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    • 5. 发明授权
    • Alignment device
    • 对准装置
    • US4717257A
    • 1988-01-05
    • US763710
    • 1985-08-08
    • Minoru KanetaIchiro Ishiyama
    • Minoru KanetaIchiro Ishiyama
    • H01L21/30G03F9/00H01L21/027G01B11/00
    • G03F9/70
    • An alignment device for aligning a reticle and a wafer with the aid of a projection lens system for projecting an integrated circuit pattern of the reticle onto the wafer, wherein a light beam from the wafer is passed throught the projection lens and is directed by way of an objective lens to a spatial filter to detect a positional relation between the reticle and the wafer. According to the position of an optical axis of the objective lens relative to an optical axis of the projection lens and according to the telecentricity of the projection lens, the spatial filter is displaced relative to the optical axis of the objective lens, whereby a particular component of the light beam from the wafer is positively extracted out, without being affected against by displacement of the objective lens for the alignment operation.
    • 一种用于借助于投影透镜系统对准标线片和晶片的对准装置,用于将光罩的集成电路图案投影到晶片上,其中来自晶片的光束穿过投影透镜并被引导通过 用于检测掩模版和晶片之间的位置关系的空间滤光器的物镜。 根据物镜的光轴相对于投影透镜的光轴的位置,并且根据投影透镜的远心度,空间滤光器相对于物镜的光轴移位,由此特定的部件 来自晶片的光束被肯定地抽出,而不受用于对准操作的物镜的位移的影响。
    • 7. 发明授权
    • Pressure-sensitive resistor sensor having electrodes with reduced contact resistance deviation
    • 压敏电阻传感器具有接触电阻偏差降低的电极
    • US06626046B2
    • 2003-09-30
    • US09962265
    • 2001-09-26
    • Masahiro TaguchiEiichi NishioIchiro Ishiyama
    • Masahiro TaguchiEiichi NishioIchiro Ishiyama
    • G01L900
    • G01L1/205
    • It is the objective of this invention to reduce deviation in contact resistance variation between electrodes among pressure-sensitive resistor sensors. The sensor is composed of a pair of films. One film has a plurality of electrode portions extending in a certain direction and the other film has at least one electrode portion that is arranged in a transverse relation with a plural of the electrode portions on the other film. Contact points generated by applied pressure are limited to crossing points between the electrode portions of the pair of films. As a result, variation in contact resistance due to applied pressure shift becomes more constant. Thus, it is possible to reduce deviation of contact resistance between the electrodes among sensors.
    • 本发明的目的是减少压敏电阻传感器中电极之间的接触电阻变化的偏差。 传感器由一对薄膜组成。 一个膜具有沿一定方向延伸的多个电极部分,另一个膜具有至少一个与另一个膜上的多个电极部分呈横向关系的电极部分。 通过施加的压力产生的接触点被限制在该对电极的电极部分之间的交叉点。 结果,由于施加的压力偏移引起的接触电阻的变化变得更加恒定。 因此,可以减少传感器之间的电极之间的接触电阻的偏差。