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1. 发明授权

US4617469A Exposure apparatus with detecting means insertable into an exposure path 失效
标题翻译：具有可插入曝光路径的检测装置的曝光装置
公开(公告)号：US4617469A
公开(公告)日：1986-10-14
申请号：US552313
申请日：1983-11-16
申请人： Kazuo Takahashi , Hiroshi Sato , Masao Kosugi
发明人： Kazuo Takahashi , Hiroshi Sato , Masao Kosugi
IPC分类号： G03B27/32 , G03F7/20 , G03F9/00 , G05D3/12 , H01L21/027 , H01L21/30 , H01L21/68 , G01N21/86
CPC分类号： G03F9/70 , H01L21/30
摘要： An exposure apparatus for aligning an original, having at least one alignment mark thereon, and radiation sensitive member, having at least one alignment mark thereon and adapted to receive the image of the original, with each other includes a first detecting device including a sensor retractable from the optical path of a light for illuminating the original, the sensor being adapted to sense the original and radiation sensitive member to detect a relative displacement (degree of misalignment) between the original and radiation sensitive member when the sensor is in the optical path; a second detecting device including a sensor set out of the optical path and adapted to detect the position of one of the original and radiation sensitive member in the absolute coordinates of the apparatus; and a driving mechanism for moving one of the original and radiation sensitive member in response to the output of the second detecting device to correct the above mentioned displacement.
摘要翻译：用于对准在其上具有至少一个对准标记的原稿和其上具有至少一个对准标记并适于接收原稿的图像的辐射敏感元件的曝光设备包括：第一检测装置，包括可伸缩的传感器从用于照射原稿的光的光路中，传感器适于感测原始和辐射敏感元件，以便在传感器处于光路时检测原始和辐射敏感元件之间的相对位移（未对准度）; 第二检测装置，其包括设置在所述光路中的传感器，并且适于检测所述原始和辐射敏感部件中的一个在所述装置的绝对坐标中的位置; 以及驱动机构，用于响应于第二检测装置的输出来移动原件和辐射敏感部件之一，以校正上述位移。

2. 发明授权

US4488806A Shot arranging method in a divisional printing apparatus 失效
标题翻译：分割印刷装置中的拍摄布置方法
公开(公告)号：US4488806A
公开(公告)日：1984-12-18
申请号：US449825
申请日：1982-12-14
申请人： Kazuo Takahashi , Hiroshi Sato , Masao Kosugi
发明人： Kazuo Takahashi , Hiroshi Sato , Masao Kosugi
IPC分类号： H01L21/30 , B41J2/44 , G03F7/20 , H01L21/027 , H01L27/02 , G03B27/32 , G03B27/44
CPC分类号： G03F7/70425 , B41J2/44 , G03F7/70433 , H01L27/0207
摘要： In a divisional printing apparatus wherein the pattern of a mask is reduced and projected for printing onto a wafer and the mask and the wafer are moved relative to each other at each shot so that the exposed areas thereof do not overlap each other, and whereby the same pattern as that for collective printing is printed onto the effective area of the wafer by a plurality of shots, a shot arranging method in which, in the case of a so-called multichip shot in which a plurality of chips are exposed at a time at each shot, the special chip area of the wafer is not exposed, but the wafer is effectively exposed so that the creation of unusable chips is minimized.
摘要翻译：在一种分割印刷装置中，其中掩模的图案被减小并投影以印刷到晶片上，并且掩模和晶片在每次拍摄时相对于彼此移动，使得其曝光区域彼此不重叠，并且由此通过多次拍摄将与集体印刷相同的图案印刷在晶片的有效区域上，其中，在一次所谓的多芯片拍摄的情况下，其中多个芯片被曝光，在每次拍摄时，晶片的特殊芯片面积都不会露出，但是晶片被有效地暴露，使得不可用的芯片的产生被最小化。

