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    • 6. 发明授权
    • Method of manufacturing photo-mask
    • 制造光掩模的方法
    • US08614034B2
    • 2013-12-24
    • US13370496
    • 2012-02-10
    • Seong-ho MoonArtem ShamsuarovSeung-hune YangSeong-bo Shim
    • Seong-ho MoonArtem ShamsuarovSeung-hune YangSeong-bo Shim
    • G03F1/36
    • G03F1/36
    • Provided is a method of manufacturing a photo-mask having a micro pattern. The method includes providing an analyzing design layout, dividing the analyzing design layout into a two-dimensionally repeated portion, a one-dimensionally repeated portion, and a non-repeated portion, forming a first corrected layout by performing optical proximity correction (OPC) in the two-dimensionally repeated portion, forming a second corrected layout, taking account of the first corrected layout, by performing OPC in the one-dimensionally repeated portion, forming a third corrected layout, taking account of the first corrected layout and the second corrected layout, by performing OPC in the non-repeated portion, and forming a photo-mask based on the first through third corrected layouts.
    • 提供一种制造具有微图案的光掩模的方法。 该方法包括提供分析设计布局,将分析设计布局划分为二维重复部分,一维重复部分和非重复部分,通过执行光学邻近校正(OPC)来形成第一校正布局 考虑到第一校正布局和第二校正布局,通过在一维重复部分中执行OPC,形成第三校正布局,形成第二校正布局,形成第二校正布局 通过在非重复部分中执行OPC,并且基于第一至第三校正布局形成光掩模。