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    • 4. 发明授权
    • Apparatus for repairing an electrically short-circuited semiconductor
device
    • 用于修复电气短路的半导体器件的装置
    • US5418680A
    • 1995-05-23
    • US155655
    • 1993-11-22
    • Keishi SaitoTatsuyuki AoikeMitsuyuki NiwaToshimitsu KariyaYuzo Koda
    • Keishi SaitoTatsuyuki AoikeMitsuyuki NiwaToshimitsu KariyaYuzo Koda
    • H01L21/28H01L31/0224H01L31/0392H01L31/20H05F7/00
    • H01L31/208H01L21/28H01L31/022466H01L31/03921Y02E10/50Y02P70/521Y10S136/29
    • An apparatus for repairing a defective semiconductor device having an electrically short-circuited portion, wherein the semiconductor device includes a semiconductor thin film and a conductive thin film disposed in the named order on a conductive surface of a substrate and in which the conductive thin film and the conductive surface of the substrate are electrically short-circuited at a pinhole occurring in the semiconductor thin film to form an electrically short-circuited portion so that the semiconductor device is defective. The apparatus includes a substrate holding unit for holding the substrate of the defective semiconductor device and an electrode arranged above the substrate holding unit so that, when the defective semiconductor is positioned on the substrate holding unit, there is a predetermined distance between the electrode and the conductive thin film of the defective semiconductor device, the electrode being capable of moving in relation to the substrate of the defective semiconductor device. The apparatus further includes a voltage applying unit for applying a desired voltage to the electrode, wherein discharge is caused between the electrode and the conductive thin film of the defective semiconductor device by applying a desired voltage to the electrode through the voltage applying means to thereby modify a region of the conductive thin film of the defective semiconductor device in electrical contact with the conductive surface of the substrate of the defective semiconductor device.
    • 一种用于修复具有电短路部分的有缺陷的半导体器件的装置,其中所述半导体器件包括半导体薄膜和导电薄膜,所述半导体薄膜和导电薄膜按照所述顺序设置在衬底的导电表面上,并且其中导电薄膜和 衬底的导电表面在发生在半导体薄膜中的针孔处电短路以形成电短路部分,使得半导体器件有缺陷。 该装置包括用于保持有缺陷的半导体器件的衬底的衬底保持单元和布置在衬底保持单元上方的电极,使得当缺陷半导体位于衬底保持单元上时,电极和 有缺陷的半导体器件的导电薄膜,电极能够相对于有缺陷的半导体器件的衬底移动。 该装置还包括用于向电极施加期望电压的电压施加单元,其中通过施加期望的电压通过电压施加装置在电极和缺陷半导体器件的导电薄膜之间引起放电,从而修改 所述有缺陷的半导体器件的导电薄膜的区域与有缺陷的半导体器件的衬底的导电表面电接触。
    • 10. 发明授权
    • Electrophotographic method using an amorphous silicon light receiving
member with a latent image support layer and a developed image support
layer and insulating toner having a volume average particle size of 4.5
to 9.0 micron
    • 使用具有潜像载体层和显影图像载体层的非晶硅光接收元件和体积平均粒度为4.5至9.0微米的绝缘调色剂的电子照相方法
    • US5358811A
    • 1994-10-25
    • US53822
    • 1993-04-29
    • Koji YamazakiToshimitsu KariyaTatsuyuki AoikeToshiyuki EharaTakehito YoshinoHirokazu Otoshi
    • Koji YamazakiToshimitsu KariyaTatsuyuki AoikeToshiyuki EharaTakehito YoshinoHirokazu Otoshi
    • G03G5/082G03G9/08G03G13/08G03G13/01
    • G03G13/08G03G5/08235G03G9/0819G03G9/0821
    • An electrophotographic image-forming and developing method using as light receiving member an amorphous silicon light receiving member which comprises a substrate and a light receiving layer disposed on said substrate, said light receiving layer comprising a first layer capable of exhibiting a photoconductivity, a second layer capable of supporting a latent image and a third layer capable of supporting a developed image being laminated in this order on said substrate, said first layer being formed of an amorphous material containing silicon atoms as a matrix, and at least one kind of atoms selected from the group consisting of hydrogen atoms and halogen atoms, said second layer being formed of an amorphous material containing silicon atoms as a matrix, carbon atoms, atoms of an element belonging to Group III of the Periodic Table, and at least one kind of atoms selected from the group consisting of hydrogen atoms and halogen atoms, and said third layer being formed of an amorphous material containing silicon atoms as a matrix, carbon atoms and at least one kind of atoms selected from the group consisting of hydrogen atoms and halogen atoms; and using as said toner a fine particle insulating toner having a volume average particle size in the range of 4.5 to 9 um and an apparent viscosity at 100.degree. C. in the range of 1.times.10.sup.4 to 2.times.10.sup.5 poise.
    • 一种电子照相图像形成和显影方法,其使用非晶硅光接收元件作为光接收元件,所述非晶硅光接收元件包括基板和设置在所述基板上的光接收层,所述光接收层包括能够呈现光电导性的第一层,第二层 能够支撑潜像和能够支持在所述基板上依次层叠的显影图像的第三层,所述第一层由含有硅原子作为基体的非晶质材料形成,以及至少一种选自 由氢原子和卤素原子组成的组,所述第二层由含有硅原子作为基体的非晶态材料形成,碳原子,属于周期表第III族的元素的原子,以及选出的至少一种原子 由氢原子和卤素原子组成的组,所述第三层由无定形配体形成 含有硅原子作为基体的碳原子和选自氢原子和卤素原子的至少一种原子; 并且使用体积平均粒度在4.5至9μm的细颗粒绝缘调色剂和在100℃下的表观粘度在1×10 4至2×105泊的范围内作为所述调色剂。