3. 发明授权

US4479711A Mask aligner 失效
标题翻译：面罩对齐器
公开(公告)号：US4479711A
公开(公告)日：1984-10-30
申请号：US446366
申请日：1982-12-02
申请人： Masao Kosugi , Hiroshi Sato , Kazuo Takahashi , Ichiro Ishiyama , Shuichi Yabu
发明人： Masao Kosugi , Hiroshi Sato , Kazuo Takahashi , Ichiro Ishiyama , Shuichi Yabu
IPC分类号： G03F9/00 , G03B27/52
CPC分类号： G03F9/7076
摘要： In a mask aligner, the actual element pattern of a mask is transferred onto a resist applied to the surface of a wafer, while the alignment pattern of the mask is not transferred onto said resist. That is, the line width of the alignment pattern of the mask is a line width which is not transferred to the wafer. If the pattern of the mask is formed so that the line width of the alignment pattern is thin as compared with that of the actual element pattern, the exposure amount in the alignment pattern portion on the resist applied to the surface of the wafer becomes excessive due to the diffraction phenomenon and thus, the alignment pattern of the mask is not transferred onto the wafer.
摘要翻译：在掩模对准器中，掩模的实际元件图案被转移到施加到晶片表面的抗蚀剂上，同时掩模的对准图案不被转印到所述抗蚀剂上。也就是说，掩模的对准图案的线宽是不传送到晶片的线宽。如果掩模的图案形成为使得对准图案的线宽与实际元件图案相比较薄，则施加到晶片表面的抗蚀剂上的对准图案部分中的曝光量变得过大因此，掩模的对准图案不会转印到晶片上。

4. 发明授权

US4506977A Transfer apparatus provided with an auto-focusing mechanism 失效
标题翻译：具有自动对焦机构的传送装置
公开(公告)号：US4506977A
公开(公告)日：1985-03-26
申请号：US482812
申请日：1983-04-07
申请人： Hiroshi Sato , Shuichi Yabu , Masao Kosugi
发明人： Hiroshi Sato , Shuichi Yabu , Masao Kosugi
IPC分类号： G03B27/32 , G02B7/36 , G03B27/34 , G03F7/20 , G03F7/207 , G03F9/00 , H01L21/027 , H01L21/30 , G03B27/42 , G03B27/52
CPC分类号： G03F9/7026 , G02B7/36 , G03F7/70241
摘要： A transfer apparatus comprises a projection device operable with a photomask having a semiconductor circuit pattern therein and includes a projection lens for projecting the image of the photomask to a photosensitive member sensitive to the image of the photomask projected by the projection lens. The apparatus further includes an illuminating device for illuminating the photomask, a memory circuit for storing the time characteristic .DELTA.l of a focus error occurring in the projection lens due to the exposure light from the photomask having passed through the projection lens, a history detector for detecting the illuminating history to/t of the illuminating device, a transmission signal forming device for forming a transmission signal regarding the transmission factor .tau. of the photomask used, a length measuring device for measuring the length of a part of the optical path between the photomask and the photosensitive member, an operation circuit for calculating a proper value in accordance with the output of the memory circuit, the output of the history detector and the transmission signal, and an adjusting device for adjusting the length of the optical path of the projection device until the proper value and the value measured by the length measuring device are in accord with each other.
摘要翻译：传送装置包括投影装置，其可与其中具有半导体电路图案的光掩模一起工作，并且包括投影透镜，用于将光掩模的图像投影到对由投影透镜投影的光掩模的图像敏感的感光部件。该装置还包括用于照射光掩模的照明装置，存储电路，用于存储由于来自已经通过投影透镜的光掩模的曝光而在投影透镜中出现的聚焦误差的时间特性DELTA 1，历史检测器检测照明装置的照明历史/ t，发送信号形成装置，用于形成关于所使用的光掩模的发送因子τT的发送信号;长度测量装置，用于测量光掩模之间的光路的一部分的长度和感光部件，根据存储电路的输出，历史检测器和传输信号的输出计算适当值的运算电路，以及用于调整投影装置的光路长度的调整装置直到由该长度测量装置测量的适当的值和值是一致的彼此。

