主体中旋转时,产生涡流。 形成柱状空气层和清洁的液体层,两者都与涡流的中心线对齐。 空气层和液体层通过连通管被引导到分离管中。 在洁净室的底部,设置有用于储存通过分离管的液体的第一储存器,用于储存从第一储存器流出的液体的第二储存器和用于排出清洁液体的冷却剂出口。
    • 7. 发明授权
    • Chip treatment device
    • 芯片处理装置
    • US06332983B1
    • 2001-12-25
    • US09565488
    • 2000-05-05
    • Minoru TashiroMakoto Tashiro
    • Minoru TashiroMakoto Tashiro
    • B23Q1100
    • B23Q11/1069B23Q11/0057
    • A chip treatment device 100 includes a box-shaped housing 110, and an upper surface panel 112 of the housing is connected to a sloped portion 114. The interiors of the housing 110 is divided into upper and lower areas by a partition panel 130, and to the areas are provided a first cutting fluid bath 150 and a second cutting fluid bath 160. Chains 240 stretched between driving sprockets 210 and chain guide units 230 are equipped with scraper units 250 moving in the direction of the arrow. The chips coming in from an entrance opening 180 is separated from cutting fluid while being conveyed on the separation panel 130. First and second filter units 170, 300 filter said cutting fluid.
    • 芯片处理装置100包括箱形壳体110,并且壳体的上表面面板112连接到倾斜部分114.壳体110的内部通过分隔板130分成上部和下部区域,并且 在这些区域设置有第一切削液槽150和第二切削液槽160.在驱动链轮210和链条引导单元230之间延伸的链240配备有沿箭头方向移动的刮刀单元250。 从进口开口180进入的碎屑在分离面板130上被输送的同时与切削液分离。第一和第二过滤器单元170,300过滤所述切削液。
    • 8. 发明授权
    • Filter apparatus
    • 过滤装置
    • US5217613A
    • 1993-06-08
    • US809245
    • 1991-12-18
    • Minoru TashiroMakoto Tashiro
    • Minoru TashiroMakoto Tashiro
    • B01D21/00B01D33/00
    • B01D21/04B01D21/0012B01D33/073B01D33/466B01D33/76
    • A filter apparatus includes a mesh filter consisting of a flexible sheet having a smooth surface and a multiplicity of through-holes and formed into a cylindrical configuration. The leading edge of a scraper is brought into abutting contact with the outer surface of the cylindrically formed mesh filter, or two scrapers can be provided on the inner and outer surfaces of the mesh filter with their leading edges abutted against these surfaces. Provided within the mesh filter is a support shaft serving also as a discharge pipe. The discharge pipe discharges clean oil filtered by the mesh filter, and the support shaft rotatably supports the mesh filter. The cylindrical mesh filter is disposed in a tank for accommodating cutting oil or abrasive oil containing solid foreign matter such as cutting chips or abrasive grains. The mesh filter is rotated on the discharge pipe/support shaft by a drive mechanism. The oil containing the solid foreign matter is passed through the cylindrical mesh filter from the outer to the inner side thereof so that the foreign matter in the oil is trapped by the through-holes. The foreign matter thus trapped is scraped off the mesh filter by the scraper or scrapers as the mesh filter rotates.
    • 过滤装置包括由具有光滑表面的柔性片和多个通孔构成的网状过滤器,并形成为圆柱形构造。 刮刀的前缘与圆筒形网状过滤器的外表面邻接接触,或者可以在网状过滤器的内表面和外表面上设置两个刮刀,其前缘抵靠在这些表面上。 在网状过滤器内设有也用作排放管的支撑轴。 排放管排出由网状过滤器过滤的清洁油,支撑轴可旋转地支撑网状过滤器。 圆筒形网状过滤器设置在用于容纳切削油或含有固体异物如切屑或磨粒的磨料油的罐中。 网状过滤器通过驱动机构在排出管/支撑轴上旋转。 含有固体异物的油从其外侧通过圆筒形网状过滤器,使得油中的异物被通孔捕获。 如网状过滤器旋转,由此被捕获的异物被刮板或刮刀从网状过滤器上刮掉。