会员体验
专利管家(专利管理)
工作空间(专利管理)
风险监控(情报监控)
数据分析(专利分析)
侵权分析(诉讼无效)
联系我们
交流群
官方交流:
QQ群: 891211   
微信请扫码    >>>
现在联系顾问~
热词
    • 1. 发明授权
    • Semiconductor device manufacturing apparatus and wafer loading/unloading method thereof
    • 半导体器件制造装置及其晶片装载/卸载方法
    • US08221045B2
    • 2012-07-17
    • US12350705
    • 2009-01-08
    • Jun-Sig ParkJung-Hyeon KimJin-Ho ShinGennady Ivanov
    • Jun-Sig ParkJung-Hyeon KimJin-Ho ShinGennady Ivanov
    • H01L21/677
    • C23C16/4583H01L21/67109H01L21/67383Y10S414/136Y10S414/141
    • A semiconductor manufacturing apparatus and a wafer loading/unloading method thereof increase productivity. The semiconductor manufacturing apparatus includes a first boat and a second boat having a plurality of first slots and a plurality of second slots, respectively, and disposed such that the first slots and the second slots alternate each other, the first boat mounting a plurality of first wafers in the first slots to direct front faces of the first wafers in a predetermined direction, the second boat mounting a plurality of second wafers in the second slots to direct back faces of the second wafers in the predetermined direction; a reaction tube having an opening and containing the first and second boats mounting the first and second wafers; a plate sealing up the opening of the reaction tube containing the first boat and the second boat; a reaction gas supplier supplying reaction gas into the sealed reaction tube for a predetermined process; and a reaction gas exhauster exhausting the reaction gas from the reaction tube to the external of the reaction tube after the predetermined process.
    • 半导体制造装置及其晶片装载/卸载方法提高了生产率。 半导体制造装置包括分别具有多个第一槽和多个第二槽的第一船和第二船,并且被布置成使得第一槽和第二槽彼此交替,第一船安装多个第一槽 在第一槽中的晶片以预定方向引导第一晶片的前表面,第二船在第二槽中安装多个第二晶片,以沿预定方向引导第二晶片的后表面; 反应管,其具有开口并且容纳安装所述第一和第二晶片的所述第一和第二船; 密封包含第一船和第二船的反应管的开口的板; 将反应气体供给到密封反应管中以进行预定处理的反应气体供给装置; 以及反应气体排出器,其在预定处理之后将反应气体从反应管排出到反应管的外部。
    • 2. 发明申请
    • SEMICONDUCTOR DEVICE MANUFACTURING APPARATUS AND WAFER LOADING/UNLOADING METHOD THEREOF
    • 半导体器件制造装置及其加载/卸载方法
    • US20090191042A1
    • 2009-07-30
    • US12350705
    • 2009-01-08
    • Jun-Sig ParkJung-Hyeon KimJin-Ho ShinGennady Ivanov
    • Jun-Sig ParkJung-Hyeon KimJin-Ho ShinGennady Ivanov
    • H01L21/677C23C16/458H01L21/30
    • C23C16/4583H01L21/67109H01L21/67383Y10S414/136Y10S414/141
    • A semiconductor manufacturing apparatus and a wafer loading/unloading method thereof increase productivity. The semiconductor manufacturing apparatus includes a first boat and a second boat having a plurality of first slots and a plurality of second slots, respectively, and disposed such that the first slots and the second slots alternate each other, the first boat mounting a plurality of first wafers in the first slots to direct front faces of the first wafers in a predetermined direction, the second boat mounting a plurality of second wafers in the second slots to direct back faces of the second wafers in the predetermined direction; a reaction tube having an opening and containing the first and second boats mounting the first and second wafers; a plate sealing up the opening of the reaction tube containing the first boat and the second boat; a reaction gas supplier supplying reaction gas into the sealed reaction tube for a predetermined process; and a reaction gas exhauster exhausting the reaction gas from the reaction tube to the external of the reaction tube after the predetermined process.
    • 半导体制造装置及其晶片装载/卸载方法提高了生产率。 半导体制造装置包括分别具有多个第一槽和多个第二槽的第一船和第二船,并且被布置成使得第一槽和第二槽彼此交替,第一船安装多个第一槽 在所述第一槽中的晶片在预定方向上引导所述第一晶片的前表面,所述第二船在所述第二槽中安装多个第二晶片以沿所述预定方向引导所述第二晶片的背面; 反应管,其具有开口并且容纳安装所述第一和第二晶片的所述第一和第二船; 密封包含第一船和第二船的反应管的开口的板; 将反应气体供给到密封反应管中以进行预定处理的反应气体供给装置; 以及反应气体排出器,其在预定处理之后将反应气体从反应管排出到反应管的外部。
    • 5. 发明授权
    • Semiconductor memory device
    • 半导体存储器件
    • US08130577B2
    • 2012-03-06
    • US12590417
    • 2009-11-06
    • Jong-Hak WonYoung-Soo AnJung-Hyeon Kim
    • Jong-Hak WonYoung-Soo AnJung-Hyeon Kim
    • G11C8/00
    • G11C7/08G11C5/025G11C7/1012G11C7/12G11C2207/002
    • A semiconductor memory device includes a sub memory cell array region having memory cells each connected between word lines extending in a first direction and bit lines extending in a second direction that is orthogonal to the first direction of extension of the word lines and a sub word line driver region disposed at a side of the sub memory cell array region in the first direction and including sub word line drivers that activate the word lines. A sensing region is disposed at a side of the sub memory cell array region in the second direction and including an equalizer that precharges the bit line in response to a signal transferred through a drive signal line and at least one first control signal driver that activates an inverted control signal line in response to a signal transferred through a control signal line. A conjunction region disposed at an intersection between the sub word line driver region and the sensing region, in which the inverted control signal line is connected to the drive signal line.
    • 半导体存储器件包括具有存储单元的子存储单元阵列区域,每个存储单元分别连接在沿第一方向延伸的字线和沿着与字线的第一延伸方向正交的第二方向延伸的位线和一个子字线 驱动器区域,设置在副存储单元阵列区域的第一方向的一侧,并且包括激活字线的子字线驱动器。 感测区域设置在副存储单元阵列区域的第二方向的一侧,并且包括响应于通过驱动信号线传送的信号而对位线进行预充电的均衡器,以及至少一个第一控制信号驱动器,其激活 响应于通过控制信号线传送的信号的反相控制信号线。 配置在副字线驱动器区域和感测区域之间的交叉点处的连接区域,其中反相控制信号线连接到驱动信号线。