5. 发明申请

US20160331470A1 Location control system 审中-公开
标题翻译：位置控制系统
公开(公告)号：US20160331470A1
公开(公告)日：2016-11-17
申请号：US15111814
申请日：2015-01-09
申请人： Hiroshi Sato
发明人： Hiroshi Sato
IPC分类号： A61B34/20 , A61M1/00 , A61B90/11 , A61M5/158 , A61B17/3209 , A61B34/00
CPC分类号： A61B34/20 , A61B5/062 , A61B17/32093 , A61B34/30 , A61B34/35 , A61B34/73 , A61B90/11 , A61B2017/320052 , A61B2034/2051 , A61B2034/2059 , A61B2034/2065 , A61B2034/2072 , A61B2034/732 , A61B2090/061 , A61B2090/062 , A61B2090/374 , A61B2090/376 , A61B2090/3762 , A61B2090/378 , A61B2090/392 , A61B2090/3954 , A61B2090/3966 , A61B2218/002 , A61B2218/007 , A61M1/008 , A61M5/158 , A61M2005/1585 , G01B15/00
摘要： The embodiment of the present invention provides a position control system having a movement apparatus including an electromagnet capable of applying a magnetic field to a head and a movement control unit; and a position detection apparatus being capable of determining a position of a mark existing on the head or in a tip end side position of a pipe which is attached to the head with a tip end thereof open and through which a liquid can be injected or suctioned via an opening portion in the tip end, the position detection apparatus being capable of detecting a position of the head on the basis of the position of the mark, the movement control unit of the movement apparatus is capable of controlling an advancement direction of the head so that the pipe is inserted substantially linearly into a target position.
摘要翻译：本发明的实施例提供了一种位置控制系统，其具有包括能够向磁头施加磁场的电磁体和移动控制单元的移动装置; 以及位置检测装置，其能够确定存在于头部的标记的位置或附接到头部的管的前端侧位置，其顶端开口，并且可以通过该顶端喷射或吸引液体通过前端的开口部，位置检测装置能够根据标记的位置检测头部的位置，移动装置的移动控制单元能够控制头部的前进方向使得管道基本线性地插入目标位置。

6. 发明授权

US09244342B2 Imprint apparatus and pattern transfer method 有权
标题翻译：印刷装置和图案转印方法
公开(公告)号：US09244342B2
公开(公告)日：2016-01-26
申请号：US12963009
申请日：2010-12-08
申请人： Hiroshi Sato
发明人： Hiroshi Sato
IPC分类号： B29C59/02 , G03F7/00 , B82Y10/00 , B82Y40/00
CPC分类号： G03F7/0002 , B82Y10/00 , B82Y40/00
摘要： An imprint apparatus comprises a scope which observes a mark formed in each shot of a substrate and a mark formed on a mold and a controller. The controller performs observation by the scope, detects an amount of displacement of the shot with respect to the mold based on the observation result, and, if the detected displacement amount falls outside an allowable range, executes at least one of remeasuring a baseline amount and reexecuting a global alignment process.
摘要翻译：压印装置包括观察在基板的每个镜头中形成的标记的范围和形成在模具上的标记和控制器。控制器通过该范围进行观察，基于观察结果检测射出相对于模具的位移量，并且如果检测到的位移量超出允许范围，则执行重新测量基线量和重新执行全局对齐过程。

7. 发明授权

US09239946B2 Method and apparatus for detecting and processing specific pattern from image 有权
标题翻译：用于从图像中检测和处理特定图案的方法和装置
公开(公告)号：US09239946B2
公开(公告)日：2016-01-19
申请号：US13546355
申请日：2012-07-11
申请人： Kan Torii , Masakazu Matsugu , Katsuhiko Mori , Hiroshi Sato , Yusuke Mitarai
发明人： Kan Torii , Masakazu Matsugu , Katsuhiko Mori , Hiroshi Sato , Yusuke Mitarai
IPC分类号： G06K9/00 , H04N5/232
CPC分类号： G06K9/00234 , G06K2209/011 , H04N5/23219
摘要： In an image within which a face pattern is detected, when a ratio of a skin color pixel is equal to or smaller than a first threshold value in a first region and a ratio of a skin color pixel is equal to or greater than a second threshold value in a second r region, the vicinity of the first region is determined to be a face candidate position at which the face pattern can exist. Face detection is carried out on the face candidate position. The second region is arranged in a predetermined position relative to the first region.
摘要翻译：在其中检测到面部图案的图像中，当皮肤颜色像素的比例在第一区域中等于或小于第一阈值并且皮肤颜色像素的比率等于或大于第二阈值时在第二r区域中，第一区域附近被确定为可以存在脸部图案的面部候选位置。脸部检测在脸部候选位置进行。第二区域相对于第一区域布置在预定位置。

8. 发明授权

US08953175B2 Mark position detector, imprint apparatus, and article manufacturing method 有权
标题翻译：标记位置检测器，压印装置和制品制造方法
公开(公告)号：US08953175B2
公开(公告)日：2015-02-10
申请号：US12966237
申请日：2010-12-13
申请人： Hiroshi Sato
发明人： Hiroshi Sato
IPC分类号： G01B11/14 , G01B11/02 , G03F9/00 , G03F7/00
CPC分类号： G01B11/14 , B29C59/002 , B29C59/026 , B29K2101/00 , B29L2009/005 , B82Y10/00 , B82Y40/00 , G01B11/02 , G03F7/0002 , G03F9/7038 , G03F9/7042 , G03F9/7049 , G03F9/7088
摘要： A detector for detecting a position of a mark comprises: an image sensing device; an optical system which projects the mark onto an image sensing surface of the image sensing device; a pattern located in a position between the image sensing surface and an optical element located closest to a plane on which the mark is to be located, among optical elements forming the optical system, the position being optically conjugated with the plane; and a processor which calculates a position of the mark with respect to one of a position of the pattern and a position already known from the position of the pattern, based on a moire pattern formed on the image sensing surface by the mark and the pattern.
摘要翻译：用于检测标记位置的检测器包括：图像感测装置; 光学系统，其将标记投射到图像感测装置的图像感测表面上; 在形成光学系统的光学元件中位于图像感测表面和位于最靠近标记所在的平面的光学元件之间的位置的图案，该位置与该平面光学共轭; 以及处理器，其基于通过标记和图案形成在图像感测表面上的莫尔图案，计算相对于图案的位置和从图案的位置已知的位置之一的标记的位置。

9. 发明授权

US08861803B2 Image recognition apparatus, image recognition method, and program 有权
标题翻译：图像识别装置，图像识别方法和程序
公开(公告)号：US08861803B2
公开(公告)日：2014-10-14
申请号：US13436585
申请日：2012-03-30
申请人： Kotaro Yano , Hiroshi Sato , Shunsuke Nakano
发明人： Kotaro Yano , Hiroshi Sato , Shunsuke Nakano
IPC分类号： G06K9/46 , G06K9/00
CPC分类号： G06K9/00281
摘要： An image recognition apparatus includes an extraction unit configured to extract a feature quantity for each local area from an input image, a conversion unit configured to convert the feature quantity extracted by the extraction unit into a feature quantity indicating a degree with respect to an attribute for each local area, a verification unit configured to verify the feature quantity converted by the conversion unit against a feature quantity of a registered image, and an identification unit configured to identify whether the input image is identical to the registered image by integrating the verification result for each local area acquired by the verification unit.
摘要翻译：图像识别装置包括：提取单元，被配置为从输入图像中提取每个局部区域的特征量;转换单元，被配置为将由提取单元提取的特征量转换为指示相对于属性的属性的度数的特征量每个局部区域，验证单元，被配置为验证由转换单元转换的特征量相对于注册图像的特征量;以及识别单元，被配置为通过将输入图像与登记图像相一致来识别，验证单位获取的每个局部区域。

10. 发明授权

US08842880B2 Information processing apparatus, method of controlling information processing apparatus, and storage medium 有权
标题翻译：信息处理装置，信息处理装置的控制方法以及存储介质
公开(公告)号：US08842880B2
公开(公告)日：2014-09-23
申请号：US13444738
申请日：2012-04-11
申请人： Shunsuke Nakano , Hiroshi Sato , Yuji Kaneda , Takashi Suzuki
发明人： Shunsuke Nakano , Hiroshi Sato , Yuji Kaneda , Takashi Suzuki
IPC分类号： G06K9/00 , G06F3/00
CPC分类号： G06K9/00288
摘要： An information processing apparatus comprising: an obtaining unit configured to obtain image data; a detection unit configured to detect an object from the image data; an attribute determination unit configured to determine an attribute indicating a characteristic of the object detected by the detection unit; a registration unit configured to register the image data in at least one of a plurality of dictionaries based on the attribute determined by the attribute determination unit; and an adding unit configured to add, when the image data is registered in not less than two dictionaries, link information concerning the image data registered in the other dictionary to the image data registered in one dictionary.
摘要翻译：一种信息处理设备，包括：获取单元，被配置为获得图像数据; 检测单元，被配置为从所述图像数据检测对象; 属性确定单元，被配置为确定指示由所述检测单元检测到的所述对象的特征的属性; 注册单元，被配置为基于由属性确定单元确定的属性将多个字典中的至少一个注册图像数据; 以及添加单元，被配置为当图像数据在不少于两个字典中登记时，将登记在其他字典中的图像数据的链接信息添加到登记在一个字典中的图像数据。

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